CN202520600U - Temperature and rotation speed detecting mechanism - Google Patents
Temperature and rotation speed detecting mechanism Download PDFInfo
- Publication number
- CN202520600U CN202520600U CN2012201280754U CN201220128075U CN202520600U CN 202520600 U CN202520600 U CN 202520600U CN 2012201280754 U CN2012201280754 U CN 2012201280754U CN 201220128075 U CN201220128075 U CN 201220128075U CN 202520600 U CN202520600 U CN 202520600U
- Authority
- CN
- China
- Prior art keywords
- thrust disc
- groove
- temperature
- rotor
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 title abstract description 6
- 238000006073 displacement reaction Methods 0.000 claims abstract description 75
- 238000001514 detection method Methods 0.000 claims description 89
- 238000012545 processing Methods 0.000 claims description 35
- 239000000523 sample Substances 0.000 claims description 35
- 239000007787 solid Substances 0.000 claims description 29
- 239000000725 suspension Substances 0.000 claims description 22
- 238000001914 filtration Methods 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 6
- 230000000630 rising effect Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000036760 body temperature Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004861 thermometry Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Abstract
The utility model provides a temperature and rotation speed detecting mechanism which can simultaneously detect the temperature and the rotation speed of a high-speed rotary body. The temperature and rotation speed detecting mechanism comprises a detecting portion and a displacement sensor, the detecting portion is used as a part of the rotary body, and a groove is arranged on the edge of the detecting portion. When the detecting portion rotates, the displacement sensor can output continuous pulse signals, and the rotation speed of the rotary body can be measured by computing the frequency of the pulse signals corresponding to the detecting groove. When the temperature changes, the detecting portion can expand or retract, the amplitude of the pulse signals detected by the displacement sensor can change, accordingly, variation of the temperature of the rotary body can be computed by measuring change of the amplitude of the pulse signals, and the temperature of the rotary body can be obtained according to the variation of the temperature of the rotary body and the initial temperature of the rotary body. The temperature and the rotation speed of the rotary body can be simultaneously measured only by the displacement sensor, and accordingly the temperature and rotation speed detecting mechanism is simple in structure and low in cost.
Description
Technical field
The utility model relates to the pumping equipment applied technical field, is specifically related to a kind of feeler mechanism that can detect high speed rotating temperature and rotating speed simultaneously.
Background technique
The magnetic suspension molecular pump is a kind of molecular pump that adopts magnetic bearing as rotor bearing; It utilize magnetic bearing with rotor stability be suspended in aerial; Make rotor in the high speed operation process and between the stator, not have Mechanical Contact; Advantages such as having and do not have the machinery wearing and tearing, energy consumption is low, allow the rotating speed height, noise is low, the life-span is long, need not to lubricate, the magnetic suspension molecular pump is widely used in the fields such as acquisition of condition of high vacuum degree, high-cleanness, high vacuum environment at present.
The internal structure of magnetic suspension molecular pump is as shown in Figure 1, and the molecular pump of magnetic suspension described in the figure vertically is provided with, and said magnetic suspension molecular pump comprises the pump housing 3, is arranged on the rotor axial system of the said pump housing 3 inner chambers.Said rotor axial system comprises rotor, first radial direction magnetic bearing 6, second radial direction magnetic bearing 9, first axial magnetic bearing 13 and second axial magnetic bearing 15.Said rotor comprise rotor shaft 7, with fixing impeller 1 of said rotor shaft 7 and the build-up member that is used for fixing said impeller 1, like screw, nut etc.The axis of said rotor shaft 7 vertically is provided with, and said impeller 1 is fixedly mounted on the top of said rotor shaft 7; The middle part of said rotor shaft 7 compartment of terrain successively is arranged with first and radially protects bearing 4, first radial displacement transducer 5, said first radial direction magnetic bearing 6, motor 8, said second radial direction magnetic bearing 9, second radial displacement transducer 10 and second radially to protect bearing 11 etc.The bottom of said rotor shaft 7 is provided with said first axial magnetic bearing 13, said second axial magnetic bearing 15, thrust disc 14 and axially protects bearing 12 and be used to detect the shaft position sensor 16 of said rotor axial displacement signal.Wherein, The signal output part of displacement transducer (said first radial displacement transducer 5, said second radial displacement transducer 10 and said shaft position sensor 16) is connected with the signal input part of displacement detector 18; The signal output part of said displacement detector 18 is connected with the signal input part of said controller 2, and said displacement detector 18 is used to detect the displacement of said rotor.In addition; For rotating speed and the temperature that detects said rotor; Said magnetic suspension molecular pump also disposes speed detector 19 that is used for the detection rotor rotating speed and the temperature-detecting device that is used for the detection rotor temperature; Said speed detector 19 is used to detect the tach signal of said rotor, and its signal input part is connected to the rotating speed detecting sensor through the tenminal block 17 of said magnetic suspension molecular pump, and the signal output part of said speed detector 19 is connected with the signal input part of said controller 2; Said temperature-detecting device is used to detect the temperature signal of said rotor; Its signal input part is connected to temperature detection sensor through the tenminal block 17 of said magnetic suspension molecular pump, and the signal output part of said temperature-detecting device is connected with the signal input part of said controller 2.
