CN202284945U - Warpage detection instrument for ceramic base plate - Google Patents
Warpage detection instrument for ceramic base plate Download PDFInfo
- Publication number
- CN202284945U CN202284945U CN2011204099075U CN201120409907U CN202284945U CN 202284945 U CN202284945 U CN 202284945U CN 2011204099075 U CN2011204099075 U CN 2011204099075U CN 201120409907 U CN201120409907 U CN 201120409907U CN 202284945 U CN202284945 U CN 202284945U
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- China
- Prior art keywords
- flat plate
- uplink
- downlink
- flat board
- fixed
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a warpage detection instrument for a ceramic base plate. The warpage detection instrument comprises a foundation which is fixed with two supports vertical to the foundation; the supports are fixed with an up flat plate and a down flat plate which are parallel to each other; the up flat plate is arranged above the down flat plate; the up flat plate and the down flat plate are provided with an upper ceramic plate and a lower ceramic plate respectively; locking nuts are fixed between the up flat plate and the down flat plate; and a gap is reserved between the up flat plate and the down flat plate; the width of the gap is equal to the thickness of the ceramic base plate; and included angles are formed between the up and down flat plates and the foundation. When the ceramic base plate passes through the upper and lower ceramic plates which are parallel to each other, whether the required parallelism can be met can be detected. By using a dial indicator, the accuracy can be controlled, the detection accuracy can be guaranteed, time and labor are saved, and detection efficiency is greatly improved.
Description
Technical field
The utility model relates to a kind of ceramic substrate with bent set-back detector, relates in particular to a kind of detector that detects the ceramic substrate depth of parallelism.
Background technology
Ceramic substrate is meant that Copper Foil at high temperature is bonded directly to the special process plate on aluminium oxide or the aluminium nitride ceramics substrate surface (single or double).Ceramic substrate has become the basic material of high-power electric and electronic circuit structure technology and interconnection technique.Ceramic substrate need guarantee its depth of parallelism in use, and whether existing manual detect is difficult to measure accurately between its four tops keeping parallelism.
The utility model content
The purpose of the utility model is to solve above-mentioned technical matters, proposes a kind of ceramic substrate with bent set-back detector.
The purpose of the utility model will be achieved through following technical scheme:
A kind of ceramic substrate is with bent set-back detector; Comprise a base, perpendicularly on the said base be fixed with two supports, it is dull and stereotyped to be fixed with the uplink and downlink that are arranged in parallel on the said support; Said up flat board is arranged on the top of descending flat board; Be fixed with upper and lower ceramic wafer respectively on the said uplink and downlink flat board, be fixed with set nut between said uplink and downlink flat board, be provided with the gap between the said uplink and downlink flat board; The width in said gap equates that with the thickness of said ceramic substrate said uplink and downlink are dull and stereotyped to form angle with base.
Preferably, the dull and stereotyped both sides of said uplink and downlink are respectively arranged with two and are used to regulate the setting nut between the uplink and downlink flat board, and said setting nut is provided with four, and said set nut is provided with two, is separately fixed between the setting nut of a side.
Preferably, four ends of said up flat board are respectively arranged with a clock gauge, and the measuring staff of said clock gauge passes up flat board perpendicular to descending planar surface.
The beneficial effect of the utility model is mainly reflected in: when ceramic substrate can detect whether meet the required depth of parallelism through the parallel plate of ceramic wafer up and down.Utilize clock gauge to accomplish the control of precision, guaranteed the accuracy that detects, time saving and energy saving, improved detection efficiency greatly.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Embodiment
The utility model provides a kind of ceramic substrate with bent set-back detector, and is as shown in Figure 1, comprises a base 1, perpendicularly on the said base 1 is fixed with two supports 11, and 11 on said support laterally arranges.It is dull and stereotyped to be fixed with the uplink and downlink that are arranged in parallel on the said support 11; Said up dull and stereotyped 21 are arranged on descending dull and stereotyped 22 top; Be to guarantee the shiny surface between the uplink and downlink flat board, be fixed with ceramic wafer 31 on said up dull and stereotyped 21, fixing time ceramic wafer 32 on descending dull and stereotyped 22.For ceramic substrate can lean on the gravity landing, be not parallel setting between said uplink and downlink flat board and the base 1, need to form certain included angle.
