CN202478700U - Filter - Google Patents

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Publication number
CN202478700U
CN202478700U CN 201120573848 CN201120573848U CN202478700U CN 202478700 U CN202478700 U CN 202478700U CN 201120573848 CN201120573848 CN 201120573848 CN 201120573848 U CN201120573848 U CN 201120573848U CN 202478700 U CN202478700 U CN 202478700U
Authority
CN
China
Prior art keywords
blast pipe
filter
cavity volume
housing
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 201120573848
Other languages
Chinese (zh)
Inventor
王振荣
黄利松
黄春杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Xinyang Semiconductor Material Co Ltd
Original Assignee
Shanghai Xinyang Semiconductor Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Xinyang Semiconductor Material Co Ltd filed Critical Shanghai Xinyang Semiconductor Material Co Ltd
Priority to CN 201120573848 priority Critical patent/CN202478700U/en
Application granted granted Critical
Publication of CN202478700U publication Critical patent/CN202478700U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model discloses a filter. The filter is characterized by comprising a casing provided with a containing cavity. The casing is communicated with liquid delivery pipes. A filter element is disposed in the containing cavity. The filter further comprises an exhaust pipe provided with an inlet and an outlet. The inlet is located inside the casing and is communicated with the containing cavity. The outlet is located outside the casing. The filter is capable of conveniently collecting bubbles in plating solution and conveniently discharging the bubbles, and the filter element can be cleaned conveniently. The filter is simple in structure and convenient to use.

Description

Filter
Technical field
The utility model relates to a kind of filter.
Background technology
In the plating piece electroplating process, electroplate liquid is in flow regime.Electroplate liquid in flowing is easy to generate bubble.Exist bubble can influence the quality of plating.Therefore in electroplating process, need to remove bubble to guarantee electroplating quality.In the prior art, do not remove the device of bubble in the electroplate liquid easily.
In the electroplating process, require electroplate liquid purity high.Especially the high field of required precision like semiconductor applications, requires the purity of electroplate liquid very high.Therefore, before electroplating, need carry out filtration treatment to electroplate liquid.Filter needs to clean filter core after using a period of time.But in the prior art, need the dismounting filter core to clean, use inconvenience, clean trouble.
The utility model content
First purpose of the utility model is in order to overcome deficiency of the prior art, to provide a kind of and can remove bubble easily, and the convenient filter that cleans filter core.
For realizing above purpose, the utility model is realized through following technical scheme:
Filter is characterized in that, comprises housing, and said housing is provided with cavity volume, and said housing is communicated with infusion pipeline; Be provided with filter core in the said cavity volume; Also comprise blast pipe, said blast pipe has import and outlet, and said import is positioned at housing and is communicated with cavity volume, and said outlet is positioned at outside the housing.
Preferably, described blast pipe is provided with valve.
Preferably, also comprise secondary blast pipe, said secondary blast pipe is communicated with blast pipe, and said valve is installed on the secondary blast pipe.
Preferably, said valve comprises first valve and second valve, and first valve and second valve all are installed on the secondary blast pipe, and is positioned at the both sides of blast pipe and secondary blast pipe connectivity points.
Preferably, the import of described blast pipe is positioned at the first half of housing content cavity.
Preferably, said woven hose comprises feed tube and drain pipe, and said feed tube and drain pipe all are communicated with the cavity volume of housing.
Preferably, described filter core is arranged at liquid on the glide path before drain pipe is discharged behind the feed tube entering cavity volume.
Preferably, shown housing is provided with exhaust outlet, and institute's exhaust outlet is communicated with cavity volume.
Filter in the utility model both can have been collected bubble, discharge easily in the plating bath easily, and can clean filter core easily.The utility model is simple in structure, and is easy to use.
Description of drawings
Fig. 1 is the utility model structural representation.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is carried out detailed description:
As shown in Figure 1, filter comprises housing 1, and said housing 1 is provided with cavity volume 2.Housing 1 is provided with exhaust outlet 11.Exhaust outlet 11 is communicated with cavity volume 2.Feed tube 6 is communicated with cavity volume 2; Drain pipe 3 also is communicated with cavity volume 2.Be provided with filter core 63 in the cavity volume 2.Filter core 63 is arranged on plating bath and after feed tube 6 gets into cavity volume 2, discharges on the route before from drain pipe 3 from plating bath.Plating bath at first filters through filter core 63 after feed tube 6 gets into cavity volume 2, discharges cavity volume 2 from drain pipe 3 again.Blast pipe 4 has import 41 and outlet 42.Import 41 is positioned at the first half of cavity volume 2.Outlet 42 is positioned at beyond the cavity volume 2.The outlet 42 of blast pipe 4 is communicated with secondary blast pipe 5, and two ends are respectively arranged with first valve 51 and second valve 52 on the secondary blast pipe 5.The both sides of first valve 51 and second valve, 52 apportion blast pipes 4 and secondary blast pipe 5 connectivity points.
During use, plating bath gets in the cavity volume 2 of housing 1 from feed tube 6.In cavity volume 2, plating bath filters through filter core 63, and its bubble that includes diffuses in the cavity volume 2 after rising to the plating bath surface.Plating bath is delivered to the place to use through drain pipe 3 then.Gas in the cavity volume 2 can be discharged through exhaust outlet 11, also can pass through blast pipe 4,5 discharges of secondary blast pipe.First valve 51 and second valve 52 are used to control the Kai Heguan of blast pipe 4 and secondary blast pipe 5.The utility model can also utilize through feed tube 6 and in cavity volume 2, import enough liquid, utilizes fluid pressure that the gas in the cavity volume 2 is discharged from blast pipe 4, secondary blast pipe 5.When cleaning filter core 63,, in cavity volume 2, charge into gas, utilize gas pressure that the cleaning fluids in the cavity volume 2 are discharged from secondary blast pipe 5, blast pipe 4 through the enough cleaning fluids of feed tube 2 inputs.
Embodiment in the utility model only is used for the utility model is described, and does not constitute the restriction to the claim scope, and other substituting of being equal in fact that those skilled in that art can expect are all in the utility model protection domain.