The controller 2 of said magnetic suspension molecular pump receives from the signal of said displacement detector 18, said speed detector 19 and said temperature-detecting device and carries out analysing and processing to the received signal, and then rotor is carried out corresponding control.
Rotor displacement and rotor speed are the important evidence of controller control rotor motion; Temperature of rotor is the important indicator that embodies magnetic suspension molecular pump working state, therefore in magnetic suspension molecular pump control procedure, need pay close attention to the numerical value change of rotor displacement, rotating speed and temperature constantly.
Existing technology adopts following method usually to the detection like high-speed rotary body rotating speed such as magnetic suspension molecular pump rotor and temperature:
1, rotor speed detects: adopt the permanent magnet DC motor of band Hall transducer to drive rotor rotation, utilize the Hall transducer that is provided with on the permanent magnet DC motor to detect the rotating speed of rotor.Its principle is: rotor whenever rotates a circle, and Hall transducer will be exported a high level signal, and the frequency of analyzing this high level signal just can obtain the rotating speed of rotor.
2, temperature of rotor detects: special temperature sensor measurement temperature of rotor is set.
The method of measurement of above-mentioned rotor speed; Must use the motor driving rotor running that has Hall transducer; And not having the motor of Hall transducer just need join the rotating speed that velocity transducer is measured the magnetic suspension molecular pump rotor in addition such as AC motor etc., this has limited magnetic suspension molecular pump related accessory equipments choice undoubtedly.In addition,,, then can't obtain the tach signal of rotor again, influence the proper functioning of magnetic suspension molecular pump in case Hall transducer breaks down so if only rely on the motor Hall transducer to measure rotor speed.Though also can on rotor, add the backup measuring device of a velocity transducer as Hall transducer;, Hall transducer starts this velocity transducer detection rotor rotating speed when breaking down; But increased cost so on the one hand; Also increased the quantity of components and parts in the magnetic suspension molecular pump pump housing on the other hand, and the space is limited in the pump housing, an extra additional velocity transducer brings difficulty certainly will for the component placement in the pump housing.Similarly, the method for measurement of above-mentioned temperature of rotor is to be equipped with a temperature transducer separately, can increase cost equally, also can the component placement in the pump housing be impacted.
The model utility content
The utility model is to be solved to be in the existing technology detection like high speed rotating temperature such as magnetic suspension molecular pump rotor and rotating speed to be needed the additional configuration sensing means; Cost is increased; And cause layout difficult technologies problem in the high-speed rotating machine cavity, and then provide a kind of simple in structure, cost is low, can detect the temperature of high-speed rotary body and the feeler mechanism of rotating speed simultaneously.
For solving the problems of the technologies described above, the utility model provides a kind of temperature and rotary speed tester structure, and its signal output part is connected with the signal input part of signal processing unit, comprises
Detection unit; Part for the solid of rotation of high speed rotating; Said detection unit has identical temperature and rotating speed with said solid of rotation; Said detection unit is a column, forms one on its cylinder and detects groove and be used for the said solid of rotation quality of balance, guarantee the quality balance structure that said solid of rotation dynamic balancing characteristic meets the demands; The width of said detection groove is less than the girth of said detection unit;
Displacement transducer; Its detect probe is arranged in the plane, said detection unit place; Said detect probe is aimed at the cylinder of said detection unit and is kept the fixed test distance with the center of said detection unit; Said detect probe is used to detect the perpendicular distance L of said detection unit to said detect probe; The signal output part of said displacement transducer is connected with the signal input part of said signal processing unit, and said displacement transducer output voltage of signals amplitude and said detection unit are proportional to the perpendicular distance L of said detect probe;
The temperature that said signal processing unit combines said displacement transducer output voltage of signals amplitude said detection unit thermal expansion coefficient interior with being built in said signal processing unit and said detection unit initial temperature to obtain said detection unit;
Said signal processing unit obtains the rotational frequency f of said detection unit according to the output calculated signals of said displacement transducer, obtains the rotational speed omega=2 π f of said solid of rotation according to the rotational frequency f of said detection unit.
Above-mentioned temperature and rotary speed tester structure, said solid of rotation are the rotor of magnetic suspension molecular pump, and said detection unit is the thrust disc of the rotor shaft bottom of said rotor.
