CN215806729U - Sealed vacuum angle valve - Google Patents
Sealed vacuum angle valve Download PDFInfo
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- CN215806729U CN215806729U CN202121422200.8U CN202121422200U CN215806729U CN 215806729 U CN215806729 U CN 215806729U CN 202121422200 U CN202121422200 U CN 202121422200U CN 215806729 U CN215806729 U CN 215806729U
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- angle valve
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- sealing
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Abstract
The utility model relates to the technical field of photovoltaic and semiconductor manufacturing, in particular to a sealed vacuum angle valve which can effectively prevent dust from entering an angle valve execution element, improve the service cycle and reduce the maintenance frequency. The angle valve comprises an angle valve shell, wherein a compaction cylinder is arranged outside one end of the angle valve shell, a piston rod of the compaction cylinder extends into the angle valve shell, a pressing sealing plate is arranged at the end part of the piston rod, vacuum suction ports are respectively formed in the other end and the side wall of the angle valve shell, the pressing sealing plate is connected with an upper sealing flange through a telescopic corrugated pipe, and the piston rod penetrates through the upper sealing flange; the angle valve shell is positioned between the upper sealing flange and the press-fit sealing plate, the inner sealing flange is installed on the inner wall of the angle valve shell, the telescopic corrugated pipe penetrates through the inner sealing flange, and the two end faces of the inner sealing flange are respectively provided with an upper sealing gasket matched with the lower end face of the upper sealing flange and a lower sealing gasket matched with the upper end face of the press-fit sealing plate.
Description
Technical Field
The utility model relates to the technical field of photovoltaic and semiconductor manufacturing, in particular to a sealed vacuum angle valve.
Background
In the photovoltaic and semiconductor industries, a large amount of process equipment is required in the wafer production process, and vacuum systems are required in the production process, and vacuum angle valves are frequently used in the vacuum systems. In a vacuum system, dust is extremely harmful to an actuating element of the angle valve, so that the angle valve is easily blocked and cannot work. Therefore the sealed angle valve that this patent provided can solve the dust and get into the painful point of angle valve executive component, guarantees the normal work of angle valve, reduces the maintenance cycle of angle valve.
Disclosure of Invention
The utility model provides a sealed vacuum angle valve, which aims to solve the problem that the existing angle valve is blocked due to dust entering an actuating element and needs frequent maintenance.
The technical scheme is as follows: a sealed vacuum angle valve comprises an angle valve shell, wherein a compaction cylinder is arranged outside one end of the angle valve shell, a piston rod of the compaction cylinder extends into the angle valve shell, a pressing sealing plate is arranged at the end part of the piston rod, vacuum suction ports are respectively formed in the other end and the side wall of the angle valve shell, the sealed vacuum angle valve is characterized in that the pressing sealing plate is connected with an upper sealing flange through a telescopic corrugated pipe, and the piston rod penetrates through the upper sealing flange; the angle valve shell is characterized in that an inner sealing flange is arranged on the inner wall of the angle valve shell and penetrates through the inner sealing flange, an upper sealing gasket matched with the lower end face of the upper sealing flange and a lower sealing gasket matched with the upper end face of the pressing sealing plate are respectively arranged on two end faces of the inner sealing flange, and a bottom sealing gasket matched with the pressing sealing plate is arranged at the position of a vacuum suction inlet at the end part of the angle valve shell.
The angle valve is further characterized in that the angle valve shell comprises a cylindrical shell, an angle valve upper flange and an angle valve lower flange, the compaction air cylinder is installed on the angle valve upper flange, a through hole in the middle of the angle valve lower flange is one of the vacuum suction ports, and the other vacuum suction port is arranged on the side wall of the cylindrical shell and is provided with a vacuum suction pipe with a flange;
the inner wall of the lower flange of the angle valve is connected with a lower sealing flange, and the bottom sealing gasket is arranged on the lower sealing flange.
