CN202369680U - Device for withdrawing long monocrystalline silicon stick - Google Patents
Device for withdrawing long monocrystalline silicon stick Download PDFInfo
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- CN202369680U CN202369680U CN2011205344322U CN201120534432U CN202369680U CN 202369680 U CN202369680 U CN 202369680U CN 2011205344322 U CN2011205344322 U CN 2011205344322U CN 201120534432 U CN201120534432 U CN 201120534432U CN 202369680 U CN202369680 U CN 202369680U
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Abstract
The utility model discloses a device for withdrawing a long monocrystalline silicon stick. The device is used for a silicon single crystal furnace. The device comprises an electric push rod, an electric push rod connecting block, a jacking shaft, a furnace cover lifting shaft, a furnace cover lifting connecting piece, an auxiliary chamber lifting shaft and an auxiliary chamber lifting connecting piece which are sequentially arranged from bottom to top, wherein the jacking shaft runs through the furnace cover lifting shaft, and two ends of the jacking shaft extend out of two ends of the furnace cover lifting shaft respectively; the jacking shaft can move up and down in the furnace cover lifting shaft; the upper end of the jacking shaft is connected with the lower end of the auxiliary chamber lifting shaft; the lower end of the jacking shaft is connected with the electric push rod connecting block; and a detachable retaining component is arranged on the jacking shaft between the bottom of the furnace cover lifting shaft and the electric push rod connecting block. By the device, long monocrystalline silicon sticks are stably, safely, conveniently and reliably withdrawn; and meanwhile, the device for withdrawing the long monocrystalline silicon stick meets the requirements of withdrawing monocrystalline silicon sticks with different lengths and switching quickly and conveniently.
Description
Technical field
The utility model relates to the production field of long silicon single crystal rod in a kind of semicon industry, relates in particular to a kind of withdrawing device of long silicon single crystal rod.
Background technology
Along with the use of monocrystal stove secondary batching equipment and technology, the once producible silicon single crystal bar length of monocrystal stove is significantly improved.The type of furnace of large size single crystal silicon rod production simultaneously is that advantage is carrying out can once producing the longer silicon single crystal rod of acquisition when the small size single crystal rod is produced with its big charging capacity.For example 8 inches silicon single crystal rod production of diameter type of furnace 120Kg that once can feed intake carries out can obtaining silicon single crystal rod length when 6 inches silicon single crystal rods of diameter are produced with identical charging capacity and rises appreciably.The same type of furnace repeatedly feeds intake and the production demand of big type of furnace small dia silicon single crystal rod in order to adapt to, and on long single crystal rod withdrawing device, has proposed the adjustment requirement.
As shown in Figure 1, be the structural representation of existing monocrystal stove.Existing monocrystal stove mainly comprises main chamber 101, bell 102, flap valve 103 and the concubine 104 that sets gradually from the bottom to top; In said main chamber 101, a side of bell 102, flap valve 103 and concubine 104 is connected with lifting mechanism 200; Be used to promote bell 102, flap valve 103 and concubine 104, so that single crystal rod is taken out.Like Fig. 2, shown in Figure 3; Existing monocrystal stove adopts concubine, bell interlock lifting mechanism 200 mostly, and this lifting mechanism 200 comprises that the electric pushrod 201, electric pushrod contiguous block 202, jacking axle 203, bell lift shaft 204, the bell that set gradually from the bottom to top promote web member 205, concubine lift shaft 206 and concubine and promote web member 207; Wherein, jacking axle 203 runs through bell lift shaft 204, and the lower ends of the upper end of jacking axle 203 and concubine lift shaft 205 connects, and makes jacking axle 203 under thrust on the electric pushrod 201, pushing tow concubine lift shaft 205 upwards, and then make and carry on the concubine 104; When on concubine 104, carrying a segment distance, electric pushrod contiguous block 202 contacts with bell lift shaft 204, and electric pushrod 201 continues to apply thrust, drives bell 102 and promotes with concubine 104, rotates to specify again and gets excellent position, takes out single crystal rod then.
This shows; In the prior art; Concubine 104 is promoted by promotion in the same propulsion source one-way trip with bell 102, and promptly propulsion source elder generation promotion concubine 104 promotes, and propulsion source triggers bell 102 after concubine 104 rises to certain altitude; Drive bell 102 again and promote, and then get excellent operation with concubine 104.
