CN202543386U - Single crystal furnace with coder - Google Patents
Single crystal furnace with coder Download PDFInfo
- Publication number
- CN202543386U CN202543386U CN2012200621747U CN201220062174U CN202543386U CN 202543386 U CN202543386 U CN 202543386U CN 2012200621747 U CN2012200621747 U CN 2012200621747U CN 201220062174 U CN201220062174 U CN 201220062174U CN 202543386 U CN202543386 U CN 202543386U
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- CN
- China
- Prior art keywords
- data processing
- processing module
- scrambler
- mount pad
- single crystal
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Abstract
The utility model discloses a single crystal furnace with a coder. The single crystal furnace comprises the coder, a coupling, a mounting seat, a bearing seat, a lead screw, a supporting base, a driving motor, a data processing module and a crucible connected with the lead screw. The lead screw is rotationally fixed through the driving motor arranged on the supporting base and the bearing seat; the part of the lead screw, which extends out of the bearing seat, is connected with one end of the coupling arranged in the mounting seat; the coder is fixed on the mounting seat, and an input shaft of the coder penetrates through a through hole of the mounting seat and is connected with the other end of the coupling in the mounting seat; and the coder transmits measurement information corresponding to rotating circles of the lead screw to the data processing module, and the lifting height value of the crucible corresponding to the measurement information is accurately calculated through the data processing module, so that the crystal pulling precision is improved.
Description
Technical field:
The utility model relates to the silicon single crystal manufacturing apparatus technical field, particularly a kind of single crystal growing furnace with scrambler.
Background technology:
Single crystal growing furnace is the indispensable equipment that polysilicon is converted into the silicon single crystal technological process, and silicon single crystal is the basic material of photovoltaic generation and semicon industry.Silicon single crystal is as the critical support material of advanced information society, is one of most important monocrystal material in the world at present, and it is not only the major function material of development computingmachine and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.
Existing single crystal growing furnace is in the silicon single-crystal pulling process; Through control motor drives leading screw, so that driving crucible shaft, leading screw goes up and down, can not monitor the rotation precision of phonomoter; Cause so that control accuracy is low, data transmission is unstable, be subject to interference problem, and then reduce the crystal pulling precision.
Summary of the invention:
In view of this, be necessary to provide the single crystal growing furnace that a kind of control accuracy is high, data transmission is stable, be not subject to interferential band scrambler.
A kind of single crystal growing furnace with scrambler comprises scrambler, shaft coupling, mount pad, chock, screw mandrel, base for supporting, CD-ROM drive motor, data processing module and the crucible shaft that is connected with leading screw.Mount pad is fixed on the upper end of base for supporting, and CD-ROM drive motor is fixed on the lower end of base for supporting, and chock is fixed on the base for supporting and between mount pad, CD-ROM drive motor, an end of screw mandrel is connected with the CD-ROM drive motor clutch end; The other end of screw mandrel is enclosed within on the chock and part projecting shaft bearing; The part of screw mandrel projecting shaft bearing is connected with a end of shaft coupling in being installed in mount pad; Scrambler is fixed on the mount pad; And the scrambler input shaft passes and is connected with the other end of shaft coupling in the mount pad from the through hole of mount pad; Scrambler also is connected with data processing module, is transferred to data processing module with the corresponding measurement signal of the number of turns with screw mandrel rotates that will produce, and calculates the crucible shaft lifting distance value corresponding with measurement signal through data processing module.
Preferably, base for supporting is welded by many metal pipe materials.
Preferably, data processing module is PLC.
The single crystal growing furnace of the band scrambler that the utility model provides; CD-ROM drive motor, chock through being arranged on the base for supporting are rotatable fixing with leading screw; The part of the projecting shaft bearing of screw mandrel is connected with a end of shaft coupling in being installed in mount pad; Scrambler is fixed on the mount pad; And the scrambler input shaft passes and is connected with the other end of shaft coupling in the mount pad from the through hole of mount pad, and so the scrambler corresponding measurement signal of the number of turns with the screw mandrel rotation that will produce is transferred to data processing module, accurately calculates the crucible shaft lifting distance value corresponding with measurement signal through data processing module; The lifting distance value that the operative employee calculates according to data processing module is in time adjusted the crucible lifting of single crystal growing furnace, thereby guarantees the growth precision of crystal bar.
Description of drawings:
Accompanying drawing 1 is the structural representation of single crystal growing furnace of the band scrambler of a preferred embodiments.
Accompanying drawing 2 is that the A-A of single crystal growing furnace of band scrambler among Fig. 1 is to cross-sectional view.
