CN202332795U - Sealing device for sealing etched groove - Google Patents
Sealing device for sealing etched groove Download PDFInfo
- Publication number
- CN202332795U CN202332795U CN2011204520026U CN201120452002U CN202332795U CN 202332795 U CN202332795 U CN 202332795U CN 2011204520026 U CN2011204520026 U CN 2011204520026U CN 201120452002 U CN201120452002 U CN 201120452002U CN 202332795 U CN202332795 U CN 202332795U
- Authority
- CN
- China
- Prior art keywords
- top board
- etching groove
- cover plate
- sealing
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model discloses a sealing device for sealing an etched groove. The sealing device comprises a cover plate and side plates, wherein the cover plate is positioned above the etched groove; and the side plates are connected to the two ends of the cover plate to seal the etched groove. The cover plate comprises a first top plate and a second top plate. The bottom edges of the first and second top plates are positioned at the two opposite edges of the etched groove respectively. The top edges of the first and second top plates are connected. At least one of the first and second top plates is inclined to form a certain angle with the horizontal plane. The sealing device has the beneficial effects that: the etched groove is sealed by a sealing structure consisting of the cover plate and the side plates which are connected, so that the sealing performance of the etched groove is ensured, and the overflow of a harmful gas from the etched groove is avoided; and the cover plate is inclined, so that condensed droplets on the inner wall of the cover plate can be guided to the edge of a groove body, and can be prevented from dropping onto a silicon chip after being accumulated, and the influence on the etching of the silicon chip is avoided.
Description
Technical field
The utility model relates to solar cell wet process production technical field, is specifically related to a kind of sealing device that is used to seal the etching groove, is used for the etching groove of solar cell wet process production is sealed.
Background technology
When the wet process of photovoltaic apparatus (solar cell) is produced; Need in the etching groove, handle silicon chip surface; Owing to can produce a large amount of acid mist and other pernicious gas in the etching groove; In the prior art, be employed in the opening part covering common planar top board of etching groove such as the glass plate on plane and seal the etching groove, prevent that acid mist and other pernicious gas that it is inner from overflowing.The shortcoming of prior art is; When acid mist runs into the flat top of the opening part that covers the etching groove; Can on the inner surface of flat top, be condensed into drop (water and sour mixture) because meet cold, on flat top, behind the droplet congregating of condensation; Can be dropped in the silicon chip surface in the etching groove, directly influence the treatment effect of silicon chip.
The utility model content
To the above-mentioned defective that prior art exists, the technical problem that the utility model will solve is, a kind of sealing device that is used to seal the etching groove is provided, and the drop of avoiding surface within it to generate is dropped on the silicon chip, influences the treatment effect of silicon chip.
For solving the problems of the technologies described above, the utility model adopts following technical scheme:
A kind of sealing device that is used to seal the etching groove; Comprise the cover plate that is positioned at said etching groove top and be connected said cover plate two ends to seal the side plate of said etching groove; Said cover plate comprises first top board and second top board of mutual butt joint; The base of said first top board and second top board lays respectively on the relative both sides of said etching groove; The top margin of said first top board and second top board interconnects, at least one in said first top board and second top board and horizontal plane is angled is obliquely installed.
As preferably, the cross section of said cover plate is inverted v-shaped.
As preferably, through the sealing strip sealing, the top margin junction of said first top board and second top board is through the sealing strip sealing respectively and between the etching groove on the base of said first top board and second top board.
As preferably, said first top board and second top board are that the one bending is shaped.
As preferably, said first top board is provided with and is used to move the first in command that said sealing device leaves said etching groove.
As preferably, on said first top board or second top board be provided with observation window, said observation window is rotatably connected on said first top board or second top board.
Preferred as further, said observation window is provided with the second in command who is used to open said observation window.
As preferably, be provided with sealing strip around the said observation window.
As preferably, said first top board, second top board and observation window are transparent PVC material.
The sealing device that being used to of the utility model sealed the etching groove has following beneficial effect: the hermetically-sealed construction of forming through interconnective cover plate and side plate seals the etching groove, guarantees the sealing of etching groove, avoids the overflowing of pernicious gas in the etching groove; Because cover plate tilts, can the edge of drop drainage to the cell body that on the inwall of cover plate, is condensed into be avoided dropping onto on the silicon chip after the condensing droplet gathering, silicon chip erosion is exerted an influence.
Description of drawings
Fig. 1 is the perspective view of sealing device that is used to seal the etching groove of the embodiment of the utility model;
Fig. 2 looks sketch map for the master of Fig. 1;
Fig. 3 is the schematic side view of Fig. 1;
Fig. 4 seals the schematic side view of observation window of the sealing device of etching groove for shown in Figure 1 being used for.
Main description of reference numerals
1-sealing device 3-rotating shaft 4-supporting seat
5-back-up block 10-cover plate 11-first top board
The 12-second top board 14-side plate 15-observation window
151-second in command 17-first in command 51-hole
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the utility model is described in further detail, but not as the qualification to the utility model.