Above-mentioned temperature and rotary speed tester structure; Said quality balance structure is N the groove that takes shape on the said thrust disc cylinder; Said groove and said detection groove evenly distribute along circumference, and said groove and said detection groove have identical shaped, and guarantee that said rotor dynamic balancing characteristic meets the demands;
Said signal processing unit obtains said displacement transducer output signal frequency f ', and the rotational frequency
that calculates said thrust disc obtains the rotating speed
of said rotor according to the rotational frequency of said thrust disc.
Above-mentioned temperature and rotary speed tester structure, said quality balance structure are a compensating groove that is molded on the said thrust disc cylinder; Said compensating groove and said detection groove become 180 degree symmetric arrangement about the center of said thrust disc, and said compensating groove is different with said detection groove shape but have identical volume and meet the demands to guarantee said rotor dynamic balancing characteristic;
In the said thrust disc rotary course, when said detection groove was aimed at said detect probe, said displacement transducer output amplitude was V
1The detection pulse signal, when said compensating groove was aimed at said detect probe, said displacement transducer output amplitude was V
2The equalizing pulse signal;
Said signal processing unit obtains the frequency f of said detection pulse signal
1, calculate the rotational frequency f=f of said thrust disc
1, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc
1
Perhaps
Said signal processing unit obtains the frequency f of said equalizing pulse signal
2, calculate the rotational frequency f=f of said thrust disc
2, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc
2
Above-mentioned temperature and rotary speed tester structure, said detection groove are dark narrow rectangle groove, and said compensating groove is shallow wide rectangle groove;
In the said thrust disc rotary course, when said detection groove was aimed at said detect probe, said displacement transducer output amplitude was V
1High narrow pulse signal, when said compensating groove was aimed at said detect probe, said displacement transducer output amplitude was V
2Low wide pulse signal;
Said signal processing unit obtains the frequency f of said high narrow pulse signal
1, calculate the rotational frequency f=f of said thrust disc
1, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc
1
Perhaps
Said signal processing unit obtains the frequency f of said low wide pulse signal
2, calculate the rotational frequency f=f of said thrust disc
2, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc
2
Above-mentioned temperature and rotary speed tester structure, said signal processing unit comprises filtration module and computing module;
The output signal of said displacement transducer is divided into two-way;
Wherein one road signal is directly inputted into said computing module; Said computing module is gathered the mean value of any N point (N >=3) voltage magnitude variable quantity of the pairing displacement transducer output of unslotted part signal on the said thrust disc; According to the said thrust disc material coefficient of thermal expansion coefficient that is built in said computing module, calculate the temperature of said rotor in conjunction with the initial temperature of said thrust disc;
Other one road signal inputs to said filtration module, is V through said filtration module filtering amplitude
2Low wide pulse signal, the reservation amplitude is V
1High narrow pulse signal after transfer to said computing module, said computing module receives the high narrow pulse signal of said filtration module output, by the frequency of said high narrow pulse signal, calculates the rotating speed of said rotor.
Above-mentioned temperature and rotary speed tester structure, said displacement transducer are current vortex sensor.
The above-mentioned technological scheme of the utility model compared with prior art has following beneficial effect:
1. temperature and rotary speed tester structure in the utility model only need a displacement transducer just can obtain two physical quantitys of temperature of rotor and rotating speed simultaneously, velocity transducer and temperature transducer that fully can replace dedicated, saving cost.
2. temperature in the utility model and rotary speed tester structure, detection unit are selected to use the thrust disc that is provided with on the magnetic suspension molecular pump rotor, need not additional other component, do not influence the cavity part placement, and overall structure is simple.
Description of drawings
For the content that makes the utility model is more clearly understood,, the utility model is done further detailed explanation below according to the specific embodiment of the utility model and combine accompanying drawing.
Fig. 1 is the structural representation of magnetic suspension molecular pump in the existing technology;
Fig. 2 is for detecting the structural representation of the groove detection unit identical with the balance groove shape;
Fig. 3 is the waveform schematic representation of embodiment's 1 displacement transducer output signal in the utility model;
Fig. 4 is for detecting the structural representation of groove and balance groove shape different detection portion;
Fig. 5 is the waveform schematic representation of the utility model embodiment 3 displacement transducers output signal;
Fig. 6 is the waveform schematic representation of embodiment's 4 filtration modules output signal in the utility model;
Wherein reference character is: the 1-impeller, and the 2-controller, the 3-pump housing, 4-first radially protects bearing, 5-first radial displacement transducer; 6-first radial direction magnetic bearing, 7-rotor shaft, 8-motor, 9-second radial direction magnetic bearing, 10-second radial displacement transducer; 11-second radially protects bearing, and 12-axially protects bearing, 13-first axial magnetic bearing, 14-thrust disc; 15-second axial magnetic bearing, 16-shaft position sensor, 17-tenminal block, 18-displacement detector; The 19-speed detector, the 20-detect probe, 21-detects groove, 22-compensating groove.
