CN202284206U - High-resolution biosensor - Google Patents
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- CN202284206U CN202284206U CN2011202780599U CN201120278059U CN202284206U CN 202284206 U CN202284206 U CN 202284206U CN 2011202780599 U CN2011202780599 U CN 2011202780599U CN 201120278059 U CN201120278059 U CN 201120278059U CN 202284206 U CN202284206 U CN 202284206U
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Abstract
The utility model discloses a high-resolution biosensor. The biosensor comprises an electrical conductive material and a micro-nano fluid device, wherein the electrical conductive material with an atomic scale serves as a sensitive unit; as the sensitive unit is arranged, an atomic-scale detection resolution is reached; and as the micro-nano fluid device is arranged, the motion and the morphological structures of detected molecules are controlled. A second electrophoresis electrode or micro-pump, a second storeroom, a second micro-nano separation channel, a substrate, a first insulation layer, a sensitive function layer, a second insulation layer, a first micro-nano separation channel, a first storeroom, and a first electrophoresis electrode or micro-pump are placed in sequence, wherein a nano hole is formed in the center of the sensitive function layer; a first insulation layer opening is formed in the center of the first insulation layer; a second insulation layer opening is formed in the center of the second insulation layer; a substrate opening is formed in the center of the substrate; and an electrical contact layer for measuring electrical signals is arranged on the sensitive function layer. By adopting the sensitive function layer of an atomic layer thickness of the biosensor, the resolution of the sensor reaches the atomic scale; as the sensitive function layer is integrated with the micro-nano fluid device, the motion and the morphological structure of deoxyribonucleic acid (DNA) or ribonucleic acid (RNA) can be controlled, so that steady signal detection can be realized.
Description
Technical field
The utility model relates to transmitter, relates in particular to a kind of high-resolution biosensor.
Background technology
Advantages such as gene electronics order-checking has the accuracy height, cost is low and speed is fast, nanoporous (nanopore) is the technology of the maximum a kind of unit molecule gene electronics order-checking of research at present.Nanoporous is expected to and can surveys and characterising biological molecule such as DNA in the unit molecule level of resolution; RNA and gather peptide; Potential does not need fluorescent marker based on the unit molecule gene sequencing technology of nanoporous, does not need PCR reaction, be expected to can be directly and quick " reading " go out the base sequence of DNA or RNA; This sequencing technologies is expected to reduce greatly the order-checking cost, realizes personalized medicine.Yet the nanoporous technology also faces many challenges: be difficult to the hole of preparation aperture less than 2 nm such as present technology; How to reduce the speed that DNA passes through nanoporous? Structural form when how to control DNA and passing through nanoporous? How the electrode of atomic size is integrated in nanoporous and reaches the resolving power of single base? The technical barrier that faces in order to solve, the patent of invention of applicant (publication number: JP2011-45944; Application number: 201110097791.0) proposed to adopt conductive laminated material such as Graphene with atomic layer level thickness and reach the resolving power of single base, and adopted the structure of micro-nano fluid device and control the motion of dna molecular; Yet, the structure more complicated of these devices.
Summary of the invention
The purpose of the utility model is the deficiency that overcomes prior art, provides a kind of structure very simple high-resolution biosensor.For this reason, the utility model adopts following technical scheme:
A kind of high-resolution biosensor, it is characterized in that comprising can detect by the electric sensitive function unit of analyzing molecules with can control by the micro-nano fluid device of analyzing molecules motion.
On the basis of adopting technique scheme, the utility model also can adopt following further technical scheme:
Described micro-nano fluid device comprises the first micro-nano split tunnel, the second micro-nano split tunnel, first storage room, second storage room, first iontophoretic electrode or Micropump, second iontophoretic electrode or Micropump; Described second iontophoretic electrode or Micropump, second storage room, the second micro-nano split tunnel, first insulation layer, sensitive function layer, second insulation layer, the first micro-nano split tunnel, first storage room, first iontophoretic electrode or Micropump are placed in order; The sensitive function collection of units is formed between the first micro-nano split tunnel and the second micro-nano split tunnel of micro-nano fluid device.On device architecture; Integrated meaning is arranged at electric sensitive function unit in the micro-nano fluid device; On function, integratedly be presented as that having electric sensitive function unit and micro-nano fluid device different and mutually can not substituted function can make described biosensor can reach the purpose that associated molecule is analyzed on high resolution ground; Through integrated, when by the molecule analyzed in micro-nano fluid channel during controlled motion, the electric sensitive function unit that is arranged in the micro-nano fluid device can accurately detect the electric property of molecule in micro-nano fluid channel of being analyzed.
