CN202359429U - Constant-voltage low-temperature plasma power supply device - Google Patents
Constant-voltage low-temperature plasma power supply device Download PDFInfo
- Publication number
- CN202359429U CN202359429U CN2011205113440U CN201120511344U CN202359429U CN 202359429 U CN202359429 U CN 202359429U CN 2011205113440 U CN2011205113440 U CN 2011205113440U CN 201120511344 U CN201120511344 U CN 201120511344U CN 202359429 U CN202359429 U CN 202359429U
- Authority
- CN
- China
- Prior art keywords
- output
- bridge inverter
- input
- signal
- switching power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Images
Landscapes
- Plasma Technology (AREA)
- Inverter Devices (AREA)
Abstract
The utility model discloses a constant-voltage low-temperature plasma power supply device which comprises a rectifier filter unit, a Buck convertor, a Buck convertor control unit, an H bridge inverter, a Hall voltage transformer, an H bridge inverter control unit, a high-frequency boosting transformer and a computer control unit. The technical route of power frequency alternating current input, low-voltage rectifying and filtering, Buck convertor pulse width modulation voltage adjusting, H bridge high-frequency inversion, high-frequency isolation transformer boosting and outputting is adopted, wherein the Buck convertor controls the duty ratio of pulse width modulation through a negative feedback signal of output voltage of the Buck convertor, and the H bridge inverter controls the current peak value of pulse through a negative feedback signal of the input current of the H bridge inverter. The constant-voltage low-temperature plasma power supply device can flexibly adjust the peak value of a discharge electric field, the peak value and discharge frequency of discharge current according to the process requirements and can generate stable, uniform and soft low-pressure plasmas at constant voltage to treat the surface of fabric and quickly inhibit the formation of filament discharge at the same time, thereby preventing the treated fabric from being perforated or damaged accidently.
Description
Technical field
The utility model relates to the power circuit field, is specifically related to be used for a kind of atmospheric low-temperature plasma supply unit of fabric surface treatments.
Background technology
In the low temperature plasma, electron temperature is up to 10
4-10
5K, and gas temperature approaches normal temperature, plasma is in the non-equilibrium state of heat.In textile industry; The application of cold temperature plasma technique carries out the modification processing to natural with the science fabric surface; Promptly utilize the high energy active particle and the fiber surface effect of low temperature plasma, make physical action modifications such as chemical action modifications such as fabric surface generation etching, crosslinked, polymerization and glycerol polymerization and antistatic, fire-retardant, wrinkle resistant, water and oil repellant, hygienic finishing.This treatment process need not any intermediate medium, has excited gas material and fibrous material directly to act on, and modifying process is simple, convenient and rapid, and environmental protection, water saving, energy-conservation, durability are all had advantages such as better effects.
The using plasma technology is a kind of technical process of complicacy to the fibrous material surface modification treatment, and the surface modification that is processed fabric is generally by following condition control: the kind of (1) gas; (2) plasma occurring mode; (3) discharging condition; (4) structure of device; (5) vacuum, gas flow rate, the time of staying.Wherein plasma occurring mode and discharging condition are by the control method decision of plasma electrical source, and the control method of plasma electrical source should comprise the control of tri-consult volumes such as voltage magnitude, current amplitude and discharge frequency.
Low temperature plasma is to the fabric surface treatments process, requires to produce stable, equal even soft low temperature plasma.The plasma electrical source load but is non-linear and time variation, and discharge type is influenced by operating mode very easily and carry out the transition to filament to discharge, and causes being processed fabric perforation or damage.Therefore require the control system of plasma electrical source to possess the function that quick inhibition filament discharges.
The utility model content
The utility model technical problem to be solved provides a kind of atmospheric low-temperature plasma supply unit; It can be according to the peak value and the discharge frequency of technological requirement flexible discharge electric field peak value, discharge current; Generation is stable under normal pressure, all even soft low temperature plasma is handled fabric face; Suppress the formation of filament discharge simultaneously fast, avoid being processed unexpected perforation of fabric and damage.