After the angle valve is adopted, when the angle valve is in an opening state, the pressing sealing plate is lifted upwards to be in contact with the lower sealing gasket to realize sealing, dust cannot enter the inside of the pressing cylinder, when the angle valve is in a closing state, the pressing sealing plate is pressed downwards to be in contact with the bottom sealing gasket and the upper sealing flange is in contact with the upper sealing gasket to realize sealing, and the dust cannot enter the inside of the pressing cylinder, so that the dustproof effect is effectively realized, the service cycle of the angle valve is prolonged, and the maintenance times are reduced.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
Detailed Description
As shown in fig. 1, a sealed vacuum angle valve comprises an angle valve shell 1, wherein a compression cylinder 2 is installed outside one end of the angle valve shell 1, a piston rod of the compression cylinder 2 extends into the angle valve shell 1, a pressing sealing plate 3 is installed at the end of the compression cylinder, vacuum suction ports 4 and 5 are respectively formed in the other end and the side wall of the angle valve shell 1, the pressing sealing plate 3 is connected with an upper sealing flange 7 through a telescopic corrugated pipe 6, and the piston rod penetrates through the upper sealing flange 7; the angle valve shell is located between an upper sealing flange 7 and a pressing sealing plate 3, an inner sealing flange 8 is installed on the inner wall of the angle valve shell 1, a telescopic corrugated pipe 6 penetrates through the inner sealing flange 8, an upper sealing gasket 9 matched with the lower end face of the upper sealing flange 7 and a lower sealing gasket 10 matched with the upper end face of the pressing sealing plate 3 are respectively arranged on two end faces of the inner sealing flange 8, and a bottom sealing gasket 11 matched with the pressing sealing plate 3 is arranged at a vacuum suction inlet 5 at the end portion of the angle valve shell 1.
The angle valve housing 1 specifically comprises a cylindrical housing 12, an angle valve upper flange 13 and an angle valve lower flange 14, wherein the compressing cylinder 2 is mounted on the angle valve upper flange 13, a through hole in the middle of the angle valve lower flange 14 is one of the vacuum suction ports 5, and the other vacuum suction port 4 is opened in the side wall of the cylindrical housing 12 and is provided with a vacuum suction pipe 15 with a flange.
The inner wall of the lower flange 14 of the angle valve is connected with a lower sealing flange 16, and the bottom sealing gasket 11 is arranged on the lower sealing flange 16.
When the angle valve is opened, the pressing sealing plate 3 is lifted to realize sealing with the lower sealing gasket 10, so that the dustproof in the angle valve shell can be effectively prevented from entering the compression cylinder 2, and the upper sealing flange 7 is supported by the telescopic corrugated pipe 6 and suspended in the angle valve shell 1.
When the angle valve was closed, the pressfitting closing plate 3 pushed down and driven last sealing flange 7 and down removed, and last sealing flange 7 earlier with the upper seal pad 9 contact seal and by spacing, when the pressfitting closing plate 3 continued to push down, the cooperation extension of concertina ripple pipe 6 was until pressfitting closing plate 3 and the 11 contacts of bottom seal pad, also played this moment and prevented dustproof entering into compressing tightly inside cylinder 2.
The sealed angle valve provided by the utility model can solve the problem that dust enters a pain point of an angle valve actuating element, and ensures the normal work of the angle valve.
Claims (3)
1. A sealed vacuum angle valve comprises an angle valve shell, wherein a compaction cylinder is arranged outside one end of the angle valve shell, a piston rod of the compaction cylinder extends into the angle valve shell, a pressing sealing plate is arranged at the end part of the piston rod, vacuum suction ports are respectively formed in the other end and the side wall of the angle valve shell, the sealed vacuum angle valve is characterized in that the pressing sealing plate is connected with an upper sealing flange through a telescopic corrugated pipe, and the piston rod penetrates through the upper sealing flange; the angle valve shell is characterized in that an inner sealing flange is arranged on the inner wall of the angle valve shell and penetrates through the inner sealing flange, an upper sealing gasket matched with the lower end face of the upper sealing flange and a lower sealing gasket matched with the upper end face of the pressing sealing plate are respectively arranged on two end faces of the inner sealing flange, and a bottom sealing gasket matched with the pressing sealing plate is arranged at the position of a vacuum suction inlet at the end part of the angle valve shell.
2. The sealed vacuum angle valve of claim 1, wherein the angle valve housing comprises a cylindrical housing, an angle valve upper flange and an angle valve lower flange, the hold-down cylinder is mounted on the angle valve upper flange, the through hole in the center of the angle valve lower flange is one of the vacuum suction ports, and the other vacuum suction port is opened in the side wall of the cylindrical housing and is mounted with a flanged vacuum suction pipe.
3. The sealed vacuum angle valve of claim 2, wherein the lower flange of the angle valve is connected to a lower sealing flange on the inner wall thereof, and the bottom gasket is mounted on the lower sealing flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121422200.8U CN215806729U (en) | 2021-06-25 | 2021-06-25 | Sealed vacuum angle valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121422200.8U CN215806729U (en) | 2021-06-25 | 2021-06-25 | Sealed vacuum angle valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215806729U true CN215806729U (en) | 2022-02-11 |
Family
ID=80178476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121422200.8U Active CN215806729U (en) | 2021-06-25 | 2021-06-25 | Sealed vacuum angle valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215806729U (en) |
-
2021
- 2021-06-25 CN CN202121422200.8U patent/CN215806729U/en active Active
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| GR01 | Patent grant | ||
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