CN202482417U - Rotary biasing device - Google Patents
Rotary biasing device Download PDFInfo
- Publication number
- CN202482417U CN202482417U CN2012200265761U CN201220026576U CN202482417U CN 202482417 U CN202482417 U CN 202482417U CN 2012200265761 U CN2012200265761 U CN 2012200265761U CN 201220026576 U CN201220026576 U CN 201220026576U CN 202482417 U CN202482417 U CN 202482417U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- rotating shaft
- permeater
- gear
- circuit closer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Physical Vapour Deposition (AREA)
- Coating Apparatus (AREA)
Abstract
The utility model discloses a rotary biasing device, which is characterized in that a vacuum penetrator is fixed on a lift platform, a positioning pin and a current collector are fixed above the vacuum penetrator, a transmission shaft and a coupler are arranged beside the current collector, a gear and a transmission gear are connected below the lifting platform, the transmission gear is connected with a rotation shaft of a rotary motor, the lifting platform is lift upwards and downwards through a plurality of air cylinders, the positioning pin and the couper on the vacuum penetrator are in embedded connection with corresponding parts a coated member rotating stand inside a vacuum chamber, and the rotary motor drives the coated member rotating frame to rotate in the vacuum chamber. The rotary biasing device disclosed by the utility model has the advantages of integrating functions of electric conduction, positioning and rotation, and being stable in rotation, accurate in positioning, stable in biasing, strong in function, simple in structure and small in size.
Description
Technical field
The utility model relates to a kind of vacuum coater, and particularly a kind of being used for is coated with part and rotates biased device indoor the making of vacuum plating.
Background technology
Common vacuum plating; Generally be workpiece to be plated to be fixed on to electroplate in the cavity carry out coating operation; If workpiece to be plated is carried out the spraying plating operation, then need carry out spraying plating, if nozzle position is fixed to being coated with each position of part; Just need make workpiece to be plated implement rotation, can both be plated to so that be coated with each position of part.For relating to a kind of filtering cathode vacuum plated film, then need apply bias voltage to it, therefore, except will making the intravital workpiece to be plated rotation in vacuum plating chamber, also need apply bias voltage to coating source.
Summary of the invention
For solving the problem of aforementioned existence, the utility model provides a kind of rotation biasing device, and this device is on a lifting table, to be fixed with the vacuum permeater; Vacuum permeater upper fixed has steady brace and circuit closer; There are transmission shaft and shaft coupling in the circuit closer next door, and the lifting table below has gear to be connected with transmitting gear, and transmitting gear is connected with the rotating machine rotating shaft; Lifting table goes up and down through four cylinders; During rising, the part pivoted frame corresponding component that is coated with in steady brace on the vacuum permeater and shaft coupling, the Vakuumkammer is rabbeted, and rotating machine makes and is coated with the workpiece pivoted frame at the Vakuumkammer internal rotation.Simultaneously, circuit closer is connected the bias voltage that the vacuum film coating chamber coating source needs.
Said vacuum permeater is that rotating shaft is arranged in cylindrical housing, rotating shaft outside, and upper and lower have two road oil sealings; There is insulation covering at the rotating shaft center, and cable is arranged in the insulation covering, and cable is connected with the torch that adds of bottom; The cable top is connected with circuit closer, and the rotating shaft bottom is connected with transmitting gear through gear.
The utility model has the advantages that, integrate conduction, location and spinfunction, rotation is steady, accurate positioning, and bias voltage is stable, and function is strong, and is simple in structure, and volume is little.
Description of drawings
Accompanying drawing 1 is the stereographic map of the utility model;
Accompanying drawing 2 is the sectional views that connect the vacuum permeater among Fig. 1.
Embodiment
See also shown in the accompanying drawing 1; This device is on a lifting device 5, to be fixed with vacuum permeater 4, and vacuum permeater 4 upper fixed have steady brace 3 and circuit closer 1, and there are transmission shaft and shaft coupling 2 in circuit closer 1 next door; Lifting device 5 belows have gear to be connected with transmitting gear 6; Transmitting gear 6 is connected with rotating machine 7 rotating shafts, and lifting device 5 goes up and down through four cylinders 8, during rising; Steady brace 3 on the vacuum permeater 4 is rabbeted with shaft coupling 2, the indoor part pivoted frame corresponding component that is coated with of vacuum plating, and rotating machine 7 makes and is coated with the part pivoted frame at the vacuum film coating chamber internal rotation.Simultaneously, circuit closer 1 is connected the bias voltage that the vacuum film coating chamber coating source needs.
Claims (2)
1. a rotation biasing device is characterized in that, on a lifting device, is fixed with the vacuum permeater; Vacuum permeater upper fixed has steady brace and circuit closer, and there are transmission shaft and shaft coupling in the circuit closer next door, and the lifting device below has gear to be connected with transmitting gear; Transmitting gear is connected with the rotating machine rotating shaft, and lifting device goes up and down through a plurality of cylinders, during rising; The part pivoted frame corresponding component that is coated with in steady brace on the vacuum permeater and shaft coupling, the Vakuumkammer is rabbeted; Rotating machine makes and is coated with the part pivoted frame at the vacuum film coating chamber internal rotation, and simultaneously, circuit closer is connected the bias voltage that the vacuum film coating chamber coating source needs.
2. by the described rotation biasing of claim 1 device, it is characterized in that said vacuum permeater is that rotating shaft is arranged in cylindrical housing; Rotating shaft outside, upper and lower have two road oil sealings, and there is insulation covering at the rotating shaft center; Cable is arranged in the insulation covering; Cable is connected with the torch that adds of bottom, and the cable top is connected with circuit closer, and the rotating shaft bottom is connected with transmitting gear through gear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200265761U CN202482417U (en) | 2012-01-20 | 2012-01-20 | Rotary biasing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200265761U CN202482417U (en) | 2012-01-20 | 2012-01-20 | Rotary biasing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202482417U true CN202482417U (en) | 2012-10-10 |
Family
ID=46956854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200265761U Expired - Lifetime CN202482417U (en) | 2012-01-20 | 2012-01-20 | Rotary biasing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202482417U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109837520A (en) * | 2018-12-20 | 2019-06-04 | 兰州空间技术物理研究所 | The shaft and installation method of the rotational workpieces of voltage and temperature measurement signal coaxial conductive |
| CN110453191A (en) * | 2019-08-28 | 2019-11-15 | 佛山市佛欣真空技术有限公司 | A kind of conducting system and vacuum coating equipment of vacuum coating equipment |
-
2012
- 2012-01-20 CN CN2012200265761U patent/CN202482417U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109837520A (en) * | 2018-12-20 | 2019-06-04 | 兰州空间技术物理研究所 | The shaft and installation method of the rotational workpieces of voltage and temperature measurement signal coaxial conductive |
| CN110453191A (en) * | 2019-08-28 | 2019-11-15 | 佛山市佛欣真空技术有限公司 | A kind of conducting system and vacuum coating equipment of vacuum coating equipment |
| CN110453191B (en) * | 2019-08-28 | 2024-05-17 | 佛山市佛欣真空技术有限公司 | Conductive system of vacuum coating machine and vacuum coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121010 |