CN202471910U

CN202471910U - Test stand for posture sensing sensor chip

Info

Publication number: CN202471910U
Application number: CN201220026241XU
Authority: CN
Inventors: 朱玉萍; 徐鹏辉
Original assignee: Jiaxing Jingyan Intelligent Equipment Technology Co Ltd
Current assignee: Jiaxing Jingyan Intelligent Equipment Technology Co Ltd
Priority date: 2012-01-19
Filing date: 2012-01-19
Publication date: 2012-10-03
Anticipated expiration: 2022-01-19

Abstract

The utility model relates to a test stand for a posture sensing sensor chip, and aims to provide the test stand which is simple in structure, fine in universality, low in investment cost and high in test efficiency. The test stand comprises a main stand plane. The main stand plane is equipped with a wafer carrying bench that is used for placing a wafer and can rotate in a circumferential manner. A vacuum sucker is disposed on the wafer carrying bench. A light source and a CCD camera are arranged opposite to the wafer carrying bench. The wafer carrying bench is provided with an X straight shaft, a Y straight shaft and a Z straight shaft corresponding to the light source and a CCD camera, wherein the X straight shaft can move left and right, the Y straight shaft can move up and down and the Z straight shaft can move back and forth. The Z straight shaft is provided with a probe card that is used for testing and can rotate in a circumferential manner. The application of the test stand for a posture sensing sensor chip helps to substantially save the time for testing, allows test costs to be lowered, enables test procedures to be simplified, and enables stability and test efficiency during testing to be improved.

Description

A kind of test board of attitude induction pick-up chip

Technical field

The utility model relates to a kind of testing apparatus of chip, refers in particular to a kind of test board of attitude induction pick-up chip.

Background technology

In recent years along with the develop rapidly of the electrical type consumer goods; Ask strange psychology in order to satisfy youthful various seeking renovation; The various products that have attitude induction pick-up chip put goods on the market in a large number; Not only stimulated the progress of semiconductor design manufacturing industry, simultaneously the packaging and testing technology of chip has also been had higher requirement.

Semiconductor test comprises CP (Circuit Probe) test and FT (Final Test) two stages of test, conventional test methods, and two stages of CP and FT are respectively two kinds of testing apparatuss, testing efficiency is low; The wasting of resources is big, and particularly the FT stage, chip is on the test bench that is placed on respectively separately; Do the exercise test of all directions, make testing apparatus mechanism many and complicated, volume is big; Complicated operation, reliability is relatively poor, and the efficient of test is low.Make manpower like this, big the increasing that have high input of financial resources improved testing cost, reduced envelope and surveyed the benefit of enterprise.

The utility model content

The purpose of this practical utility model provides a kind of test board of simple in structure, versatility good, input cost is low, testing efficiency is high attitude induction pick-up chip.

In order to reach above-mentioned requirements; Technical scheme be: a kind of test board of attitude induction pick-up chip; Include main table top; It is characterized in that year brilliant platform that confession is placed wafer and can done to rotate in a circumferential direction is installed on main table top, on year brilliant platform, be placed with vacuum cup, light source and CCD camera are installed on a year brilliant platform opposite; But carry brilliant platform has move left and right with respect to light source and CCD camera X linear axis and Y linear axis that moves up and down and the Z linear axis that can seesaw, the probe that can circumferentially rotate that installation testing is used on the Z linear axis.

Described Z linear axis is installed on X linear axis and the Y linear axis.

Said year brilliant platform and the setting all perpendicular to the ground of pin card, and can both do independent rotation.

Be connected with below the said main table top that 2 antarafacials intersect can independent rotation A axle and B axle.It is the antarafacial square crossing that the antarafacial of said A axle and B axle intersects.

Test board according to the such scheme design; Require to carry out to carry out electric parameters testing after attitude changes according to attitude; It can be used this test board and can save the time of test greatly the test in CP stage and FT stage simultaneously, reduces testing cost; Simplify test procedure, improve the stability and the testing efficiency of test process.When below main table top, being connected with A axle and B axle, except attitude induction pick-up chip testing, also can carry out the test of three-dimensional attitude induction pick-up chip to two dimension, be applied to as to the test of gyroscope chip etc.

Description of drawings

Fig. 1 is a plurality of chips are formed wafer together with arrayed a front view;

Fig. 2 is the test board schematic perspective view of attitude induction pick-up chip.

Among the figure: 1, chip; 2, wafer; 3, main table top; 4, X linear axis; 5, Y linear axis; 6, Z linear axis; 7, pin card; 8, carry brilliant platform; 9, vacuum cup; 10, light source; 11, CCD camera; 12, CCD mobile camera moving axle; 13, A rotation axis; 14, B rotation axis.

Embodiment

Below in conjunction with accompanying drawing with through embodiment the utility model is explained in detail.

This test board is to require to carry out to carry out electric parameters testing after attitude changes according to attitude, and the state that the core of attitude sensor to be tested is formed wafer 2 by a plurality of chips 1 is as shown in Figure 1, and this test board can be applied to the test in CP stage and FT stage simultaneously.

The test board of this attitude induction pick-up chip is as shown in Figure 2; It includes main table top 3, have above it can about, the X linear axis 4 that moves up and down, Y linear axis 5; The Z linear axis 6 that can seesaw is installed on X linear axis 4, Y linear axis 5; Installation testing is used on the Z linear axis 6 can independent rotation probe 7, also have to supply to place wafer 2 and carry brilliant platform 8 perpendicular to what placed on ground, carry brilliant platform 8 on be placed with the vacuum cup 9 that can do to rotate in a circumferential direction.Be placed with transportable light source 10 and CCD camera 11 carrying brilliant platform 8 opposites, light source 10 is contained on the CCD mobile camera moving axle 12 with CCD camera 11, below whole main table top 3, be provided with 2 antarafacial square crossings can independent rotation A axle 13 and B axle 14.

For the attitude induction pick-up chip that only needs the test two dimension, test board can not be provided with A rotation axis 13 and B rotation axis 14.

Claims

1. the test board of an attitude induction pick-up chip; Include main table top; It is characterized in that year brilliant platform that confession is placed wafer and can done to rotate in a circumferential direction is installed on main table top, on year brilliant platform, be placed with vacuum cup, light source and CCD camera are installed on a year brilliant platform opposite; But carry brilliant platform has move left and right with respect to light source and CCD camera X linear axis and Y linear axis that moves up and down and the Z linear axis that can seesaw, the probe that can circumferentially rotate that installation testing is used on the Z linear axis.

2. the test board of a kind of attitude induction pick-up chip according to claim 1 is characterized in that described Z linear axis is installed on X linear axis and the Y linear axis.

3. the test board of a kind of attitude induction pick-up chip according to claim 1 is characterized in that said year brilliant platform and the setting all perpendicular to the ground of pin card, and can both do independent rotation.

4. the test board of a kind of attitude induction pick-up chip according to claim 1, it is characterized in that below said main table top, being connected with 2 antarafacials intersect can independent rotation A axle and B axle.

5. the test board of a kind of attitude induction pick-up chip according to claim 4 is characterized in that the antarafacial intersection of said A axle and B axle is the antarafacial square crossing.