Yet, in the lifting process that concubine 104 promotes, certain deflection can take place, and bell 102 was fixed this moment, so can't realizes synchronous rotation between concubine 104 and the bell 102, cause both positions to have certain deviation, can influence the taking-up of single crystal rod.When long silicon single crystal rod below concubine 104, spill length surpass between concubine 104 and the flap valve 103 apart from the time, more can't long silicon single crystal rod taking-up be had a strong impact on ordinary production.
In order to satisfy the taking-up needs of long single crystal rod; Existing a kind of removing method is that hand steered together bell 102 of a plurality of at the scene operator's cooperations and concubine 104 make the two rotate to appointment synchronously and get excellent position; Take out single crystal rod from below, bell 102 bottoms then; So not only waste time and energy, and the hand steered maintenance concubine 104 of operator is relatively poor with the safety of bell 102 rotation synchronously, causes easily bumping because of rotating asynchronous flap valve 103 and the silicon single crystal rod of making; Cause the potentially dangerous that silicon single crystal rod shakes and, also constitute certain potential safety hazard for the personnel that under silicon single crystal rod, operate simultaneously.
Existing another kind of removing method is, and is as shown in Figure 4, and riser 208 is installed on flap valve 103; After concubine 104 rises certain altitude earlier; Riser 208 can limit the rotation of concubine 104 relative flap valves 103, treat that bell 102 rises certain altitudes after, concubine 104, bell 102, flap valve 103 are rotated together; Make it rotate to appointment and get excellent position, take out single crystal rod then.Though add the structure of riser 208 on the available technology adopting flap valve 103, can realize concubine 104 and the synchronous rotation of bell 102 and the security of raising operation to a certain extent, can't realize the reliable synchronization rotation of concubine 104 and bell 102; Be easy to generate rocking of 102 of concubine 104 and flap valve 103, bells; And each manipulation require is wasted time and energy the increase working strength according to the length installation or the dismounting riser 208 of institute's produce single crystal silicon rod; Concubine cooperates with the accurate of flap valve when closing stove for guarantee simultaneously; All need pull down riser 208, the installation and the dismounting of riser 208 have certain altitude at every turn, and operation is implemented in inconvenience.
In addition; No matter be repeatedly to feed intake to produce or the big type of furnace is carried out the production of small dia silicon single crystal rod; The production of long silicon single crystal rod has certain yield rate; Except needs are considered stablizing, safely, reliably taking out of long silicon single crystal rod, also need consider the switching of removing method when long silicon single crystal rod and conventional length silicon single crystal rod production change in the actually operating.
Therefore how can guarantee stable, the safe and reliable taking-up of long silicon single crystal rod, and switch easily to long silicon single crystal rod and conventional length silicon single crystal rod production variation and to have become industry and need improved target badly.
Because the problem that long silicon single crystal rod takes out; The utility model people is based on being engaged in Machine Design manufacturing rich experiences and strong excessively expertise for many years; Application in conjunction with monocrystal stove is actual, actively studies innovation, in the hope of overcome the shortcoming of prior art in structure aspects; Provide a kind of and realize that long silicon single crystal rod is firm, safe ready, take out reliably, satisfy simultaneously that the different lengths silicon single crystal rod takes out and the withdrawing device that carries out the long silicon single crystal rod of quick and easy handoff requirement.
Prior art:
The 101-main chamber; The 102-bell; The 103-flap valve; The 104-concubine; The 200-lifting mechanism; The 201-electric pushrod; 202-electric pushrod contiguous block; 203-jacking axle; 204-bell lift shaft; The 205-bell promotes web member; 206-concubine lift shaft; The 207-concubine promotes web member; The 208-riser.
The utility model:
The 1-electric pushrod; 2-electric pushrod contiguous block; 3-jacking axle; 4-bell lift shaft; The 5-bell promotes web member; 6-concubine lift shaft; The 7-concubine promotes web member; The 8-backstopping assembly; The 81-locating sleeve; The 82-swivel nut; The 83-spacer; 84,85-half spacer; The 86-bolt; 87,88-half spacer; The 89-loose-leaf; The 9-clip; The 10-flap valve; 11 first backplates; 12-second backplate; The 13-conical surface.
The utility model content
The purpose of the utility model provides a kind ofly can realize that long silicon single crystal rod is firm, safe ready, take out reliably, satisfies simultaneously that the different lengths silicon single crystal rod takes out and the withdrawing device that carries out the long silicon single crystal rod of quick and easy handoff requirement.