Described electric sensitive function unit comprises first insulation layer, sensitive function layer, second insulation layer; The sensitive function layer is located between first insulation layer and second insulation layer; The sensitive function layer is provided with nanoporous; First insulation layer is provided with first insulating layer perforating, and second insulation layer is provided with second insulating layer perforating; Described micro-nano fluid device comprises the first micro-nano split tunnel, the second micro-nano split tunnel, first storage room, second storage room, first iontophoretic electrode or Micropump, second iontophoretic electrode or Micropump.
Described second iontophoretic electrode or Micropump, second storage room, the second micro-nano split tunnel, first insulation layer, sensitive function layer, second insulation layer, the first micro-nano split tunnel, first storage room, first iontophoretic electrode or Micropump are placed in order; The center of the nanoporous of the described second micro-nano split tunnel, first insulating layer perforating, sensitive function layer, the first micro-nano split tunnel and second insulating layer perforating is on the same central axis.
Described electric sensitive function unit comprises first insulation layer, sensitive function layer, second insulation layer, and the sensitive function layer is located between first insulation layer and second insulation layer; Described micro-nano fluid device comprises the first micro-nano split tunnel, the second micro-nano split tunnel, first storage room, second storage room, first iontophoretic electrode and second iontophoretic electrode; Said biosensor comprises substrate, and the center of substrate is provided with base openings; Second iontophoretic electrode or Micropump, second storage room, the second micro-nano split tunnel, substrate, first insulation layer, sensitive function layer, second insulation layer, the first micro-nano split tunnel, first storage room, first iontophoretic electrode or Micropump are placed in order; The center of second insulation layer is provided with second insulating layer perforating, and the center of sensitive function layer is provided with nanoporous, and the center of first insulation layer is provided with first insulating layer perforating; The center of the nanoporous of the second micro-nano split tunnel, base openings, first insulating layer perforating, sensitive function layer, the first micro-nano split tunnel and second insulating layer perforating is on the same central axis.
Described sensitive function layer is provided with the coupled electric contacting layer that connects.
The material of described sensitive function layer is a layered conductive material, and the thickness of described sensitive function layer is 0.2～30 nm, and more excellent is 0.2～10 nm, and optimum is 0.2～1 nm.
The material of described sensitive function layer is a graphene film, and the number of plies of described graphene film is the 1-100 layer, and more excellent is 1～30 nm, and optimum is 1～3 layer.
The nanoporous of described sensitive function layer is circular hole, ellipse or Polygons, and the aperture of nanoporous is 1～100 nm, and optimum is 1～20 nm.
The shape of cross section of described first insulating layer perforating, second insulating layer perforating and the first micro-nano split tunnel and the second micro-nano split tunnel is circle, ellipse or Polygons; The aperture is 1～30 mm; More excellent is 1～10 mm, and optimum is 1～20 nm.
The sensitive function layer of the utility model can reach the resolution requirement that detects the single base among single stranded DNA or the RNA; The micro-nano fluid device of the utility model, the speed in the time of can controlling DNA or RNA and pass through nanoporous, control base and sensitive function layer interact, and can reach the electric property of accurate detection base like this, thereby reach the purpose of gene sequencing.Electric sensitive function collection of units is formed in the sensitivity that micro-nano fluid device will have nanoporous, and its preparation method is simple, thereby is suitable for low cost, the order-checking of rapid gene electronics.The sensitive function layer clamps between two insulation layers, can avoid polluting and unnecessary environmental influence, such sensitive function layer sound construction, thus obtain stable signal detection, reach the resolving power of single base.The nanoporous periphery causes the interactional influence to base and sensitive function layer for the shape of the sensitive function layer of full wafer has solved the different orientation that possibly exist owing to base when DNA or RNA base are passed through nanoporous.
