CN202291966U - Auxiliary device for assembling upright furnace body - Google Patents

Auxiliary device for assembling upright furnace body Download PDF

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Publication number
CN202291966U
CN202291966U CN 201120381260 CN201120381260U CN202291966U CN 202291966 U CN202291966 U CN 202291966U CN 201120381260 CN201120381260 CN 201120381260 CN 201120381260 U CN201120381260 U CN 201120381260U CN 202291966 U CN202291966 U CN 202291966U
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CN
China
Prior art keywords
furnace body
servicing unit
hole
vertical body
regulating block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 201120381260
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Chinese (zh)
Inventor
孙少东
赵燕平
董金卫
钟华
赵星梅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
North China Science And Technology Group Ltd By Share Ltd
Beijing Naura Microelectronics Equipment Co Ltd
Original Assignee
Beijing Sevenstar Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Beijing Sevenstar Electronics Co Ltd filed Critical Beijing Sevenstar Electronics Co Ltd
Priority to CN 201120381260 priority Critical patent/CN202291966U/en
Application granted granted Critical
Publication of CN202291966U publication Critical patent/CN202291966U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model discloses an auxiliary device for assembling an upright furnace body, and belongs to the technical field of upright assembling for the furnace body in semi-conductor processing equipment. The auxiliary device comprises a supporting fixing block (1) and a gap adjusting block (2), wherein, a sliding chute (3) is formed on the upper surface of the supporting fixing block (1); in addition, the gap adjusting block (2) is arranged in the sliding chute (3), and is used for adjusting a gap formed between the upper surface of the supporting fixing block (1) and the bottom part of the furnace body. The auxiliary device supports the furnace body and positions an outer wall of the furnace body when the upright furnace body is assembled, can improve the stability of the furnace body during the assembling process, can bring convenience to the assembly of the outer wall of the furnace body at the same time, and can greatly reduce the assembling difficulty of the outer wall of the furnace body.