For achieving the above object; The utility model proposes a kind of withdrawing device of long silicon single crystal rod; Be used for monocrystal stove; Comprise that the electric pushrod, electric pushrod contiguous block, jacking axle, bell lift shaft, the bell that set gradually from the bottom to top promote web member, concubine lift shaft and concubine and promote web member; The end of said bell lift shaft is extended at the two ends that said jacking axle runs through said bell lift shaft and said jacking axle respectively, and said jacking axle can move up and down in said bell lift shaft, and the lower ends of the upper end of said jacking axle and said concubine lift shaft connects; The lower end of said jacking axle is connected with said electric pushrod contiguous block, on the said jacking axle between said bell lift shaft bottom and the said electric pushrod contiguous block, is provided with removable backstopping assembly.
The withdrawing device of aforesaid long silicon single crystal rod, wherein, said backstopping assembly comprises: locating sleeve is sleeved on said electric pushrod contiguous block and said jacking axle bottom; Swivel nut is sleeved on the top of said locating sleeve, and the inwall of said swivel nut is connected with the outer wall thread of said locating sleeve; Spacer, removable slip cap are located on the said jacking axle, and are positioned at said swivel nut top, and said spacer can be resisted against the bottom of said bell lift shaft.
The withdrawing device of aforesaid long silicon single crystal rod wherein, before proposing motion on the said jacking axle, has predetermined gap between the bottom face of the upper surface of said spacer and said bell lift shaft.
The withdrawing device of aforesaid long silicon single crystal rod, wherein, this predetermined gap is 5mm～10mm.
The withdrawing device of aforesaid long silicon single crystal rod, wherein, said spacer is formed by the butt joint of two halves spacer, on the corresponding surface of said two halves spacer, offers the half slot that matches with said jacking axle along axis respectively, and said two halves spacer is connected through bolt.
The withdrawing device of aforesaid long silicon single crystal rod; Wherein, Said spacer is formed by the butt joint of two halves spacer; On the corresponding surface of said two halves spacer, offer the half slot that matches with said jacking axle along axis respectively, a side of said two halves spacer connects through loose-leaf, and opposite side is connected through bolt.
The withdrawing device of aforesaid long silicon single crystal rod; Wherein, Said backstopping assembly is a clip, and said clip is clamped on the said jacking axle between said bell lift shaft bottom and the said electric pushrod contiguous block, and said clip matches with the bottom face of said bell lift shaft to push up and supports.
The withdrawing device of aforesaid long silicon single crystal rod wherein, before proposing motion on the said jacking axle, has predetermined gap between the bottom face of the upper surface of said clip and said bell lift shaft.
The withdrawing device of aforesaid long silicon single crystal rod, wherein, said predetermined gap is 5mm～10mm.
The withdrawing device of aforesaid long silicon single crystal rod; Wherein, Said withdrawing device also comprises first backplate and second backplate, and said first backplate and said second backplate are located at the both sides, upper end of the flap valve of said monocrystal stove respectively, and the height of said first backplate is less than the height of said second backplate; Said second backplate on the side of said first backplate, offer the conical surface, the said conical surface matches with the bottom of the concubine of said monocrystal stove.
Compared with prior art, the utlity model has following characteristics and advantage:
1, the utility model is provided with removable backstopping assembly on the jacking axle between bell lift shaft bottom and the electric pushrod contiguous block; Compared with prior art; Basically removed the concubine movement travel of going ahead of the rest, backstopping assembly is resisted against bell lift shaft bottom under the drive of electric pushrod contiguous block, thereby makes bell lift shaft and concubine lift shaft promote synchronously; Concubine and bell to guarantee monocrystal stove promote synchronously; Thereby guarantee the firm of body of heater, make that stability, safety, the security in the long silicon single crystal rod rotation process all significantly promotes, and improved the security of operator when construction.
2, the utility model adopts the both sides, flap valve upper end that first backplate highly do not wait and second backplate are located at monocrystal stove respectively; And the inboard at the second higher backplate offers the conical surface; This conical surface matches with the bottom of the concubine of monocrystal stove; The concubine lower flange contacts the back with it can slide to the centering direction along the conical surface in dropping process, the second backplate inner arc radius is consistent with concubine lower flange outer arc radius, realizes accurate centering.