Embodiment
Embodiment 1
Present embodiment provides a kind of temperature and rotary speed tester structure, and its signal output part is connected with the signal input part of signal processing unit, comprises
Detection unit; Part for the solid of rotation of high speed rotating; Said detection unit has identical temperature and rotating speed with said solid of rotation; Said detection unit is a column, forms one on its cylinder and detects groove 21 and be used for the said solid of rotation quality of balance, guarantee the quality balance structure that said solid of rotation dynamic balancing characteristic meets the demands; The width of said detection groove 21 is less than the girth of said detection unit;
Said solid of rotation dynamic balancing characteristic meets the demands and is meant; Because being provided with, detection unit detects groove 21; Cause solid of rotation to have unbalance mass, (unbalance mass, is meant the quality that is positioned at the solid of rotation specific radius, and the product of this quality and centripetal acceleration equals uneven centrifugal force), when unbalance mass, greater than 10 milligram hours; This unbalance mass, will make the center of gravity of solid of rotation and axle center produce a tangible throw of eccentric; In solid of rotation high speed rotating process, the centrifugal inertia force that the solid of rotation unbalance mass, causes can cause the horizontal mechanical vibration of solid of rotation (being generally radial vibration), influences system's proper functioning.Therefore, the purpose that said quality balance structure is set is to correct, eliminate its unbalance mass,, and said solid of rotation dynamic balancing characteristic meets the demands and just is meant that said solid of rotation unbalance mass, is less than predefined value;
Displacement transducer; Its detect probe 20 is arranged in the plane, said detection unit place; Said detect probe 20 is aimed at the cylinder of said detection unit and is kept the fixed test distance with the center of said detection unit; Said detect probe 20 is used to detect the perpendicular distance L of said detection unit to said detect probe 20; The signal output part of said displacement transducer is connected with the signal input part of said signal processing unit, and said displacement transducer output voltage of signals amplitude and said detection unit are proportional to the perpendicular distance L of said detect probe 20;
The temperature that said signal processing unit combines said displacement transducer output voltage of signals amplitude said detection unit thermal expansion coefficient interior with being built in said signal processing unit and said detection unit initial temperature to obtain said detection unit;
Said signal processing unit obtains the rotational frequency f of said detection unit according to the output calculated signals of said displacement transducer, obtains the rotational speed omega=2 π f of said solid of rotation according to the rotational frequency f of said detection unit.
As the mode that can implement, only otherwise influence proper functioning and the dynamics and the equilibrium response of the solid of rotation of high speed rotating, said detection unit can be selected the arbitrary portion on the said solid of rotation.
In the present embodiment, said solid of rotation is the rotor of magnetic suspension molecular pump, and said detection unit is the thrust disc 14 of rotor shaft 7 bottoms of said rotor.Why selecting thrust disc 14 as detection unit, is because the diameter of thrust disc 14 described in all parts that said rotor comprises is maximum.When said rotor expanded by heating, the thermal deformation amount of said thrust disc 14 is maximum, and it is higher that the deformation quantity when therefore utilizing said thrust disc 14 thermal expansions carries out temperature measurement accuracy.
In the present embodiment; Said quality balance structure is N the groove that takes shape on said thrust disc 14 cylinders; Said groove and said detection groove 21 evenly distribute along circumference, and said groove and said detection groove 21 have identical shaped, and guarantee that said rotor dynamic balancing characteristic meets the demands;
Said signal processing unit obtains said displacement transducer output signal frequency f ', and the rotational frequency
that calculates said thrust disc 14 obtains the rotating speed
of said rotor according to the rotational frequency of said thrust disc 14.
Be the process that example explanation present embodiment explanation present embodiment is measured temperature and rotating speed below with N=1:
As shown in Figure 2, during N=1, form on the said thrust disc 14 one detect that groove 21 is identical with said detection groove shape with one, volume is identical and with said detection groove 21 about the center of thrust disc 14 become 180 spend symmetrical distribution groove.Said detect probe 20 is used to detect the perpendicular distance L of said thrust disc 14 to said detect probe 20.In said thrust disc 14 rotary courses, when said detection groove 21 rotated on the position relative with said detect probe 20, said detect probe 20 became big to the perpendicular distance L of said thrust disc 14, and said displacement transducer is correspondingly exported a pulse signal.Equally; For guaranteeing that said rotor dynamic balancing characteristic meets the demands the said groove that is provided with and said detect probe 20 relatively the time; Said detect probe 20 becomes big to the perpendicular distance L of said thrust disc 14; Said displacement transducer is correspondingly exported the pulse signal of an identical amplitude and width, and therefore the waveform of said displacement transducer output voltage signal is shown in Fig. 3 solid line part.According to the waveform of pulse signal shown in Fig. 3 solid line part, the time of being experienced between per two pulse signal rising edges is an operation cycle, obviously utilizes the frequency f that this operation cycle calculates ' be two times of the rotational frequency f of said thrust disc 14; Be f=f '/2; Utilize the rotational frequency f of said thrust disc 14, the rotating speed that calculates said thrust disc 14 is ω=2 π f=π f ', and this is the rotating speed of rotor; When N greater than 1 the time, analytic process is the same.