Among the figure: single crystal growing furnace 20, scrambler 21, input shaft 211, shaft coupling 22, mount pad 23, through hole 231, chock 24, screw mandrel 25, base for supporting 26, CD-ROM drive motor 27, clutch end 271, data processing module 28, the crucible shaft 29 of band scrambler
Embodiment:
The utility model is through increasing scrambler in the crucible shaft hoisting appliance of single crystal growing furnace; Number of turns precision through the rotation of encoders monitor screw mandrel; And utilize the corresponding measurement signal of scrambler generation and measurement signal is transferred to data processing module; Accurately calculate the crucible shaft lifting distance value corresponding with measurement signal through data processing module again, the lifting distance value that the operative employee calculates according to data processing module is in time adjusted the crucible lifting of single crystal growing furnace, thereby guarantees the growth precision of crystal bar.
Like the single crystal growing furnace 20 of Fig. 1 and band scrambler shown in Figure 2, comprise scrambler 21, shaft coupling 22, mount pad 23, chock 24, screw mandrel 25, base for supporting 26, CD-ROM drive motor 27, data processing module 28 and the crucible shaft 29 that is connected with leading screw 25.
One end of screw mandrel 25 is connected with CD-ROM drive motor 27 clutch ends 271, so drives leading screw 25 and rotates, and goes up and down so that screw mandrel 25 drives crucible shaft 29; The other end of screw mandrel 25 is enclosed within on the chock 24 and part projecting shaft bearing 24, and the part of screw mandrel 25 projecting shaft bearings 24 is connected with a end of shaft coupling 22 in being installed in mount pad 24.
Scrambler 21 is fixed on the mount pad 23; And the input shaft 211 of scrambler 21 passes and is connected with the other end of shaft coupling 22 in the mount pad 23 from the through hole 231 of mount pad 23; Scrambler 21 also is connected with data processing module 28; The corresponding measurement signal of the number of turns with screw mandrel 25 rotates producing is transferred to data processing module 28, calculates the crucible shaft corresponding with measurement signal 29 lifting distance values through data processing module 28.Wherein, data processing module 28 can be PLC (Programmable Logic Controller, programmable logic controller), computingmachine.
During the silicon single-crystal operation process, under the effect of CD-ROM drive motor 27, make screw mandrel 25 rotate; The input shaft 211 that screw mandrel 25 drives scrambler 21 again rotates; The generation measurement signal of scrambler 21 correspondences, and send data processing module 28 to, data processing module 28 accurately calculates crucible shaft lifting distance value according to measurement signal; And the lifting distance value offered the operative employee; For example through display equipment the lifting distance value is shown, the operative employee in time adjusts the crucible lifting of single crystal growing furnace according to the lifting distance value that shows, thereby guarantees the growth precision of crystal bar.
Claims (3)
1. the single crystal growing furnace with scrambler is characterized in that: comprise scrambler, shaft coupling, mount pad, chock, screw mandrel, base for supporting, CD-ROM drive motor, data processing module and the crucible shaft that is connected with leading screw; Mount pad is fixed on the upper end of base for supporting, and CD-ROM drive motor is fixed on the lower end of base for supporting, and chock is fixed on the base for supporting and between mount pad, CD-ROM drive motor, an end of screw mandrel is connected with the CD-ROM drive motor clutch end; The other end of screw mandrel is enclosed within on the chock and part projecting shaft bearing; The part of screw mandrel projecting shaft bearing is connected with a end of shaft coupling in being installed in mount pad; Scrambler is fixed on the mount pad; And the scrambler input shaft passes and is connected with the other end of shaft coupling in the mount pad from the through hole of mount pad; Scrambler also is connected with data processing module, is transferred to data processing module with the corresponding measurement signal of the number of turns with screw mandrel rotates that will produce, and calculates the crucible shaft adjustable height value corresponding with measurement signal through data processing module.
2. the single crystal growing furnace of band scrambler according to claim 1 is characterized in that: base for supporting is welded by many metal pipe materials.
3. the single crystal growing furnace of band scrambler according to claim 1 is characterized in that: data processing module is PLC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200621747U CN202543386U (en) | 2012-02-24 | 2012-02-24 | Single crystal furnace with coder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200621747U CN202543386U (en) | 2012-02-24 | 2012-02-24 | Single crystal furnace with coder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202543386U true CN202543386U (en) | 2012-11-21 |
Family
ID=47164050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200621747U Expired - Lifetime CN202543386U (en) | 2012-02-24 | 2012-02-24 | Single crystal furnace with coder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202543386U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290469A (en) * | 2012-02-24 | 2013-09-11 | 宁夏日晶新能源装备股份有限公司 | Single crystal furnace with encoder |
-
2012
- 2012-02-24 CN CN2012200621747U patent/CN202543386U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290469A (en) * | 2012-02-24 | 2013-09-11 | 宁夏日晶新能源装备股份有限公司 | Single crystal furnace with encoder |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121121 |
|
| CX01 | Expiry of patent term |