3, because the backstopping assembly of the utility model is removable setting, therefore can between long silicon single crystal rod taking-up and conventional silicon single crystal rod mode, conveniently switch,
Description of drawings
Following accompanying drawing only is intended to the utility model is done schematic illustration and explanation, does not limit the scope of the utility model.Wherein,
Fig. 1 is the structural representation of existing monocrystal stove;
Fig. 2 is the structural representation of the lifting mechanism of existing monocrystal stove;
Fig. 3 is the structure for amplifying synoptic diagram of A part among Fig. 2;
Fig. 4 is the flap valve and the riser bonded structural representation of existing monocrystal stove;
Fig. 5 is the structural representation of the embodiment one of the withdrawing device of the long silicon single crystal rod of the utility model;
Fig. 6 is the structure for amplifying synoptic diagram of B part among Fig. 5;
Fig. 7 is the structural representation of the locating sleeve of the utility model;
Fig. 8 is the structural representation of the swivel nut of the utility model;
Fig. 9 looks cross-sectional view for the master of an embodiment of the spacer of the utility model;
Figure 10 is the cross-sectional view of overlooking of Fig. 9;
Figure 11 looks cross-sectional view for the master of another embodiment of the spacer of the utility model;
Figure 12 is the cross-sectional view of overlooking of Figure 11;
Figure 13 is the structural representation of the embodiment two of the withdrawing device of the long silicon single crystal rod of the utility model;
Figure 14 is the structure for amplifying synoptic diagram of C part among Figure 13;
Figure 15 looks cross-sectional view for the master of the clip of the utility model;
Figure 16 is the cross-sectional view of overlooking of Figure 15;
Figure 17 is the flap valve and the backplate bonded structural representation of the utility model.
Description of reference numerals:
Embodiment
Understand for technical characterictic, purpose and effect to the utility model have more clearly, contrast the embodiment of description of drawings the utility model at present.
Please refer to Fig. 5, Fig. 6, be the structure for amplifying synoptic diagram of B part among the structural representation of the embodiment one of the withdrawing device of the long silicon single crystal rod of the utility model and Fig. 5.As shown in the figure; The withdrawing device of the long silicon single crystal rod that the utility model proposes is used for monocrystal stove, comprises that the electric pushrod 1, electric pushrod contiguous block 2, jacking axle 3, bell lift shaft 4, the bell that set gradually from the bottom to top promote web member 5, concubine lift shaft 6 and concubine and promote web member 7; The end of bell lift shaft 4 is extended at the two ends that jacking axle 3 runs through bell lift shaft 4 and jacking axle 3 respectively; Jacking axle 3 can move up and down in bell lift shaft 4, and the lower ends of the upper end of jacking axle 3 and concubine lift shaft 6 connects, and the lower end of jacking axle 3 is connected with electric pushrod contiguous block 2; Like this under electric pushrod 1 drives; Electric pushrod contiguous block 2 drives jacking axle 3 and rises, and promotion concubine lift shaft 6 promotes, and promotes the concubine lifting that web member 7 drives monocrystal stove through concubine.In the utility model; On the jacking axle 3 between bell lift shaft 4 bottoms and the electric pushrod contiguous block 2, be provided with removable backstopping assembly 8; Be used to limit jacking axle 3 moving up and down with respect to bell lift shaft 4; Basically removed the concubine movement travel of going ahead of the rest, backstopping assembly 8 is resisted against bell lift shaft 4 bottoms under the drive of electric pushrod contiguous block 2, thereby makes bell lift shaft 4 and concubine lift shaft 6 promote synchronously; Concubine and bell to guarantee monocrystal stove promote synchronously; Thereby guarantee the firm of body of heater, make that stability, safety, the security in the silicon single crystal rod rotation process all significantly promotes, and improved the security of operator when construction.
