CN202532852U - Gas distribution drying furnace - Google Patents
Gas distribution drying furnace Download PDFInfo
- Publication number
- CN202532852U CN202532852U CN2012201710752U CN201220171075U CN202532852U CN 202532852 U CN202532852 U CN 202532852U CN 2012201710752 U CN2012201710752 U CN 2012201710752U CN 201220171075 U CN201220171075 U CN 201220171075U CN 202532852 U CN202532852 U CN 202532852U
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- thermal
- insulation baffle
- roof
- gas
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Abstract
The utility model discloses a gas distribution drying furnace, which comprises a furnace body and a furnace cavity, wherein a drying channel is arranged in the furnace body, a plurality of groups of heat preservation baffles are arranged in the furnace cavity, each group of heat preservation baffles comprises a first heat preservation baffle connected with the top wall and a second heat preservation baffle connected with the bottom wall, a first gas distribution plate is arranged between every two adjacent first heat preservation baffles, a plurality of first gas inlets are arranged in the top wall, a first temperature control device is arranged on one side of each first gas inlet, a second gas distribution plate is arranged between every two adjacent second heat preservation baffles, a plurality of second gas inlets are arranged in the bottom wall, a second temperature control device is arranged on one side of each second gas inlet, a heating device is arranged on the side wall, gas outlets are arranged in two ends of the top wall, an air extracting device is arranged above each gas outlet, and an oil storage groove is arranged in each air extracting device. The gas distribution drying furnace has the advantages of simple structure, lower cost, longer service life, and capability of realizing constant temperature drying.
Description
Technical field
The utility model relates to a kind of drying oven of solar silicon wafers industry, relates in particular to a kind of gas distribution drying oven through the air-flow regulating and controlling temperature.
Background technology
The oven dry of silicon chip is very important step in the whole solar silicon wafers production procedure in the solar silicon wafers industry.The drying oven passage of silicon chip through uniform temperature, thus other oily matters such as slurry unwatering on the silicon chip perfecting made, make being attached to above the silicon chip that useful material can be even, firm.Wherein the control of bake out temperature uniformity and stability is extremely important in the drying course, and can whole drying course guarantee that constant temperature drying has bigger influence to the quality of silicon chip.And the oily matters such as steam that drying course produces can not impact silicon chip surface.Drying oven power of the prior art is bigger than normal, cost is higher, service life is shorter, and can not handle the influence that the oily matter condensate drop of evaporating in the drying course causes silicon chip.
The utility model content
The utility model technical problem to be solved is: provide a kind of simple in structure, cost is lower, service life is long, and can prevent the condense gas distribution drying oven of drippage of oil gas in the stove.
For solving the problems of the technologies described above, the utility model adopts following technical scheme: a kind of gas distribution drying oven comprises: body of heater; The central authorities of said body of heater are provided with drying channel, and said body of heater comprises roof, diapire, is connected in the end walls at roof and diapire two ends and is connected in roof and the two side of diapire both sides that above-mentioned six walls are around forming furnace chamber; Be provided with some groups of thermal-insulation baffle plates in the said furnace chamber, every group of thermal-insulation baffle plate comprises first thermal-insulation baffle plate that is connected with roof and second thermal-insulation baffle plate that is connected with diapire, and said first thermal-insulation baffle plate and second thermal-insulation baffle plate are positioned at same vertical plane; Be provided with first air distribution plate between per two adjacent first thermal-insulation baffle plates; Form several first memory spaces between several first air distribution plates and the roof respectively, said roof is provided with several first air inlets, and a side of each first air inlet all is equipped with first temperature regulating device; Said several first air inlets communicate with several first memory spaces respectively; Be provided with second air distribution plate between per two second thermal-insulation baffle plates, form several second memory spaces between several second air distribution plates and the diapire respectively, said diapire is provided with several second air inlets; One side of each second air inlet all is equipped with second temperature regulating device; Said several second air inlets communicate with several second memory spaces respectively, on the said sidewall heater are installed, and the two ends of said roof are respectively equipped with the gas outlet; The top of each gas outlet is equipped with extractor fan, is provided with oil storage tank in the said extractor fan.
As a kind of optimized technical scheme, said first air distribution plate and second air distribution plate are processed by the stainless steel sintering net.
As a kind of optimized technical scheme, said several first thermal-insulation baffle plates are connected with roof through high temperature glue respectively, and said several second thermal-insulation baffle plates are connected with diapire through high temperature glue respectively.
As a kind of optimized technical scheme, said several first air distribution plates are respectively through screw and side wall of furnace fixing mutually, and said several second air distribution plates pass through screw and side wall of furnace fixing mutually respectively.
As a kind of optimized technical scheme, said heater is the Infrared Heating fluorescent tube.
As a kind of optimized technical scheme, said first temperature regulating device and second temperature regulating device are gas flowmeter.
