CN202543315U - Novel connection structure of vacuum horizontal poly-p-xylylene deposition system - Google Patents
Novel connection structure of vacuum horizontal poly-p-xylylene deposition system Download PDFInfo
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- CN202543315U CN202543315U CN2011204477100U CN201120447710U CN202543315U CN 202543315 U CN202543315 U CN 202543315U CN 2011204477100 U CN2011204477100 U CN 2011204477100U CN 201120447710 U CN201120447710 U CN 201120447710U CN 202543315 U CN202543315 U CN 202543315U
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Abstract
The utility model discloses a novel connection structure of a vacuum horizontal poly-p-xylylene deposition system. The novel connection structure of the vacuum horizontal poly-p-xylylene deposition system comprises a main unit, a base, a vacuum chamber and a drum arranged in the vacuum chamber, and is characterized in that the base is arranged beside the main unit, the vacuum chamber is arranged above the base, a chamber flange is arranged on the side wall of the vacuum chamber, one side wall, provided with the chamber flange, of the vacuum chamber is connected with the side wall of the main unit, and a conveying pipe in the main unit penetrates through the side wall of the main unit, is fixed with the side wall of the vacuum chamber in a matched manner through a nozzle flange and extends into the drum. The novel connection structure of the vacuum horizontal poly-p-xylylene deposition system solves the problems of poor sealing performance of the main unit and the vacuum chamber after connection and inconvenience in mounting of a novel connection structure of a vacuum horizontal poly-p-xylylene deposition system in the prior art, and is simple in structure, good in parallelism of the main unit and the vacuum chamber and good in vacuum chamber sealing performance.
Description
Technical field
The utility model relates to parylene deposition apparatus, particularly relates to the new connecting structure of the horizontal depositing system of a kind of polyphenylene ethyl vacuum.
Background technology
Polyphenylene ethyl is the general designation with the polymeric film that gathers the diformazan structure through chemical Vapor deposition process preparation, mainly contains three kinds of Parylene N (polyphenylene ethyl), Parylene C (poly) and Parylene D (polydichloro-p-xylene).Parylene film has extremely good electrical property, chemicalstability and biocompatibility, has a wide range of applications in fields such as microelectromechanical systems, electronic devices and components, medical devices.
Parylene film all adopts vapour deposition process (CVD technology) manufacturing; Technology is following: the p-Xylol dimer distils under 180 ℃ in the Device Host system and is gas; Through Pintsch process is the p-Xylol monomer, imports in the vacuum chamber inside deposition device at room temperature deposition polymerization again in product surface.This technology make parylene film have no unrelieved stress, fully similar shape, highly evenly, advantage such as seepage force is strong.
Because above-mentioned characteristic; The horizontal depositing system of polyphenylene ethyl vacuum need often take Device Host apart and vacuum chamber is cleared up with the residual film to pipeline and parts surface; Again connect after cleaning out, and the state that debugging connects is to guarantee the needed vacuum tightness of depositing system.The method that the horizontal depositing system syndeton of present polyphenylene ethyl vacuum adopts is; Be installed in from vacuum chamber on the chute of firm banking; Stretch out pipeline in main frame and the vacuum chamber respectively; Clamp by the nozzle flange of standard K F clip two pipelines, and by wherein KF sealing-ring maintenance vacuum-sealing.Height and levelness through debug host and vacuum chamber guarantee the parallelism that two nozzle flanges keep, thus the desired stopping property of the system that reaches.Because ground is difficult to keep abswolute level, and the influence of the structural distortion of equipment own, makes that the initial failure period of two nozzle flange face keeping parallelisms is long, difficulty is high.Owing to adopt the firm banking top that the chute structure is installed, it is big that base takies volume simultaneously, and chamber height is higher, and it is big to cause taking up room, product loading and unloading effort.
The utility model content
In order to solve the new connecting structure of the horizontal depositing system of polyphenylene ethyl vacuum in the prior art; Main frame is connected the back sealing property with vacuum chamber relatively poor; Inconvenient problem is installed; It is a kind of simple in structure that the utility model provides, and main frame and vacuum chamber parallelism are better, and the vacuum chamber sealing property is the new connecting structure of the horizontal depositing system of polyphenylene ethyl vacuum preferably.
In order to address the above problem, the technical scheme that the utility model is taked is:
The new connecting structure of the horizontal depositing system of a kind of polyphenylene ethyl vacuum; Comprise main frame, base, drum and vacuum chamber; In vacuum chamber, be provided with drum; It is characterized in that: be provided with base in that main frame is other, above base, be provided with vacuum chamber, directly be fixed on the main frame sidewall at a framed side wallboard of vacuum chamber; Said vacuum chamber is connected with wallboard on the main frame sidewall through the chamber flange.
The new connecting structure of the aforesaid horizontal depositing system of a kind of polyphenylene ethyl vacuum is characterized in that: in the main frame bottom liftable wall screw is installed.In chamber base bottom four universal wheels are installed.
The new connecting structure of the aforesaid horizontal depositing system of a kind of polyphenylene ethyl vacuum is characterized in that: the sealing-ring that in the chamber flange, is provided with sealing function.Pairing wallboard part surface smooth forms trim.