Like Fig. 1-shown in Figure 3, the sealing device 1 that is used to seal the etching groove of an embodiment of the utility model comprises the cover plate 10 that is positioned at etching groove (not shown) top and is connected the side plate 14 of said cover plate 10 two ends to seal said etching groove.In this enforcement; Said cover plate 10 comprises first top board 11 and second top board 12 of mutual butt joint; The base of first top board 11 and second top board 12 is connected with the cell body of etching groove, and the top margin of first top board 11 and second top board 12 interconnects above the etching groove, in the present embodiment; First top board 11 and second top board 12 all with the angled inclination of horizontal plane; And butt joint above the etching groove, forming the covering plate structure that cross section is inverted v-shaped, the sealing strip sealing is adopted in the top margin junction of first top board 11 and second top board 12.Certainly, as long as one and the angled inclination of horizontal plane in first top board 11 and second top board 12, even cover plate 10 be positioned at the etching groove directly over part all get final product with the angled inclination of horizontal plane.Tilt like first top board 11, second top board 12 is vertical with horizontal plane to be provided with, and makes the cross section of the cover plate 10 leg-of-mutton shape that meets at right angles, and also can realize the object of the invention.In the present embodiment, the base of first top board 11 and second top board 12 and the base of two side plates 14 all place on the upper surface of cell body, form line with the upper surface of cell body and contact, and adopt sealing joint strip commonly used to seal.Such first top board 11, second top board 12 and two side plates 14 of being connected its two ends and the cell body of etching groove are formed the space of the sealing of triangular prism shape jointly, and the etching groove is sealed, and avoid the pernicious gas in the etching groove to overflow.When the condensation and when being gathered into droplet (water with acid mixture) on the inwall of first top board 11 or second top board 12 of part acid mist; Because first top board 11 or second top board 12 with respect to the horizontal plane tilt; Under action of gravity; Droplet, is avoided dropping onto on the silicon chip by the edge of drainage to cell body along first top board 11 or second top board 12, reduces silicon chip erosion is exerted an influence.Certainly; Cover plate 10 can also be the structure of one bending shaping; Cover plate 10 by an integral body is bent into first top board 11 and second top board, 12 two parts, in the present embodiment, the broken line that forms between first top board 11 and second top board 12 can be positioned at the etching groove directly over; The broken line that forms between first top board 11 and second top board 12 can also be positioned at other zones of etching groove top, as long as the part directly over the etching groove is the position that favours horizontal plane.
Like Fig. 1, shown in Figure 2, as preferably, in the present embodiment, first top board 11 is provided with the first in command 17.Move the sealing device 1 that this cover plate 10 and side plate 14 are formed through holding the first in command 17, be convenient to remove or sealing device 1 is installed.
For the ease of in time checking the working condition in the etching groove; And the silicon chip of being convenient to remove fragmentation in the etching groove; Also offer an observation panel on first top board 11 in the present embodiment, said observation panel is provided with observation window 15, and observation window 15 is rotatably connected on first top board 11; And on observation window 15, also be provided with the second in command 151 who is used to open observation window 15.In order when not opening, just to observe the situation in the etching groove, first top board 11, second top board 12 are transparent PVC material with observation window 15.In order to improve sealing, observation window 15 is provided with sealing strip with the position that first top board 11 contacts.Obviously, for more convenient, an observation window can also be set also on second top board 12.
Like Fig. 2, shown in Figure 4, in this enforcement, as preferred version; One side of observation window 15 is provided with two back-up blocks 5; Have hole 51, the first top boards 11 on the back-up block 5 and be provided with supporting seat 4 with back-up block 5 corresponding positions, back-up block 5 is rotatably connected on the supporting seat 4 through the rotating shaft 3 of passing hole 51; Be the easy to process and consideration that reduces cost, rotating shaft 3 adopts hexagon-headed bolt to get final product.The quantity of back-up block 5 and supporting seat 4 can be selected according to actual conditions.
Certainly; The above is the preferred implementation of the utility model; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; Can also make some improvement and retouching, these improvement and retouching also are regarded as the protection range of the utility model.
Claims (9)
1. sealing device that is used to seal the etching groove; It is characterized in that; Comprise the cover plate that is positioned at said etching groove top and be connected said cover plate two ends to seal the side plate of said etching groove; Said cover plate comprises first top board and second top board; The base of said first top board and second top board lays respectively on the relative both sides of said etching groove, and the top margin of said first top board and second top board is connected, at least one in said first top board and second top board and horizontal plane is angled is obliquely installed.
2. the sealing device that is used to seal the etching groove as claimed in claim 1 is characterized in that the cross section of said cover plate is inverted v-shaped.
3. the sealing device that is used to seal the etching groove as claimed in claim 1; It is characterized in that; The base of said first top board and second top board respectively and said etching groove between through sealing strip sealing, the top margin junction of said first top board and second top board is through the sealing strip sealing.
