CN104183671A - Wafer jamming alarm method and system - Google Patents
Wafer jamming alarm method and system Download PDFInfo
- Publication number
- CN104183671A CN104183671A CN201410448637.7A CN201410448637A CN104183671A CN 104183671 A CN104183671 A CN 104183671A CN 201410448637 A CN201410448637 A CN 201410448637A CN 104183671 A CN104183671 A CN 104183671A
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- silicon chip
- transducer
- jam
- wafer
- time
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Links
- 238000000034 method Methods 0.000 title claims abstract description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 118
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 118
- 239000010703 silicon Substances 0.000 claims abstract description 118
- 238000001039 wet etching Methods 0.000 claims abstract description 24
- 238000009941 weaving Methods 0.000 claims description 20
- 238000005096 rolling process Methods 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 210000002268 wool Anatomy 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000008216 herbs Nutrition 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a wafer jamming alarm method and system. The wafer jamming alarm method and system are used for giving alarms when wafer jamming happens to a texturing machine and a wet etching machine. The passing time T needed for a silicon wafer for to pass by a wafer inlet sensor and a wafer outlet sensor is first acquired; the silicon wafer first passes by the wafer inlet sensor, after the wafer inlet sensor detects the silicon wafer and the time T passes by, whether the wafer outlet sensor can detect the silicon wafer or not is judged, if the silicon wafer is detected, the silicon wafer passes by normally, and if the silicon wafer is not detected, it is determined that wafer jamming happens to a device, and a wafer jamming alarm signal is given out. According to the wafer jamming alarm method, whether wafer jamming happens in the device or not can be prompted accurately in time so that an operator can find out that wafer jamming happens in the device in time and carry out handling, loss is reduced to the minimum, cost is reduced, regular manual examination is avoided, the workload of the operator is reduced, and safety is improved. The invention further provides the wafer jamming alarm system using the wafer jamming alarm method.
Description
Technical field
The present invention relates to photovoltaic technology field, particularly relate to a kind of jam alarm method and system.
Background technology
Photovoltaic module utilizes application on a large scale of form as the one of solar energy, and has formed huge industry, and increasing photovoltaic module comes into operation, for the mankind are providing clean electric power energy.
Photovoltaic module utilizes glass plate, backboard and EVA packaged battery sheet, and cell piece is made up of silicon chip, and silicon chip is formed by silicon ingot cutting, then makes cell piece through techniques such as surface wool manufacturing, diffusion knot processed, wet etching, depositing antireflection film, printing-sinterings.Wherein, the equipment that making herbs into wool operation and wet etching operation are used is chain type production model, and silicon chip enters from one end of equipment, leaves, through having reacted making herbs into wool operation and wet etching operation with the liquid such as soda acid in the process of equipment from the other end.
Because soda acid liquid is dangerous liquid, so for security consideration, wool-weaving machine and wet etching machine are all designed to closing form in design, and, due to the environment of strong acid and strong base, be not easy at device interior sensor installation, once therefore there is jam accident, operating personnel are difficult to find in time, thereby can not make accident be resolved in time, serious waste production cost, affect product quality.
At present, conventionally adopt the method for artificial regular check to determine whether to occur jam phenomenon, because equipment seals, there are many uncertainties in the method for artificial regular check, can not ensure to find in time jam accident, in addition, hand inspection has also increased staff's workload frequently.
Therefore, how can find timely jam phenomenon, not increase again staff's workload, be that those skilled in the art are badly in need of the technical problem solving at present.
Summary of the invention
The object of this invention is to provide a kind of jam alarm method, whether this jam alarm method can there is jam in discovering device inside promptly and accurately, reminds operating personnel to find in time and process jam phenomenon.Another object of the present invention is to provide a kind of jam warning system of applying above-mentioned jam alarm method.
In order to realize above-mentioned technical purpose, the invention provides a kind of jam alarm method, report to the police for the jam of wool-weaving machine and wet etching machine, comprise the following steps:
1) obtain silicon chip through entering sheet transducer and slice transducer required pass through time T;
2) described in judgement, enter sheet transducer and described silicon chip whether detected, if so, enter step 3); If not, return to step 2);
3) judge the T time after described slice transducer described silicon chip whether detected, if so, return to step 2); If not, enter step 4);
4) send jam alarm signal.
Preferably, step 1) in also comprise:
11) enter the distance L between sheet transducer and described slice transducer described in obtaining;
12) obtain described silicon chip through described in enter the Negotiation speed V of sheet transducer and described slice transducer;
13) calculate the time T=L/V that passes through of described silicon chip according to distance L and Negotiation speed V.