When said thrust disc 14 temperature changed Δ T, because the physical property of expanding with heat and contract with cold, deformation took place in said thrust disc 14, and its vary in diameter amount is Δ R.If Δ T is minus value, the output signal of said displacement transducer is shown in Fig. 3 dotted portion at this moment, and obviously, said displacement transducer output voltage of signals amplitude integral body has increased Δ V.Because said displacement transducer output voltage of signals amplitude is proportional with the perpendicular distance L that said thrust disc 14 arrives said detect probe 20, so Δ V and said thrust disc 14 vary in diameter amount Δ R are proportional, can calculate Δ R according to Δ V.Because the signal processing unit stored has said thrust disc 14 material coefficient of thermal expansion coefficients; Vary in diameter amount Δ R in conjunction with said thrust disc 14 just can obtain said thrust disc 14 temperature variation Δ T, in conjunction with the initial temperature value T of said thrust disc 14 temperature variation Δ T and said thrust disc 14
0Can obtain the temperature value of said thrust disc 14: T=T
0+ Δ T, this is the temperature of rotor.If Δ T is the value greater than zero, then said displacement transducer output signal amplitude reduces, and thermometry and Δ T are the same when zero, repeat no more at this.
Present embodiment and embodiment's 1 difference are that the structure of quality balance described in the present embodiment is a compensating groove 22 that is molded on said thrust disc 14 cylinders; Said compensating groove 22 and said detection groove 21 become 180 degree symmetric arrangement about the center of said thrust disc 14, and said compensating groove 22 is different with said detection groove 21 shapes but have identical volume and meet the demands to guarantee said rotor dynamic balancing characteristic;
In said thrust disc 14 rotary courses, when said detection groove 21 was aimed at said detect probe 20, said displacement transducer output amplitude was V
1The detection pulse signal, when said compensating groove 22 was aimed at said detect probe 20, said displacement transducer output amplitude was V
2The equalizing pulse signal;
Said signal processing unit obtains the frequency f of said detection pulse signal
1, calculate the rotational frequency f=f of said thrust disc 14
1, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc 14
1
Perhaps
Said signal processing unit obtains the frequency f of said equalizing pulse signal
2, calculate the rotational frequency f=f of said thrust disc 14
2, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc 14
2
The process of measuring temperature is identical with embodiment's 1 said measuring phase, and this does not give unnecessary details.
Embodiment 3
On embodiment 2 basis, detecting groove 21 described in the present embodiment is dark narrow rectangle groove, and said compensating groove 22 is shallow wide rectangle groove, and is as shown in Figure 4.
In said thrust disc 14 rotary courses, when said detection groove 21 was aimed at said detect probe 20, said displacement transducer output amplitude was V
1High narrow pulse signal, when said compensating groove 22 was aimed at said detect probe 20, said displacement transducer output amplitude was V
2Low wide pulse signal;
Said signal processing unit obtains the frequency f of said high narrow pulse signal
1, calculate the rotational frequency f=f of said thrust disc 14
1, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc 14
1
Perhaps
Said signal processing unit obtains the frequency f of said low wide pulse signal
2, calculate the rotational frequency f=f of said thrust disc 14
2, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc 14
2
Partly provided the signal output waveform figure of the displacement transducer under the situation shown in Figure 4 at Fig. 5 solid line.
According to the waveform of pulse signal shown in Fig. 5 solid line part, wherein dark narrow rectangle groove is V corresponding to amplitude
1High narrow pulse signal, shallow wide rectangle groove is V corresponding to amplitude
2Low wide pulse signal.The time of being experienced between the rising edge with per two high narrow pulse signals is the frequency f that one-period can obtain high narrow pulse signal
1, the rotational frequency f=f of obvious thrust disc 14
1, utilizing the rotational frequency f of said thrust disc 14, the rotating speed that calculates said thrust disc 14 is ω=2 π f=2 π f
1
Perhaps, the time of being experienced between the rising edge with per two low wide pulse signals is the frequency f that one-period can obtain high narrow pulse signal
2, the rotational frequency f=f of obvious thrust disc 14
2, utilizing the rotational frequency f of said thrust disc 14, the rotating speed that calculates said thrust disc 14 is ω=2 π f=2 π f
2
The process of measuring temperature is identical with embodiment's 1 said measuring phase, and this does not give unnecessary details.