The beneficial effect of the utility model is: extension pipeline opening flange connection is adopted in the utility model cancellation; Changing the vacuum chamber wallboard into directly connects on the main frame sidewall; Because the chamber flange diameter is more than ten times of former pipe flange diameter; Contact area between flange and the wallboard plane obtains amplifying, and has reduced the requirement to parallelism; Disposable adjustment main frame wall screw guarantees the parallelism of wallboard and vacuum chamber flange simultaneously, and follow-up dismounting chamber need not carry out the parallelism adjustment again, and equipment guarantees stopping property more easily.After the universal wheel structure is installed in the base below, reduced chamber and taken up room, conveniently moving, chamber height is reduced to and loading-unloading vehicle platform equal height, and product is got dress need not lift height, directly moves in the vacuum chamber from the loading-unloading vehicle platform, reduces labor intensity greatly.
Description of drawings
Fig. 1 is the structural representation of the new connecting structure of the horizontal depositing system of the utility model polyphenylene ethyl vacuum.
Fig. 2 is the right view of Fig. 1.
Embodiment
Below in conjunction with accompanying drawing the utility model is done further description.
Shown in Fig. 1-2; The new connecting structure of the horizontal depositing system of a kind of polyphenylene ethyl vacuum comprises main frame 1, base 7, drum and vacuum chamber 2, in vacuum chamber 2, is provided with drum; At the main frame 1 other base 7 that is provided with; Above base 7, be provided with vacuum chamber 2, the sidewall of vacuum chamber 2 is provided with the chamber flange, and the framed side wallboard 3 that vacuum chamber 2 is equipped with the chamber flange is connected with main frame 1 sidewall.
In the chamber flange, be provided with the sealing-ring of sealing function.Directly be connected through chamber flange and vacuum chamber wallboard 3 vacuum chamber 2 is linked to each other with main frame 1; Because the chamber flange diameter is bigger; Nonparallelism between chamber flange and the sidewall plane is reduced, and has reduced the difficulty of keeping parallelism, and vacuum chamber 2 guarantees vacuum property preferably more easily.
In main frame 1 bottom wall screw 5 is installed, four universal wheels 6 are installed in the bottom of base 7, and 4 universal wheel 6 uniform distribution; Base 7 moves very convenient like this; Saved the space simultaneously, significantly reduced the height of vacuum chamber 2, product is got dress need not lift height; And available dolly has alleviated labour intensity greatly.
During installation, be benchmark with the chamber flange earlier, adjustment wall screw 5 is with the wallboard face 3 and chamber parallel flange of main frame sidewall; During daily use; Because the wall screw 5 of main frame 1 bottom is fixed, as long as shift base 7 onto position through universal wheel 6, vacuum chamber 2 Flange Plane are exactly parallel with main frame wallboard plane 3 like this; Vacuum chamber 2 integral body just have the better seal performance, have guaranteed the vacuum property of vacuum chamber 2.
More than show and described ultimate principle, principal character and the advantage of the utility model.The technician of the industry should understand; The utility model is not restricted to the described embodiments; The principle of describing in the foregoing description and the specification sheets that the utility model just is described; Under the prerequisite that does not break away from the utility model spirit and scope, the utility model also has various changes and modifications, and these variations and improvement all fall in the utility model scope that requires protection.The utility model requires protection domain to be defined by appending claims and equivalent thereof.
Claims (4)
1. new connecting structure of the horizontal depositing system of polyphenylene ethyl vacuum; Comprise main frame, base, drum and vacuum chamber; In vacuum chamber, be provided with drum; It is characterized in that: be provided with base in that main frame is other, above base, be provided with vacuum chamber, directly be fixed on the main frame sidewall at a framed side wallboard of vacuum chamber; Said vacuum chamber is connected with wallboard on the main frame sidewall through the chamber flange.
2. the new connecting structure of the horizontal depositing system of a kind of polyphenylene ethyl vacuum according to claim 1 is characterized in that: in the main frame bottom liftable wall screw is installed.
3. the new connecting structure of the horizontal depositing system of a kind of polyphenylene ethyl vacuum according to claim 1 is characterized in that: in chamber base bottom four universal wheels are installed.
4. the new connecting structure of the horizontal depositing system of a kind of polyphenylene ethyl vacuum according to claim 1 is characterized in that: the sealing-ring that in the chamber flange, is provided with sealing function.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204477100U CN202543315U (en) | 2011-11-14 | 2011-11-14 | Novel connection structure of vacuum horizontal poly-p-xylylene deposition system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204477100U CN202543315U (en) | 2011-11-14 | 2011-11-14 | Novel connection structure of vacuum horizontal poly-p-xylylene deposition system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202543315U true CN202543315U (en) | 2012-11-21 |
Family
ID=47163979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204477100U Expired - Lifetime CN202543315U (en) | 2011-11-14 | 2011-11-14 | Novel connection structure of vacuum horizontal poly-p-xylylene deposition system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202543315U (en) |
-
2011
- 2011-11-14 CN CN2011204477100U patent/CN202543315U/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121121 |