CN202533713U - Adjusting device of bias flat plate - Google Patents

Abstract

The utility model discloses an adjusting device of a bias flat plate. The adjusting device is arranged on a focusing and leveling main framework plate and used for adjusting the angle of the bias flat plate, and comprises a rotary axis system and a driving mechanism, wherein the rotary axis system and the driving mechanism are respectively arranged on the focusing and leveling main framework plate, and the driving mechanism comprises a wedge block which is arranged on the rotary axis system. According to the utility model, requirements on precision of a motor can be reduced effectively. In addition, by means of arranging an angular sensor on the rotary axis system, errors caused by factors such as driving mechanism gap and component machining can be reduced, so that better position precision can be obtained. Furthermore, by means of a braking device for locking the rotary axis system, when the bias flat plate arrives at a set position, the braking device locks a braking shaft, so that the rotary axis system and the bias flat plate are locked. At the moment, a power supply of the motor can be cut off so as to reduce influences of motor heating to the entire device.

Description

The dull and stereotyped adjusting gear of a kind of biasing

Technical field

The utility model relates to a kind of adjusting gear, relates in particular to the dull and stereotyped adjusting gear of a kind of biasing.

Background technology

Improve constantly along with what semiconductor technology was tending towards day by day that precise treatment and yield-power require, the accuracy of semiconductor manufacturing facility constantly promotes, and is corresponding, and the accuracy of the detecting instrument of product is required also to improve constantly.In projection lithography system, carry out high-precision test for surface to silicon chip, need the height and the inclination information of focusing and leveling systematic survey silicon chip upper surface.

In the measuring process of focusing and leveling system, after the projection objective focal plane drifts about,, the measurement point center of focusing and leveling is not overlapped with projection objective exposure visual field if rectification building-out is not carried out in its position of focal plane, cause measuring error.In this case for rectification building-out, be employed in that to add a biasing in the light path dull and stereotyped, and realize correction and compensation the focal plane position excursion through the adjustment of the dull and stereotyped anglec of rotation that sheet is setovered.Two kinds of structures being used always at present are as depicted in figs. 1 and 2:

As shown in Figure 1, electric rotating machine 2 directly drives dull and stereotyped 1 rotation of biasing.The weak point of this adjusting gear is that because biasing dull and stereotyped 1 is directly to be driven by electric rotating machine 2 to rotate, this kind mode directly causes present general motor can't satisfy the dull and stereotyped required running accuracy of adjustment biasing.

As shown in Figure 2, biasing dull and stereotyped 1 is connected with lever 3, and an end of lever is erected at cam 4 tops, and stepper motor (not shown) driving cam 4 rotates around axle 40 and drives lever 3 and move.Because camshaft 40 changes to the distance at cam 4 edges; Therefore; When cam 4 during around axle 40 Rotate 180s °, the solid line position of position from Fig. 2 of lever 3 and biasing dull and stereotyped 1 moves to dotted line position, thereby reaches the purpose of the rotation angle of the Spin Control biasing dull and stereotyped 1 that utilizes cam 4.The weak point of this adjusting gear is the cam processed complex, and manufacturing cost is too high.

In on October 20th, 2010 disclosed publication number be that the Chinese utility model patent of CN201611424U improves to the structure of Fig. 2; Its structure is as shown in Figure 3; Thereby this device adopts the cylinder 52 with wedge surface 520 to replace cams to reduce the processing and manufacturing difficulty, but this device to the accuracy requirement of motor still than higher.

Therefore, how to provide that a kind of can effectively to reduce the dull and stereotyped adjusting gear of the biasing of the accuracy requirement of motor be the technical matters that those skilled in the art need to be resolved hurrily.

The utility model content

The purpose of the utility model is to provide biasing dull and stereotyped adjusting gear, can effectively reduce the accuracy requirement to motor.