Embodiment 4
Present embodiment is on embodiment 3 basis, and said signal processing unit comprises filtration module and computing module; The output signal of said displacement transducer is divided into two-way;
Wherein one road signal is directly inputted into said computing module; Said computing module is gathered the mean value of any N point (N >=3) voltage magnitude variable quantity of the pairing displacement transducer output of unslotted part signal on the said thrust disc 14; According to the said thrust disc that is built in said computing module 14 material coefficient of thermal expansion coefficients, calculate the temperature of said rotor in conjunction with the initial temperature of said thrust disc 14.
With Fig. 5 is example, and when temperature variation, said displacement transducer output voltage of signals amplitude can integral body change, and the voltage magnitude of gathering any point of said displacement transducer output signal in theory changes all can calculate said temperature of rotor.But because the rising edge of pulse signal and falling edge itself just have the big variable quantity of voltage magnitude; Therefore in order to obtain accurately the voltage magnitude variable quantity to obtain rotary body temperature value accurately; When selecting the variation of displacement calculating sensor output signal voltage magnitude, to avoid the rising edge or the falling edge of strobe pulse signal; Therefore select to gather the mean value of any N point (N >=3) voltage magnitude variable quantity of the pairing displacement transducer output of unslotted part signal on the said thrust disc 14 in the present embodiment; According to the said thrust disc that is built in said computing module 14 material coefficient of thermal expansion coefficients, calculate the temperature of said rotor in conjunction with the initial temperature of said thrust disc 14; And through choosing the accuracy that method that a plurality of point voltage magnitude amounts average has improved measurement result;
Other one road signal inputs to said filtration module, is V through said filtration module filtering amplitude
2Low wide pulse signal, the reservation amplitude is V
1High narrow pulse signal after transfer to said computing module, said computing module receives the high narrow pulse signal of said filtration module output, by the frequency of said high narrow pulse signal, calculates the rotating speed of said rotor;
Filtering in the said filtration module is following, and according to shown in Figure 5, the voltage magnitude of high narrow pulse signal is V
1, the voltage magnitude of low wide pulse signal is V
2, it is V that comparative voltage can be set
0And V
2≤V
0≤V
1When input end was high narrow pulse signal, said comparison circuit output signal was a high level; When input end is that it is low level that said comparison circuit is exported signal when hanging down wide pulse signal.Through comparative voltage V is set
0Can filter hanging down wide pulse signal, the waveform of filtration module output is as shown in Figure 6.The time of experiencing between the rising edge by two pulse signals of said filtration module output signal shown in Figure 6 is the rotational frequency that one-period calculates said thrust disc 14; Thereby calculate the rotating speed of said thrust disc 14, the rotating speed of rotor is identical with the rotating speed of said thrust disc 14.
In the present embodiment, said displacement transducer is a current vortex sensor, also can select existing other non-contact type displacement transducers.
Obviously, the foregoing description only be for explanation clearly done for example, and be not qualification to mode of execution.For the those of ordinary skill in affiliated field, on the basis of above-mentioned explanation, can also make other multi-form variation or change.Here need not also can't give exhaustive to all mode of executions.And conspicuous variation of being extended out thus or change still are among the protection domain of the invention.
Claims (7)
1. temperature and rotary speed tester structure, its signal output part is connected with the signal input part of signal processing unit, it is characterized in that: comprise
Detection unit; Part for the solid of rotation of high speed rotating; Said detection unit has identical temperature and rotating speed with said solid of rotation; Said detection unit is a column, forms one on its cylinder and detects groove (21) and be used for the said solid of rotation quality of balance, guarantee the quality balance structure that said solid of rotation dynamic balancing characteristic meets the demands; The width of said detection groove (21) is less than the girth of said detection unit;
Displacement transducer; Its detect probe (20) is arranged in the plane, said detection unit place; Said detect probe (20) is aimed at the cylinder of said detection unit and is kept the fixed test distance with the center of said detection unit; Said detect probe (20) is used to detect the perpendicular distance L of said detection unit to said detect probe (20); The signal output part of said displacement transducer is connected with the signal input part of said signal processing unit, and said displacement transducer output voltage of signals amplitude and said detection unit are proportional to the perpendicular distance L of said detect probe (20);
The temperature that said signal processing unit combines said displacement transducer output voltage of signals amplitude said detection unit thermal expansion coefficient interior with being built in said signal processing unit and said detection unit initial temperature to obtain said detection unit;
Said signal processing unit obtains the rotational frequency f of said detection unit according to the output calculated signals of said displacement transducer, obtains the rotational speed omega=2 π f of said solid of rotation according to the rotational frequency f of said detection unit.
2. temperature according to claim 1 and rotary speed tester structure is characterized in that: said solid of rotation is the rotor of magnetic suspension molecular pump, and said detection unit is the thrust disc (14) of rotor shaft (7) bottom of said rotor.