As a kind of optimized technical scheme, said body of heater is processed by sheet metal component, and the inwall of said body of heater is through the glutinous warming plate that is stained with of high temperature glue.
The beneficial effect of the utility model: the gas distribution drying oven in the utility model is simple in structure, cost is lower, service life, length, the mobile entire inner space of furnace chamber that makes even through air-flow, rule reached a uniform dynamic equilibrium; Thereby can realize constant temperature drying, can effectively prevent in the stove oil gas drippage that condenses through extractor fan is set in addition.
Description of drawings
Fig. 1 is a gas distribution structure of Stove sketch map.
Among Fig. 1: 1, body of heater, 10, drying channel, 11, roof, 110, first air inlet, 111, first temperature regulating device; 112, gas outlet, 12, diapire, 120, second air inlet, 121, second temperature regulating device, 13, furnace chamber; 2, first thermal-insulation baffle plate, 3, second thermal-insulation baffle plate, 4, first air distribution plate, 5, first memory space, 6, second air distribution plate; 7, second memory space, 8, heater, 9, extractor fan, 90, oil storage tank.
The specific embodiment
Describe below in conjunction with the preferred embodiment of accompanying drawing, should be appreciated that preferred embodiment described herein only is used for explanation and explains the utility model, and be not used in qualification the utility model the utility model.
See also Fig. 1, a kind of gas distribution drying oven comprises: body of heater 1; The central authorities of said body of heater 1 are provided with drying channel 10; Said body of heater 1 comprises roof 11, diapire 12, be connected in the end walls at roof 11 and diapire 12 two ends and be connected in the two side of roof 11 and diapire 12 both sides, and above-mentioned six walls are provided with some groups of thermal-insulation baffle plates around forming furnace chamber 13 in the said furnace chamber 13; Every group of thermal-insulation baffle plate comprises first thermal-insulation baffle plate 2 that is connected with roof 11 and second thermal-insulation baffle plate 3 that is connected with diapire 12; Said first thermal-insulation baffle plate 2 and second thermal-insulation baffle plate 3 are positioned at same vertical plane, are provided with first air distribution plate 4 between per two adjacent first thermal-insulation baffle plates 2, form several first memory spaces 5 between several first air distribution plates 4 and the roof 11 respectively; Said roof 11 is provided with several first air inlets 110; One side of each first air inlet 110 all is equipped with first temperature regulating device 111, and said several first air inlets 110 communicate with several first memory spaces 5 respectively, is provided with second air distribution plate 6 between per two second thermal-insulation baffle plates 3; Form several second memory spaces 7 between several second air distribution plates 6 and the diapire 12 respectively; Said diapire 12 is provided with several second air inlets 120, and a side of each second air inlet 120 all is equipped with second temperature regulating device 121, and said several second air inlets 120 communicate with several second memory spaces 7 respectively; Heater 8 is installed on the said sidewall; The two ends of said roof 11 are respectively equipped with gas outlet 112, and the top of each gas outlet 112 is equipped with extractor fan 9, are provided with oil storage tank 90 in the said extractor fan 9.Said first air distribution plate 4 and second air distribution plate 6 are processed by the stainless steel sintering net.The utility model replaces filtration blanket of the prior art through using the stainless steel sintering net; Promptly reduced production cost, improved service life again; And repair also more convenient; Said several first thermal-insulation baffle plates 2 are connected with roof 11 through high temperature glue respectively, and said several second thermal-insulation baffle plates 3 are connected with diapire 12 through high temperature glue respectively.Said several first air distribution plates 4 are the fixing mutually of the sidewall through screw and body of heater 1 respectively, and said several second air distribution plates 6 pass through screw and side wall of furnace fixing mutually respectively.When first air distribution plate 4 and 6 damages of second air distribution plate, it is comparatively convenient to change.Said heater 8 is the Infrared Heating fluorescent tube.Said first temperature regulating device 111 and second temperature regulating device 121 are gas flowmeter.Through can effectively control the even, constant of whole furnace chamber 13 interior temperature to the adjusting of first temperature regulating device 111 and second temperature regulating device 121.Said body of heater 1 is processed by sheet metal component, and the inwall of said body of heater 1 is stained with warming plate through high temperature glue is glutinous, can effectively completely cut off the maintenance temperature.
The operation principle of gas distribution drying oven is in the utility model: compressed air is squeezed in several first memory spaces 5 and several second memory spaces 7 through several first air inlets 110 and several second air inlets 120 respectively; Compressed air in first memory space 5 can be distributed on first air distribution plate 4 equably; Be penetrated into then in the furnace chamber 13; Compressed air in second memory space 7 can be distributed on second air distribution plate 6 equably, is penetrated into then in the furnace chamber 13, then heats through the air-flow in 8 pairs of furnace chambers of heater 13; Then silicon chip being put into drying channel 10 can dry silicon chip; Air communication after the heating is crossed the gas outlet 112 at body of heater 1 two ends and is discharged, and thermal current can pass through extractor fan 9 then, because air communication becomes soot gas after crossing drying oven; The air outlet of running into extractor fan 9 can condense, and the oil after condensing can be dropped in 90 li of oil storage tanks along air outlet.