In order to reach above-mentioned purpose, the utility model adopts following technical scheme:

The utility model provides a kind of biasing dull and stereotyped adjusting gear; Be located at and be used to adjust the dull and stereotyped angle of biasing on the focusing and leveling main frame plate; The dull and stereotyped adjusting gear of said biasing comprises rotary axis and driving mechanism; Said rotary axis and driving mechanism are arranged at respectively on the said focusing and leveling main frame plate, and said driving mechanism comprises a wedge, and said wedge is arranged on the said rotary axis.

Preferably; In the dull and stereotyped adjusting gear of above-mentioned biasing; Said driving mechanism comprises driving mechanism support, motor, lead screw assembly, contiguous block, guide rail and sphere guides, and said lead screw assembly comprises the first leading screw support member, second leading screw support member and the leading screw, and the said first leading screw support member, the second leading screw support member and said guide rail are installed on the said driving mechanism support; Said motor is connected with said leading screw; Said sphere guides is fixedly connected with said leading screw through said contiguous block, and the said leading screw of said driven by motor rotates, and said leading screw drives said contiguous block and moves up and down along said guide rail.

Preferably, in the dull and stereotyped adjusting gear of above-mentioned biasing, said sphere guides contacts with said wedge line.

Preferably, in the dull and stereotyped adjusting gear of above-mentioned biasing, said driving mechanism also comprises a back-moving spring, and an end of said back-moving spring is connected with said wedge, and the other end is connected with said focusing and leveling main frame plate.

Preferably, in the dull and stereotyped adjusting gear of above-mentioned biasing, said rotary axis comprises biasing mirror, biasing microscope base and turning axle, and said biasing mirror is located in the said biasing microscope base, and said biasing microscope base is located on the said turning axle.

Preferably, in the dull and stereotyped adjusting gear of above-mentioned biasing, said focusing and leveling main frame plate is provided with the through hole that is used for ccontaining said turning axle, and said biasing microscope base is arranged on the said turning axle.

Preferably, in the dull and stereotyped adjusting gear of above-mentioned biasing, comprise that also one is used to pin the clamping device of said rotary axis, said clamping device is arranged at the below of focusing and leveling main frame plate.

Preferably; In the dull and stereotyped adjusting gear of above-mentioned biasing, said clamping device comprises brake axle and braking device, and said braking device is fixedly set in the said through hole of focusing and leveling main frame plate; And said braking device is positioned at the below of said focusing and leveling main frame plate; Said turning axle has a center pit, and the upper end of said brake axle is sticked in the center pit of said turning axle, and it is inner that the other end of said brake axle is arranged in said braking device.

Preferably, in the dull and stereotyped adjusting gear of above-mentioned biasing, also comprise an angular transducer, said angular transducer is arranged on the said turning axle

The beneficial effect of the utility model is following:

The dull and stereotyped adjusting gear of the biasing that provides of the utility model; Be located at and be used to adjust the dull and stereotyped angle of biasing on the focusing and leveling main frame plate; The dull and stereotyped adjusting gear of said biasing comprises rotary axis and driving mechanism; Said rotary axis and driving mechanism are arranged at respectively on the said focusing and leveling main frame plate, and said driving mechanism comprises a wedge, and said wedge is arranged on the said rotary axis; Adjust the dull and stereotyped angle of biasing through the dull and stereotyped adjusting gear of the biasing of adopting the utility model, can effectively reduce accuracy requirement motor.In addition,, can reduce the error of introducing owing to factors such as driving mechanism gap and part processing, thereby obtain more accurate positional precision because angular transducer is installed on the rotary axis.In addition, through being used to lock the clamping device of said rotary axis, when said biasing flat board arrived the position of setting, braking device locked brake axle, thereby with the said rotary axis and dull and stereotyped locking of setovering.Can cut off motor power this moment, thereby, can reduce that the motor feels hot to the influence of complete machine.

Description of drawings

The dull and stereotyped adjusting gear of the biasing of the utility model is provided by following embodiment and accompanying drawing.