3. temperature according to claim 2 and rotary speed tester structure is characterized in that:
Said quality balance structure is for taking shape in N groove on said thrust disc (14) cylinder; Said groove and said detection groove (21) evenly distribute along circumference; Said groove and said detection groove (21) have identical shaped, and guarantee that said rotor dynamic balancing characteristic meets the demands;
Said signal processing unit obtains said displacement transducer output signal frequency f ', and the rotational frequency
that calculates said thrust disc (14) obtains the rotating speed
of said rotor according to the rotational frequency of said thrust disc (14).
4. temperature according to claim 2 and rotary speed tester structure is characterized in that:
Said quality balance structure is for being molded over the compensating groove (22) on said thrust disc (14) cylinder; Said compensating groove (22) and said detection groove (21) become 180 degree symmetric arrangement about the center of said thrust disc (14), and said compensating groove (22) is different with said detection groove (21) shape but have identical volume and meet the demands to guarantee said rotor dynamic balancing characteristic;
In said thrust disc (14) rotary course, when said detection groove (21) was aimed at said detect probe (20), said displacement transducer output amplitude was V
1The detection pulse signal, when said compensating groove (22) was aimed at said detect probe (20), said displacement transducer output amplitude was V
2The equalizing pulse signal;
Said signal processing unit obtains the frequency f of said detection pulse signal
1, calculate the rotational frequency f=f of said thrust disc (14)
1, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc (14)
1
Perhaps
Said signal processing unit obtains the frequency f of said equalizing pulse signal
2, calculate the rotational frequency f=f of said thrust disc (14)
2, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc (14)
2
5. temperature according to claim 4 and rotary speed tester structure is characterized in that: said detection groove (21) is dark narrow rectangle groove, and said compensating groove (22) is shallow wide rectangle groove;
In said thrust disc (14) rotary course, when said detection groove (21) was aimed at said detect probe (20), said displacement transducer output amplitude was V
1High narrow pulse signal, when said compensating groove (22) was aimed at said detect probe (20), said displacement transducer output amplitude was V
2Low wide pulse signal;
Said signal processing unit obtains the frequency f of said high narrow pulse signal
1, calculate the rotational frequency f=f of said thrust disc (14)
1, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc (14)
1
Perhaps
Said signal processing unit obtains the frequency f of said low wide pulse signal
2, calculate the rotational frequency f=f of said thrust disc (14)
2, obtain the rotational speed omega=2 π f=2 π f of said rotor according to the rotational frequency of said thrust disc (14)
2
6. temperature according to claim 5 and rotary speed tester structure is characterized in that: said signal processing unit comprises filtration module and computing module;
The output signal of said displacement transducer is divided into two-way;
Wherein one road signal is directly inputted into said computing module; Said computing module is gathered the mean value that said thrust disc (14) is gone up any N point (N >=3) voltage magnitude variable quantity of the pairing displacement transducer output of unslotted part signal; According to said thrust disc (14) the material coefficient of thermal expansion coefficient that is built in said computing module, calculate the temperature of said rotor in conjunction with the initial temperature of said thrust disc (14);
Other one road signal inputs to said filtration module, is V through said filtration module filtering amplitude
2Low wide pulse signal, the reservation amplitude is V
1High narrow pulse signal after transfer to said computing module, said computing module receives the high narrow pulse signal of said filtration module output, by the frequency of said high narrow pulse signal, calculates the rotating speed of said rotor.