Description of drawings
Fig. 1 is the structural representation of the high resolving power biosensor of the utility model;
Fig. 2 is the high resolving power biosensor preparation flow synoptic diagram of the utility model; Employing by chemical Vapor deposition process synthetic graphene film as the sensitive function layer;
Fig. 3 is the transmission electron microscope shape figure in the graphene nano hole of the utility model;
Fig. 4 is the high resolving power biosensor preparation flow synoptic diagram of the utility model; The MoS that employing is obtained by mechanically peel
2Film is as the sensitive function layer;
Fig. 5 is the high resolving power biosensor preparation flow synoptic diagram of the utility model; The graphene film that employing is obtained by the SiC thermolysis is as the sensitive function layer.
Embodiment
As shown in Figure 1, the utility model comprises the micro-nano fluid device that detection is moved by analyzing molecules by the electric sensitive function unit of analyzing molecules and control.
Described electric sensitive function unit comprises first insulation layer 2, sensitive function layer 3, second insulation layer 4.Sensitive function layer 3 is located between first insulation layer 2 and second insulation layer 4.
Described micro-nano fluid device comprises the micro-nano split tunnel of the first micro-nano split tunnel 7, second 8, first storage room 10, second storage room 11, first iontophoretic electrode or Micropump 12, second iontophoretic electrode or Micropump 13.
Said biosensor comprises substrate 1, and the center of substrate 1 is provided with base openings 15;
The micro-nano split tunnel of the micro-nano split tunnel of second iontophoretic electrode or Micropump 13, second storage room 11, second 8, substrate 1, first insulation layer 2, sensitive function layer 3, second insulation layer 4, first 7, first storage room 10, first iontophoretic electrode or Micropump 12 are placed in order;
The center of second insulation layer 4 is provided with second insulating layer perforating 17, and the center that the center of sensitive function layer 3 is provided with nanoporous 5, the first insulation layers 2 is provided with first insulating layer perforating 16.
The electric contacting layer 9 that is attached thereto on the described sensitive function layer 3.
The center of the nanoporous 5 of the described second micro-nano split tunnel 8, base openings 15, sensitive function layer, first insulating layer perforating 16, second insulating layer perforating 17 and the first micro-nano split tunnel 7 is on the same central axis, and the shape of the micro-nano split tunnel of the first micro-nano split tunnel 7, second 8, nanoporous 5, base openings 15, first insulating layer perforating 16, second insulating layer perforating 17 is circle, Polygons, ellipse or square.
As preferably, the nanoporous of described sensitive function layer is a circular hole, and the aperture of the nanoporous of sensitive function layer is 1～100 nm, and the aperture of optimum nanoporous is 1～20 nm.Nanoporous is that circular hole can better guarantee the transmitter isotropy.As other scheme, the nanoporous of sensitive function layer also can be changeable shape hole or elliptical aperture, and the ultimate range around the nanoporous between last 2 is 1～100 nm.
The basic functional principle of the utility model is following:
Electrolytic solution is put in described transmitter; The electrolytic solution that will contain samples 14 such as the DNA that wants measured analysis or RNA is positioned over first storage room 10; DNA or RNA molecule are straightened under the gradient fields effect that is produced by iontophoretic electrode or Micropump 12 and 13, and arrive second storage room 11 through the perforate 16 of the nanoporous 5 of the perforate 17 of the first micro-nano split tunnel 7, second insulation layer 4, sensitive function layer 3, first insulation layer 2, substrate 1, the second micro-nano split tunnel 8 successively.Electric property when passing through nanoporous 5 with sensitive function layer 3 measurement base 6, electrical signal passes to data-analyzing machine by electric contacting layer 9, obtains base putting in order in DNA or RNA molecule through analysis.
