CN202484328U - Vacuum gate valve - Google Patents
Vacuum gate valve Download PDFInfo
- Publication number
- CN202484328U CN202484328U CN2012200032935U CN201220003293U CN202484328U CN 202484328 U CN202484328 U CN 202484328U CN 2012200032935 U CN2012200032935 U CN 2012200032935U CN 201220003293 U CN201220003293 U CN 201220003293U CN 202484328 U CN202484328 U CN 202484328U
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- CN
- China
- Prior art keywords
- gate valve
- gate
- vacuum
- compresses
- sealing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to the technical field of mechanically manufactured equipment, in particular to a vacuum gate valve. The vacuum gate valve comprises a through hole formed in the wall of a vacuum container, and is characterized in that a limit wheel is arranged above the through hole in the inner wall of the vacuum container and linear guide rails are arranged on two sides of the through hole; a cylinder is arranged on the outer wall at the bottom of the vacuum container, a push rod of the cylinder is penetrated inside the vacuum container, and a seat plate of the gate valve is arranged at the end part of the push rod of the cylinder; a fixing plate of the gate valve is connected and fixed on one side of the seat plate of the gate valve, and a pressing wedge block is arranged on the fixing plate of the gate valve; a return pressure spring is arranged on the other side of the seat plate of the gate valve, a supporting surface of the upper end of the return pressure spring is supported by a sealing plate of the gate valve, and the sealing plate of the gate valve is connected with movable blocks of the linear guide rails and corresponds to a fixed limiting wheel in position; and the sealing plate of the gate valve is connected through a sealing pressure spring and a screw and nut to be closely attached with the fixing plate, and sealing strips and a pressed guide wheel are arranged on the sealing plate of the gate valve. The vacuum gate valve has the advantages of simple structure, safety and reliability, convenience for operation and significant locking and sealing effect.
Description
Technical field
The utility model relates to the machinery production equipment technical field, is specifically related to a kind of vacuum gate valve.
Technical background
In large size vacuum vessel, the working efficiency of vacuum seal and conducting to the influence of the working efficiency of vacuum vessel greatly in present seal arrangement, does not also have a kind of simple in structure and device that can carry out conducting and sealing fast to vacuum vessel.
Summary of the invention
The purpose of the utility model is the deficiency to existing technology, provide a kind of simple in structure, speed of response is fast, safe and reliable, easy to operate, be easy to install adjustment, lock sealing obvious results vacuum gate valve.
The purpose of the utility model realizes through following technological scheme:
A kind of vacuum gate valve comprises: the container wall of vacuum vessel is provided with conducting orifice, it is characterized in that: above vacuum vessel inwall conducting orifice, be provided with limited wheel, the conducting orifice both sides are provided with linear rail; Be provided with cylinder in the vacuum vessel bottom outer wall, cylinder push-rod pierces into vacuum vessel inside, and this cylinder push-rod end has been provided with the gate valve seat board; Be fixedly connected with the gate valve fixed plate on one side at the gate valve seat board, this gate valve fixed plate is provided with and compresses voussoir; Gate valve seat board another side is provided with the reseat pressure spring, and this reseat pressure spring upper end supporting surface is supported with the Gate-valve sealing plate, and said Gate-valve sealing plate connects with the linear rail movable block and be corresponding with the fixed limit wheel location; The Gate-valve sealing plate connects with fixed plate through sealing load spring and bolt and nut and is close to, and on the Gate-valve sealing plate, is provided with Stamping Steel Ribbon, compresses guide wheel; Saidly compress guide wheel and compress the voussoir corresponding matching; Said Stamping Steel Ribbon is corresponding with the vacuum vessel inner wall position.
The said voussoir that compresses is provided with one section control and compresses the plane of inclination that guide wheel compresses displacement.
The said voussoir that compresses is fastened on the fixed plate through screw.
The beneficial effect of the utility model is: the guide rail location is adopted at the gate valve two ends, makes gate valve keeping parallelism in the gate valve lifting process; Can effectively control the sealing and the conducting of vacuum chamber, simple in structure, speed of response is fast, safe and reliable, easy to operate, be easy to install adjustment, the lock sealing effect is remarkable.
Description of drawings
Utilize accompanying drawing that the utility model is described further, but the embodiment in the accompanying drawing does not constitute any restriction to the utility model.
Fig. 1 is the utility model schematic representation.
Fig. 2 is the utility model sectional view.
Fig. 3 is that the utility model is analysed and observe partial enlarged drawing.
Fig. 4 is the utility model sealing schematic representation.
In Fig. 1, Fig. 2, Fig. 3, Fig. 4, comprise:
1, limited wheel, 2, vacuum vessel, 3, conducting orifice, 4, cylinder, 5, the Gate-valve sealing plate; 6, fixed plate, 7, compress voussoir, 8, the gate valve seat board, 9, Stamping Steel Ribbon; 10, compress guide wheel, 11, the reseat pressure spring, 12, linear rail, 13, the sealing load spring.
Embodiment
Below in conjunction with embodiment the utility model is elaborated.
Among Fig. 1, Fig. 2, Fig. 3, Fig. 4, above vacuum vessel 2 inwall conducting orifices 3, be provided with limited wheel 1, conducting orifice (3) both sides are provided with linear rail 12; Be provided with cylinder 4 in vacuum vessel 2 bottom outer wall, cylinder 4 push rods pierce into vacuum vessel 2 inside, and these cylinder 4 push rod ends have been provided with gate valve seat board 8; Be fixedly connected with gate valve fixed plate 6 on one side at gate valve seat board 8, this gate valve fixed plate 6 is provided with and compresses voussoir 7; Gate valve seat board 8 another sides are provided with reseat pressure spring 11, and these reseat pressure spring 11 upper end supporting surfaces are supported with Gate-valve sealing plate 5, and said Gate-valve sealing plate 5 and linear rail 12 movable blocks connect and to take turns 1 position corresponding with fixed limit; Gate-valve sealing plate 5 connects with fixed plate 6 through sealing load spring 13 and bolt and nut and is close to, and on Gate-valve sealing plate 5, is provided with Stamping Steel Ribbon 9, compresses guide wheel 10; Saidly compress guide wheel 10 and compress voussoir 7 corresponding matching; Said Stamping Steel Ribbon 9 is corresponding with vacuum vessel 2 inner wall positions.