Be provided with four setting nuts 42 that are used to regulate its spacing between said uplink and downlink flat board, the dull and stereotyped both sides of uplink and downlink are set respectively.Also be provided with the set nut 41 that is used for fixing the uplink and downlink flat board between said uplink and downlink flat board, said set nut 41 is provided with two, is separately fixed between the setting nut 42 of a side.
Four ends of said up dull and stereotyped 21 are respectively arranged with a clock gauge 5, and the measuring staff of said clock gauge 5 passes up dull and stereotyped 21 perpendicular to descending dull and stereotyped 22 surfaces.
Following mask body is set forth the method for application of the utility model down:
Step 2, adjusting detector.Unclamp set nut 41, adjust four setting nuts 42, upper and lower ceramic wafer is fit together, this moment, two sheet separations were 0.Adjust four clock gauges 5, it is made zero.Adjust setting nut 42 successively, and observe clock gauge 5 readings of corresponding angles, make four jiaos all to reach the prepsetting gap value gradually, with set nut 41 lockings.
Step 3, detection ceramic substrate.Ceramic substrate to be measured is put into from the gap of upper and lower ceramic wafer, and substrate passes the sheet separation under action of gravity.
Step 4, judgement detect qualified ceramic substrate.If ceramic substrate can pass through, then its bent set-back is qualified; If can not can sort out bent set-back specification product with this through promptly defective.
The utility model still has numerous embodiments, and all employing equivalents or equivalent transformation and all technical schemes of forming all drop within the protection domain of the utility model.
Claims (3)
1. a ceramic substrate is with bent set-back detector; Comprise a base, it is characterized in that: perpendicularly on the said base be fixed with two supports, it is dull and stereotyped to be fixed with the uplink and downlink that are arranged in parallel on the said support; Said up flat board is arranged on the top of descending flat board; Be fixed with upper and lower ceramic wafer respectively on the said uplink and downlink flat board, be fixed with set nut between said uplink and downlink flat board, be provided with the gap between the said uplink and downlink flat board; The width in said gap equates that with the thickness of said ceramic substrate said uplink and downlink are dull and stereotyped to form angle with base.
2. ceramic substrate according to claim 1 is with bent set-back detector; It is characterized in that: the dull and stereotyped both sides of said uplink and downlink are respectively arranged with two and are used to regulate the setting nut between the uplink and downlink flat board; Said setting nut is provided with four; Said set nut is provided with two, is separately fixed between the setting nut of a side.
3. ceramic substrate according to claim 2 is characterized in that with bent set-back detector: four ends of said up flat board are respectively arranged with a clock gauge, and the measuring staff of said clock gauge passes up flat board perpendicular to descending planar surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204099075U CN202284945U (en) | 2011-10-25 | 2011-10-25 | Warpage detection instrument for ceramic base plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204099075U CN202284945U (en) | 2011-10-25 | 2011-10-25 | Warpage detection instrument for ceramic base plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202284945U true CN202284945U (en) | 2012-06-27 |
Family
ID=46296464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204099075U Expired - Fee Related CN202284945U (en) | 2011-10-25 | 2011-10-25 | Warpage detection instrument for ceramic base plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202284945U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111307023A (en) * | 2018-12-12 | 2020-06-19 | 奇景光电股份有限公司 | Parallelism measuring device and method |
-
2011
- 2011-10-25 CN CN2011204099075U patent/CN202284945U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111307023A (en) * | 2018-12-12 | 2020-06-19 | 奇景光电股份有限公司 | Parallelism measuring device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120627 Termination date: 20151025 |
|
| EXPY | Termination of patent right or utility model |