For addressing the above problem, the utility model is realized through following scheme:
A kind of atmospheric low-temperature plasma supply unit mainly is made up of rectification filtering unit, Buck converter, Buck convertor controls unit, H bridge inverter, Hall voltage instrument transformer, Hall current instrument transformer, H bridge inverter control module, high-frequency step-up transformer and computer control unit.The interchange input side of rectifier bridge in the civil power input rectifying filter unit; The straight uncontrollable direct current of rectification filtering unit output is sent into the input of Buck converter; The straight controlled direct current of Buck converter output is sent into the direct-flow input end of H bridge inverter; H bridge inverter ac output end is connected to the first side winding of high-frequency step-up transformer; The secondary side winding of high-frequency step-up transformer is connected to the sparking electrode of atmospheric low-temperature plasma fabric surface treatments device; The input of Hall voltage instrument transformer is attempted by the output of Buck converter, and the output of Hall voltage instrument transformer inserts Buck convertor controls unit; The input of Hall current instrument transformer is serially connected in the direct current input anode of H bridge inverter, and the output of Hall current instrument transformer inserts H bridge inverter control module; Computer control unit connects Buck convertor controls unit and H bridge inverter control module respectively.
Above-mentioned supply unit also includes an accessory power supply unit, and the input and the civil power of this accessory power supply unit join, and the output of accessory power supply unit and Buck convertor controls unit, H bridge inverter control module and computer control unit join.
Above-mentioned supply unit also comprises a capacitance, and H bridge inverter ac output end is through being connected to the first side winding of high-frequency step-up transformer behind this capacitance.
In the such scheme, said Buck converter comprises switching power tube, fly-wheel diode, filter reactor and filter condenser; The colelctor electrode of switching power tube and the output cathode of rectification filtering unit join; The input of the emitter stage of switching power tube, the negative electrode of fly-wheel diode and filter reactor is connected together, and the output of the control utmost point of switching power tube and Buck convertor controls unit joins; The output of filter reactor and the positive pole of filter condenser join as Buck converter output plus terminal; The join output negative pole that is connected to rectification filtering unit again and of the anode of fly-wheel diode and the negative pole of filter condenser as Buck converter output negative terminal.
In the such scheme, said Buck convertor controls unit comprises dc pulse width modulation drive circuit and proportional-integral controller; The voltage given signal of Buck convertor controls unit receiving computer control module output; Receive the Buck converter voltage sense signal of Hall voltage instrument transformer output simultaneously; This two signal obtains the input that deviation signal is sent into proportional-integral controller after comparison operation; Deviation signal obtains the duty cycle control signal of dc pulse width modulation after the ratio-integral operation of proportional-integral controller; The duty cycle control signal of dc pulse width modulation is sent into the dc pulse width modulation drive circuit, produces the dc pulse width modulated drive signal and also after isolating amplification, is connected on the Buck converter switches power tube control utmost point and the emitter stage; Divide two-way after Hall voltage instrument transformer output signal is sent into Buck convertor controls unit, promptly also have one the tunnel send into computer control unit input.
In the such scheme, said H bridge inverter comprises the left bridge arm circuit and the right bridge arm circuit of symmetry, and wherein each bridge arm circuit respectively comprises two switching power tubes, two fly-wheel diodes and a buffer circuit; Each switching power tube and a fly-wheel diode inverse parallel, last brachium pontis switching power tube are connected with following brachium pontis switching power tube and afterwards are connected to the output of Buck converter with the brachium pontis buffer circuit parallelly connectedly; The output of H bridge inverter bridge is connected to the first side winding of high-frequency step-up transformer.
In the such scheme, said H bridge inverter control module comprises two divided-frequency logic circuit, voltage comparator, first AND, second AND and isolating amplifier circuit; The clock signal with adjustable frequency of computer control unit output inserts the input of two divided-frequency logic circuit; The opposite square-wave pulse signal of two divided-frequency logic circuit output two-way phase place; Wherein positive phase signals removes to drive the upper left brachium pontis switching power tube of H bridge inverter behind isolating amplifier circuit, inversion signal removes to drive the upper right brachium pontis switching power tube of H bridge inverter behind isolating amplifier circuit; The given signal of peak point current of computer control unit output inserts the positive input terminal of voltage comparator; The output signal of Hall current instrument transformer divides two-way after inserting H bridge inverter control module, and one the tunnel is connected to the negative input end of voltage comparator, and another road outputs to the input of computer control unit; The two-way input of first AND is connected with the output of two divided-frequency logic circuit positive signal output part and voltage comparator respectively, removes to drive the bottom right brachium pontis switching power tube of H bridge inverter behind first AND output Signal Spacing amplifying circuit; The two-way input of second AND is connected with the output of two divided-frequency logic circuit inversion signal output and voltage comparator respectively, removes to drive brachium pontis switching power tube under the left side of H bridge inverter behind second AND output Signal Spacing amplifying circuit.