Gas distribution drying oven in the utility model is simple in structure, cost is lower, service life, length, the mobile entire inner space of furnace chamber that makes even through air-flow, rule reached a uniform dynamic equilibrium; Thereby can realize constant temperature drying, can effectively prevent in the stove oil gas drippage that condenses through extractor fan is set in addition.
What should explain at last is: the above is merely the preferred embodiment of the utility model; Be not limited to the utility model; Although the utility model has been carried out detailed explanation with reference to previous embodiment; For a person skilled in the art, it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement.All within the spirit and principle of the utility model, any modification of being done, be equal to replacement, improvement etc., all should be included within the protection domain of the utility model.
Claims (7)
1. gas distribution drying oven comprises: body of heater, and the central authorities of said body of heater are provided with drying channel; It is characterized in that: said body of heater comprises roof, diapire, is connected in the end walls at roof and diapire two ends and is connected in roof and the two side of diapire both sides that above-mentioned six walls are provided with some groups of thermal-insulation baffle plates around forming furnace chamber in the said furnace chamber; Every group of thermal-insulation baffle plate comprises first thermal-insulation baffle plate that is connected with roof and second thermal-insulation baffle plate that is connected with diapire; Said first thermal-insulation baffle plate and second thermal-insulation baffle plate are positioned at same vertical plane, are provided with first air distribution plate between per two adjacent first thermal-insulation baffle plates, form several first memory spaces between several first air distribution plates and the roof respectively; Said roof is provided with several first air inlets; One side of each first air inlet all is equipped with first temperature regulating device, and said several first air inlets communicate with several first memory spaces respectively, is provided with second air distribution plate between per two second thermal-insulation baffle plates; Form several second memory spaces between several second air distribution plates and the diapire respectively; Said diapire is provided with several second air inlets, and a side of each second air inlet all is equipped with second temperature regulating device, and said several second air inlets communicate with several second memory spaces respectively; On the said sidewall heater is installed; The two ends of said roof are respectively equipped with the gas outlet, and the top of each gas outlet is equipped with extractor fan, are provided with oil storage tank in the said extractor fan.
2. a kind of gas distribution drying oven as claimed in claim 1 is characterized in that: said first air distribution plate and second air distribution plate are processed by the stainless steel sintering net.
3. a kind of gas distribution drying oven as claimed in claim 2 is characterized in that: said several first thermal-insulation baffle plates are connected with roof through high temperature glue respectively, and said several second thermal-insulation baffle plates are connected with diapire through high temperature glue respectively.
4. like claim 1 or 2 or 3 described a kind of gas distribution drying ovens, it is characterized in that: said several first air distribution plates are respectively through screw and side wall of furnace fixing mutually, and said several second air distribution plates pass through screw and side wall of furnace fixing mutually respectively.
5. a kind of gas distribution drying oven as claimed in claim 4 is characterized in that: said heater is the Infrared Heating fluorescent tube.
6. a kind of gas distribution drying oven as claimed in claim 5 is characterized in that: said first temperature regulating device and second temperature regulating device are gas flowmeter.
7. a kind of gas distribution drying oven as claimed in claim 1, it is characterized in that: said body of heater is processed by sheet metal component, and the inwall of said body of heater is through the glutinous warming plate that is stained with of high temperature glue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201710752U CN202532852U (en) | 2012-04-21 | 2012-04-21 | Gas distribution drying furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201710752U CN202532852U (en) | 2012-04-21 | 2012-04-21 | Gas distribution drying furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202532852U true CN202532852U (en) | 2012-11-14 |
Family
ID=47134031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201710752U Withdrawn - After Issue CN202532852U (en) | 2012-04-21 | 2012-04-21 | Gas distribution drying furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202532852U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102628643A (en) * | 2012-04-21 | 2012-08-08 | 张家港鹏博光电科技有限公司 | Gas distribution drying furnace |
| CN105506899A (en) * | 2016-01-19 | 2016-04-20 | 湖州新创丝织品有限公司 | Drying and dedusting equipment of tentering and setting machine |
-
2012
- 2012-04-21 CN CN2012201710752U patent/CN202532852U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102628643A (en) * | 2012-04-21 | 2012-08-08 | 张家港鹏博光电科技有限公司 | Gas distribution drying furnace |
| CN105506899A (en) * | 2016-01-19 | 2016-04-20 | 湖州新创丝织品有限公司 | Drying and dedusting equipment of tentering and setting machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20121114 Effective date of abandoning: 20140416 |
|
| RGAV | Abandon patent right to avoid regrant |