Preferably, step 1) in also comprise:
14) make a silicon chip enter wool-weaving machine and wet etching machine, described in when entering sheet transducer and described silicon chip being detected, start timing;
15) when described slice transducer detects described silicon chip, timing finishes, and obtains the real time T' that described silicon chip passes through;
16) judge by time T whether equal real time T', if equal, enter step 2); If etc., do not return to step 11).
Preferably, step 4) in when sending jam alarm signal, control silicon chip and stop entering wool-weaving machine and wet etching machine.
The invention provides a kind of jam warning system, jam for wool-weaving machine and wet etching machine is reported to the police, comprise into sheet transducer, slice transducer, controller and alarm, described in enter sheet transducer, described slice transducer and described alarm and be all connected with described controller by holding wire; Described controller can obtain passing through the time of silicon chip, when described enter sheet transducer detect after described silicon chip, the signal of described silicon chip detected by after the time if described controller is not received described slice transducer through described, control described alarm and send jam alarm signal.
Preferably, described silicon chip moves by conveying roller, described controller according to described in enter distance between sheet transducer and described slice transducer and the velocity of rotation of described conveying roller obtains passing through the time of described silicon chip.
Preferably, the rotation of described conveying roller is by motor control, and described motor is connected with described controller by holding wire, so that described controller obtains the velocity of rotation of described conveying roller.
Preferably, when described alarm sends jam alarm signal, motor is out of service described in described controller control.
The invention provides a kind of jam alarm method, report to the police for the jam of wool-weaving machine and wet etching machine, first obtain silicon chip through entering sheet transducer and slice transducer required pass through time T; Silicon chip first, through entering sheet transducer, enters sheet transducer and detects after silicon chip, after the T time, judge whether slice transducer can detect silicon chip, if silicon chip detected, silicon chip normally passes through, if silicon chip do not detected, there is jam in equipment, sends jam alarm signal.
Silicon chip passes through wool-weaving machine and wet etching machine on conveying roller, enter the front end that sheet transducer is positioned at conveying roller, before silicon chip access arrangement first through entering sheet transducer, slice transducer is positioned at the rear end of conveying roller, silicon chip complete operation from equipment out through slice transducer.Enter sheet transducer and often detect that a silicon chip just passes to signal of controller, controller judges that after the T time whether slice transducer can detect silicon chip, comes judgment device inside with this whether jam has occurred.Whether this jam alarm method can there is jam in prompt facility promptly and accurately, makes the interior jam of the timely discovering device of operator and processes, and loss is dropped to minimum, reduce cost, avoid artificial regular check simultaneously, reduced operator's workload, and improved fail safe.
The present invention also provides a kind of jam warning system of applying above-mentioned jam alarm method, and this jam alarm method has above-mentioned technique effect, therefore this jam warning system also has corresponding technique effect.
Brief description of the drawings
Fig. 1 is the flow chart of a kind of embodiment of jam alarm method provided by the present invention;
Fig. 2 is the flow chart of the another kind of embodiment of jam alarm method provided by the present invention;
Fig. 3 is the structural representation of a kind of embodiment of jam warning system provided by the present invention.
Wherein, the corresponding relation between Reference numeral and the component names in Fig. 3 is as follows:
Conveying roller 1; Enter sheet transducer 2; Slice transducer 3; Alarm 4; Controller 5; Motor 6; Silicon chip 7.
Embodiment
Core of the present invention is to provide a kind of jam alarm method, and whether this jam alarm method can jam occur discovering device inside promptly and accurately, reminds operating personnel to find in time and process jam phenomenon.Another core of the present invention is to provide a kind of jam warning system of applying above-mentioned jam alarm method.
In order to make those skilled in the art person understand better the present invention program, below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Please refer to Fig. 1 and Fig. 2, Fig. 1 is the flow chart of a kind of embodiment of jam alarm method provided by the present invention, and Fig. 2 is the flow chart of the another kind of embodiment of jam alarm method provided by the present invention.
In a kind of concrete execution mode, the invention provides a kind of jam alarm method, report to the police for the jam of wool-weaving machine and wet etching machine, comprise the following steps:
Step S1: obtain silicon chip through entering sheet transducer and slice transducer required pass through time T;
Step S2: enter sheet transducer described in judgement and described silicon chip whether detected, if so, enter step S3; If not, return to step S2;
Step S3: after judging the T time, whether described slice transducer detects described silicon chip, if so, returns to step S2; If not, enter step S4;
Step S4: send jam alarm signal.
