CN102628643B - Gas distribution drying furnace - Google Patents
Gas distribution drying furnace Download PDFInfo
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- CN102628643B CN102628643B CN201210118070.8A CN201210118070A CN102628643B CN 102628643 B CN102628643 B CN 102628643B CN 201210118070 A CN201210118070 A CN 201210118070A CN 102628643 B CN102628643 B CN 102628643B
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Abstract
The invention discloses a gas distribution drying furnace, which comprises a furnace body and a furnace cavity, wherein the furnace body is provided with a drying passage, a plurality of groups of heat insulation plates are arranged in the furnace cavity, each group of the heat insulation plates comprises a first heat insulation plate and a second heat insulation plate, the first heat insulation plate is connected with the top wall, the second insulation separation plate is connected with the bottom wall, a first gas distribution plate is arranged between every two adjacent first heat insulation separation plates, the top wall is provided with a plurality of first gas inlet, one side of each first gas inlet is respectively provided with a first temperature control device, a second gas distribution plate is arranged between every two second heat insulation plates, the bottom wall is provided a plurality of second gas inlets, one side of each second gas inlet is respectively provided with a second temperature control device, a heating device is arranged on the side wall, two ends of the top wall are respectively provided with gas outlets, an exhausting device is arranged above each gas outlet, and oil storage grooves are arranged in the exhausting devices. The gas distribution drying furnace disclosed by the invention has the advantages that the structure is simple, the cost is lower, the service life is longer, and the constant temperature drying can be realized.
Description
Technical field
The present invention relates to a kind of drying oven of solar silicon wafers industry, relate in particular to a kind of by the gas distribution drying oven of air-flow regulating and controlling temperature.
Background technology
In solar silicon wafers industry, the oven dry of silicon chip is a very important step in whole solar silicon wafers production procedure.Silicon chip is by the drying oven passage of uniform temperature, thereby makes other oily matters such as slurry unwatering on silicon chip perfecting, make useful material can be evenly, be firmly attached to above silicon chip.Wherein in drying course, the control of bake out temperature uniformity and stability is extremely important, and can whole drying course guarantee that constant temperature drying has larger impact to the quality of silicon chip.And the oily matters such as steam that drying course produces can not impact silicon chip surface.Drying oven power of the prior art is bigger than normal, cost is higher, service life is shorter, and can not process the impact that the oily matter condensate drop of evaporating in drying course causes silicon chip.
Summary of the invention
A technical problem to be solved by this invention is: provide a kind of simple in structure, cost is lower, service life is long, and can prevent the condense gas distribution drying oven of drippage of oil gas in stove.
For solving the problems of the technologies described above, the present invention adopts following technical scheme: a kind of gas distribution drying oven, comprise: body of heater, the central authorities of described body of heater are provided with drying channel, described body of heater comprises roof, diapire, be connected in the end walls at roof and diapire two ends and be connected in roof and the two side of diapire both sides, above-mentioned six walls are around forming furnace chamber, in described furnace chamber, be provided with some groups of thermal-insulation baffle plates, every group of thermal-insulation baffle plate comprises the first thermal-insulation baffle plate being connected with roof and the second thermal-insulation baffle plate being connected with diapire, described the first thermal-insulation baffle plate and the second thermal-insulation baffle plate are positioned at same vertical plane, between every two adjacent the first thermal-insulation baffle plates, be provided with the first air distribution plate, between several the first air distribution plates and roof, form respectively several the first memory spaces, described roof is provided with several the first air inlets, one side of each the first air inlet is all provided with the first temperature regulating device, described several the first air inlet communicates with several the first memory spaces respectively, between every two second thermal-insulation baffle plates, be provided with the second air distribution plate, between several the second air distribution plates and diapire, form respectively several the second memory spaces, described diapire is provided with several the second air inlets, one side of each the second air inlet is all provided with the second temperature regulating device, described several the second air inlet communicates with several the second memory spaces respectively, on described sidewall, heater is installed, the two ends of described roof are respectively equipped with gas outlet, the top of each gas outlet is equipped with extractor fan, in described extractor fan, be provided with oil storage tank.
As a kind of preferred technical scheme, described the first air distribution plate and the second air distribution plate are made by stainless steel sintered meshwork.
As a kind of preferred technical scheme, described several the first thermal-insulation baffle plates are connected with roof by high temperature glue respectively, and described several the second thermal-insulation baffle plates are connected with diapire by high temperature glue respectively.
As a kind of preferred technical scheme, described several the first air distribution plates are the sidewall phase fixing with body of heater by screw respectively, and described several the second air distribution plates are the sidewall phase fixing with body of heater by screw respectively.
As a kind of preferred technical scheme, described heater is infrared heating fluorescent tube.
As a kind of preferred technical scheme, described the first temperature regulating device and the second temperature regulating device are gas flowmeter.
As a kind of preferred technical scheme, described body of heater is made by sheet metal component, and the inwall of described body of heater is by the glutinous warming plate that is stained with of high temperature glue.