Please in the lump with reference to figure 7 to Figure 10, be respectively the structural representation of the locating sleeve of the utility model; The structural representation of the swivel nut of the utility model; The master of one embodiment of the spacer of the utility model looks cross-sectional view; And Fig. 9 overlook cross-sectional view.As shown in the figure; In the present embodiment; Said backstopping assembly 8 comprises locating sleeve 81, swivel nut 82 and removable spacer 83, and is as shown in Figure 7, and locating sleeve 81 is the tube-in-tube structure of the hollow chamber with perforation; The shape of the shape of locating sleeve 81 hollow chamber and electric pushrod contiguous block 2 and jacking axle 3 connection sections is complementary, and locating sleeve 81 has outside screw; As shown in Figure 8, swivel nut 82 is the nut shape, has the IT that matches with locating sleeve 81 outside screws; Like Fig. 9, shown in Figure 10, spacer 83 be by the two halves spacer be spliced to form cylindric.Wherein: locating sleeve 81 is sleeved on electric pushrod contiguous block 2 and jacking axle 3 bottoms, and locating sleeve 81 is fixedly connected with electric pushrod contiguous block 2, plays the effect that cooperates swivel nut 82 and positioning spacer 83; Swivel nut 82 is sleeved on the top of locating sleeve 81; The inwall of swivel nut 82 is connected with the outer wall thread of locating sleeve 81; In use, through the amount of screwing between adjustment swivel nut 82 and the locating sleeve 81, to reach Adjusting bolt Adjusting screw 82 height; And then realize regulatory function to the position height of spacer 83, make the suitable spacing of maintenance between spacer 83 and the bell lift shaft 4.Spacer 83 is sheathed on the jacking axle 3 slidably; Spacer 83 and be positioned at swivel nut 82 tops makes spacer 83 under the promotion of swivel nut 82, to move, and then is resisted against the bottom of bell lift shaft 4; Propose motion to drive on the bell lift shaft 4; Simultaneously, jacking axle 3 drives on the concubine lift shaft 6 proposes motion, realizes that the concubine and the bell of monocrystal stove promotes synchronously.
Further, like Fig. 9, shown in Figure 10, spacer 83 is formed by two halves spacer 84,85 butt joint, on the corresponding surface of two halves spacer 84,85, offers the half slot that matches with the jacking axle along axis respectively, and two halves spacer 84,85 is connected through bolt 86.Make jacking axle 3 can be placed in the containing hole of two half slots butt joint formation; And the radius of half slot is slightly larger than the radius of jacking axle 3; Make and have certain clearance between spacer 83 and the jacking axle 3; And then make spacer 83 to slide along jacking axle 3 outer walls, and make locating sleeve 81, swivel nut 82 complement each other to form backstopping assembly 8 with spacer 83, can stop jacking axle 3 to slide with respect to bell lift shaft 4; Realization bell lift shaft 4 is carried synchronously with jacking axle 3 with concubine lift shaft 6, has higher safety and security.
Further, before proposing motion on the jacking axle 3, have predetermined gap between the bottom face of the upper surface of spacer 83 and bell lift shaft 4, this predetermined gap is 5mm～10mm.Promptly make electric pushrod 1 promote concubine earlier and promote minimum constructive height, electric pushrod 1 takes place then also promote bell and promote phenomenon.Experiment test; Because the transmission of rigid body contact and power needs certain reaction length, being reflected on the stroke is minimum constructive height (predetermined gap), and its reasonable value is 5mm; For the transmission of guarantee power comes in the desirable 10mm height value of electric pushrod minimum constructive height; Because each lifting piece assembling is accomplished post gap and is differed, according to the practical situation of difference, can be with the thread fit amount of regulating locating sleeve 81 and swivel nut 82.
As the another kind of optional embodiment of the utility model, please refer to Figure 11 and Figure 12, be respectively the cross-sectional view of overlooking that the master of another embodiment of the spacer of the utility model looks cross-sectional view and Figure 11.As shown in the figure, spacer 83 is formed by 87,88 butt joints of two halves spacer, on the corresponding surface of two halves spacer 87,88, offers the half slot that matches with the jacking axle along axis respectively; One side of two halves spacer 87,88 connects through loose-leaf 89, and opposite side is connected through bolt 86, like this two halves spacer is connected with loose-leaf; Preserve together at ordinary times; Only need tighten a side screw during use, just can accomplish installation, have the advantage of easy accessibility.