7. according to arbitrary described temperature of claim 1-6 and rotary speed tester structure, it is characterized in that: said displacement transducer is a current vortex sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201280754U CN202520600U (en) | 2012-03-29 | 2012-03-29 | Temperature and rotation speed detecting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201280754U CN202520600U (en) | 2012-03-29 | 2012-03-29 | Temperature and rotation speed detecting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202520600U true CN202520600U (en) | 2012-11-07 |
Family
ID=47103552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201280754U Expired - Lifetime CN202520600U (en) | 2012-03-29 | 2012-03-29 | Temperature and rotation speed detecting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202520600U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102606504A (en) * | 2012-03-29 | 2012-07-25 | 北京中科科仪股份有限公司 | Temperature and rotational speed detecting mechanism |
| CN103961771A (en) * | 2014-04-09 | 2014-08-06 | 邓旋 | Medical compression type atomizer |
| CN104359442A (en) * | 2014-11-11 | 2015-02-18 | 天津大中汽车零部件有限公司 | Metal rod inner hole inspection device |
| CN105547664A (en) * | 2015-12-04 | 2016-05-04 | 大庆市万和石油科技开发有限公司 | Petroleum drilling machine crown block fast wheel operation state non-contact measurement method |
| CN109563876A (en) * | 2016-08-18 | 2019-04-02 | 大金工业株式会社 | Magnetic bearing device and the fluid-mechanic system for having used the magnetic bearing device |
| CN110594294A (en) * | 2019-08-28 | 2019-12-20 | 中国人民解放军海军工程大学 | Magnetic suspension bearing system with detachable thrust disc |
| CN114233674A (en) * | 2021-12-31 | 2022-03-25 | 北京中科科仪股份有限公司 | Overload protection method and device for magnetic suspension molecular pump and storage medium |
-
2012
- 2012-03-29 CN CN2012201280754U patent/CN202520600U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102606504A (en) * | 2012-03-29 | 2012-07-25 | 北京中科科仪股份有限公司 | Temperature and rotational speed detecting mechanism |
| CN102606504B (en) * | 2012-03-29 | 2014-08-13 | 北京中科科仪股份有限公司 | Temperature and rotational speed detecting mechanism |
| CN103961771A (en) * | 2014-04-09 | 2014-08-06 | 邓旋 | Medical compression type atomizer |
| CN104359442A (en) * | 2014-11-11 | 2015-02-18 | 天津大中汽车零部件有限公司 | Metal rod inner hole inspection device |
| CN105547664A (en) * | 2015-12-04 | 2016-05-04 | 大庆市万和石油科技开发有限公司 | Petroleum drilling machine crown block fast wheel operation state non-contact measurement method |
| CN105547664B (en) * | 2015-12-04 | 2018-02-13 | 大庆市万和石油科技开发有限公司 | Oil-well rig overhead traveling crane fast steamer running status contactless measurement |
| CN109563876A (en) * | 2016-08-18 | 2019-04-02 | 大金工业株式会社 | Magnetic bearing device and the fluid-mechanic system for having used the magnetic bearing device |
| CN110594294A (en) * | 2019-08-28 | 2019-12-20 | 中国人民解放军海军工程大学 | Magnetic suspension bearing system with detachable thrust disc |
| CN114233674A (en) * | 2021-12-31 | 2022-03-25 | 北京中科科仪股份有限公司 | Overload protection method and device for magnetic suspension molecular pump and storage medium |
| CN114233674B (en) * | 2021-12-31 | 2024-04-02 | 北京中科科仪股份有限公司 | Overload protection method and device for magnetic suspension molecular pump and storage medium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202520600U (en) | Temperature and rotation speed detecting mechanism | |
| CN102606504B (en) | Temperature and rotational speed detecting mechanism | |
| KR102391977B1 (en) | Centrifuge and method for sensing imbalances in the centrifuge | |
| CN101130923B (en) | Rotating body control device and washing machine including the same | |
| CN104728054B (en) | Method for determining angular position and/or revolving speed | |
| EP0856604B1 (en) | Method for balancing a washing machine | |
| CN208012854U (en) | A kind of experimental rig and pilot system for torsional vibration damper | |
| CN102072797A (en) | Method for measuring unbalance of spindle in measurement of dynamic balance of tire and tire balancing machine | |
| CN106568565A (en) | Rotating machine vibration on-line monitoring device and rotating machine vibration on-line monitoring method | |
| CN102425553B (en) | Measuring method for rotor suspension center of magnetic suspension molecular pump | |
| CN103620355B (en) | For measuring the equipment by the time and the method for blade tip in turbine engine | |
| CN103868649A (en) | On-line dynamic balancing correction method for rotors of double-rotor axial flow fan | |
| CN102425562A (en) | Dynamic balance method for magnetic suspension molecular pump | |
| JPH01206113A (en) | Rolling bearing with sensor | |
| CN105478245A (en) | Identification method on basis of vibration detection of main shaft and for dynamic unbalance value of auxiliary shaft of double-freedom degree precision centrifugal machine | |
| CN109642845A (en) | Wheel balance measurement device, the evaluation method of wheel balance measurement device, the bearing calibration of wheel balance measurement device, wheel balance measurement device correction program | |
| CZ2011588A3 (en) | Method of determining actual eccentricity of a rotating rotor and rotating rotor eccentricity diagnostics | |
| CN206725225U (en) | A kind of experimental rig for simulating aero-engine disk chamber hydrops | |
| TWM576517U (en) | Workpiece processing and detecting device | |
| CN201510945U (en) | Centrifuge imbalance protection device of angle deviation sensor | |
| CN101205676A (en) | Rotation body control device and washing machine including the same | |
| CN104334849A (en) | Exhaust-gas turbocharger | |
| CN204788642U (en) | Washing machine is intensity of vibration detection device for drier | |
| CN111271301B (en) | Dynamic balance correction method for impeller of centrifugal fan of range hood | |
| CN101000247A (en) | Device for discriminating rotar position of magnet suspension flywheel |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20121107 Effective date of abandoning: 20140813 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20121107 Effective date of abandoning: 20140813 |
|
| RGAV | Abandon patent right to avoid regrant |