Compared with prior art, the utlity model has following characteristics:
(1) using plasma discharge peak value electric field, discharge peak currents and discharge frequency Three Degree Of Freedom parameter coordination control technology realizes stable, equal even soft discharge of plasma in low temperature, satisfies different fabric surface treatments technological requirements;
(2) the H bridge inverter adopts the peak point current control model; In this pulse, realize the control of maximum current; Possesses quick inhibition filament discharge energy function; Avoid causing being processed fabric perforation and damage to possess the quick current-limiting protection function of H bridge inverter switching power tube simultaneously, improve the control system reliability;
(3) adopt Computer Control Technology, be convenient to technological parameter flexible adjustment, maturation process data storage and call the upgrading of the Based Intelligent Control of being more convenient for.
Description of drawings
Fig. 1 is a kind of structural representation that is used for the atmospheric low-temperature plasma supply unit embodiment of fabric surface treatments of the utility model; Label is among the figure: 1-rectification filtering unit, 2-Buck converter, 3-Hall voltage instrument transformer; 4-Buck convertor controls unit, 5-Hall current instrument transformer, 6-H bridge inverter control module; The 7-H bridge inverter, 8-capacitance, 9-high-frequency step-up transformer; The 10-sparking electrode, 11-computer control unit, 12-accessory power supply unit.
Fig. 2 is the structural representation of Buck converter 2 among Fig. 1; Label is among the figure: 21-switching power tube, 22-fly-wheel diode, 23-filter reactor, 24-filter condenser.
Fig. 3 is Buck convertor controls unit 4 structural representations among Fig. 1, and label is among the figure: 41-dc pulse width modulation (PWM) drive circuit, 42-ratio-integration (PI) adjuster.
Fig. 4 is the structural representation of H bridge inverter 7 among Fig. 1, and label is among the figure: the upper left brachium pontis switching power tube of 71-, brachium pontis switching power tube under the 72-left side; The upper left brachium pontis fly-wheel diode of 73-; Brachium pontis fly-wheel diode under the 74-left side, 75-left side brachium pontis buffer circuit, the right bridge arm circuit of 76-.
Fig. 5 is the structural representation of H bridge inverter control module 6 among Fig. 1, and label is among the figure: 61-two divided-frequency logic circuit, 62-voltage comparator, 63-first AND, 64-second AND, 65-isolating amplifier circuit.
Fig. 6 is an each point working signal oscillogram among Fig. 5.
Fig. 7 is the block diagram of computer control unit 12 among Fig. 1.
The specific embodiment
Referring to Fig. 1; A kind of atmospheric low-temperature plasma supply unit that is used for fabric surface treatments of the utility model mainly is made up of rectification filtering unit 1, Buck converter 2, Hall voltage instrument transformer 3, Buck convertor controls unit 4, Hall current instrument transformer 5, H bridge inverter control module 6, H bridge inverter 7, capacitance 8, high-frequency step-up transformer 9, computer control unit 11 and accessory power supply unit 12.Interchange input side by rectifier bridge in the civil power input rectifying filter unit 1; The straight uncontrollable direct current of rectification filtering unit 1 output is sent into the input of Buck converter 2; The straight controlled direct current of Buck converter 2 outputs is sent into the direct-flow input end of H bridge inverter 7; H bridge inverter 7 ac output ends are connected to the first side winding of high-frequency step-up transformer 9 behind capacitance 8; The secondary side winding of high-frequency step-up transformer 9 is connected to the sparking electrode 10 of atmospheric low-temperature plasma fabric surface treatments device, is processed fabric and is positioned over 10 of two sparking electrodes.The input of Hall voltage instrument transformer 3 is attempted by the output of Buck converter 2; The output of Hall voltage instrument transformer 3 inserts Buck convertor controls unit 4; Hall voltage instrument transformer 3 is used to detect the sampled signal U of Buck converter 2 output voltages, and promptly the size of U is proportional to Buck converter 2 output voltage values.The input of Hall current instrument transformer 5 is serially connected in the direct current input anode of H bridge inverter 7; The output of Hall current instrument transformer 5 inserts H bridge inverter control module 6; Hall current instrument transformer 5 is used to detect the sampled signal I of H bridge inverter 7 input currents, and promptly the size of I is proportional to H bridge inverter 7 input current value.Computer control unit 11 is connected to Buck convertor controls unit 4 and H bridge inverter control module 6 respectively.The input and the civil power of accessory power supply unit 12 join, and civil power offers the work accessory power supply of Buck convertor controls unit 4, H bridge inverter control module 6, computer control unit 11 again through isolated buck after rectification, filtering, voltage stabilizing.The effect of said capacitance 8 is to prevent high-frequency step-up transformer 9 magnetic bias, guarantees high-frequency step-up transformer 9 efficient operation.
