CN202388851U - Solar selective absorption coating - Google Patents
Solar selective absorption coating Download PDFInfo
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- CN202388851U CN202388851U CN 201120527422 CN201120527422U CN202388851U CN 202388851 U CN202388851 U CN 202388851U CN 201120527422 CN201120527422 CN 201120527422 CN 201120527422 U CN201120527422 U CN 201120527422U CN 202388851 U CN202388851 U CN 202388851U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
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Abstract
The utility model discloses a solar selective absorption coating, which comprises an infrared reflecting layer, a composite absorption layer and an anti-reflection layer, and is characterized in that the composite absorption layer is composed of an SS-N-Al(H) thin film high-absorption sub-layer, an SS-N-Al(M) thin film medium-absorption sub-layer and an SS-N-Al(L) thin film low-absorption sub-layer, which are sequentially arranged along the direction away from a glass substrate according to the decreasing sequence of the contents of metal components. When the coating is prepared, the process is easy to adjust and control, and the production cost is low; and the coating is stable in performances, such as good baking resistance, is preferentially suitable for working in vacuum at medium temperature, has the solar absorption ratio alpha being not smaller than 0.92 and the half-sphere emission ratio epsilon being not smaller than 0.060 (80 DEG C), and can be applied to absorption coatings of all-glass vacuum heat collecting pipes or selective absorption coatings of other vacuum systems.
Description
Technical field
The utility model relates to a kind of coating for selective absorption, especially solar selectively absorbing coating.
Background technology
Selectively absorbing layers is the Core Feature part that is used to absorb luminous energy in the light absorption system, is generally used in solar collection element or the solar selectively absorbing coating system.In the solar selectively absorbing coating, mostly comprise infrared reflecting layer, absorbed layer, anti-reflection layer, wherein absorbed layer plays crucial effects to the performance of whole coating.The cost that existing absorbed layer has is low but only be applicable to the cryogenic vacuum environment, though have can be applicable in temperature even high-temperature vacuum environment cost height and preparation method's complicacy wayward.
The utility model content
In order to overcome the shortcoming that above-mentioned prior art exists, the purpose of the utility model is to provide a kind of solar selectively absorbing coating, in the absorbed layer of this kind coating in the warm vacuum environment serviceability good, and preparation technology controls easily, production cost is low.
For realizing above-mentioned purpose; The utility model adopts following technical scheme: a kind of solar selectively absorbing coating; Comprise infrared reflecting layer, composite absorbent layer, anti-reflection layer, said composite absorbent layer by along away from the direction of glass baseplate and according to metal ingredient content order from high to low be arranged in order SS-N-Al (H) film of setting high absorb absorb subgrade in subgrade, SS-N-Al (M) film, the low subgrade that absorbs of SS-N-Al (L) film is formed.
Further technical scheme as the utility model:
In this solar selectively absorbing coating, the gross thickness of said composite absorbent layer is 60～140nm.
Further: said composite absorbent layer thickness is 110nm.
The beneficial effect of the utility model is: technology was easy to regulation and control when this solar selectively absorbing coating prepared; Production cost is not high; The stable for example anti-baking property of coating performance is good etc., preferably is applicable to temperature work in a vacuum, and by solar absorptance α>=0.92 of this solar selectively absorbed layer; The hemisphere emission is than ε≤0.060 (80 ℃), and this solar selectively absorbing coating can be applicable to all-glass vacuum thermal-collecting tube absorber coatings or other vacuum system coating for selective absorption.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is done further explanation:
Fig. 1 is the structural representation of the utility model embodiment;
Among the figure: 1 glass baseplate, 2 tack coats, 3 infrared reflecting layers, 4 composite absorbent layers, the 41 high subgrades that absorb absorb subgrade, 43 low subgrades, 5 anti-reflection layers of absorbing in 42.
The specific embodiment
As shown in Figure 1, this solar selectively absorbing coating comprises the tack coat 2, infrared emission layer 3, composite absorbent layer 4, the anti-reflection layer 5 that set gradually along the direction away from glass baseplate 1.
Said tack coat 2 is aluminium film (Al film) or aluminium nitride film (AlN film) or mixes the mixture film of forming (Al+AlN film) by aluminium, aluminium nitride.
Said infrared reflecting layer 3 is the copper film.
