CN202321642U - Roller for conveying silicon slices in silicon etching process - Google Patents

Roller for conveying silicon slices in silicon etching process Download PDF

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Publication number
CN202321642U
CN202321642U CN 201120515938 CN201120515938U CN202321642U CN 202321642 U CN202321642 U CN 202321642U CN 201120515938 CN201120515938 CN 201120515938 CN 201120515938 U CN201120515938 U CN 201120515938U CN 202321642 U CN202321642 U CN 202321642U
Authority
CN
China
Prior art keywords
roller
silicon chip
rings
silicon
antislip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201120515938
Other languages
Chinese (zh)
Inventor
吴兵
袁强
程曦
段甜健
包崇彬
李质磊
盛雯婷
张凤鸣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Baoding Tianwei Group Co Ltd
Tianwei New Energy Holdings Co Ltd
Original Assignee
Baoding Tianwei Group Co Ltd
Tianwei New Energy Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baoding Tianwei Group Co Ltd, Tianwei New Energy Holdings Co Ltd filed Critical Baoding Tianwei Group Co Ltd
Priority to CN 201120515938 priority Critical patent/CN202321642U/en
Application granted granted Critical
Publication of CN202321642U publication Critical patent/CN202321642U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model provides a roller for conveying silicon slices in a silicon etching process, which comprises roller bodies, clamp rings and anti-skidding rings, wherein six clamp rings are evenly arranged on each roller body, the distance between two adjacent clamp rings is larger than the size of the silicon slices, and at least two anti-skidding rings are further evenly arranged on the roller body between every two adjacent clamp rings. Through improvement of the roller, accidents of slice clamping, stacking and the like caused by orbit displacement of the silicon slices can be completely avoided, slice breaking rate is greatly reduced, rolled yield is remarkably improved, shut down time is reduced, and continuity and stability of production are ensured.

Description

A kind of roller that in silicon chip making herbs into wool process, transmits silicon chip
Technical field
The utility model relates to a kind of roller that in silicon chip making herbs into wool process, transmits silicon chip.
Background technology
In the production process of crystal-silicon solar cell, the making herbs into wool operation adopts the wet etching technology when removing silicon chip surface damage layer, and preparation one deck matte is used for antireflective.Realize the general wet etching machine that adopts of this technology, this equipment is the chain type continuous mode of production, is divided into 5 tracks; Be made up of a plurality of functional modules, all by roller transmission silicon chip, the Input district gets into first module of board for silicon chip; Foreign vendor can be automatic transmission system equipment of Input district configuration, and the orbital position that silicon chip gets into behind the Input district can not squint basically, so the roller in the Input district does not design silicon chip track correcting device; And domestic manufacturers because taking cost into account, and Input district majority is the artificial sheet of throwing, and adds other factors; Like the slight vibrations of equipment itself, have a strong impact on the track accuracy rate of silicon chip, can produce orbit displacement; The silicon chip that part interorbital deviation is bigger can bump against with the silicon chip of other tracks behind access arrangement or be overlapping; Cause lamination or card accident, produce a large amount of fragments and nonconformity sheet, and have a strong impact on the continuity of production.
The utility model content
The purpose of the utility model is to provide a kind of roller that in silicon chip making herbs into wool process, transmits silicon chip, and it can effectively revise the shift phenomenon that chip transmission produces, the accident of avoiding lamination, card and hitting sheet.
The utility model provides a kind of roller that in silicon chip making herbs into wool process, transmits silicon chip, and it comprises roller, snap ring, antislip ring; Wherein, evenly be provided with 6 snap rings on each roller, the distance between two adjacent snap rings is greater than the size of silicon chip; On the roller between two whenever adjacent snap rings, also evenly be provided with at least 2 antislip rings.
Wherein, the annulus width sum of said silicon wafer thickness and antislip ring is less than or equal to the annulus width of snap ring.
Further, on the roller between two whenever adjacent snap rings, also evenly be provided with at least 4 antislip rings.
The utility model can be avoided significantly improving first-pass yield because accidents such as the card that the silicon chip orbit displacement causes, lamination significantly reduce fragment rate through the improvement of pair roller fully, reduces the Down machine time, guarantees the continuity and the stability of producing.
Description of drawings
The structural representation of Fig. 1 the utility model
Wherein, 1-roller, 2-snap ring, 3-antislip ring.
The specific embodiment
As shown in Figure 1, the utility model is a kind of roller that in silicon chip making herbs into wool process, transmits silicon chip, and it comprises roller 1, snap ring 2, antislip ring 3; Wherein, evenly be provided with 6 snap rings 2 on each roller 1, the distance between two adjacent snap rings 2 is greater than the size of silicon chip; On the roller 1 between two whenever adjacent snap rings 2, also evenly be provided with at least 2 antislip rings 2.Wherein, the annulus width sum of said silicon wafer thickness and antislip ring 3 is less than or equal to the annulus width of snap ring 2.On the roller 1 between two whenever adjacent snap rings 2, also evenly be provided with at least 4 antislip rings 3.
Distance between two adjacent snap rings can guarantee that greater than the size of silicon chip silicon chip can not depart from transporting rail; Simultaneously, the antislip ring of setting can strengthen the friction dynamics to silicon chip, further prevents silicon chip offset rail in transmission course.Wherein, antislip ring and snap ring all adopt the material that is difficult for silicon chip is caused damage.Simultaneously, the present invention evenly is provided with 6 snap rings, and roller is divided into 5 sections, and each section can be corresponding with 5 tracks of board.
The utility model can be avoided significantly improving first-pass yield because accidents such as the card that the silicon chip orbit displacement causes, lamination significantly reduce fragment rate through the improvement of pair roller fully, reduces the Down machine time, guarantees the continuity and the stability of producing.