This jam alarm method, first obtain silicon chip 7 through entering sheet transducer 2 and slice transducer 3 required pass through time T; Silicon chip 7 first, through entering sheet transducer 2, enters sheet transducer 2 and detects after silicon chip 7, after the T time, judge whether slice transducer 3 can detect silicon chip 7, if silicon chip 7 detected, silicon chip 7 normally passes through, if silicon chip 7 do not detected, there is jam in equipment, sends jam alarm signal.
Silicon chip 7 passes through wool-weaving machine and wet etching machine on conveying roller 1, enter the front end that sheet transducer 2 is positioned at conveying roller 1, before silicon chip 7 access arrangements first through entering sheet transducer 2, slice transducer 3 is positioned at the rear end of conveying roller 1, silicon chip 7 complete operation from equipment out through slice transducer 3.Enter sheet transducer 2 and often detect that a silicon chip 7 just passes to 5 one signals of controller, controller 5 judges that after the T time whether slice transducer 3 can detect silicon chip 7, comes judgment device inside with this whether jam has occurred.
This jam alarm method is applied in wool-weaving machine and wet etching machine, can in prompt facility promptly and accurately, whether there is jam, make the interior jam of the timely discovering device of operator and process, loss is dropped to minimum, reduce cost, avoid artificial regular check simultaneously, reduced operator's workload, and improved fail safe.
In said method, silicon chip 7 pass through time T can be due to the difference of the Negotiation speed of silicon chip 7 difference, can gather the Negotiation speed V of silicon chip 7, obtain the time T of passing through of silicon chip 7 by the mode of calculating; Also can first make a silicon chip 7 pass through, the time of the passing through V of direct-detection silicon chip 7.
In another kind of concrete execution mode, jam alarm method provided by the invention comprises the following steps:
Step S11: enter the distance L between sheet transducer and described slice transducer described in obtaining;
Step S12: obtain described silicon chip through described in enter the Negotiation speed V of sheet transducer and described slice transducer;
Step S13: the time T=L/V that passes through that calculates described silicon chip according to distance L and Negotiation speed V.
Step S2: enter sheet transducer described in judgement and described silicon chip whether detected, if so, enter step S3; If not, return to step S2;
Step S3: after judging the T time, whether described slice transducer detects described silicon chip, if so, returns to step S2; If not, enter step S4;
Step S4: send jam alarm signal.
The distance L of entering between sheet transducer 2 and slice transducer 3 can be determined, can be also changeable, can arrange according to concrete needing.Silicon chip 7 passes through equipment conventionally on conveying roller 1, and the rolling speed of conveying roller 1 is the Negotiation speed V of silicon chip 7.
Each parts are all connected with controller 5 by holding wire, silicon chip 7 is by before equipment, first obtained into the distance L between sheet transducer 2 and slice transducer 3 by controller 5, controller 5 continues to obtain the rolling speed V of conveying roller 1, then, controller 5 can calculate silicon chip 7 normally by the required time T of passing through.In the equipment course of work, when silicon chip 7 passes through, controller 5, according to by time T and the detection signal that enters sheet transducer 2, slice transducer 3, judges whether whether device interior jam occurs.
One preferred embodiment in, step S1 comprises step:
Step S11: enter the distance L between sheet transducer and described slice transducer described in obtaining;
Step S12: obtain described silicon chip through described in enter the Negotiation speed V of sheet transducer and described slice transducer;
Step S13: the time T=L/V that passes through that calculates described silicon chip according to distance L and Negotiation speed V.
Step S14: make a silicon chip enter wool-weaving machine and wet etching machine, described in when entering sheet transducer and described silicon chip being detected, start timing;
Step S15: when described slice transducer detects described silicon chip, timing finishes, obtains the real time T' that described silicon chip passes through;
Step S16: judge by time T whether equal real time T', if equal, enter step S2; If etc., do not return to step S11.
Obtain by the way passing through after time T of silicon chip 7, first utilize a silicon chip 7 to test the real time T' that a lower silicon slice 7 passes through, contrast by time T and real time T', if the two is identical or in the error range allowing, equipment is started working; If the two differs greatly, again obtain the time T of passing through of silicon chip 7.
In another kind of concrete execution mode, when sending jam alarm signal in step S4, control silicon chip and stop entering wool-weaving machine and wet etching machine.