Said composite absorbent layer 4 is the mixture film that in ar gas environment, is formed with the nitrogen reactive sputtering by stainless steel target, aluminium target, is the SS-N-Al film.Composite absorbent layer (SS-N-Al film) is by along away from the direction of glass baseplate and absorb subgrade 41, middle absorption subgrade 42, the low subgrade 43 that absorbs according to the height that metal ingredient content order from high to low sets gradually and form.The high subgrade 41 that absorbs is expressed as SS-N-Al (H), and wherein H is the head letter of " height " English alphabet high.In absorb subgrade 42 and be expressed as SS-N-Al (M), wherein M be " in " head of English alphabet medium is alphabetical.The low subgrade 43 that absorbs is expressed as SS-N-Al (L), and wherein L is the head letter of " low " English alphabet low.SS-N-Al (H), SS-N-Al (M), SS-N-Al (L) are existing regular-expression commonly used in this area.
The gross thickness of said composite absorbent layer 4 is 60～140nm.
Said anti-reflection layer 5 is aluminium nitride film (an AlN film).
The preparation method of this solar selectively absorbing coating may further comprise the steps:
A) in the vacuum chamber of magnetron sputtering coater, pipe in the vacuum tube to be coated is contained in the step on the vacuum tube movements and postures of actors;
B) when described vacuum chamber is evacuated to base vacuum, pour argon gas and reach operating pressure, start the aluminium target, keep the aluminium target current constant, pour the step of nitrogen;
C) step of deposition tack coat: stop to pour the direct aluminium target of nitrogen and sputter at deposition formation aluminium film on the glass baseplate; Perhaps continue to pour nitrogen, aluminium target and nitrogen reactive sputtering deposit on glass baseplate and form aluminium nitride film or mixed the mixture film of forming by aluminium, aluminium nitride; Said aluminium film or aluminium nitride film or mix the mixture film of forming by aluminium, aluminium nitride and be tack coat, and to make adhesive layer thickness be 5～20nm;
D) step of deposition infrared emission layer: stop the sputter of aluminium target, stop nitrogen injection; Direct current sputter copper target, the deposited copper film is the infrared emission layer;
E) step of deposition composite absorbent layer comprises step by step:
(e1) deposition is high absorbs subgrade step by step: stopping the sputter of copper target, pour nitrogen, is negative electrode with aluminium target and stainless steel target, and maintenance aluminium target sputtering current is constant and give aluminium target first sputtering voltage, gives stainless steel target first sputtering current; Aluminium target and the sputter in nitrogen atmosphere of stainless steel target while form the high subgrade that absorbs;
(e2) absorb subgrade step by step in the deposition: the said sputtering current of maintenance aluminium target is constant and give aluminium target second sputtering voltage, and second sputtering voltage is less than described first sputtering voltage; Give stainless steel target second sputtering current, second sputtering current is less than described first sputtering current; Aluminium target and stainless steel target absorb subgrade during sputter forms in nitrogen atmosphere simultaneously;
(e3) deposition is low absorbs subgrade step by step: the said sputtering current of maintenance aluminium target is constant and give aluminium target the 3rd sputtering voltage, and the 3rd sputtering voltage is less than described second sputtering voltage; Give stainless steel target the 3rd sputtering current, the 3rd sputtering current is less than described second sputtering current; Aluminium target and the sputter in nitrogen atmosphere of stainless steel target while form the low subgrade that absorbs;
The mixture film that forms 60～140nm through above-mentioned (e1) step by step, (e2), (e3) sputtering sedimentation is the composite absorbent layer.Above-mentioned (e1) step by step, (e2), (e3) realize three adjustment that absorb the tenor of subgrades through adjusting the sputtering current of aluminium target sputtering voltage, stainless steel target; Make the low metal ingredient content that absorbs in the subgrade be less than the middle metal ingredient content that absorbs in the subgrade; The middle metal ingredient content that absorbs in the subgrade is less than the high content that absorbs the metal ingredient in the subgrade; Be that the composite absorbent layer reduces along the direction metal ingredient content away from glass baseplate;
F) deposition anti-reflection layer: stopping the sputter of stainless steel target, continue to pour nitrogen, is negative electrode with the aluminium target, and sputtering sedimentation thickness is that the aluminium nitride film of 60～180nm is anti-reflection layer.
In the preparation method of above-mentioned solar selectively absorbing coating; In the step e); Sputter is high when the sputtering current of stainless steel target absorbs subgrade with sputter is low when absorbing subgrade, and the sputtering current ratio of stainless steel target be (1.67～2.25): 1, and the sputtering current of stainless steel target and the sputtering current of stainless steel target when hanging down the absorption subgrade when sputtering current of stainless steel target absorbs subgrade less than sputter is high when absorbing subgrade in the sputter greater than sputter.