Said sensitive function layer is the laminar of center band nanoporous, the different orientation problem that possibly exist when having solved base through nanoporous.
The nanoporous transmitter of the utility model also can be measured and analyze except being applied to DNA or RNA Measurement and analysis other macromole such as protein etc.Synoptic diagram 1 is merely the ultimate principle and the substruction thereof of explanation the utility model, and the biosensor of the utility model can be revised on this basis to some extent.
Below through specific embodiment and combine accompanying drawing that the utility model is further specified.
Embodiment 1: synthetic and transfer graphene film
Adopt chemical gaseous phase depositing process synthesizing graphite alkene film on Cu: will have thickness is that 25 μ m Cu sheets carry out the surface finish clean, is placed in the ultrahigh vacuum(HHV) (1 * 10
-8Torr), then at Ar/H
2(~ 20 vol% H in the atmosphere
2) carried out 750 oC thermal treatments about 110 minutes, then temperature is elevated to ~ 950 oC handled 30 minutes; Turn off Ar/H
2, and change logical CH
4Come the synthesizing graphite alkene film, growth time is 5 minutes, has so just synthesized graphene film.
After graphene film is synthetic; Spin coating 500 nm Polymethylmethacrylate (PMMA) layer on institute's synthetic graphene film; Graphene film/the Cu that scribbles PMMA is positioned in the iron nitrate solution Cu is eroded; The PMMA/ graphene film separates with the Cu substrate like this, thereby obtains the PMMA/ graphene film.Then, the PMMA/ graphene film is transferred to the Al that is used to prepare transmitter
2O
3The Al of (100 nm)/Si (550 μ m)
2O
3On the hole; At last, with acetone PMMA is dissolved, the graphene film layer has just been transferred to Al like this
2O
3The Al of (100 nm)/Si (550 μ m)
2O
3On the hole and as sensitive function layer 3.
Embodiment 2: Graphene is as the biosensor of sensitive function layer
As shown in Figure 2: preparation 100 nm Al on the thick Si substrate 1 of 550 μ m
2O
3(Fig. 2 a) for first insulation layer 2.
Adopt photoetching and mask technique, thereby and prepare a square openings 15 (Fig. 2 b) that is approximately 30 mm * 30 mm with KOH solution corrosion silicon substrate.
Adopt photoetching and mask technique technology, and with the Al of buffered HF solution corrosion on the square openings of silicon substrate
2O
3Thereby the hole 16 (Fig. 2 c) that to prepare a diameter be 10 mm.
The graphene film for preparing is transferred to Al
2O
3The Al of (100 nm)/Si (550 μ m)
2O
3As sensitive function layer 3, graphene film covers Al on first insulation layer
2O
3Hole 16 (Fig. 3 d).
Be used to prepare graphene nano hole 5 from the electron beam of transmission electron microscope (JEOL 2010F): the magnification of transmission electron microscope is transferred to about 800,000 zoom and focus on Graphene, was approximately for 6 seconds, thus the graphene nano hole (Fig. 2 e and Fig. 3) for preparing one 2.5 nm.
In argon atmospher, heat-treat and remove pollutent (Fig. 2 f) in 300 oC.
Adopt photoetching technique, mask technique and low-pressure chemical vapor deposition method are at the surface preparation 20 nm Si of sensitive function layer graphene 3
3N
4Insulation layer is as second insulation layer 4 (Fig. 2 g).
Adopt photoetching technique, the mask technique Ti (2 nm) that preparation is connected with sensitive function layer graphene 3 with the vacuum thermal evaporation method/Au (15 nm) layer is as electric contacting layer 9 (Fig. 2 h).
At last, will be assembled between the first micro-nano split tunnel and the second micro-nano split tunnel of micro-nano fluid device (Fig. 2 i) by the prepared electric sensitive function unit of above step, thereby obtain biosensor.
Embodiment 3:MoS
2Biosensor as the sensitive function layer
As shown in Figure 4: at the thick silicon single crystal of 600 μ m<100>Prepare 50 nm SiO on the substrate 1 successively
2With 30 nm Si
3N
4Composite insulation layer 2 (Fig. 4 a).