Fig. 1 is the synoptic diagram of the dull and stereotyped adjusting gear of a kind of traditional biasing;

Fig. 2 is the synoptic diagram of the dull and stereotyped adjusting gear of the traditional biasing of another kind;

Fig. 3 is the improvement structural representation of the dull and stereotyped adjusting gear of traditional biasing shown in Figure 2;

Fig. 4 is the setover structural representation of dull and stereotyped adjusting gear one embodiment of the utility model;

Fig. 5 is the setover schematic top plan view of dull and stereotyped adjusting gear one embodiment of the utility model;

Fig. 6 is the A-A cut-open view of Fig. 5;

Fig. 7 is the setover motion principle synoptic diagram of dull and stereotyped adjusting gear one embodiment of the utility model.

Among the figure, 401-driving mechanism, 402-rotary axis, 403-focusing and leveling main frame plate, 404-are setovered dull and stereotyped; 501-driving mechanism support, 502-motor, the 503-first leading screw support member, 504-leading screw, 505-contiguous block; The 506-second leading screw support member, 507-guide rail, 508-biasing mirror, the 509-microscope base of setovering, 510-wedge, 511-angular transducer; The 512-bearing, 513-brake axle, 514-braking device, 516-sphere guides, 517-turning axle.

Embodiment

Below will do further to describe in detail to the dull and stereotyped adjusting gear of the biasing of the utility model.

Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented the preferred embodiment of the utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize the advantageous effects of the utility model.Therefore, following description is appreciated that extensively knowing to those skilled in the art, and not as the restriction to the utility model.

For clear, whole characteristics of practical embodiments are not described.In following description, be not described in detail known function and structure, because they can make the utility model because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize developer's specific objective.In addition, will be understood that this development possibly be complicated and time-consuming, but only be routine work to those skilled in the art.

For the purpose, the characteristic that make the utility model is more obviously understandable, be further described below in conjunction with the embodiment of accompanying drawing to the utility model.What need explanation is, accompanying drawing all adopts the form of simplifying very much and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.

See also Fig. 4, Fig. 5, Fig. 6 and Fig. 7; Wherein, Shown in Figure 4 is the setover structural representation of dull and stereotyped adjusting gear one embodiment of the utility model; Shown in Figure 5 is the setover schematic top plan view of dull and stereotyped adjusting gear one embodiment of the utility model, and shown in Figure 6 is the A-A cut-open view of Fig. 5, and shown in Figure 7 is the setover motion principle synoptic diagram of dull and stereotyped adjusting gear one embodiment of the utility model.

The dull and stereotyped adjusting gear of this biasing; Be located at the angle that is used to adjust biasing dull and stereotyped 404 on the focusing and leveling main frame plate 403; The dull and stereotyped adjusting gear of said biasing comprises rotary axis 402 and driving mechanism 401; Said rotary axis 402 is arranged at respectively on the said focusing and leveling main frame plate 403 with driving mechanism 401, and said driving mechanism 401 comprises a wedge 510, and said wedge 510 is arranged on the said rotary axis 402.

In the present embodiment; Please consult Fig. 4～Fig. 6 by emphasis; Said driving mechanism 401 comprises driving mechanism support 501, motor 502, lead screw assembly, contiguous block 505, guide rail 507 and sphere guides 516; Said lead screw assembly comprises the first leading screw support member 503, the second leading screw support member 506 and leading screw 504, and the said first leading screw support member 503, the second leading screw support member 506 are installed on the said driving mechanism support 501 with said guide rail 507, and said motor 502 is connected with said leading screw 504; Said sphere guides 516 is fixedly connected with said leading screw 504 through said contiguous block 505; Said motor 502 drives said leading screw 504 and rotates, and said leading screw 504 drives said contiguous block 505 and moves up and down along said guide rail 507, and said driving mechanism support 501 is fixedly connected with said focusing and leveling main frame plate 403.