As the another kind of optional embodiment of the utility model; Please refer to Figure 13 to Figure 16; Be respectively the structural representation of embodiment two of the withdrawing device of the long silicon single crystal rod of the utility model; The structure for amplifying synoptic diagram of C part among Figure 13, the master of the clip of the utility model looks cross-sectional view, and Figure 15 overlook cross-sectional view.As shown in the figure; Backstopping assembly 8 is a clip 9, and this clip 9 is clamped on the jacking axle 3 between bell lift shaft 4 bottoms and the electric pushrod contiguous block 2, makes to form friction pair between clip 9 and the jacking axle 3; Like this when carrying on the jacking axle 3; Clip 9 with on move and be resisted against the bottom face of bell lift shaft 4, and then upper lifting force is passed to bell lift shaft 4 through clip 9, make bell lift shaft 4 and concubine lift shaft 6 carry synchronously.But the backstopping assembly 8 that the utility model adopts also is not limited thereto; Can also adopt other known removable structure; As long as guarantee that backstopping assembly 8 stops jacking axle 3 and surpasses the clearance distance of setting with respect to moving on the bell lift shaft 4, make bell lift shaft 4 carry synchronously and get final product with concubine lift shaft 6.
Further; Show through experiment, when carrying out the power transmission, cause the friction vibration of concubine and long silicon single crystal rod easily like bell promotion concubine; For realizing reliable and stable in bell and the concubine lifting synchronously; Before proposing motion on the jacking axle 3, have predetermined gap between the bottom face of the upper surface of clip 9 and bell lift shaft 4, this predetermined gap is 5mm～10mm.The effect that predetermined gap is set between the bottom face of its effect and the upper surface of spacer 83 and bell lift shaft 4 is identical, no longer repeats at this.
Further, please refer to Figure 17, be the flap valve and the backplate bonded structural representation of the utility model.As shown in the figure; The withdrawing device of the utility model comprises that also first backplate 11 and second backplate, 12, the first backplates 11 and second backplate 12 be located at the both sides, upper end of the flap valve 10 of monocrystal stove respectively, and the height of first backplate 11 is less than the height of second backplate 12; On the side of first backplate 11, offer the conical surface 13 at second backplate 12; This conical surface 13 matches with the bottom of the concubine of monocrystal stove, the two accurate centering when guaranteeing that concubine and flap valve close stove, when concubine returns back to flap valve 10 tops by backplate with its stop; On backplate, drive the processing conical surface, guarantee that concubine falls and the accurate centering of flap valve.In use, flap valve 10 is installed on the bell, the concubine rotation; Bell and flap valve are motionless; Concubine screws out and cycle, and it screws out direction is the rotation from second backplate, 12 side direction, first backplate, 11 sides, and the cycle direction is to rotate to second backplate 12 from first backplate 11.Back-out needs to rise an end distance earlier and leaves, and rising highly is greater than first backplate, 11 height, and rotation highly is greater than first backplate, 11 height when circling round equally; And be lower than second backplate, 12 height; Circle round like this through first backplate 11 but stoped by second backplate 12, second backplate, 12 upsides have the conical surface 13, and the concubine lower flange contacts the back with it can slide to the centering direction along the conical surface 13 in dropping process; Second backplate, 12 inner arc radiuses are consistent with concubine lower flange outer arc radius, realize accurate centering.
In sum; The utility model is through being provided with removable backstopping assembly 8 on the jacking axle 3 between bell lift shaft 4 bottoms and the electric pushrod contiguous block 2; Basically removed the concubine movement travel of going ahead of the rest; Backstopping assembly 8 is resisted against bell lift shaft 4 bottoms under the drive of electric pushrod contiguous block 2, thereby makes bell lift shaft 4 and concubine lift shaft 6 promote synchronously, promotes synchronously with concubine and the bell that guarantees monocrystal stove; Thereby guarantee the firm of body of heater, make that stability, safety, the security in the silicon single crystal rod rotation process all significantly promotes.Backstopping assembly 8 adopts removable structure, when producing long silicon single crystal rod, can quick and convenient installation backstopping assembly 8, from bell below taking-up silicon single crystal rod; When producing conventional silicon single crystal rod, can take off backstopping assembly 8 easily, adopt ordinary method to take out silicon single crystal rod, have the advantage of easy switching, also reduce single crystal rod dropping distance and time.The operator is positioned at the bell avris and can operates when the concubine bell rotates, and operation highly reduces, the risk reduction.The above is merely the schematic embodiment of the utility model, is not in order to limit the scope of the utility model.Any those skilled in the art, equivalent variations of under the prerequisite of design that does not break away from the utility model and principle, having done and modification all should belong to the scope that the utility model is protected.