While there is jam phenomenon, when alarm sends jam alarm signal, control appliance is out of service, avoids more silicon chip 7 access arrangements, avoids silicon chip 7 to pile up in equipment, causes serious waste.
Please refer to Fig. 3, Fig. 3 is the structural representation of a kind of embodiment of jam warning system provided by the present invention.
In a kind of concrete execution mode, the invention provides a kind of jam warning system, jam for wool-weaving machine and wet etching machine is reported to the police, comprise into sheet transducer 2, slice transducer 3, controller 5 and alarm 4, enter sheet transducer 2, slice transducer 3 and alarm 4 and be all connected with controller 5 by holding wire; Controller 5 can obtain passing through the time of silicon chip 7, detects after silicon chip 7 when entering sheet transducer 2, through by after the time, the signal of silicon chip 7 detected if controller 5 is not received slice transducer 3, controls alarm 4 and sends jam alarm signal.
Enter the two ends that sheet transducer 2 and slice transducer 3 lay respectively at the conveying roller 1 of wool-weaving machine and wet etching machine, controller 5 can, by entering sheet transducer 2, slice transducer 3 and judging whether to occur jam by the time, send jam alarm signal to control alarm 4.
Silicon chip 7 passes through wool-weaving machine and wet etching machine on conveying roller 1, enter the front end that sheet transducer 2 is positioned at conveying roller 1, before silicon chip 7 access arrangements first through entering sheet transducer 2, slice transducer 3 is positioned at the rear end of conveying roller 1, silicon chip 7 complete operation from equipment out through slice transducer 3.
It is normal by the required time T of passing through that controller 5 first obtains silicon chip 7, silicon chip 7 is through out-of-date, first through entering sheet transducer 2, entering sheet transducer 2 detects after silicon chip 7, signal is passed to controller 5, after the T time, controller 5 judges whether slice transducer 3 transmits the signal that silicon chip 7 detected, if silicon chip 7 normally passes through,, after the T time, slice transducer 3 can detect silicon chip 7, otherwise, be that jam phenomenon has occurred device interior, controller 5 is just controlled alarm 4 and is sent jam alarm signal.
Enter sheet transducer 2 and often detect that a silicon chip 7 just passes to 5 one signals of controller, controller 5 judges that after the T time whether slice transducer 3 can detect silicon chip 7, comes judgment device inside with this whether jam has occurred.
This jam warning system is applied in wool-weaving machine and wet etching machine, can whether there is jam in discovering device inside promptly and accurately, remind operating personnel to find in time and process jam phenomenon, loss is dropped to minimum, reduce cost, avoid artificial regular check simultaneously, reduced operator's workload.
Concrete, silicon chip 7 moves by conveying roller 1, controller 5 according to enter distance between sheet transducer 2 and slice transducer 3 and conveying roller 1 velocity of rotation acquisition silicon chip 7 pass through time T.
The distance L of entering between sheet transducer 2 and slice transducer 3 can be determined, also can be changeable, can arrange according to concrete needing, the two is all connected with controller 5 by holding wire, and controller 5 can obtain into the distance L between sheet transducer 2 and slice transducer 3.
Silicon chip 7 passes through equipment conventionally on conveying roller 1, and the rolling speed of conveying roller 1 is the Negotiation speed V of silicon chip 7, and controller 5 also can obtain the rolling speed V of conveying roller 1, i.e. the Negotiation speed V of silicon chip 7.
Further, the rotation of conveying roller 1 is controlled by motor 6, and motor 6 is connected with controller 5 by holding wire, and the output speed of motor 6 can pass to controller 5 by holding wire, so that controller 5 obtains the velocity of rotation of conveying roller 1.
Concrete, when alarm 4 sends jam alarm signal, it is out of service that controller 5 is controlled motor 6.While there is jam phenomenon, when alarm 4 sends jam alarm signal, control appliance is out of service, avoids more silicon chip 7 access arrangements, avoid jam after more silicon chip 7 in equipment, pile up, cause waste.
Above jam alarm method provided by the present invention and system are described in detail.Applied specific case herein principle of the present invention and execution mode are set forth, the explanation of above embodiment is just for helping to understand method of the present invention and core concept thereof.It should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention, can also carry out some improvement and modification to the present invention, these improvement and modification also fall in the protection range of the claims in the present invention.
Claims (8)
1. a jam alarm method, reports to the police for the jam of wool-weaving machine and wet etching machine, it is characterized in that, comprises the following steps:
1) obtain silicon chip through entering sheet transducer and slice transducer required pass through time T;
2) described in judgement, enter sheet transducer and described silicon chip whether detected, if so, enter step 3); If not, return to step 2);
3) judge the T time after described slice transducer described silicon chip whether detected, if so, return to step 2); If not, enter step 4);
4) send jam alarm signal.