Adopt photoetching technique, and corrode silicon substrate and SiO respectively with KOH solution and buffered HF solution
2And prepare a square openings 15 (Fig. 4 b) that is approximately 10 mm * 10 mm.
Adopt electron beam lithography and SF
6The plasma reaction lithographic technique is at Si
3N
4Diameter of preparation is approximately the hole 16 (Fig. 4 c) of 2 mm on the film.
The double-deck MoS that will produce by mechanically peel
2Film transfer is to Si
3N
4(30 nm)/SiO
2The Si of (50 nm)/Si
3N
4On the hole and as inferior nano functional layer 3, MoS
2Film covers silicon nitride fenestra 16 (Fig. 4 d).
Be used to prepare MoS from the electron beam of transmission electron microscope (JEOL 2010F)
2Nanoporous 5: the magnification of transmission electron microscope is transferred to about 800,000 zoom and focus on SP 1, was approximately for 10 seconds, thereby prepare the big MoS of 20 nm
2Nanoporous 5 (Fig. 4 e).
Adopt electron beam lithography, mask technique and plasma reinforced chemical vapour deposition method are at inferior nano functional layer MoS
2The surface on the preparation 5 nm SiN
xAs second insulation layer 4 (Fig. 4 f).
Adopt photoetching technique, the mask technique Pt layer (15nm) that preparation is connected with sensitive function layer graphene 3 with the electron beam deposition method is as electric contacting layer 9 (Fig. 4 g).
At last, will be assembled between the first micro-nano split tunnel and the second micro-nano split tunnel of micro-nano fluid device (Fig. 4 h) by the prepared electric sensitive function unit of above step, thereby obtain biosensor.
Embodiment 4: the graphene film that is synthesized by SiC is as the biosensor of sensitive function layer
{ 0001} substrate 1 is in ultrahigh vacuum(HHV) (1.0 * 10 at the thick monocrystal SiC of 500 μ m
-10Torr) (surface treatment of 950oC-1400oC) becomes Silicon-rich face (Si-terminated surface), and (Fig. 5 a), epitaxy obtains the graphene film layer (Fig. 5 b) as sensitive function layer 3 then to carry out heat.
Adopt photoetching technique and corrosion technology on SiC, to prepare a square openings 15 (Fig. 5 c) that is approximately 20 nm * 20 nm
Be used to prepare graphene nano hole 5 from the electron beam of transmission electron microscope (JEOL 2010F): the magnification of transmission electron microscope is transferred to about 800,000 zoom and focus on Graphene, was approximately for 6 seconds, thus the graphene nano hole (Fig. 5 d) for preparing one 5 nm.
Adopt electron beam lithography, the method for mask technique and ald prepares 10 nm HfO on the surface of inferior nano functional layer graphene
2As second insulation layer 4 (Fig. 5 e).
Adopt photoetching technique, mask technique PSS:PDOT (35 nm) layer that preparation is connected with sensitive function layer graphene 3 with the solution spin coating method is as electric contacting layer 9 (Fig. 5 f).
At last, will be assembled between the first micro-nano split tunnel and the second micro-nano split tunnel of micro-nano fluid device (Fig. 5 g) by the prepared electric sensitive function unit of above step, thereby obtain biosensor.
This example is employed in insulating SiC and goes up the synthesizing graphite alkene film as sensitive function layer 3, and SiC both had been the solid carbon source material of synthesizing graphite alkene thin film layer, also for preparing the substrate 1 and first insulation layer, 2 materials of transmitter.
Above embodiment has carried out certain explanation to the basic structural feature and the preparation of the nanoporous transmitter of the utility model, but the constitutional features of the nanoporous transmitter of the utility model and preparation are not limited to above embodiment.
