CN202377887U - Edge polishing device for photomask plate - Google Patents
Edge polishing device for photomask plate Download PDFInfo
- Publication number
- CN202377887U CN202377887U CN2011203754303U CN201120375430U CN202377887U CN 202377887 U CN202377887 U CN 202377887U CN 2011203754303 U CN2011203754303 U CN 2011203754303U CN 201120375430 U CN201120375430 U CN 201120375430U CN 202377887 U CN202377887 U CN 202377887U
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- CN
- China
- Prior art keywords
- pattern
- frame
- explorator
- slide plate
- slide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to an edge polishing device for a photomask plate. The edge polishing device comprises a motor, an engine base, a frame, an abrasive wheel, an explorator mechanism and a supporting structure, wherein the frame is fixed on the engine base; the exploratory mechanism is located at one side of the frame; the motor and the abrasive wheel are fixed on the supporting structure at the other side of the frame; the abrasive wheel is arranged under the motor; the explorator mechanism comprises an explorator, an explorator slide plate and an explorator slide rail; the explorator slide rail is arranged at one side of the frame; the explorator slide plate is horizontally arranged on the explorator slide rail in a sliding manner, and the explorator is arranged on the explorator slide plate. The edge polishing device disclosed by the utility model has the advantages of being simple in structure, low in device cost and the like as compared with the prior art.
Description
Technical field
The utility model relates to a kind of throwing limit device, especially relates to a kind of throwing edge equipment that is used for photomask blank.
Background technology
Photomask blank is the substrate of semicon industry chip photoetching.And the substrate of photomask blank was originally produced by Japan's monopolization, and its processing request is very accurate, except flatness, the depth of parallelism, any surface finish of glass substrate are outside one's consideration; Bevelling polishing to profile requires difficulty height especially; Labour intensity is big, and production capacity is very low, has hindered the processing of glass substrate.
The utility model content
The purpose of the utility model is exactly that a kind of simple in structure, throwing edge equipment that is used for photomask blank that equipment cost is low is provided in order to overcome the defective that above-mentioned prior art exists.
The purpose of the utility model can realize through following technical scheme:
A kind of throwing edge equipment that is used for photomask blank; It is characterized in that; Comprise motor, support, frame, emery wheel, pattern mechanism and supporting construction, described frame is fixed on the support, and described pattern mechanism is positioned at a side of frame; Described motor and emery wheel are fixed on the supporting construction of frame opposite side, described emery wheel be located at motor under.
Described pattern mechanism comprises pattern, pattern slide plate, pattern slide rail, and described pattern slide rail is installed on a side of frame, and described pattern slide plate slidably level is installed on the pattern slide rail, and described pattern is installed on the pattern slide plate.
Described pattern is 90 ° of patterns.
Described supporting construction comprises slide plate and slide rail, and described slide plate is connected with the slide rail horizontal slip, and described motor and emery wheel are installed on the slide plate.
Compared with prior art, the utility model is realized the processing to product through the mode of pattern, and simple in structure, equipment cost is low, and is simple to operate, and processing precision of products is high.
Description of drawings
Fig. 1 is the structural representation of the utility model.
The specific embodiment
Below in conjunction with accompanying drawing and specific embodiment the utility model is elaborated.
As shown in Figure 1, a kind of throwing edge equipment that is used for photomask blank comprises support 1, frame 2, motor 3, emery wheel 4, pattern mechanism 5 and supporting construction 6.Frame 2 is fixed on the support 1; Pattern mechanism 5 is positioned at a side of frame 2, comprises pattern 7, pattern slide plate 8, pattern slide rail 9, and pattern slide rail 9, pattern slide plate 8 slidably level are installed on the pattern slide rail 9, and pattern 7 is 90 ° of patterns, is installed on the pattern slide plate 8; Supporting construction 6 is positioned at the opposite side of frame 2, comprises slide plate 10 and slide rail 11, and slide plate 10 is connected with slide rail 11 horizontal slips, and motor 3 is installed on the slide plate 10 with emery wheel 4, and described emery wheel 4 is under motor 3.
Claims (4)
1. throwing edge equipment that is used for photomask blank; It is characterized in that; Comprise motor, support, frame, emery wheel, pattern mechanism and supporting construction, described frame is fixed on the support, and described pattern mechanism is positioned at a side of frame; Described motor and emery wheel are fixed on the supporting construction of frame opposite side, described emery wheel be located at motor under.
2. a kind of throwing edge equipment that is used for photomask blank according to claim 1; It is characterized in that; Described pattern mechanism comprises pattern, pattern slide plate, pattern slide rail; Described pattern slide rail is installed on a side of frame, and described pattern slide plate slidably level is installed on the pattern slide rail, and described pattern is installed on the pattern slide plate.
3. a kind of throwing edge equipment that is used for photomask blank according to claim 2 is characterized in that described pattern is 90 ° of patterns.
4. a kind of throwing edge equipment that is used for photomask blank according to claim 1 is characterized in that described supporting construction comprises slide plate and slide rail, and described slide plate is connected with the slide rail horizontal slip, and described motor and emery wheel are installed on the slide plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203754303U CN202377887U (en) | 2011-09-28 | 2011-09-28 | Edge polishing device for photomask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203754303U CN202377887U (en) | 2011-09-28 | 2011-09-28 | Edge polishing device for photomask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202377887U true CN202377887U (en) | 2012-08-15 |
Family
ID=46626406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203754303U Expired - Fee Related CN202377887U (en) | 2011-09-28 | 2011-09-28 | Edge polishing device for photomask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202377887U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103009205A (en) * | 2011-09-28 | 2013-04-03 | 上海双明光学科技有限公司 | Photo-mask plate side polishing device |
-
2011
- 2011-09-28 CN CN2011203754303U patent/CN202377887U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103009205A (en) * | 2011-09-28 | 2013-04-03 | 上海双明光学科技有限公司 | Photo-mask plate side polishing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120815 Termination date: 20130928 |