CN202414772U - Transmitting device of vacuum device - Google Patents
Transmitting device of vacuum device Download PDFInfo
- Publication number
- CN202414772U CN202414772U CN2012200150429U CN201220015042U CN202414772U CN 202414772 U CN202414772 U CN 202414772U CN 2012200150429 U CN2012200150429 U CN 2012200150429U CN 201220015042 U CN201220015042 U CN 201220015042U CN 202414772 U CN202414772 U CN 202414772U
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- wheel
- conveyer
- load
- chamber
- vacuum
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Abstract
The utility model discloses a transmitting device of a vacuum device, which is arranged on a vacuum cavity and is used for transmitting a base plate, wherein the vacuum cavity comprises a cavity wall which defines a cavity. The transmitting device comprises a transmitting mechanism and a guide mechanism, wherein the transmitting mechanism comprises a plurality of bearing wheels arranged in the cavity, a power unit, and a connecting member connected with the power unit and the bearing wheels; the power unit comprises a drive member penetrating through the cavity wall to extend into the chamber, a power wheel combined on the inner end of the drive member in a linkage manner and positioned in the cavity, and a power source which is connected with and drives the drive member to rotate. Most of members are arranged in the cavity, thus the quantity of penetrated parts of the cavity wall can be reduced, and the member cost for maintaining vacuum degree of the cavity can be reduced.
Description
Technical field
The utility model relates to a kind of conveyer of vacuum apparatus, particularly relates to a kind of conveyer that is used to transmit a substrate.
Background technology
Consult Fig. 1,2; Conveyer 1 for a kind of known vacuum apparatus is installed on the vacuum cavity 21, is used to transmit the carrier 23 that a surface is fixed with several piece substrate 22; Said substrate 22 is transmitted in these vacuum cavity 21 in-to-in processes, can carries out the plated film operation simultaneously.This vacuum cavity 21 defines a chamber 211, and comprises two front and back sidewalls 212 at interval, and a roof 213 that is connected the apical margin of said sidewall 212.
This conveyer 1 comprises that motor (figure does not show) that several separated between left and right connecting gears 11, one be used to drive a connecting gear 11 wherein and rotate, one are used to connect said connecting gear 11 so that the belt 12 that each connecting gear 11 can rotate synchronously, and a guide mechanism 13 that is erected at the top of this carrier 23.
Each connecting gear 11 comprises 111, the couple axles 112 that stretch into this vacuum cavity 21 from this binding wheel 111 through this sidewall 212 of binding wheel that are positioned at the outside of one of them sidewall 212; And the delivery wheel 113 that can be installed in the inner of this couple axle 112 synchronously rotationally, this delivery wheel 113 can supply this carrier 23 to be set up in its top.The binding wheel 111 of each connecting gear 11 sees through this belt 12 and connects; Therefore receive motor driven and when rotating when the binding wheel 111 of a connecting gear 11 wherein; Just can see through the connecting gear 11 that this belt 12 drives other and rotate, and then drive this carrier 23 and advance along a direction of transfer shown in Fig. 1 arrow.
This guide mechanism 13 comprises a rail bar 131 that is installed in the top of this carrier 23; And several are installed on the roof 213 of this vacuum cavity 21 and toward the guide bar 132 that extends below at each interval; Each guide bar 132 has a head 133 in the guide channel that stretches into this rail bar 131 130; See through cooperating of said head 133 and guide channel 130, can prevent that carrier 23 generation in being transferred the process of advancing from rocking, unstable phenomenon.
Though said connecting gear 11 can reach the purpose of carrying this carrier 23; But because each connecting gear 11 all has partial component to be positioned at outside this vacuum cavity 21; And partial component stretches in this vacuum cavity 21; Therefore several positions that on this sidewall 212, supply said connecting gear 11 to be provided with all must install more precision and complicated member (the not shown in the figures meaning out) additional, and are outside and inner with certain isolated chambers; Thereby guarantee the degree of vacuum in the cavity, cause the cost of whole vacuum apparatus to improve thus.And the position of being run through on this sidewall 212 more for a long time, also makes the degree of vacuum in the cavity be difficult for keeping easily.
Summary of the invention
The purpose of the utility model is to provide a kind of can reduce equipment cost, and can keep the conveyer of the vacuum apparatus of the degree of vacuum in the cavity.