2. jam alarm method as claimed in claim 1, is characterized in that step 1) in also comprise:
11) enter the distance L between sheet transducer and described slice transducer described in obtaining;
12) obtain described silicon chip through described in enter the Negotiation speed V of sheet transducer and described slice transducer;
13) calculate the time T=L/V that passes through of described silicon chip according to distance L and Negotiation speed V.
3. jam alarm method as claimed in claim 2, is characterized in that step 1) in also comprise:
14) make a silicon chip enter wool-weaving machine and wet etching machine, described in when entering sheet transducer and described silicon chip being detected, start timing;
15) when described slice transducer detects described silicon chip, timing finishes, and obtains the real time T' that described silicon chip passes through;
16) judge by time T whether equal real time T', if equal, enter step 2); If etc., do not return to step 11).
4. the jam alarm method as described in claims 1 to 3 any one, is characterized in that step 4) in when sending jam alarm signal, control silicon chip and stop entering wool-weaving machine and wet etching machine.
5. a jam warning system, jam for wool-weaving machine and wet etching machine is reported to the police, it is characterized in that, comprise into sheet transducer (2), slice transducer (3), controller (5) and alarm (4), described in enter sheet transducer (2), described slice transducer (3) and described alarm (4) and be all connected with described controller (5) by holding wire; Described controller (5) can obtain passing through the time of silicon chip (7), when described enter sheet transducer (2) detect after described silicon chip (7), pass through after the time through described, if do not receive, described slice transducer (3) detects the signal of described silicon chip (7) to described controller (5), controls described alarm (4) and sends jam alarm signal.
6. jam warning system as claimed in claim 5, it is characterized in that, described silicon chip (7) is mobile by conveying roller (1), described controller (5) according to described in enter distance between sheet transducer (2) and described slice transducer (3) and the velocity of rotation of described conveying roller (1) obtains passing through the time of described silicon chip (7).
7. jam warning system as claimed in claim 6, it is characterized in that, the rotation of described conveying roller (1) is controlled by motor (6), described motor (6) is connected with described controller (5) by holding wire, so that described controller (5) obtains the velocity of rotation of described conveying roller (1).
8. jam warning system as claimed in claim 7, is characterized in that, when described alarm (4) sends jam alarm signal, it is out of service that described controller (5) is controlled described motor (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410448637.7A CN104183671B (en) | 2014-09-04 | 2014-09-04 | A kind of jam alarm method and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410448637.7A CN104183671B (en) | 2014-09-04 | 2014-09-04 | A kind of jam alarm method and system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104183671A true CN104183671A (en) | 2014-12-03 |
| CN104183671B CN104183671B (en) | 2016-03-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410448637.7A Expired - Fee Related CN104183671B (en) | 2014-09-04 | 2014-09-04 | A kind of jam alarm method and system |
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| CN (1) | CN104183671B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110544642A (en) * | 2019-09-06 | 2019-12-06 | 通威太阳能（成都）有限公司 | Method for preventing battery piece from falling and having no warning |
| CN112766435A (en) * | 2020-12-31 | 2021-05-07 | 通威太阳能（合肥）有限公司 | Tracing method applied to solar cell production |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202321642U (en) * | 2011-12-12 | 2012-07-11 | 天威新能源控股有限公司 | Roller for conveying silicon slices in silicon etching process |
| CN203225239U (en) * | 2013-05-07 | 2013-10-02 | 上海华力微电子有限公司 | Groove type wet method device |
-
2014
- 2014-09-04 CN CN201410448637.7A patent/CN104183671B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202321642U (en) * | 2011-12-12 | 2012-07-11 | 天威新能源控股有限公司 | Roller for conveying silicon slices in silicon etching process |
| CN203225239U (en) * | 2013-05-07 | 2013-10-02 | 上海华力微电子有限公司 | Groove type wet method device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110544642A (en) * | 2019-09-06 | 2019-12-06 | 通威太阳能（成都）有限公司 | Method for preventing battery piece from falling and having no warning |
| CN112766435A (en) * | 2020-12-31 | 2021-05-07 | 通威太阳能（合肥）有限公司 | Tracing method applied to solar cell production |
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| Publication number | Publication date |
|---|---|
| CN104183671B (en) | 2016-03-23 |
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Granted publication date: 20160323 |