CN202421210U - 一种微机械加速度传感器 - Google Patents

一种微机械加速度传感器 Download PDF

Info

Publication number
CN202421210U
CN202421210U CN2011205338035U CN201120533803U CN202421210U CN 202421210 U CN202421210 U CN 202421210U CN 2011205338035 U CN2011205338035 U CN 2011205338035U CN 201120533803 U CN201120533803 U CN 201120533803U CN 202421210 U CN202421210 U CN 202421210U
Authority
CN
China
Prior art keywords
acceleration transducer
sensitive
micro
sensitive beam
model
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011205338035U
Other languages
English (en)
Inventor
徐明龙
刘江辽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XI'AN WEIZHENG ELECTRONIC SCIENCE AND TECHNOLOGY Co Ltd
Original Assignee
XI'AN WEIZHENG ELECTRONIC SCIENCE AND TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by XI'AN WEIZHENG ELECTRONIC SCIENCE AND TECHNOLOGY Co Ltd filed Critical XI'AN WEIZHENG ELECTRONIC SCIENCE AND TECHNOLOGY Co Ltd
Priority to CN2011205338035U priority Critical patent/CN202421210U/zh
Application granted granted Critical
Publication of CN202421210U publication Critical patent/CN202421210U/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)

Abstract

一种微机械加速度传感器，包括敏感梁，敏感梁位于主梁正上方，主梁通过过渡区与敏感梁实现连接，敏感梁对称配置在质量块的两端，敏感电阻安置在敏感梁与锚区的相接处，下盖板与质量块连接，本实用新型具有高固有频率。

Description

一种微机械加速度传感器
技术领域
本实用新型属于微电子机械系统领域，具体涉及一种微机械加速度传感器。
背景技术
硅微机械压阻式加速度传感器的加速度大到一定程度后梁上的应力可能使梁断裂，应根据硅的断裂强度来碗定传感器的测量量程。
实用新型内容
为了克服上述现有技术的缺点，本实用新型的目的在于提供一种微机械加速度传感器，具有高固有频率。
为了达到上述目的，本实用新型采取的技术方案为：
一种微机械加速度传感器，包括敏感梁2，敏感梁2位于主梁4正上方，主梁4通过过渡区6与敏感梁2实现连接，敏感梁2对称配置在质量块5的两端，敏感电阻1安置在敏感梁2与锚区3的相接处，下盖板7与质量块5连接。
本实用新型具有高固有频率。
附图说明
附图为本实用新型的结构示意图。
具体实施方式
下面结合附图对本实用新型作详细描述。
一种微机械加速度传感器，包括敏感梁2，敏感梁2位于主梁4正上方，主梁4通过过渡区6与敏感梁2实现连接，敏感梁2对称配置在质量块5的两端，敏感电阻1安置在敏感梁2与锚区3的相接处，下盖板7与质量块5连接。
本实用新型具有高固有频率。

Claims (1)

1.一种微机械加速度传感器，包括敏感梁(2)，其特征在于：敏感梁(2)位于主梁(4)正上方，主梁(4)通过过渡区(6)与敏感梁(2)实现连接，敏感梁(2)对称配置在质量块(5)的两端，敏感电阻(1)安置在敏感梁(2)与锚区(3)的相接处，下盖板(7)与质量块(5)连接。
CN2011205338035U 2011-12-15 2011-12-15 一种微机械加速度传感器 Expired - Fee Related CN202421210U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011205338035U CN202421210U (zh) 2011-12-15 2011-12-15 一种微机械加速度传感器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011205338035U CN202421210U (zh) 2011-12-15 2011-12-15 一种微机械加速度传感器

Publications (1)

Publication Number Publication Date
CN202421210U true CN202421210U (zh) 2012-09-05

Family

ID=46745963

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011205338035U Expired - Fee Related CN202421210U (zh) 2011-12-15 2011-12-15 一种微机械加速度传感器

Country Status (1)

Country Link
CN (1) CN202421210U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102967729A (zh) * 2012-09-18 2013-03-13 华东光电集成器件研究所 一种压阻式mems加速度计
CN112798821A (zh) * 2020-12-28 2021-05-14 武汉大学 一种双轴压电式加速度计

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102967729A (zh) * 2012-09-18 2013-03-13 华东光电集成器件研究所 一种压阻式mems加速度计
CN112798821A (zh) * 2020-12-28 2021-05-14 武汉大学 一种双轴压电式加速度计
CN112798821B (zh) * 2020-12-28 2021-10-08 武汉大学 一种双轴压电式加速度计

Similar Documents

Publication Publication Date Title
EP2679536A3 (en) Anodically bonded strain isolator
CN103543287B (zh) 一种球形风速风向传感器结构
TR201201780T2 (tr) Mikroelektromekanik sistem (MEMS) teknolojisi ile üretilmiş, mikroakışkan-kanal içine gömülebilir, yatay eksende salınan gravimetrik sensör aygıtı.
WO2012037501A3 (en) Flexure bearing to reduce quadrature for resonating micromachined devices
CN103235155B (zh) 一种具有全桥微梁结构的压阻式加速度传感器
EP2518441A3 (en) Calibration of a MEMS gyroscope so as to reduce thermal bias
EP2105707A3 (en) Systems and methods for determining acceleration and rotation by using an out-of-plane mems device
CN103017943A (zh) 双量程式压力传感机构
CN202421210U (zh) 一种微机械加速度传感器
CN102435776A (zh) 单片集成八梁臂三轴加速度计
EP2244081A3 (en) Structural integrity monitoring system
EP2546659A3 (en) Dual output accelerometer system
CN102647657B (zh) 单片集成mems压阻超声传感器
Zhang et al. Design and optimization of stress centralized MEMS vector hydrophone with high sensitivity at low frequency
WO2012039681A8 (en) Vibration detector and method
CN102175305B (zh) 一种单片集成三维矢量振动传感器
CN103954305B (zh) 一种带有柔性杠杆的mems谐振式电荷传感器及其方法
WO2009088567A8 (en) Orientation independent gravity sensor
CN100465088C (zh) 一种“中”字形谐振式硅微机械压力传感器
CN103163326A (zh) 一种高固有频率微机械加速度传感器
CN201993382U (zh) 一种基于磁场检测的风速风向测量装置
Tian et al. A MEMS-based flow sensor with membrane cantilever beam array structure
CN104445056B (zh) 一种用于mems振动疲劳或扭转疲劳的四梁测试结构
CN103604949A (zh) 一种环状压电式微加速度传感器
CN203365461U (zh) 一种单凸梁式微机械加速度传感器

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120905

Termination date: 20121215