CN202478659U - Device for eliminating air bubbles in liquid - Google Patents
Device for eliminating air bubbles in liquid Download PDFInfo
- Publication number
- CN202478659U CN202478659U CN 201120574307 CN201120574307U CN202478659U CN 202478659 U CN202478659 U CN 202478659U CN 201120574307 CN201120574307 CN 201120574307 CN 201120574307 U CN201120574307 U CN 201120574307U CN 202478659 U CN202478659 U CN 202478659U
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- CN
- China
- Prior art keywords
- blast pipe
- bubble
- valve
- cavity volume
- communicated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a device for eliminating air bubbles in liquid. The device is characterized by comprising a shell, the shell is provided with a cavity which is communicated with an infusion pipeline; and further comprising an air exhaust pipe which is provided with an inlet and an outlet, the inlet is located inside the shell and is communicated with the cavity, and the outlet is located outside the cavity. The device for eliminating air bubbles in liquid disclosed by the utility model can collect the air bubbles in the liquid and eliminate the collected air bubbles conveniently, and can prevent the air bubbles from affecting the plating quality.
Description
Technical field
The utility model relates to a kind of device of removing bubble in the liquid.
Background technology
In the plating piece electroplating process, electroplate liquid is in flow regime.Electroplate liquid in flowing is easy to generate bubble.Exist bubble can influence the quality of plating.Therefore in electroplating process, need to remove bubble to guarantee electroplating quality.In the prior art, do not remove the device of bubble in the electroplate liquid easily.
The utility model content
First purpose of the utility model is in order to overcome deficiency of the prior art, and the device of bubble in a kind of removing liquid that can remove bubble easily is provided.
For realizing above purpose, the utility model is realized through following technical scheme:
Remove the device of bubble in the liquid, it is characterized in that comprise housing, said housing is provided with cavity volume, said cavity volume is communicated with infusion pipeline; Also comprise blast pipe, said blast pipe has import and outlet, and said import is positioned at housing and is communicated with cavity volume, and said outlet is positioned at outside the cavity volume.
Preferably, described blast pipe is provided with valve.
Preferably, also comprise secondary blast pipe, said secondary blast pipe is communicated with blast pipe, and said valve is installed on the secondary blast pipe.
Preferably, said valve comprises first valve and second valve, and first valve and second valve all are installed on the secondary blast pipe, and is positioned at the both sides of blast pipe and secondary blast pipe connectivity points.
Preferably, the import of described blast pipe is positioned at the first half of housing content cavity.
Preferably, said woven hose comprises feed tube and drain pipe, and said feed tube and drain pipe all are communicated with the cavity volume of housing.
Preferably, shown housing is provided with exhaust outlet, and institute's exhaust outlet is communicated with cavity volume.
The device of bubble in the removing liquid in the utility model, the bubble that can collect easily in the liquid also can be discharged easily, can prevent the aeration electroplating quality.
Description of drawings
Fig. 1 is the utility model structural representation.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is carried out detailed description:
As shown in Figure 1, the device of bubble comprises housing 1 in the removing liquid, and said housing 1 is provided with cavity volume 2.Housing 1 is provided with exhaust outlet 11.Exhaust outlet 11 is communicated with cavity volume 2.Feed tube 3 is communicated with cavity volume 2; Drain pipe 3 also is communicated with cavity volume 2.Blast pipe 4 has import 41 and outlet 42.Import 41 is positioned at the first half of cavity volume 2.Outlet 42 is positioned at beyond the cavity volume 2.The outlet 42 of blast pipe 4 is communicated with secondary blast pipe 5.Two ends are respectively arranged with first valve 51 and second valve 52 on the secondary blast pipe 5.The both sides of first valve 51 and second valve, 52 apportion blast pipes 4 and secondary blast pipe 5 connectivity points.
During use, plating bath gets in the cavity volume 2 of housing 1 from feed tube 2.Because the sectional area of cavity volume 2 is greater than feed tube 2, plating bath diffuses in the cavity volume after its bubble that includes rises to the plating bath surface after getting in the cavity volume 2.Plating bath is delivered to the place to use through drain pipe 3 then.Gas in the cavity volume 2 can be discharged through exhaust outlet 11, also can pass through blast pipe 4,5 discharges of secondary blast pipe.First valve 51 and second valve 52 are used to control the Kai Heguan of blast pipe 4 and secondary blast pipe 5.
Embodiment in the utility model only is used for the utility model is described, and does not constitute the restriction to the claim scope, and other substituting of being equal in fact that those skilled in that art can expect are all in the utility model protection domain.
Claims (7)
1. the device of bubble in the removing liquid is characterized in that, comprise housing, said housing is provided with cavity volume, and said cavity volume is communicated with infusion pipeline; Also comprise blast pipe, said blast pipe has import and outlet, and said import is positioned at housing and is communicated with cavity volume, and said outlet is positioned at outside the cavity volume.
2. the device of bubble is characterized in that in the removing liquid according to claim 1, and described blast pipe is provided with valve.
3. the device of bubble is characterized in that in the removing liquid according to claim 2, also comprises secondary blast pipe, and said secondary blast pipe is communicated with blast pipe, and said valve is installed on the secondary blast pipe.
4. the device of bubble is characterized in that in the removing liquid according to claim 3, and said valve comprises first valve and second valve, and first valve and second valve all are installed on the secondary blast pipe, and is positioned at the both sides of blast pipe and secondary blast pipe connectivity points.
5. the device of bubble is characterized in that in the removing liquid according to claim 1, and the import of described blast pipe is positioned at the first half of housing content cavity.
6. the device of bubble is characterized in that in the removing liquid according to claim 1, and said woven hose comprises feed tube and drain pipe, and said feed tube and drain pipe all are communicated with the cavity volume of housing.
7. the device of bubble is characterized in that in the removing liquid according to claim 1, and shown housing is provided with exhaust outlet, and institute's exhaust outlet is communicated with cavity volume.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201120574307 CN202478659U (en) | 2011-12-31 | 2011-12-31 | Device for eliminating air bubbles in liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201120574307 CN202478659U (en) | 2011-12-31 | 2011-12-31 | Device for eliminating air bubbles in liquid |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202478659U true CN202478659U (en) | 2012-10-10 |
Family
ID=46953123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201120574307 Expired - Lifetime CN202478659U (en) | 2011-12-31 | 2011-12-31 | Device for eliminating air bubbles in liquid |
Country Status (1)
Country | Link |
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CN (1) | CN202478659U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102912406A (en) * | 2012-11-12 | 2013-02-06 | 上海华力微电子有限公司 | Protecting cover for process cavity |
CN103924282A (en) * | 2013-01-15 | 2014-07-16 | 深南电路有限公司 | Electroplating cylinder |
CN110090471A (en) * | 2018-01-31 | 2019-08-06 | 上海微电子装备(集团)股份有限公司 | A kind of liquid case and liquid circulating apparatus |
-
2011
- 2011-12-31 CN CN 201120574307 patent/CN202478659U/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102912406A (en) * | 2012-11-12 | 2013-02-06 | 上海华力微电子有限公司 | Protecting cover for process cavity |
CN102912406B (en) * | 2012-11-12 | 2015-06-24 | 上海华力微电子有限公司 | Protecting cover for process cavity |
CN103924282A (en) * | 2013-01-15 | 2014-07-16 | 深南电路有限公司 | Electroplating cylinder |
CN110090471A (en) * | 2018-01-31 | 2019-08-06 | 上海微电子装备(集团)股份有限公司 | A kind of liquid case and liquid circulating apparatus |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20121010 |