Claims (3)

  1. One kind in silicon chip making herbs into wool process the transmission silicon chip roller, it is characterized in that: it comprises roller (1), snap ring (2), antislip ring (3); Wherein, evenly be provided with 6 snap rings (2) on each roller (1), the distance between adjacent two snap rings (2) is greater than the size of silicon chip; On the roller (1) between whenever adjacent two snap rings (2), also evenly be provided with at least 2 antislip rings (3).
  2. 2. the roller of transmission silicon chip according to claim 1 is characterized in that: the annulus width sum of said silicon wafer thickness and antislip ring (3) is less than or equal to the annulus width of snap ring (2).
  3. 3. the roller of transmission silicon chip according to claim 1 is characterized in that: on the roller (1) between whenever adjacent two snap rings (2), also evenly be provided with at least 4 antislip rings (3).
CN 201120515938 2011-12-12 2011-12-12 Roller for conveying silicon slices in silicon etching process Expired - Fee Related CN202321642U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201120515938 CN202321642U (en) 2011-12-12 2011-12-12 Roller for conveying silicon slices in silicon etching process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201120515938 CN202321642U (en) 2011-12-12 2011-12-12 Roller for conveying silicon slices in silicon etching process

Publications (1)

Publication Number Publication Date
CN202321642U true CN202321642U (en) 2012-07-11

Family

ID=46433631

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201120515938 Expired - Fee Related CN202321642U (en) 2011-12-12 2011-12-12 Roller for conveying silicon slices in silicon etching process

Country Status (1)

Country Link
CN (1) CN202321642U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104183671A (en) * 2014-09-04 2014-12-03 天津英利新能源有限公司 Wafer jamming alarm method and system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104183671A (en) * 2014-09-04 2014-12-03 天津英利新能源有限公司 Wafer jamming alarm method and system
CN104183671B (en) * 2014-09-04 2016-03-23 天津英利新能源有限公司 A kind of jam alarm method and system

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120711

Termination date: 20171212

CF01 Termination of patent right due to non-payment of annual fee