The conveyer of the utility model vacuum apparatus; Be installed on the vacuum cavity and be used to transmit a substrate; This vacuum cavity comprises a chamber wall that defines a chamber; The conveyer of this vacuum apparatus comprises: connecting gear, and between top and this chamber wall that is installed in this substrate, and be used to guide the guide mechanism of the shift motion of this substrate.This connecting gear comprises that several are arranged in this chamber and are used to carry the load-supporting wheel of this substrate, a power unit; And connecting piece that connects this power unit and said load-supporting wheel and the rotational power of this power unit sent to said load-supporting wheel; This power unit comprises that a drivening piece, that passes this chamber wall and stretch into this chamber is combined in the inner of this drivening piece linkedly and is arranged in the power wheel of this chamber, and one is positioned at the outside of this vacuum cavity and connects and drive the propulsion source that this drivening piece rotates.
The conveyer of the described vacuum apparatus of the utility model, each load-supporting wheel comprise one and this connecting piece bonded assembly binding wheel portion, and the wheel portion of carrying with a lead ring ditch, and this lead ring ditch supplies the bottom of this substrate to stretch into.
The conveyer of the described vacuum apparatus of the utility model, this connecting gear also comprise at least one and said load-supporting wheel adjustment wheel at interval, the bearing of trend that this adjustment wheel connects this connecting piece and is used to change connecting piece.
The conveyer of the described vacuum apparatus of the utility model, this connecting piece are a chain, and the binding wheel portion of said load-supporting wheel, said adjustment wheel and this power wheel all are sprocket wheels.
The conveyer of the described vacuum apparatus of the utility model, this connecting gear comprise that also supplies the unit that sets up that said load-supporting wheel is rotatably mounted.
The conveyer of the described vacuum apparatus of the utility model; The chamber wall of this vacuum cavity comprises a first side wall portion and one second side wall portion at interval; This drivening piece passes this first side wall portion and stretches into this chamber; This sets up the unit and comprises that one is fixed on the frame plate on this second side wall portion, a riser that extends from this frame plate up, and several are positioned on this riser and the carrying support body that also supplies said load-supporting wheel to install respectively towards this first side wall portion.
The conveyer of the described vacuum apparatus of the utility model; This guide mechanism comprises several guide units at interval; Each guide unit comprises a guide bar that top wall portion court extends below from this chamber wall; And the propelling sheave that is provided with and is installed in rotation on the below of this guide bar about two, said propelling sheave defines the guiding space that a top that supplies this substrate is stretched into jointly.
The conveyer of the described vacuum apparatus of the utility model, this connecting piece are a flute profile belt, and the binding wheel portion of said load-supporting wheel, said adjustment wheel and this power wheel all are belt pulleys.
The beneficial effect of the utility model is: because said load-supporting wheel all is arranged in this chamber; Have only the drivening piece of this power unit need pass this chamber wall and stretch into this chamber; Inside and outside isolated effect of cavity need be considered in the position that therefore this drivening piece only is installed on this chamber wall; So can reduce equipment cost, and help keeping the degree of vacuum of cavity.
Description of drawings
Fig. 1 is a block diagram, shows a kind of conveyer, a carrier and several piece substrate of known genuine null device;
Fig. 2 is a cross-sectional schematic, mainly shows this conveyer, a vacuum cavity, and the relativeness between this carrier;
Fig. 3 is a front elevation, shows that a preferred embodiment of the conveyer of the utility model vacuum apparatus is to be installed on the vacuum cavity two by one group;
Fig. 4 is the block diagram of a part, shows this preferred embodiment and a substrate;
Fig. 5 is a cross-sectional schematic, mainly shows this preferred embodiment, this vacuum cavity, and the relativeness between this substrate.
The specific embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is elaborated.
Consult Fig. 3,4,5; The preferred embodiment of the conveyer 5 of the utility model vacuum apparatus is installed on the vacuum cavity 3, is used to transmit at least one substrate 41; Said substrate 41 is transmitted in the process in this vacuum cavity 3, can carries out the plated film operation simultaneously.This vacuum cavity 3 comprises a chamber wall 31 that defines a chamber 32; A the first side wall portion 311 and one second side wall portion 312 at interval before and after this chamber wall 31 comprises, and a top wall portion 313 that is connected the apical margin of the said the first side wall portion 311 and second side wall portion 312.The vacuum cavity 3 of present embodiment is provided with the conveyer 5 (like Fig. 3) of two the utility model, and said two conveyers 5 can transmit a substrate 41 respectively, as long as but a conveyer 5 is set in practical application just can reaches the transmission purpose.The element that said two conveyers 5 are comprised is all identical, and each conveyer 5 comprises: a connecting gear 6, and a guide mechanism 7.
This connecting gear 6 is positioned at the below of this substrate 41, and is used to carry this substrate 41 and this substrate 41 is carried towards direction of transfer 8.This connecting gear 6 comprise one be fixed on this second side wall portion 312 and be arranged in this chamber 32 set up unit 61, several can be installed in this rotationally around self central axis and set up load-supporting wheel 62 on the unit 61, one and be installed in the power unit 63 in this first side wall portion 311, a connecting piece 64 that connects this power unit 63 and said load-supporting wheel 62, and several are positioned at adjustment wheel 65 of said load-supporting wheel 62 belows.