The solar selectively absorbing coating of the utility model, preferred composite absorbent layer thickness is 110nm, the preparation method of corresponding above-mentioned preferred solar selectively absorbing coating is following:
In the step e), during deposition composite absorbent layer, pour nitrogen and keep operating pressure 0.40Pa;
In (e1), the said sputtering current of aluminium target is 40A step by step, and said first sputtering voltage is 310V; Said first sputtering current of stainless steel target is 26A; Sputtering time is 5 minutes;
In (e2), the said sputtering current of aluminium target is 40A step by step, and said second sputtering voltage is 308V; Said second sputtering current of stainless steel target is 13A; Sputtering time is 6 minutes;
In (e3), the said sputtering current of aluminium target is 40A step by step, and said the 3rd sputtering voltage is 305V; Said the 3rd sputtering current of stainless steel target is 10A; Sputtering time is 3 minutes.
Among the preparation method of above-mentioned solar selectively absorbing coating; Described step c), e), f) in; During the sputter of aluminium target, all flow-compensated because of the influence of aluminium target voltage fluctuation to the film of sputter formation through the injection of regulating nitrogen, have the film of particular optical constant with preparation.
It is the stainless steel of 1Cr18Ni9Ti, 0Cr17Ni12Mo2, B445J1M that stainless steel target in the above-mentioned sputtering target, target can adopt the trade mark, preferred 1Cr18Ni9Ti and B445J1M.
Its composition of 1Cr18Ni9Ti such as following table 1:
B445J1M composition such as following table 2:
Claims (3)
1. solar selectively absorbing coating; Comprise infrared reflecting layer, composite absorbent layer, anti-reflection layer, it is characterized in that: said composite absorbent layer by along away from the direction of glass baseplate and according to metal ingredient content order from high to low be arranged in order SS-N-Al (H) film of setting high absorb absorb subgrade in subgrade, SS-N-Al (M) film, the low subgrade that absorbs of SS-N-Al (L) film is formed.
2. a kind of solar selectively absorbing coating according to claim 1 is characterized in that: the gross thickness of said composite absorbent layer is 60～140nm.
3. a kind of solar selectively absorbing coating according to claim 2 is characterized in that: said composite absorbent layer thickness is 110nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120527422 CN202388851U (en) | 2011-12-16 | 2011-12-16 | Solar selective absorption coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120527422 CN202388851U (en) | 2011-12-16 | 2011-12-16 | Solar selective absorption coating |
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| CN202388851U true CN202388851U (en) | 2012-08-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201120527422 Expired - Lifetime CN202388851U (en) | 2011-12-16 | 2011-12-16 | Solar selective absorption coating |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091377A (en) * | 2015-09-01 | 2015-11-25 | 中国建筑材料科学研究总院 | Solar selective absorbing coating and preparation method thereof |
| CN105299935A (en) * | 2015-04-03 | 2016-02-03 | 中国建筑材料科学研究总院 | Solar spectrum selective absorbing coating layer and preparation method thereof and heat collector |
| US10586879B2 (en) | 2015-04-03 | 2020-03-10 | China Building Materials Academy | Spectrally selective solar absorbing coating and a method for making it |
-
2011
- 2011-12-16 CN CN 201120527422 patent/CN202388851U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105299935A (en) * | 2015-04-03 | 2016-02-03 | 中国建筑材料科学研究总院 | Solar spectrum selective absorbing coating layer and preparation method thereof and heat collector |
| CN105299935B (en) * | 2015-04-03 | 2017-07-07 | 中国建筑材料科学研究总院 | A kind of coating for selective absorption of sunlight spectrum and preparation method thereof and heat collector |
| US10586879B2 (en) | 2015-04-03 | 2020-03-10 | China Building Materials Academy | Spectrally selective solar absorbing coating and a method for making it |
| CN105091377A (en) * | 2015-09-01 | 2015-11-25 | 中国建筑材料科学研究总院 | Solar selective absorbing coating and preparation method thereof |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Jiangsu Sangle Digital Solar Energy Co.,Ltd. Assignor: Shangdong Sangle Solar Energy Co., Ltd. Contract record no.: 2013370000022 Denomination of utility model: Solar selective absorbing coating and preparation method thereof Granted publication date: 20120822 License type: Exclusive License Record date: 20130205 |
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| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120822 |
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| CX01 | Expiry of patent term |