2 as shown in Figure 2 comprising of said Buck converter: switching power tube 21, fly-wheel diode 22, filter reactor 23, filter condenser 24.The colelctor electrode C of switching power tube 23 and the output cathode of rectification filtering unit 1 join; The input of the negative electrode of the emitter E of switching power tube 21, fly-wheel diode 22 and filter reactor 23 is connected together, and the output of the control utmost point of switching power tube 21 and Buck convertor controls unit 4 joins; The positive pole of the output of filter reactor 23 and filter condenser 24 joins as Buck converter 2 output plus terminals; The join output negative pole that is connected to rectification filtering unit 1 again and of the negative pole of the anode of fly-wheel diode 22 and filter condenser 24 as Buck converter 2 output negative terminals.
4 as shown in Figure 3 comprising of said Buck convertor controls unit: dc pulse width modulation (PWM) drive circuit 41 and ratio-integration (PI) adjuster 42.The voltage given signal U of Buck convertor controls unit 4 receiving computer control modules, 11 outputs
*, Buck converter 2 output voltages that receive 3 outputs of Hall voltage instrument transformer simultaneously adopt signal U, and this two signal obtains deviation signal Δ U (Δ U=U after comparison operation
*-U) sending into the input of pi regulator 42, deviation signal Δ U obtains the duty cycle control signal U of PWM after the ratio-integral operation of pi regulator 42
c, the duty cycle control signal U of PWM
cSend into PWM drive circuit 41, produce PWM and drive signal also through being connected to after the isolation amplification on Buck converter 2 switching power tubes, 21 control utmost point G and the emitter E; Hall voltage instrument transformer 3 output signal U are sent into back, Buck convertor controls unit 4 and are divided two-way, promptly also have one the tunnel send into computer control unit 11 input.
7 as shown in Figure 4 comprising of said H bridge inverter: the left bridge arm circuit and the right bridge arm circuit 76 of symmetry, wherein each bridge arm circuit respectively comprises two switching power tubes, two fly-wheel diodes and a buffer circuit.Each switching power tube and a fly-wheel diode inverse parallel, last brachium pontis switching power tube are connected with following brachium pontis switching power tube and afterwards are connected to the output of Buck converter 2 with the brachium pontis buffer circuit parallelly connectedly; The output of H bridge inverter 7 is connected to the first side winding of high-frequency step-up transformer 9 through capacitance 8.Under the peak point current control model, H bridge inverter 7 has four kinds of periodic duty states: when (1) upper left brachium pontis switching tube 71 ends with the conducting simultaneously of bottom right brachium pontis switching power tube and other switching power tube, and high-frequency step-up transformer 9 output positive pulses; (2) during only upper left brachium pontis switching tube 71 conductings, form high-frequency step-up transformer 9 first side winding forward continuous current circuits with upper right brachium pontis fly-wheel diode, high-frequency step-up transformer 9 is output as 0; When (3) upper right brachium pontis switching tube ended with left 72 conductings simultaneously of brachium pontis switching power tube down and other switching power tube, high-frequency step-up transformer 9 was exported negative pulses; (4) during only upper right brachium pontis switching tube conducting, form the reverse continuous current circuit of high-frequency step-up transformer 9 first side winding with upper left brachium pontis fly-wheel diode 73, high-frequency step-up transformer 9 is output as 0.