Wherein, This sets up unit 61 and comprises that one is fixed on the frame plate 611 on this second side wall portion 312, a riser 612 that extends from this frame plate 611 up; Several are positioned on this riser 612 and towards the carrying support body 613 of this first side wall portion 311, and two are positioned on this riser 612 and towards the adjustment support body 614 of this first side wall portion 311.This frame plate 611 is horizontal web of growing to extension along this direction of transfer 8, and this riser 612 is upright plates of growing to extension along this direction of transfer 8.The quantity of said carrying support body 613 cooperates the quantity of said load-supporting wheel 62, and compartment of terrain, the left and right sides is provided with each other, and the carrying support body 613 of present embodiment is outstanding rod member form, but is not limited thereto.The quantity of said adjustment support body 614 cooperates the quantity of said adjustment wheel 65, and the quantity of the adjustment support body 614 of present embodiment is two and separated between left and right each other, and said adjustment support body 614 is outstanding rod member form, but is not limited thereto.
Said load-supporting wheel 62 is installed in rotation on respectively on the said carrying support body 613, each load-supporting wheel 62 comprise one with this riser 612 binding wheel portion 621 at interval, and wheel portion 622 of carrying between this binding wheel portion 621 and this riser 612.The binding wheel portion 621 of present embodiment is the form of sprocket wheel, therefore has several radially outstanding lobes.This carries wheel portion 622 and has a lead ring ditch 623, can supply the bottom of this substrate 41 to stretch into, so the wheel portion 622 of carrying of each load-supporting wheel 62 can work in coordination and carries and transmit this substrate 41.
This power unit 63 comprises that one is passed the first side wall portion 311 of this vacuum cavity 3 and stretches into the drivening piece 631 of this chamber 32, a power wheel 632 that is combined in the inner of this drivening piece 631 linkedly and is arranged in this chamber 32, and one to be positioned at this vacuum cavity 3 outside and be connected the propulsion source 633 of the outer end of this drivening piece 631.This drivening piece 631 is forms of an axostylus axostyle, and can receive this propulsion source 633 and drive and rotate, and then this power wheel 632 of interlock rotates around himself central axis.The power wheel 632 of present embodiment is a sprocket wheel, and this propulsion source 633 is motors.
The connecting piece 64 of present embodiment is a chain, is used for sending the rotational power of this power unit 63 to said load-supporting wheel 62.This connecting piece 64 comprises one and 632 engagements of this power wheel and is the 3rd connected section 643 that second connected section 642 that first connected section 641 of U font, one be engaged on binding wheel portion 621 tops of said load-supporting wheel 62, extend between said load-supporting wheel 62 and one of them adjustment wheel 65 and be engaged on these adjustment wheel 65 tops, and one is connected between this second connected section 642 and the 3rd connected section 643 and is engaged on another and adjusts the 4th connected section 644 of taking turns 65 below.
Said adjustment wheel 65 is installed in rotation on respectively on the said adjustment support body 614; The adjustment wheel 65 of present embodiment is the form of sprocket wheel; Be used to change the bearing of trend of connecting piece 64 and make this connecting piece 64 have a certain size tension force, thereby the rotational power that can transmit this power wheel 632 is given said load-supporting wheel 62.
Need to prove; The utility model is not limited to chain and cooperates with sprocket wheel; For example this connecting piece 64 also can be a belt, the binding wheel portion 621 of said load-supporting wheel 62, said adjustment wheel 65 and 632 common runners that can not have lobe for the surface of this power wheel.Perhaps this connecting piece 64 also can be a flute profile belt, and this moment, said binding wheel portion 621, adjustment wheel 65 and 632 of this power wheels were respectively a belt pulley that can cooperate this flute profile belt.
This guide mechanism 7 is positioned at these substrate 41 tops and is installed in the top wall portion 313 of this vacuum cavity 3, is used to guide the shift motion of this substrate 41, can prevent to produce in the process that substrate 41 is transferred to advance rock, unstable phenomenon.This guide mechanism 7 comprises several guide units 71 at interval; Each guide unit 71 comprises a guide bar 711 that extends below from these top wall portion 313 courts; And the propelling sheave 712 that is provided with and is installed in rotation on the below of this guide bar 711 about two; Self central axis of said two propelling sheaves 712 is vertical extension, and said two propelling sheaves 712 all can be round himself axle center rotational, and defines a guiding space 713 jointly.Because so the improvement emphasis of these guide mechanism 7 non-the utility model is no longer explanation.