Beneficial effect of the present invention: gas distribution drying oven in the present invention is simple in structure, cost is lower, service life is long, by air-flow evenly, the mobile whole inner space of furnace chamber that makes of rule reaches a uniform dynamic equilibrium, thereby can realize constant temperature drying, by extractor fan is set, can effectively prevent in stove the oil gas drippage that condenses in addition.
Accompanying drawing explanation
Fig. 1 is the structural representation of gas distribution drying oven.
In Fig. 1: 1, body of heater, 10, drying channel, 11, roof, the 110, first air inlet, 111, the first temperature regulating device, 112, gas outlet, 12, diapire, 120, the second air inlet, the 121, second temperature regulating device, 13, furnace chamber, 2, the first thermal-insulation baffle plate, the 3, second thermal-insulation baffle plate, the 4, first air distribution plate, 5, the first memory space, the 6, second air distribution plate, the 7, second memory space, 8, heater, 9, extractor fan, 90, oil storage tank.
The specific embodiment
Below in conjunction with accompanying drawing, the preferred embodiments of the present invention are described, should be appreciated that preferred embodiment described herein, only for description and interpretation the present invention, is not intended to limit the present invention.
Refer to Fig. 1, a kind of gas distribution drying oven, comprise: body of heater 1, the central authorities of described body of heater 1 are provided with drying channel 10, described body of heater 1 comprises roof 11, diapire 12, be connected in the end walls at roof 11 and diapire 12 two ends and be connected in the two side of roof 11 and diapire 12 both sides, above-mentioned six walls are around forming furnace chamber 13, in described furnace chamber 13, be provided with some groups of thermal-insulation baffle plates, every group of thermal-insulation baffle plate comprises the first thermal-insulation baffle plate 2 being connected with roof 11 and the second thermal-insulation baffle plate 3 being connected with diapire 12, described the first thermal-insulation baffle plate 2 and the second thermal-insulation baffle plate 3 are positioned at same vertical plane, between every two adjacent the first thermal-insulation baffle plates 2, be provided with the first air distribution plate 4, between several the first air distribution plates 4 and roof 11, form respectively several the first memory spaces 5, described roof 11 is provided with several the first air inlets 110, one side of each the first air inlet 110 is all provided with the first temperature regulating device 111, described several the first air inlet 110 communicates with several the first memory spaces 5 respectively, between every two second thermal-insulation baffle plates 3, be provided with the second air distribution plate 6, between several the second air distribution plates 6 and diapire 12, form respectively several the second memory spaces 7, described diapire 12 is provided with several the second air inlets 120, one side of each the second air inlet 120 is all provided with the second temperature regulating device 121, described several the second air inlet 120 communicates with several the second memory spaces 7 respectively, heater 8 is installed on described sidewall, the two ends of described roof 11 are respectively equipped with gas outlet 112, the top of each gas outlet 112 is equipped with extractor fan 9, in described extractor fan 9, be provided with oil storage tank 90.Described the first air distribution plate 4 and the second air distribution plate 6 are made by stainless steel sintered meshwork.The present invention is by replacing filtration blanket of the prior art with stainless steel sintered meshwork, reduced production cost, improved service life again, and repair also more convenient, described several the first thermal-insulation baffle plate 2 is connected with roof 11 by high temperature glue respectively, and described several the second thermal-insulation baffle plates 3 are connected with diapire 12 by high temperature glue respectively.Described several the first air distribution plate 4 is the sidewall phase fixing with body of heater 1 by screw respectively, and described several the second air distribution plates 6 are the sidewall phase fixing with body of heater by screw respectively.When the first air distribution plate 4 and the second air distribution plate 6 damage, change more for convenience.Described heater 8 is infrared heating fluorescent tube.Described the first temperature regulating device 111 and the second temperature regulating device 121 are gas flowmeter.By can effectively control the even, constant of whole furnace chamber 13 interior temperature to the adjusting of the first temperature regulating device 111 and the second temperature regulating device 121.Described body of heater 1 is made by sheet metal component, and the inwall of described body of heater 1 is stained with warming plate by high temperature glue is glutinous, can effectively completely cut off and keep temperature.
In the present invention, the operation principle of gas distribution drying oven is: compressed air is squeezed in several the first memory spaces 5 and several the second memory space 7 by several the first air inlets 110 and several the second air inlet 120 respectively, compressed air in the first memory space 5 can be distributed on the first air distribution plate 4 equably, then be penetrated in furnace chamber 13, compressed air in the second memory space 7 can be distributed on the second air distribution plate 6 equably, then be penetrated in furnace chamber 13, then by the air-flow in 8 pairs of furnace chambers 13 of heater, heat, then silicon chip being put into drying channel 10 can dry silicon chip, air-flow after heating is discharged by the gas outlet 112 at body of heater 1 two ends, then thermal current can pass through extractor fan 9, because air-flow becomes soot gas after by drying oven, the air outlet of encountering extractor fan 9 can condense, oil after condensing can be dropped in 90 li of oil storage tanks along air outlet.