6 as shown in Figure 5 comprising of said H bridge inverter control module: two divided-frequency logic circuit 61, voltage comparator 62, first AND 63, second AND 64, isolating amplifier circuit 65.The clock signal with adjustable frequency CL of computer control unit 11 outputs inserts the input of two divided-frequency logic circuit 61; The opposite square-wave pulse signal g of two divided-frequency logic circuit 61 output two-way phase places
1And g
2, wherein positive phase signals g
1Through the upper left brachium pontis switching power tube 71 of isolating amplifier circuit 65 rear drive H bridge inverters 7, inversion signal g
2Upper right brachium pontis switching power tube through isolating amplifier circuit 65 rear drive H bridge inverters 7; The given signal I of peak point current of computer control unit 11 outputs
*Insert the positive input terminal of voltage comparator 62; The output signal I of Hall current instrument transformer 5 inserts H bridge inverter control module 6 backs and divides two-way, and one the tunnel is connected to the negative input end of voltage comparator 62, and another road outputs to the input of computer control unit 11.As I≤I
*The time, voltage comparator 62 output high level are as I＞I
*The time, voltage comparator 62 output low levels; The two-way input of first AND 63 respectively with two divided-frequency logic circuit 61 positive phase signals output signal g
1Be connected first AND, 63 output signal g with the output of voltage comparator 62
4Bottom right brachium pontis switching power tube through isolating amplifier circuit 65 rear drive H bridge inverters 7; The two-way input of second AND 64 respectively with two divided-frequency logic circuit 61 inversion signal output signal g
2Be connected second AND, 64 output signal g with the output of voltage comparator 62
3Brachium pontis switching power tube 72 under the left side of isolating amplifier circuit rear drive H bridge inverter 7.The driving signal of brachium pontis switching power tube is a square-wave signal on the H bridge inverter 7; And down the driving signal of brachium pontis switching power tube is a dutycycle less than 50% pulse signal; In the half period of square wave, the operating current rising I of H bridge inverter 7 is to peak point current set-point I
*The time, following brachium pontis switching power tube is blocked to be ended.H bridge inverter control module 6 each operating point waveform are as shown in Figure 6.
11 as shown in Figure 7 comprising of said computer control unit: central processing unit and the memory module, computing module, analog-to-digital conversion input module, switching input module, digital-to-analogue conversion output module, switching value output module, pulse output module and the man-machine interface that are connected with central processing unit.The output signal of Hall voltage instrument transformer and Hall current instrument transformer is received the input of computer control unit, through analog-to-digital conversion input module input central processing unit, after processing such as calculating, judgement, sends into memory module storage and man-machine interface respectively and shows; Man-machine interface is except that Presentation Function, and main effect is that the technological parameter real-time debug is set and the storage of maturation process parameter is set and the technological parameter that is stored in the memory module is called; Be called or debugged technological parameter is handled by central processing unit and received output through digital-to-analogue conversion output module and pulse output module, be connected to Buck convertor controls unit 4 and H bridge inverter control module 6 respectively; Signal such as switching value input and output module is used to start, stops, fault, warning and need input and the output with miscellaneous equipment co-ordination contact signal, this instance does not mark the switching value signal control circuit.
A kind of control method that is used for the atmospheric low-temperature plasma power supply of fabric surface treatments that above-mentioned supply unit is realized, it is conceived basically: adopt the boost technology path of (AC) output of industrial frequency AC input (AC) → lower pressure rectifier filtering (DC) → Buck inverter pulse width modulation pressure regulation (DC) → H bridge high-frequency inversion (AC) → high-frequency isolation transformer.Wherein Buck converter 2 carries out automatic voltage regulation through the dutycycle that the negative-feedback signal U of its output voltage goes to control pulsewidth modulation; H bridge inverter 6 in the H bridge high-frequency inversion step removes to control the current peak of this pulse through the negative-feedback signal I of its input current.
Present embodiment is used for the atmospheric low-temperature plasma power supply of fabric surface treatments by mains-supplied, behind AC → DC → DC → AC current transformation, through the high frequency transformer output of boosting.Be used for the control method of the atmospheric low-temperature plasma power supply of fabric surface treatments, comprise:
(1) control of plasma discharge electric field (high-frequency step-up transformer output voltage) peak value: Buck converter 2 is through Buck convertor controls unit 4; Go to control the dutycycle of pulsewidth modulation output wave as negative-feedback signal by the detected sampled signal U of Hall voltage instrument transformer with Buck converter 2 output voltages; Realize the stable regulation of DC → DC conversion; For the H bridge inverter 7 that will realize DC → AC conversion provides adjustable, stable, straight direct-current input power supplying, and the voltage value of Buck converter 2 out-put supplies will determine the peak value of atmospheric low-temperature plasma discharge electric field.The said signal that is used to control the control of Buck converter 2 output voltages also comprises the voltage setting signal U that is provided by computer control unit 11
*, voltage setting signal U
*Carry out ratio-integration (PI) computing output signal U with the deviation signal Δ U of Buck converter 2 output voltage negative-feedback signal U through pi regulator
CGo to regulate the break-make dutycycle of the switching power tube 21 of Buck converter 2, finally realize the stable regulation of Buck converter 2 output voltages.