Claims (8)

1. filter is characterized in that, comprises housing, and said housing is provided with cavity volume, and said housing is communicated with infusion pipeline; Be provided with filter core in the said cavity volume; Also comprise blast pipe, said blast pipe has import and outlet, and said import is positioned at housing and is communicated with cavity volume, and said outlet is positioned at outside the housing.
2. filter according to claim 1 is characterized in that described blast pipe is provided with valve.
3. filter according to claim 2 is characterized in that, also comprises secondary blast pipe, and said secondary blast pipe is communicated with blast pipe, and said valve is installed on the secondary blast pipe.
4. filter according to claim 3 is characterized in that, said valve comprises first valve and second valve, and first valve and second valve all are installed on the secondary blast pipe, and is positioned at the both sides of blast pipe and secondary blast pipe connectivity points.
5. filter according to claim 1 is characterized in that the import of described blast pipe is positioned at the first half of housing content cavity.
6. filter according to claim 1 is characterized in that said infusion pipeline comprises feed tube and drain pipe, and said feed tube and drain pipe all are communicated with the cavity volume of housing.
7. filter according to claim 1 is characterized in that, described filter core is arranged at liquid and after feed tube gets into cavity volume, discharges on the glide path before from drain pipe.
8. the filter of stating according to claim 1 is characterized in that, described housing is provided with exhaust outlet, shown in exhaust outlet be communicated with cavity volume.
CN 201120573848 2011-12-31 2011-12-31 Filter Expired - Lifetime CN202478700U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201120573848 CN202478700U (en) 2011-12-31 2011-12-31 Filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201120573848 CN202478700U (en) 2011-12-31 2011-12-31 Filter

Publications (1)

Publication Number Publication Date
CN202478700U true CN202478700U (en) 2012-10-10

Family

ID=46953164

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201120573848 Expired - Lifetime CN202478700U (en) 2011-12-31 2011-12-31 Filter

Country Status (1)

Country Link
CN (1) CN202478700U (en)

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20121010

CX01 Expiry of patent term