Gas distribution drying oven in the present invention is simple in structure, cost is lower, service life is long, by air-flow evenly, the mobile whole inner space of furnace chamber that makes of rule reaches a uniform dynamic equilibrium, thereby can realize constant temperature drying, by extractor fan is set, can effectively prevent in stove the oil gas drippage that condenses in addition.
Finally it should be noted that: the foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, although the present invention is had been described in detail with reference to previous embodiment, for a person skilled in the art, its technical scheme that still can record aforementioned each embodiment is modified, or part technical characterictic is wherein equal to replacement.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (7)
1. a gas distribution drying oven, comprise: body of heater, the central authorities of described body of heater are provided with drying channel, it is characterized in that: described body of heater comprises roof, diapire, be connected in the end walls at roof and diapire two ends and be connected in roof and the two side of diapire both sides, above-mentioned six walls are around forming furnace chamber, in described furnace chamber, be provided with some groups of thermal-insulation baffle plates, every group of thermal-insulation baffle plate comprises the first thermal-insulation baffle plate being connected with roof and the second thermal-insulation baffle plate being connected with diapire, described the first thermal-insulation baffle plate and the second thermal-insulation baffle plate are positioned at same vertical plane, between every two adjacent the first thermal-insulation baffle plates, be provided with the first air distribution plate, between several the first air distribution plates and roof, form respectively several the first memory spaces, described roof is provided with several the first air inlets, one side of each the first air inlet is all provided with the first temperature regulating device, described several the first air inlet communicates with several the first memory spaces respectively, between every adjacent two second thermal-insulation baffle plates, be provided with the second air distribution plate, between several the second air distribution plates and diapire, form respectively several the second memory spaces, described diapire is provided with several the second air inlets, one side of each the second air inlet is all provided with the second temperature regulating device, described several the second air inlet communicates with several the second memory spaces respectively, on described sidewall, heater is installed, the two ends of described roof are respectively equipped with gas outlet, the top of each gas outlet is equipped with extractor fan, in described extractor fan, be provided with oil storage tank.
2. a kind of gas distribution drying oven as claimed in claim 1, is characterized in that: described the first air distribution plate and the second air distribution plate are made by stainless steel sintered meshwork.
3. a kind of gas distribution drying oven as claimed in claim 2, is characterized in that: described the first thermal-insulation baffle plate is connected with roof by high temperature glue, and described the second thermal-insulation baffle plate is connected with diapire by high temperature glue.
4. a kind of gas distribution drying oven as described in claim 1 or 2 or 3, is characterized in that: described several the first air distribution plates are the sidewall phase fixing with body of heater by screw respectively, and described several the second air distribution plates are the sidewall phase fixing with body of heater by screw respectively.
5. a kind of gas distribution drying oven as claimed in claim 4, is characterized in that: described heater is infrared heating fluorescent tube.
6. a kind of gas distribution drying oven as claimed in claim 5, is characterized in that: described the first temperature regulating device and the second temperature regulating device are gas flowmeter.
7. a kind of gas distribution drying oven as claimed in claim 1, is characterized in that: described body of heater is made by sheet metal component, and the inwall of described body of heater is by the glutinous warming plate that is stained with of high temperature glue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210118070.8A CN102628643B (en) | 2012-04-21 | 2012-04-21 | Gas distribution drying furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210118070.8A CN102628643B (en) | 2012-04-21 | 2012-04-21 | Gas distribution drying furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102628643A CN102628643A (en) | 2012-08-08 |
| CN102628643B true CN102628643B (en) | 2014-04-16 |
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ID=46586954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210118070.8A Expired - Fee Related CN102628643B (en) | 2012-04-21 | 2012-04-21 | Gas distribution drying furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN102628643B (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2729802B2 (en) * | 1988-03-30 | 1998-03-18 | 大日本印刷株式会社 | Drying machine for web offset press |
| CN101153713A (en) * | 2006-09-29 | 2008-04-02 | 张四海 | Chimney connector |
| CN201589506U (en) * | 2009-10-23 | 2010-09-22 | 长沙楚天科技有限公司 | Oven of tunnel type sterilization dryer |
| CN202066320U (en) * | 2011-03-25 | 2011-12-07 | 福建省厨师食品集团有限公司 | Novel drying oven |
| CN202032857U (en) * | 2011-04-21 | 2011-11-09 | 建滔（连州）铜箔有限公司 | Hot air oven with ceramic heating plates |
| CN202532852U (en) * | 2012-04-21 | 2012-11-14 | 张家港鹏博光电科技有限公司 | Gas distribution drying furnace |
-
2012
- 2012-04-21 CN CN201210118070.8A patent/CN102628643B/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN102628643A (en) | 2012-08-08 |
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Granted publication date: 20140416 Termination date: 20180421 |