The said voussoir 7 that compresses is provided with one section control and compresses the plane of inclination that guide wheel 10 compresses displacement.
The said voussoir 7 that compresses is fastened on the fixed plate 6 through screw.
Should be noted that at last; Above embodiment is only in order to the technological scheme of explanation the utility model but not to the restriction of the utility model protection domain; Although the utility model has been done detailed description with reference to preferred embodiment; Those of ordinary skill in the art should be appreciated that and can make amendment or be equal to replacement the technological scheme of the utility model, and do not break away from the essence and the scope of the utility model technological scheme.
Claims (3)
1. vacuum gate valve, comprising: the container wall of vacuum vessel (2) is provided with conducting orifice (3), it is characterized in that: be provided with limited wheel (1) in vacuum vessel (2) inwall conducting orifice (3) top, conducting orifice (3) both sides are provided with linear rail (12); Be provided with cylinder (4) in vacuum vessel (2) bottom outer wall, cylinder (4) push rod pierces into vacuum vessel (2) inside, and this cylinder (4) push rod end has been provided with gate valve seat board (8); Be fixedly connected with gate valve fixed plate (6) on one side at gate valve seat board (8), this gate valve fixed plate (6) is provided with and compresses voussoir (7); Gate valve seat board (8) another side is provided with reseat pressure spring (11); This reseat pressure spring (11) upper end supporting surface is supported with Gate-valve sealing plate (5), and said Gate-valve sealing plate (5) connects with linear rail (12) movable block and be corresponding with fixed limit wheel (1) position; Gate-valve sealing plate (5) connects with fixed plate (6) through sealing load spring (13) and bolt and nut and is close to, and on Gate-valve sealing plate (5), is provided with Stamping Steel Ribbon (9), compresses guide wheel (10); Saidly compress guide wheel (10) and compress voussoir (7) corresponding matching; Said Stamping Steel Ribbon (9) is corresponding with vacuum vessel (2) inner wall position.
2. according to the said vacuum gate valve of claim 1, it is characterized in that: the said voussoir (7) that compresses is provided with one section control and compresses the plane of inclination that guide wheel (10) compresses displacement.
3. according to claim 1,2 said vacuum gate valves, it is characterized in that: the said voussoir (7) that compresses is fastened on the fixed plate (6) through screw.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012200032935U CN202484328U (en) | 2012-01-06 | 2012-01-06 | Vacuum gate valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012200032935U CN202484328U (en) | 2012-01-06 | 2012-01-06 | Vacuum gate valve |
Publications (1)
Publication Number | Publication Date |
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CN202484328U true CN202484328U (en) | 2012-10-10 |
Family
ID=46958753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012200032935U Expired - Fee Related CN202484328U (en) | 2012-01-06 | 2012-01-06 | Vacuum gate valve |
Country Status (1)
Country | Link |
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CN (1) | CN202484328U (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104455506A (en) * | 2013-11-26 | 2015-03-25 | 核工业北京地质研究院 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
CN106704600A (en) * | 2015-11-13 | 2017-05-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Valve mechanism and semiconductor machining equipment |
CN107002890A (en) * | 2014-11-25 | 2017-08-01 | 普利西斯株式会社 | Vacuum valve |
RU176223U1 (en) * | 2017-04-17 | 2018-01-12 | Федеральное государственное бюджетное учреждение "Национальный исследовательский центр "Курчатовский институт" | SUPER HIGH VACUUM SHUTTER |
CN108884821A (en) * | 2016-02-15 | 2018-11-23 | 住友重机械工业株式会社 | Cryogenic pump and gate valve |
-
2012
- 2012-01-06 CN CN2012200032935U patent/CN202484328U/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104455506A (en) * | 2013-11-26 | 2015-03-25 | 核工业北京地质研究院 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
CN104455506B (en) * | 2013-11-26 | 2017-03-22 | 核工业北京地质研究院 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
CN107002890A (en) * | 2014-11-25 | 2017-08-01 | 普利西斯株式会社 | Vacuum valve |
CN106704600A (en) * | 2015-11-13 | 2017-05-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Valve mechanism and semiconductor machining equipment |
CN106704600B (en) * | 2015-11-13 | 2019-03-12 | 北京北方华创微电子装备有限公司 | Valve mechanism and semiconductor processing equipment |
CN108884821A (en) * | 2016-02-15 | 2018-11-23 | 住友重机械工业株式会社 | Cryogenic pump and gate valve |
RU176223U1 (en) * | 2017-04-17 | 2018-01-12 | Федеральное государственное бюджетное учреждение "Национальный исследовательский центр "Курчатовский институт" | SUPER HIGH VACUUM SHUTTER |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 526060 Xinghua Road two, Duanzhou science and Technology Park, Duanzhou, Guangdong, Zhaoqing Patentee after: Guangdong Zhen Hua Technology Co., Ltd. Address before: 526060 Xinghua Road two, Duanzhou science and Technology Park, Duanzhou, Guangdong, Zhaoqing Patentee before: Zhaoqing Zhenhua Vacuum Machinery Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121010 Termination date: 20210106 |
|
CF01 | Termination of patent right due to non-payment of annual fee |