When the utility model uses, can under the situation that must not cooperate carrier, directly carry said substrate 41, this substrate 41 is erected on each load-supporting wheel 62, and the top of this substrate 41 stretched in the guiding space 713 of each guide mechanism 7.Behind the propulsion source 633 output rotational powers of this connecting gear 6; But this drivening piece 631 of interlock, this power wheel 632 rotate with this connecting piece 64; Each load-supporting wheel 62 and then driven and rotate, and drive this substrate 41 and advance towards this direction of transfer 8, reach the purpose of conveying substrate 41.
Because in the conveyer 5 of the utility model; Each load-supporting wheel 62 all is directly to be arranged in this chamber 32, has only the drivening piece 631 of this power unit 63 to pass this chamber wall 31 and stretches in this chamber 32, therefore; In the first side wall portion 311 of this chamber wall 31; The position that this drivening piece 631 only is installed need consider and that is to say inside and outside isolated effect of this vacuum cavity 3 to have only this position to guarantee the degree of vacuum in the cavity with accurate, complicated member; Have for several positions will consider that vacuum insulating handles with respect to equipment in the past, the utility model can reduce equipment cost really.And the position of being run through on this chamber wall 31 of the utility model minimizing, help to keep the good degree of vacuum in the cavity.
Claims (8)
1. the conveyer of a vacuum apparatus; Be installed on the vacuum cavity and be used to transmit a substrate; This vacuum cavity comprises a chamber wall that defines a chamber; The conveyer of this vacuum apparatus comprises: connecting gear, and between top and this chamber wall that is installed in this substrate, and be used to guide the guide mechanism of the shift motion of this substrate; It is characterized in that: this connecting gear comprises that several are arranged in this chamber and are used to carry the load-supporting wheel of this substrate, a power unit; And connecting piece that connects this power unit and said load-supporting wheel and the rotational power of this power unit sent to said load-supporting wheel; This power unit comprises that a drivening piece, that passes this chamber wall and stretch into this chamber is combined in the inner of this drivening piece linkedly and is arranged in the power wheel of this chamber, and one is positioned at the outside of this vacuum cavity and connects and drive the propulsion source that this drivening piece rotates.
2. the conveyer of vacuum apparatus according to claim 1 is characterized in that: each load-supporting wheel comprises that one links wheel portion with this connecting piece bonded assembly, and the wheel portion of carrying with a lead ring ditch, and this lead ring ditch supplies the bottom of this substrate to stretch into.
3. the conveyer of vacuum apparatus according to claim 2 is characterized in that: this connecting gear also comprises at least one and said load-supporting wheel adjustment wheel at interval, and this adjustment wheel this connecting piece of connection also is used to change the bearing of trend of connecting piece.
4. the conveyer of vacuum apparatus according to claim 3, it is characterized in that: this connecting piece is a chain, the binding wheel portion of said load-supporting wheel, said adjustment wheel and this power wheel all are sprocket wheels.
5. the conveyer of vacuum apparatus according to claim 1 and 2 is characterized in that: this connecting gear comprises that also supplies the unit that sets up that said load-supporting wheel is rotatably mounted.
6. the conveyer of vacuum apparatus according to claim 5; It is characterized in that: the chamber wall of this vacuum cavity comprises a first side wall portion and one second side wall portion at interval; This drivening piece passes this first side wall portion and stretches into this chamber; This sets up the unit and comprises that one is fixed on the frame plate on this second side wall portion, a riser that extends from this frame plate up, and several are positioned on this riser and the carrying support body that also supplies said load-supporting wheel to install respectively towards this first side wall portion.
7. the conveyer of vacuum apparatus according to claim 1; It is characterized in that: this guide mechanism comprises several guide units at interval; Each guide unit comprises a guide bar that top wall portion court extends below from this chamber wall; And the propelling sheave that is provided with and is installed in rotation on the below of this guide bar about two, said propelling sheave defines the guiding space that a top that supplies this substrate is stretched into jointly.
8. the conveyer of vacuum apparatus according to claim 3, it is characterized in that: this connecting piece is a flute profile belt, the binding wheel portion of said load-supporting wheel, said adjustment wheel and this power wheel all are belt pulleys.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200150429U CN202414772U (en) | 2012-01-13 | 2012-01-13 | Transmitting device of vacuum device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200150429U CN202414772U (en) | 2012-01-13 | 2012-01-13 | Transmitting device of vacuum device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202414772U true CN202414772U (en) | 2012-09-05 |
Family
ID=46739557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200150429U Expired - Fee Related CN202414772U (en) | 2012-01-13 | 2012-01-13 | Transmitting device of vacuum device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202414772U (en) |
-
2012
- 2012-01-13 CN CN2012200150429U patent/CN202414772U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120905 Termination date: 20150113 |
|
| EXPY | Termination of patent right or utility model |