Description

Vertical body of heater assembling servicing unit
Technical field
The utility model relates to the vertical mounting technology field of body of heater in the semiconductor manufacturing equipment, relates in particular to a kind of vertical body of heater assembling servicing unit.
Background technology
In the vertical assembling process of body of heater, because the welding of body of heater needs certain space, body of heater is understood some and is in vacant state, need support overhanging portion, could obtain more firm state.Simultaneously, the installation difficulty of furnace body outer wall is bigger, and especially the location of outer wall is a complex process of debugging repeatedly, wastes time and energy, and the assembling effect is also not ideal enough.
The utility model content
The technical problem that (one) will solve
The technical problem that the utility model will solve is: a kind of vertical body of heater assembling servicing unit is provided; It can be when vertical body of heater assembles; Body of heater is supported, furnace body outer wall is positioned; The soundness of body of heater in assembling process strengthened, greatly reduce the assembly difficulty of furnace body outer wall, practice thrift furnace body outer wall assembling consumed time and energy.
(2) technical scheme
For addressing the above problem, the utility model provides a kind of vertical body of heater assembling servicing unit, comprising: support fixation piece, gap regulating block, wherein,
The upper surface of said support fixation piece is provided with chute;
Said gap regulating block is located in the said chute, is used to regulate the gap of the upper surface and the bottom of furnace body of said support fixation piece.
Preferably, the working face of said gap regulating block is the inclined-plane.
Preferably, said gap regulating block is provided with slotted hole, is used to regulate the position of described gap regulating block.
Preferably, be provided with the hole in the said chute, be used for fixing said gap regulating block.
Preferably; Also comprise the outer wall location-plate; Be font; Be installed on the upper surface of said support fixation piece, be used for outer wall is positioned, supports.
Preferably, the height of said gap regulating block is not less than the degree of depth of chute.
Preferably, the height of said gap regulating block is greater than the degree of depth of chute, and said outer wall location-plate is provided with the structure breach, and the height of said structure breach is not less than the height that gap regulating block exposes chute.
Preferably, said outer wall location-plate is provided with the hole, is used to connect outer wall.
Preferably, said hole is a slotted hole, is used to absorb outer wall location-plate and outer wall the corresponding mounting hole error in height.
Preferably, said outer wall location-plate is provided with the hole, and the upper surface of said support fixation piece is provided with the hole, is used to make said outer wall location-plate to fix.
Preferably, said hole is a slotted hole, is used to regulate the radial position of outer wall location-plate along body of heater.
Preferably, the upper surface of said support fixation piece is provided with the hole, is used for fixing said device.
Preferably, plane, place, said hole is lower than plane, said chute place.
Preferably, the material of said support fixation piece, gap regulating block comprises stainless steel.
Preferably, the material of said outer wall location-plate comprises stainless steel.
(3) beneficial effect
When the utility model assembles at vertical body of heater; Can support, furnace body outer wall is positioned body of heater; The soundness of body of heater in assembling process strengthened; For the assembling of furnace body outer wall has brought facility, greatly reduce the assembly difficulty of furnace body outer wall simultaneously, practiced thrift furnace body outer wall and assembled required consumed time and energy; Simultaneously can guarantee that also the body of heater that is assembled all has uniformity preferably; In addition, the gap regulating block of the utility model can be adjusted the gap that support fixation piece and bottom of furnace body possibly occur, and the soundness of body of heater is further strengthened.
Description of drawings
Fig. 1 is the structural representation of vertical body of heater assembling servicing unit described in the utility model embodiment;
Fig. 2 is the structural representation of support fixation piece described in the utility model embodiment;
Fig. 3 is the structural representation of outer wall location-plate described in the utility model embodiment;
Fig. 4 is the structural representation of gap regulating block described in the utility model embodiment.
The specific embodiment
Below in conjunction with accompanying drawing and embodiment, the specific embodiment of the utility model is described in further detail.Following examples are used to explain the utility model, but are not used for limiting the scope of the utility model.
Shown in Fig. 1-4, the described vertical body of heater assembling servicing unit of the utility model comprises: support fixation piece 1, gap regulating block 2, wherein,
The upper surface of said support fixation piece 1 is provided with chute 3;
Said gap regulating block 2 is located in the said chute 3, is used to regulate the gap of the upper surface and the bottom of furnace body of said support fixation piece 1.
Preferably, the working face of said gap regulating block 2 is the inclined-plane.The inclined-plane through with the inconsistent gap of regulating the upper surface and the bottom of furnace body of said support fixation piece 1 of bottom of furnace body.
Preferably, said gap regulating block 2 is provided with slotted hole 4, is used to regulate the position of described gap regulating block 2.
Preferably, be provided with hole 5 in the said chute 3, be used for fixing said gap regulating block 2.
Preferably; Also comprise outer wall location-plate 6; Be
Figure BDA0000097176810000031
font; Be installed on the upper surface of said support fixation piece 1, be used for outer wall is positioned, supports.
The inclined-plane of said gap regulating block 2 is adjustable to outside the side of said outer wall location-plate 6.Inclined working to guarantee gap regulating block 2 can arrive the body of heater bottom in the Shen.
Preferably, the height of said gap regulating block 2 is not less than the degree of depth of said chute 3.
Preferably, the height of said gap regulating block 2 is greater than the degree of depth of said chute 3, and said outer wall location-plate 6 is provided with the structure breach, and the height of said structure breach is not less than the height that gap regulating block 2 exposes chute 3.
Preferably, said outer wall location-plate 6 is provided with hole 7, is used to connect outer wall.
Preferably, said hole 7 is a slotted hole, is used to absorb outer wall location-plate 6 and outer wall the corresponding mounting hole error in height.
Preferably, said outer wall location-plate 6 is provided with hole 8, and the upper surface of said support fixation piece 1 is provided with hole 9, is used to make said outer wall location-plate 6 to fix.
Preferably, said hole 8 is a slotted hole, is used to regulate the radial position of outer wall location-plate 6 along body of heater.
Preferably, the upper surface of said support fixation piece 1 is provided with hole 10, is used for fixing said device.
Preferably, plane, 10 place, said hole is lower than plane, said chute 3 place.
Preferably, the material of said support fixation piece 1, gap regulating block 2 comprises stainless steel.
Preferably, the material of said outer wall location-plate 6 comprises stainless steel.
Above embodiment only is used to explain the utility model; And be not the restriction to the utility model; The those of ordinary skill in relevant technologies field under the situation of spirit that does not break away from the utility model and scope, can also be made various variations and modification; Therefore all technical schemes that are equal to also belong to the category of the utility model, and the scope of patent protection of the utility model should be defined by the claims.