(2) control of plasma peak point current: H bridge inverter 7 is exported the first side winding that connects high-frequency step-up transformer 9 through capacitance 8, and high-frequency step-up transformer 9 belongs to inductive load, and H bridge inverter 7 operating current waveforms are similar to sawtooth waveforms.With the sampled signal I of Hall current instrument transformer 6 detection H bridge inverters 9 input currents, and with this current sampling signal I and the peak point current setting signal I that provides by computer control unit 11
*Relatively, in case the sampled signal I of input current is greater than peak point current setting signal I
*Block the conducting of brachium pontis switching power tube down in the H bridge inverter 7 immediately.Just realized peak point current control in this sample pulse; Simultaneously peak point current is controlled in this pulse, even the filament discharge takes place, discharge energy also deficiency causes and is processed fabric perforation and damage; The peak point current control control model while is as the overcurrent protection measure of H bridge inverter 7.
(3) control of plasma discharge frequency: the frequency through changing the clock signal C L that computer control unit 11 provides changes the reverse frequency of H bridge inverter, thereby realizes changing the plasma discharge frequency.
The utility model is according to the peak value and the discharge frequency of technological requirement flexible discharge electric field peak value, discharge current; Generation is stable under normal pressure, all even soft low temperature plasma is handled fabric face; Suppress the formation of filament discharge simultaneously fast; Avoid being processed unexpected perforation of fabric and damage, be convenient to Based Intelligent Control.
Claims (7)
1. atmospheric low-temperature plasma supply unit; Comprise the supply unit body, it is characterized in that: said supply unit body mainly is made up of rectification filtering unit (1), Buck converter (2), Buck convertor controls unit (4), H bridge inverter (7), Hall voltage instrument transformer (3), Hall current instrument transformer (5), H bridge inverter control module (6), high-frequency step-up transformer (9) and computer control unit (11);
The interchange input side of rectifier bridge in the civil power input rectifying filter unit (1); The straight uncontrollable direct current of rectification filtering unit (1) output is sent into the input of Buck converter (2); The straight controlled direct current of Buck converter (2) output is sent into the direct-flow input end of H bridge inverter (7); H bridge inverter (7) ac output end is connected to the first side winding of high-frequency step-up transformer (9); The secondary side winding of high-frequency step-up transformer (9) is connected to the sparking electrode (10) of atmospheric low-temperature plasma fabric surface treatments device;
The input of Hall voltage instrument transformer (3) is attempted by the output of Buck converter (2), and the output of Hall voltage instrument transformer (3) inserts Buck convertor controls unit (4); The input of Hall current instrument transformer (5) is serially connected in the direct current input anode of H bridge inverter (7), and the output of Hall current instrument transformer (5) inserts H bridge inverter control module (6); Computer control unit (11) connects Buck convertor controls unit (4) and H bridge inverter control module (6) respectively.
2. a kind of atmospheric low-temperature plasma supply unit according to claim 1; It is characterized in that: said supply unit body also comprises an accessory power supply unit (12); The input and the civil power of this accessory power supply unit (12) join, and the output of accessory power supply unit (12) and Buck convertor controls unit (4), H bridge inverter control module (6) and computer control unit (11) join.
3. a kind of atmospheric low-temperature plasma supply unit according to claim 1; It is characterized in that: said supply unit body also comprises a capacitance (8), is connected to the first side winding of high-frequency step-up transformer (9) behind H bridge inverter (7) ac output end this capacitance of process (8).
4. according to any described a kind of atmospheric low-temperature plasma supply unit in the claim 1～3, it is characterized in that: said Buck converter (2) comprises switching power tube (21), fly-wheel diode (22), filter reactor (23), filter condenser (24); The colelctor electrode (C) of switching power tube (23) joins with the output cathode of rectification filtering unit (1); The input of the emitter stage (E) of switching power tube (21), the negative electrode of fly-wheel diode (22) and filter reactor (23) is connected together, and the output of the control utmost point of switching power tube (21) and Buck convertor controls unit (4) joins; The positive pole of the output of filter reactor (23) and filter condenser (24) joins as Buck converter (2) output plus terminal; The join output negative pole that is connected to rectification filtering unit (1) again and of the negative pole of the anode of fly-wheel diode (22) and filter condenser (24) as Buck converter (2) output negative terminal.