4. the sealing device that is used to seal the etching groove as claimed in claim 2 is characterized in that, said first top board and second top board are that the one bending is shaped.
5. like claim 3 or the 4 described sealing devices that are used to seal the etching groove, it is characterized in that said first top board is provided with and is used to move the first in command that said sealing device leaves said etching groove.
6. like claim 3 or the 4 described sealing devices that are used to seal the etching groove, it is characterized in that said first top board or second top board are provided with observation window, said observation window is rotatably connected on said first top board or second top board.
7. the sealing device that is used to seal the etching groove as claimed in claim 6 is characterized in that said observation window is provided with the second in command who is used to open said observation window.
8. the sealing device that is used to seal the etching groove as claimed in claim 6 is characterized in that, is provided with sealing strip around the said observation window.
9. like each described sealing device that is used to seal the etching groove among the claim 1-4, it is characterized in that said first top board, second top board and observation window are transparent PVC material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204520026U CN202332795U (en) | 2011-11-15 | 2011-11-15 | Sealing device for sealing etched groove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204520026U CN202332795U (en) | 2011-11-15 | 2011-11-15 | Sealing device for sealing etched groove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202332795U true CN202332795U (en) | 2012-07-11 |
Family
ID=46444766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204520026U Expired - Fee Related CN202332795U (en) | 2011-11-15 | 2011-11-15 | Sealing device for sealing etched groove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202332795U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103569468A (en) * | 2013-09-29 | 2014-02-12 | 桐城市福润包装材料有限公司 | Woven bag |
| CN106610369A (en) * | 2016-12-26 | 2017-05-03 | 广州广电计量检测股份有限公司 | Integrated environmental test system |
| CN107450285A (en) * | 2017-09-22 | 2017-12-08 | 武汉华星光电技术有限公司 | Developing apparatus |
| CN111589781A (en) * | 2020-05-21 | 2020-08-28 | 北京北方华创微电子装备有限公司 | Sealing cover of groove type cleaning equipment and groove type cleaning equipment |
-
2011
- 2011-11-15 CN CN2011204520026U patent/CN202332795U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103569468A (en) * | 2013-09-29 | 2014-02-12 | 桐城市福润包装材料有限公司 | Woven bag |
| CN106610369A (en) * | 2016-12-26 | 2017-05-03 | 广州广电计量检测股份有限公司 | Integrated environmental test system |
| CN107450285A (en) * | 2017-09-22 | 2017-12-08 | 武汉华星光电技术有限公司 | Developing apparatus |
| CN111589781A (en) * | 2020-05-21 | 2020-08-28 | 北京北方华创微电子装备有限公司 | Sealing cover of groove type cleaning equipment and groove type cleaning equipment |
| CN111589781B (en) * | 2020-05-21 | 2022-04-22 | 北京北方华创微电子装备有限公司 | Sealing cover of groove type cleaning equipment and groove type cleaning equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202332795U (en) | Sealing device for sealing etched groove | |
| US9353528B2 (en) | Rain gutter system | |
| US9988804B2 (en) | Floor drain for same floor drainage without descending floor of building | |
| CN202194523U (en) | Shutter plate and blind having the shutter plate | |
| CN205153350U (en) | Roof drainage gutter | |
| CN205065682U (en) | ACP1000 nuclear power steam generator is corrugated plate assemblies for desicator | |
| CN206673901U (en) | Hasp installing type photovoltaic module | |
| CN205104870U (en) | Novel slot type crane span structure of taking shelter from rain of becalming | |
| CN205079214U (en) | CAP1000CAP1400 nuclear power steam generator is corrugated plate assemblies for desicator | |
| CN203850771U (en) | Rainproof cover plate for cable tray | |
| CN208690911U (en) | A kind of High Voltage Outdoor feeder pillar | |
| CN208191543U (en) | A kind of greenhouse captation | |
| CN204098366U (en) | Slope roof window discharge structure | |
| CN202913581U (en) | Waterproofing device of photovoltaic system press-fixing piece | |
| CN105524671A (en) | Integrated biogas desulfurization tower | |
| CN2602056Y (en) | A kind of modified sluice gate of water prevention | |
| CN207239809U (en) | A kind of organ-type telescopic protective shield applied to lathe | |
| CN207567913U (en) | A kind of drainage ditch cover plate with water guide effect | |
| CN205399256U (en) | Traffic sign structure | |
| CN205904982U (en) | Flow card protection box | |
| CN204401888U (en) | Right angle plane tile | |
| CN203957808U (en) | A kind of dormer window sunshading board assembly and automobile of automobile | |
| CN202248410U (en) | Unit-type curtain wall with tilt facade | |
| CN215829935U (en) | External corner strip | |
| CN206853413U (en) | A kind of desulfuration absorbing tower based on presulfurization butyl rubber lining |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20201115 |