Claims (15)

1. a vertical body of heater assembling servicing unit is characterized in that, comprising: support fixation piece (1), gap regulating block (2), wherein,
The upper surface of said support fixation piece (1) is provided with chute (3);
Said gap regulating block (2) is located in the said chute (3).
2. vertical body of heater assembling servicing unit as claimed in claim 1 is characterized in that the working face of said gap regulating block (2) is the inclined-plane.
3. vertical body of heater assembling servicing unit as claimed in claim 1 is characterized in that said gap regulating block (2) is provided with slotted hole (4).
4. vertical body of heater assembling servicing unit as claimed in claim 1 is characterized in that, is provided with hole (5) in the said chute (3).
5. vertical body of heater assembling servicing unit as claimed in claim 1 is characterized in that, also comprises outer wall location-plate (6), is " L " font, is installed on the upper surface of said support fixation piece (1).
6. vertical body of heater assembling servicing unit as claimed in claim 5 is characterized in that the height of said gap regulating block (2) is not less than the degree of depth of chute (3).
7. vertical body of heater assembling servicing unit as claimed in claim 6; It is characterized in that; The height of said gap regulating block (2) is greater than the degree of depth of said chute (3); Said outer wall location-plate (6) is provided with the structure breach, and the height of said structure breach is not less than gap regulating block (2) and exposes the height of chute (3).
8. vertical body of heater assembling servicing unit as claimed in claim 5 is characterized in that said outer wall location-plate (6) is provided with hole (7).
9. vertical body of heater assembling servicing unit as claimed in claim 8 is characterized in that said hole (7) are slotted hole.
10. vertical body of heater assembling servicing unit as claimed in claim 5 is characterized in that said outer wall location-plate (6) is provided with hole (8), and the upper surface of said support fixation piece (1) is provided with hole (9).
11. vertical body of heater assembling servicing unit as claimed in claim 10 is characterized in that said hole (8) are slotted hole.
12. vertical body of heater assembling servicing unit as claimed in claim 1 is characterized in that the upper surface of said support fixation piece (1) is provided with hole (10).
13. vertical body of heater assembling servicing unit as claimed in claim 13 is characterized in that plane, said hole (10) place is lower than plane, said chute (3) place.
14., it is characterized in that the material of said support fixation piece (1), gap regulating block (2) comprises stainless steel like the arbitrary described vertical body of heater assembling servicing unit of claim 1-13.
15., it is characterized in that the material of said outer wall location-plate (6) comprises stainless steel like the arbitrary described vertical body of heater assembling servicing unit of claim 5-11.
CN 201120381260 2011-10-09 2011-10-09 Auxiliary device for assembling upright furnace body Expired - Lifetime CN202291966U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201120381260 CN202291966U (en) 2011-10-09 2011-10-09 Auxiliary device for assembling upright furnace body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201120381260 CN202291966U (en) 2011-10-09 2011-10-09 Auxiliary device for assembling upright furnace body

Publications (1)

Publication Number Publication Date
CN202291966U true CN202291966U (en) 2012-07-04

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Country Status (1)

Country Link
CN (1) CN202291966U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104802880A (en) * 2015-05-06 2015-07-29 安徽安凯汽车股份有限公司 Clearance control tool for front bumper of passenger car
CN105666011A (en) * 2016-04-07 2016-06-15 安徽安凯汽车股份有限公司 Novel fan transmission mechanism support welding positioning structure and positioning method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104802880A (en) * 2015-05-06 2015-07-29 安徽安凯汽车股份有限公司 Clearance control tool for front bumper of passenger car
CN105666011A (en) * 2016-04-07 2016-06-15 安徽安凯汽车股份有限公司 Novel fan transmission mechanism support welding positioning structure and positioning method

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CP03 Change of name, title or address
CP03 Change of name, title or address

Address after: 100016 Jiuxianqiao East Road, Beijing, No. 1, No.

Patentee after: North China Science and technology group Limited by Share Ltd.

Address before: 100016, No. 1, Jiuxianqiao East Road, Beijing, Chaoyang District, building No. 2, M2

Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd.

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20180316

Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No.

Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd.

Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No.

Patentee before: North China Science and technology group Limited by Share Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20120704