5. a kind of atmospheric low-temperature plasma supply unit according to claim 4 is characterized in that: said Buck convertor controls unit (4) comprises dc pulse width modulation drive circuit (41) and proportional-integral controller (42); Voltage given signal (the U of Buck convertor controls unit (4) receiving computer control module (11) output
*); Receive Buck converter (2) the output voltage sampled signal (U) of Hall voltage instrument transformer (3) output simultaneously; This two signal obtains the input that deviation signal (Δ U) is sent into proportional-integral controller (42) after comparison operation, deviation signal (Δ U) obtains the duty cycle control signal (U of dc pulse width modulation after the ratio-integral operation of proportional-integral controller (42)
c), the duty cycle control signal (U of dc pulse width modulation
c) send into dc pulse width modulation drive circuit (41), produce the dc pulse width modulated drive signal and after isolating amplification, be connected to Buck converter (2) switching power tube (21) and control on the utmost point (G) and the emitter stage (E); Hall voltage instrument transformer (3) output signal (U) is sent into back, Buck convertor controls unit (4) and is divided two-way, promptly also have one the tunnel send into computer control unit (11) input.
6. a kind of atmospheric low-temperature plasma supply unit according to claim 5; It is characterized in that: said H bridge inverter (7) comprises the left bridge arm circuit and the right bridge arm circuit of symmetry, and wherein each bridge arm circuit respectively comprises two switching power tubes, two fly-wheel diodes and a buffer circuit; Each switching power tube and a fly-wheel diode inverse parallel, last brachium pontis switching power tube are connected with following brachium pontis switching power tube and afterwards are connected to the output of Buck converter (2) with the brachium pontis buffer circuit parallelly connectedly; The output of H bridge inverter (7) is connected to the first side winding of high-frequency step-up transformer (9).
7. a kind of atmospheric low-temperature plasma supply unit according to claim 6 is characterized in that: said H bridge inverter control module (6) comprises two divided-frequency logic circuit (61), voltage comparator (62), first AND (63), second AND (64) and isolating amplifier circuit (65); The clock signal with adjustable frequency of computer control unit output (11) inserts the input of two divided-frequency logic circuit (61); The opposite square-wave pulse signal of two divided-frequency logic circuit (61) output two-way phase place; Wherein positive phase signals removes to drive the upper left brachium pontis switching power tube of H bridge inverter (7) behind isolating amplifier circuit (65), inversion signal removes to drive the upper right brachium pontis switching power tube of H bridge inverter (7) behind isolating amplifier circuit (65); Given signal (the I of peak point current of computer control unit output (11)
*) insert the positive input terminal of voltage comparator (62); The output signal (I) of Hall current instrument transformer (5) inserts H bridge inverter control module (6) back and divides two-way, and one the tunnel is connected to the negative input end of voltage comparator (62), and another road outputs to the input of computer control unit (11); The two-way input of first AND (63) is connected with the output of two divided-frequency logic circuit (61) positive signal output part and voltage comparator (62) respectively, removes to drive the bottom right brachium pontis switching power tube of H bridge inverter (7) behind first AND (63) the output Signal Spacing amplifying circuit (65); The two-way input of second AND (64) is connected with the output of two divided-frequency logic circuit (61) inversion signal output and voltage comparator (62) respectively, removes to drive brachium pontis switching power tube under the left side of H bridge inverter (7) behind second AND (64) the output Signal Spacing amplifying circuit (65).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205113440U CN202359429U (en) | 2011-12-09 | 2011-12-09 | Constant-voltage low-temperature plasma power supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205113440U CN202359429U (en) | 2011-12-09 | 2011-12-09 | Constant-voltage low-temperature plasma power supply device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202359429U true CN202359429U (en) | 2012-08-01 |
Family