In the present embodiment, please consult Fig. 4～Fig. 6 by emphasis, said driving mechanism 401 also comprises a back-moving spring 515, and an end of said back-moving spring 515 is connected with said wedge 510, and the other end is connected with said focusing and leveling main frame plate 401.The effect of said back-moving spring 515 is to produce a pretightning force at sphere guides 516 and 510 of wedges, makes sphere guides 516 remain with wedge 510 and contacts.

In the present embodiment, please consult Fig. 4 and Fig. 5 by emphasis, said rotary axis 402 comprises biasing mirror 508, biasing microscope base 509 and the axle 517 of walking around, and said biasing mirror 508 is located in the said biasing microscope base 509, and said biasing microscope base 509 is located on the said turning axle 517.

In the present embodiment, please consult Fig. 4～Fig. 6 by emphasis, said focusing and leveling main frame plate 403 is provided with the through hole of ccontaining said turning axle 517, is provided with bearing 512 between said focusing and leveling main frame plate 403 and the said turning axle 517.Said biasing microscope base 509 is arranged on the said turning axle 517.

Preferably, in the present embodiment, please consult Fig. 4～Fig. 6 by emphasis, the dull and stereotyped adjusting gear of said biasing comprises that also one is used to pin the clamping device of said rotary axis 402, and said clamping device is arranged at the below of focusing and leveling main frame plate 403.In the present embodiment; Said clamping device comprises brake axle 513 and braking device 514; Said braking device 514 is fixedly set in the said through hole of said focusing and leveling main frame plate 403, and said braking device 514 is positioned at the below of said focusing and leveling main frame plate 403, and said turning axle 517 has a center pit; The upper end of said brake axle 513 is sticked in the center pit of said turning axle 517, and the other end of said brake axle 513 is arranged in said braking device 514 inside.When biasing dull and stereotyped 404 arrived the position of setting, braking device 514 locked brake axle 513, thereby with said turning axle 517 and dull and stereotyped 404 lockings of biasing.Can cut off motor power this moment, to reduce that the motor feels hot to the influence of complete machine.

In the present embodiment; Please consult Fig. 4～Fig. 6 by emphasis, the dull and stereotyped adjusting gear of said biasing also comprises an angular transducer 511, and said angular transducer 511 is arranged on the said rotary axis 402; Concrete, said angular transducer 511 is arranged on the said turning axle 517.Because angular transducer 511 is installed on the said turning axle 517, can reduces the error of introducing owing to factors such as driving mechanism gap and part processing, thereby obtain more accurate positional precision.

The principle of work of the utility model is following, please consult Fig. 4～Fig. 6 by emphasis, and suppose: the angle of wedge of wedge 510 is θ; The radius of turn of rotary axis 402 is R; The distance of sphere guides 516 motions is h; The angle of dull and stereotyped 404 rotations of biasing is β; The angle of motor 502 rotations is α; The helical pitch of screw mandrel 504 is P; Can know according to the solid geometry principle; The cylindrical cross section of cutting sth. askew is oval; Therefore; One section of when sphere guides 516 moved up and down, the movement locus of sphere guides 516 on the lozenges of wedge 510 was minor axis 2R, and major axis is

ellipse.

When sphere guides 516 moves up and down, can the driven in rotation axle be 402 motions, satisfy following formula:

$h=\frac{2\mathrm{Tg\&theta;}}{\mathrm{\&pi;}}\&times;\mathrm{R\&beta;}=\frac{\mathrm{<figure-callout\; id="2"\; label="P"\; filenames="HDA0000142207070000011.png"\; state="\{\{state\}\}">P</figure-callout>}}{2\mathrm{\&pi;}}\mathrm{\&alpha;}$ ... ... ... formula is 1.

1. can release by formula: $\frac{\mathrm{\&alpha;}}{\mathrm{\&beta;}}=\frac{4R\mathrm{Tan}\mathrm{\&theta;}}{P}$

In Fig. 6; Suppose θ=60 °; R=30mm; P=1mm,

can know that this device reduces by 207.8 times to the position of rotation accuracy requirement of motor than motor direct-drive so.Therefore, adopt the utility model to setover dull and stereotyped adjusting gear to the flat board adjustment of setovering, effectively reduction is to the accuracy requirement of motor.