Claims (15)
1. a high-resolution biosensor is characterized in that the micro-nano fluid device that comprises that detection is moved by analyzing molecules by the electric sensitive function unit of analyzing molecules and control;
Described micro-nano fluid device comprises the first micro-nano split tunnel (7), the second micro-nano split tunnel (8), first storage room (10), second storage room (11), first iontophoretic electrode or Micropump (12), second iontophoretic electrode or Micropump (13); Described second iontophoretic electrode or Micropump (13), second storage room (11), the second micro-nano split tunnel (8), first insulation layer (2), sensitive function layer (3), second insulation layer (4), the first micro-nano split tunnel (7), first storage room (10), first iontophoretic electrode or Micropump (12) are placed in order;
The sensitive function collection of units is formed between the first micro-nano split tunnel and the second micro-nano split tunnel of micro-nano fluid device;
Described electric sensitive function unit comprises first insulation layer (2), sensitive function layer (3), second insulation layer (4); Sensitive function layer (3) is located between first insulation layer (2) and second insulation layer (4); The sensitive function layer is provided with nanoporous (5); First insulation layer is provided with first insulating layer perforating (16), and second insulation layer is provided with second insulating layer perforating (17);
Described micro-nano fluid device comprises the first micro-nano split tunnel (7), the second micro-nano split tunnel (8), first storage room (10), second storage room (11), first iontophoretic electrode or Micropump (12), second iontophoretic electrode or Micropump (13).
2. a kind of high-resolution biosensor according to claim 1 is characterized in that:
Described second iontophoretic electrode or Micropump (13), second storage room (11), the second micro-nano split tunnel (8), first insulation layer (2), sensitive function layer (3), second insulation layer (4), the first micro-nano split tunnel (7), first storage room (10), first iontophoretic electrode or Micropump (12) are placed in order;
The center of the nanoporous (5) of the described second micro-nano split tunnel (8), first insulating layer perforating (16), sensitive function layer, the first micro-nano split tunnel (7) and second insulating layer perforating (17) is on the same central axis.
3. a kind of high-resolution biosensor according to claim 1 is characterized in that:
Described electric sensitive function unit comprises first insulation layer (2), sensitive function layer (3), second insulation layer (4), and sensitive function layer (3) is located between first insulation layer (2) and second insulation layer (4);
Described micro-nano fluid device comprises the first micro-nano split tunnel (7), the second micro-nano split tunnel (8), first storage room (10), second storage room (11), first iontophoretic electrode (12) and second iontophoretic electrode (13);
Said biosensor comprises substrate (1), and the center of substrate (1) is provided with base openings (15);
Second iontophoretic electrode or Micropump (13), second storage room (11), the second micro-nano split tunnel (8), substrate (1), first insulation layer (2), sensitive function layer (3), second insulation layer (4), the first micro-nano split tunnel (7), first storage room (10), first iontophoretic electrode or Micropump (12) are placed in order;
The center of second insulation layer (4) is provided with second insulating layer perforating (17), and the center of sensitive function layer (3) is provided with nanoporous (5), and the center of first insulation layer (2) is provided with first insulating layer perforating (16);
The center of the nanoporous (5) of the second micro-nano split tunnel (8), base openings (15), first insulating layer perforating (16), sensitive function layer, the first micro-nano split tunnel (7) and second insulating layer perforating (17) is on the same central axis.
4. according to claim 2 or 3 described a kind of high-resolution biosensors, it is characterized in that described sensitive function layer (3) is provided with the coupled electric contacting layer that connects (9).
5. according to claim 2 or 3 described a kind of high-resolution biosensors, the material that it is characterized in that described sensitive function layer (3) is a layered conductive material, and the thickness of described sensitive function layer is 0.2～30nm.
6. according to claim 2 or 3 described a kind of high-resolution biosensors, the material that it is characterized in that described sensitive function layer (3) is a layered conductive material, and the thickness of described sensitive function layer is 0.2～10nm.
7. according to claim 2 or 3 described a kind of high-resolution biosensors, the material that it is characterized in that described sensitive function layer (3) is a layered conductive material, and the thickness of described sensitive function layer is 0.2～1nm.
8. according to claim 2 or 3 described a kind of high-resolution biosensors, the material that it is characterized in that described sensitive function layer (3) is a graphene film, and the number of plies of described graphene film is the 1-100 layer.