ID=46570627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205113440U Withdrawn - After Issue CN202359429U (en) | 2011-12-09 | 2011-12-09 | Constant-voltage low-temperature plasma power supply device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202359429U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102497115A (en) * | 2011-12-09 | 2012-06-13 | 桂林电子科技大学 | Control method of normal-pressure low-temperature plasma power supply and power supply device |
| CN103929869A (en) * | 2014-04-04 | 2014-07-16 | 深圳市嘉力电气技术有限公司 | Electronic-type stepless light dimming intelligent UV variable frequency power supply |
| CN104649373A (en) * | 2014-12-25 | 2015-05-27 | 春焱电子科技（苏州）有限公司 | High-frequency-pulse non-equilibrium plasma sewage treatment device |
| CN106255305A (en) * | 2015-06-05 | 2016-12-21 | 松下知识产权经营株式会社 | Plasma generating equipment |
| CN109512503A (en) * | 2017-09-18 | 2019-03-26 | 四川锦江电子科技有限公司 | A kind of Collation surgery system carrying out stimulation output |
-
2011
- 2011-12-09 CN CN2011205113440U patent/CN202359429U/en not_active Withdrawn - After Issue
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102497115A (en) * | 2011-12-09 | 2012-06-13 | 桂林电子科技大学 | Control method of normal-pressure low-temperature plasma power supply and power supply device |
| CN102497115B (en) * | 2011-12-09 | 2014-01-01 | 桂林电子科技大学 | Normal-pressure low-temperature plasma power supply and power supply device |
| CN103929869A (en) * | 2014-04-04 | 2014-07-16 | 深圳市嘉力电气技术有限公司 | Electronic-type stepless light dimming intelligent UV variable frequency power supply |
| CN104649373A (en) * | 2014-12-25 | 2015-05-27 | 春焱电子科技（苏州）有限公司 | High-frequency-pulse non-equilibrium plasma sewage treatment device |
| CN106255305A (en) * | 2015-06-05 | 2016-12-21 | 松下知识产权经营株式会社 | Plasma generating equipment |
| CN109512503A (en) * | 2017-09-18 | 2019-03-26 | 四川锦江电子科技有限公司 | A kind of Collation surgery system carrying out stimulation output |
| CN109512503B (en) * | 2017-09-18 | 2020-03-31 | 四川锦江电子科技有限公司 | Low-temperature plasma ablation system capable of outputting stimulation |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102497115B (en) | Normal-pressure low-temperature plasma power supply and power supply device | |
| CN202359429U (en) | Constant-voltage low-temperature plasma power supply device | |
| EP2731252A1 (en) | Inverter circuit and control method therefor | |
| CN107155383A (en) | Uninterrupted power supply(ups) | |
| CN107947573B (en) | DC/DC chopper suitable for superconducting magnetic energy storage | |
| US8456879B2 (en) | Switching power supply apparatus | |
| CN102916581A (en) | Frequency multiplier type booster circuit, control method and inverter thereof | |
| Duan et al. | Interleaved modulation scheme with optimized phase shifting for double-switch buck-boost converter | |
| CN103780065A (en) | Soft turn-off power supply converter | |
| CN104128680B (en) | Electrochemical machining high frequency pulse power source based on SOPC technology | |
| CN109039123A (en) | A kind of seven electrical level inverter of booster type | |
| CN107317343B (en) | High-efficiency cascade H-bridge type dynamic voltage restorer and control method thereof | |
| CN115833547A (en) | Decoupling circuit suitable for wide-band pulse load and control method | |
| Nacar et al. | Comparison of control techniques for series resonant converter | |
| EP2421134A1 (en) | Current-fed quadratic buck converter | |
| CN203918149U (en) | Electrolyzed Processing high frequency pulse power supply based on SOPC technology | |
| CN101540544B (en) | Circuit used for drive control of flow current tube of direct current/direct current converter | |
| CN104578731A (en) | Harmonic suppression double closed loop control circuit and harmonic suppression device | |
| CN205356181U (en) | A dc -to -ac converter for photovoltaic power generation system and electric energy repayment | |
| CN112019077A (en) | Novel single-phase inverter based on buck circuit and control method thereof | |
| CN103944386A (en) | DC-DC boost conversion device and boost conversion working method thereof | |
| CN113037086B (en) | Photovoltaic energy storage inverter suitable for photovoltaic power limitation | |
| Wang et al. | Modeling and simulation of a permanent magnet brushless DC motor fed by PWM Z-source inverter | |
| KR102526264B1 (en) | Device for controlling single-phase transformerless virtual-ground buck-boost inverter | |
| RU2159497C1 (en) | Frequency converter control process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120801 Effective date of abandoning: 20140101 |
|
| RGAV | Abandon patent right to avoid regrant |