Claims (10)
1. the withdrawing device of a long silicon single crystal rod; Be used for monocrystal stove; Comprise that the electric pushrod, electric pushrod contiguous block, jacking axle, bell lift shaft, the bell that set gradually from the bottom to top promote web member, concubine lift shaft and concubine and promote web member; The end of said bell lift shaft is extended at the two ends that said jacking axle runs through said bell lift shaft and said jacking axle respectively; Said jacking axle can move up and down in said bell lift shaft, and the lower ends of the upper end of said jacking axle and said concubine lift shaft connects, and the lower end of said jacking axle is connected with said electric pushrod contiguous block; It is characterized in that, on the said jacking axle between said bell lift shaft bottom and the said electric pushrod contiguous block, be provided with removable backstopping assembly.
2. the withdrawing device of long silicon single crystal rod as claimed in claim 1 is characterized in that, said backstopping assembly comprises: locating sleeve is sleeved on said electric pushrod contiguous block and said jacking axle bottom;
Swivel nut is sleeved on the top of said locating sleeve, and the inwall of said swivel nut is connected with the outer wall thread of said locating sleeve;
Spacer, removable slip cap are located on the said jacking axle, and are positioned at said swivel nut top, and said spacer can be resisted against the bottom of said bell lift shaft.
3. the withdrawing device of long silicon single crystal rod as claimed in claim 2 is characterized in that, before proposing motion on the said jacking axle, has predetermined gap between the bottom face of the upper surface of said spacer and said bell lift shaft.
4. the withdrawing device of long silicon single crystal rod as claimed in claim 2 is characterized in that, this predetermined gap is 5mm～10mm.
5. like the withdrawing device of claim 2 or 3 or 4 described long silicon single crystal rods; It is characterized in that; Said spacer is formed by the butt joint of two halves spacer, on the corresponding surface of said two halves spacer, offers the half slot that matches with said jacking axle along axis respectively, and said two halves spacer is connected through bolt.
6. like the withdrawing device of claim 2 or 3 or 4 described long silicon single crystal rods; It is characterized in that; Said spacer is formed by the butt joint of two halves spacer; On the corresponding surface of said two halves spacer, offer the half slot that matches with said jacking axle along axis respectively, a side of said two halves spacer connects through loose-leaf, and opposite side is connected through bolt.
7. the withdrawing device of long silicon single crystal rod as claimed in claim 1; It is characterized in that; Said backstopping assembly is a clip; Said clip is clamped on the said jacking axle between said bell lift shaft bottom and the said electric pushrod contiguous block, and said clip matches with the bottom face of said bell lift shaft to push up and supports.
8. the withdrawing device of long silicon single crystal rod as claimed in claim 7 is characterized in that, before proposing motion on the said jacking axle, has predetermined gap between the bottom face of the upper surface of said clip and said bell lift shaft.
9. the withdrawing device of long silicon single crystal rod as claimed in claim 8 is characterized in that, said predetermined gap is 5mm～10mm.
10. the withdrawing device of long silicon single crystal rod as claimed in claim 1; It is characterized in that; Said withdrawing device also comprises first backplate and second backplate, and said first backplate and said second backplate are located at the both sides, upper end of the flap valve of said monocrystal stove respectively, and the height of said first backplate is less than the height of said second backplate; Said second backplate on the side of said first backplate, offer the conical surface, the said conical surface matches with the bottom of the concubine of said monocrystal stove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205344322U CN202369680U (en) | 2011-12-20 | 2011-12-20 | Device for withdrawing long monocrystalline silicon stick |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205344322U CN202369680U (en) | 2011-12-20 | 2011-12-20 | Device for withdrawing long monocrystalline silicon stick |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202369680U true CN202369680U (en) | 2012-08-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205344322U Expired - Fee Related CN202369680U (en) | 2011-12-20 | 2011-12-20 | Device for withdrawing long monocrystalline silicon stick |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202369680U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102409398A (en) * | 2011-12-20 | 2012-04-11 | 北京京仪世纪电子股份有限公司 | Taking-out device of long monocrystalline silicon rods |
-
2011
- 2011-12-20 CN CN2011205344322U patent/CN202369680U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102409398A (en) * | 2011-12-20 | 2012-04-11 | 北京京仪世纪电子股份有限公司 | Taking-out device of long monocrystalline silicon rods |
| CN102409398B (en) * | 2011-12-20 | 2014-03-26 | 北京京仪世纪电子股份有限公司 | Taking-out device of long monocrystalline silicon rods |
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