9. according to claim 2 or 3 described a kind of high-resolution biosensors, the material that it is characterized in that described sensitive function layer (3) is a graphene film, and the number of plies of described graphene film is 1～30 layer.
10. according to claim 2 or 3 described a kind of high-resolution biosensors, the material that it is characterized in that described sensitive function layer (3) is a graphene film, and the number of plies of described graphene film is 1～3 layer.
11. according to claim 2 or 3 described a kind of high-resolution biosensors, it is characterized in that the nanoporous (5) of described sensitive function layer is circular hole, ellipse or Polygons, the aperture of nanoporous (5) is 1～100nm.
12. according to claim 2 or 3 described a kind of high-resolution biosensors, it is characterized in that the nanoporous (5) of described sensitive function layer is circular hole, ellipse or Polygons, the aperture of nanoporous (5) is 1～20nm.
13. according to claim 2 or 3 described a kind of high-resolution biosensors; The shape of cross section that it is characterized in that described first insulating layer perforating (16), second insulating layer perforating (17) and the first micro-nano split tunnel (7) and the second micro-nano split tunnel (8) is circle, ellipse or Polygons, and the aperture is 1～30 μ m.
14. according to claim 2 or 3 described a kind of high-resolution biosensors; The shape of cross section that it is characterized in that described first insulating layer perforating (16), second insulating layer perforating (17) and the first micro-nano split tunnel (7) and the second micro-nano split tunnel (8) is circle, ellipse or Polygons, and the aperture is for being 1～10 μ m.
15. according to claim 2 or 3 described a kind of high-resolution biosensors; The shape of cross section that it is characterized in that described first insulating layer perforating (16), second insulating layer perforating (17) and the first micro-nano split tunnel (7) and the second micro-nano split tunnel (8) is circle, ellipse or Polygons, and the aperture is 1～20nm.
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| CN2011202780599U CN202284206U (en) | 2011-08-02 | 2011-08-02 | High-resolution biosensor |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103193189A (en) * | 2013-02-21 | 2013-07-10 | 东南大学 | Multielectrode nanopore device for DNA detection and production method thereof |
| CN104703700A (en) * | 2012-08-06 | 2015-06-10 | 康特姆斯集团有限公司 | Method and kit for nucleic acid sequencing |
| US9938573B2 (en) | 2008-09-03 | 2018-04-10 | Quantumdx Group Limited | Methods and kits for nucleic acid sequencing |
| US10759824B2 (en) | 2008-09-03 | 2020-09-01 | Quantumdx Group Limited | Design, synthesis and use of synthetic nucleotides comprising charge mass tags |
| US11180523B2 (en) | 2016-01-04 | 2021-11-23 | Quantumdx Group Limited | Design, synthesis and use of synthetic nucleotides comprising charge mass tags |
-
2011
- 2011-08-02 CN CN2011202780599U patent/CN202284206U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9938573B2 (en) | 2008-09-03 | 2018-04-10 | Quantumdx Group Limited | Methods and kits for nucleic acid sequencing |
| US10759824B2 (en) | 2008-09-03 | 2020-09-01 | Quantumdx Group Limited | Design, synthesis and use of synthetic nucleotides comprising charge mass tags |
| CN104703700A (en) * | 2012-08-06 | 2015-06-10 | 康特姆斯集团有限公司 | Method and kit for nucleic acid sequencing |
| CN104703700B (en) * | 2012-08-06 | 2018-01-12 | 康特姆斯集团有限公司 | Method and kit for nucleic acid sequencing |
| CN103193189A (en) * | 2013-02-21 | 2013-07-10 | 东南大学 | Multielectrode nanopore device for DNA detection and production method thereof |
| CN103193189B (en) * | 2013-02-21 | 2015-08-26 | 东南大学 | A kind of multi-electrode nanopore device for DNA detection and manufacture method thereof |
| US11180523B2 (en) | 2016-01-04 | 2021-11-23 | Quantumdx Group Limited | Design, synthesis and use of synthetic nucleotides comprising charge mass tags |
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