In sum, adopt the dull and stereotyped adjusting gear of biasing of the utility model to adjust the dull and stereotyped angle of biasing, can effectively reduce accuracy requirement motor.In addition,, can reduce the error of introducing owing to factors such as driving mechanism gap and part processing, thereby obtain more accurate positional precision because angular transducer is installed on the rotary axis.In addition, through being used to lock the clamping device of said rotary axis, when said biasing flat board arrived the position of setting, braking device locked brake axle, thereby with the said rotary axis and dull and stereotyped locking of setovering.Can cut off motor power this moment, thereby, can reduce that the motor feels hot to the influence of complete machine.

Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from the spirit and the scope of the utility model.Like this, belong within the scope of the utility model claim and equivalent technologies thereof if these of the utility model are revised with modification, then the utility model also is intended to comprise these changes and modification interior.

Claims (9)

1. One kind the biasing dull and stereotyped adjusting gear; Be located at and be used to adjust the dull and stereotyped angle of biasing on the focusing and leveling main frame plate; The dull and stereotyped adjusting gear of said biasing comprises rotary axis and driving mechanism, and said rotary axis and driving mechanism are arranged at respectively on the said focusing and leveling main frame plate, it is characterized in that; Said driving mechanism comprises a wedge, and said wedge is arranged on the said rotary axis.
2. 2. the dull and stereotyped adjusting gear of biasing according to claim 1; It is characterized in that; Said driving mechanism comprises driving mechanism support, motor, lead screw assembly, contiguous block, guide rail and sphere guides, and said lead screw assembly comprises the first leading screw support member, second leading screw support member and the leading screw, and the said first leading screw support member, the second leading screw support member and said guide rail are installed on the said driving mechanism support; Said motor is connected with said leading screw; Said sphere guides is fixedly connected with said leading screw through said contiguous block, and the said leading screw of said driven by motor rotates, and said leading screw drives said contiguous block and moves up and down along said guide rail.
3. 3. the dull and stereotyped adjusting gear of biasing according to claim 2 is characterized in that, said sphere guides contacts with said wedge line.
4. 4. the dull and stereotyped adjusting gear of biasing according to claim 2 is characterized in that said driving mechanism also comprises a back-moving spring, and an end of said back-moving spring is connected with said wedge, and the other end is connected with said focusing and leveling main frame plate.
5. 5. the dull and stereotyped adjusting gear of biasing according to claim 1 is characterized in that, said rotary axis comprises biasing mirror, biasing microscope base and turning axle, and said biasing mirror is located in the said biasing microscope base, and said biasing microscope base is located on the said turning axle.
6. 6. the dull and stereotyped adjusting gear of biasing according to claim 5 is characterized in that, said focusing and leveling main frame plate is provided with the through hole that is used for ccontaining said turning axle, and said biasing microscope base is arranged on the said turning axle.
7. 7. the dull and stereotyped adjusting gear of biasing according to claim 5 is characterized in that, comprises that also one is used to pin the clamping device of said rotary axis, and said clamping device is arranged at the below of focusing and leveling main frame plate.
8. 8. the dull and stereotyped adjusting gear of biasing according to claim 7; It is characterized in that said clamping device comprises brake axle and braking device, said braking device is fixedly set in the said through hole of focusing and leveling main frame plate; And said braking device is positioned at the below of said focusing and leveling main frame plate; Said turning axle has a center pit, and the upper end of said brake axle is sticked in the center pit of said turning axle, and it is inner that the other end of said brake axle is arranged in said braking device.
9. 9. according to the dull and stereotyped adjusting gear of the biasing of claim 5, it is characterized in that also comprise an angular transducer, said angular transducer is arranged on the said turning axle.

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