CN102911859A - High-resolution biosensor - Google Patents
High-resolution biosensor Download PDFInfo
- Publication number
- CN102911859A CN102911859A CN2011102195848A CN201110219584A CN102911859A CN 102911859 A CN102911859 A CN 102911859A CN 2011102195848 A CN2011102195848 A CN 2011102195848A CN 201110219584 A CN201110219584 A CN 201110219584A CN 102911859 A CN102911859 A CN 102911859A
- Authority
- CN
- China
- Prior art keywords
- micro
- layer
- nano
- sensitive function
- insulation layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention discloses a high-resolution biosensor comprising a conductive material with an atomic scale and a micro-nano-fluidic device. The conductive material is adopted as a sensitive unit, such that an atomic-scale detection resolution can be achieved. The micro-nano-fluidic device is used for controlling movements and morphological structures of detected molecules. A second electrophoresis electrode or micro pump, a second storage room, a second micro-nano separation channel, a substrate, a first insulation layer, a sensitive functional layer, a second insulation layer, a first micro-nano separation channel, a first storage chamber, and a first electrophoresis electrode or micro-pump are sequentially arranged. A nano-pore is provided at the center of the sensitive functional layer. A first insulation layer opening is provided at the center of the first insulation layer. A second insulation layer opening is provided at the center of the second insulation layer. A substrate opening is provided at the center of the substrate. An electrical contact layer used for measuring electrical signals is provided on the sensitive functional layer. According to the invention, with the sensitive functional layer with an atomic layer thickness, the resolution of the sensor reaches an atomic scale. The sensitive functional layer is integrated with the micro-nano-fluidic device, such that DNA or RNA movements and structural morphology can be controlled. Therefore, stable signal detection can be obtained.
Description
Technical field
The present invention relates to sensor, relate in particular to a kind of high-resolution biosensor.
Background technology
The advantages such as gene electronics order-checking has the accuracy height, cost is low and speed is fast, nanoporous (nanopore) is the technology of a kind of unit molecule gene electronics order-checking of present most study.Nanoporous is expected to and can surveys and characterising biological molecule such as DNA in the unit molecule level of resolution, RNA and poly-peptide, the potential unit molecule gene sequencing technology based on nanoporous does not need fluorescent marker, does not need PCR reaction, and being expected to can be directly and " reading " goes out DNA or RNA fast base sequence; This sequencing technologies is expected to greatly reduce the order-checking cost, realizes personalized medicine.Yet the nanoporous technology also faces many challenges: be difficult to the preparation aperture less than the hole of 2 nm such as present technology, how to reduce the speed that DNA passes through nanoporous? structural form when how to control DNA and passing through nanoporous? how the electrode of atomic size is integrated in nanoporous and reaches the resolving power of single base? in order to solve the technical barrier that faces, the patent of invention of applicant (publication number: JP2011-45944; Application number: 201110097791.0) proposed to adopt the conductive laminated material such as Graphene with atomic layer level thickness and reach the resolving power of single base, and adopted the structure of micro-nano fluid device and control the motion of dna molecular; Yet, the complicated structure of these devices.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, provide a kind of structure very simple high-resolution biosensor.For this reason, the present invention is by the following technical solutions:
A kind of high-resolution biosensor is characterized in that comprising the electric sensitive function unit that can detect analyzed molecule and the micro-nano fluid device that can control analyzed molecular motion.
On the basis of adopting technique scheme, the present invention also can adopt following further technical scheme:
Described micro-nano fluid device comprises the first micro-nano split tunnel, the second micro-nano split tunnel, the first storage room, the second storage room, the first iontophoretic electrode or Micropump, the second iontophoretic electrode or Micropump; Described the second iontophoretic electrode or Micropump, the second storage room, the second micro-nano split tunnel, the first insulation layer, sensitive function layer, the second insulation layer, the first micro-nano split tunnel, the first storage room, the first iontophoretic electrode or Micropump are placed in turn; The sensitive function collection of units is formed between the first micro-nano split tunnel and the second micro-nano split tunnel of micro-nano fluid device.On device architecture, integrated meaning is arranged at electric sensitive function unit in the micro-nano fluid device, on function, integrated electric sensitive function unit and the micro-nano fluid device with function different and that can not replace mutually of being presented as can make described biosensor can reach the purpose that associated molecule is analyzed on high resolution ground; By integrated, when analyzed molecule in micro-nano fluid channel during controlled motion, the electric sensitive function unit that is arranged in the micro-nano fluid device can accurately detect the electric property of analyzed molecule in micro-nano fluid channel.
Described electric sensitive function unit comprises the first insulation layer, sensitive function layer, the second insulation layer, the sensitive function layer is located between the first insulation layer and the second insulation layer, the sensitive function layer is provided with nanoporous, the first insulation layer is provided with the first insulating layer perforating, and the second insulation layer is provided with the second insulating layer perforating; Described micro-nano fluid device comprises the first micro-nano split tunnel, the second micro-nano split tunnel, the first storage room, the second storage room, the first iontophoretic electrode or Micropump, the second iontophoretic electrode or Micropump.
Described the second iontophoretic electrode or Micropump, the second storage room, the second micro-nano split tunnel, the first insulation layer, sensitive function layer, the second insulation layer, the first micro-nano split tunnel, the first storage room, the first iontophoretic electrode or Micropump are placed in turn; The center of the nanoporous of the described second micro-nano split tunnel, the first insulating layer perforating, sensitive function layer, the first micro-nano split tunnel and the second insulating layer perforating is on the same central axis.
Described electric sensitive function unit comprises the first insulation layer, sensitive function layer, the second insulation layer, and the sensitive function layer is located between the first insulation layer and the second insulation layer; Described micro-nano fluid device comprises the first micro-nano split tunnel, the second micro-nano split tunnel, the first storage room, the second storage room, the first iontophoretic electrode and the second iontophoretic electrode; Described biosensor comprises substrate, and the center of substrate is provided with base openings; The second iontophoretic electrode or Micropump, the second storage room, the second micro-nano split tunnel, substrate, the first insulation layer, sensitive function layer, the second insulation layer, the first micro-nano split tunnel, the first storage room, the first iontophoretic electrode or Micropump are placed in turn; The center of the second insulation layer is provided with the second insulating layer perforating, and the center of sensitive function layer is provided with nanoporous, and the center of the first insulation layer is provided with the first insulating layer perforating; The center of the nanoporous of the second micro-nano split tunnel, base openings, the first insulating layer perforating, sensitive function layer, the first micro-nano split tunnel and the second insulating layer perforating is on the same central axis.
Described sensitive function layer is provided with coupled electric contacting layer.
The material of described sensitive function layer is layered conductive material, and the thickness of described sensitive function layer is 0.2～30 nm, and more excellent is 0.2～10 nm, and optimum is 0.2～1 nm.
The material of described sensitive function layer is graphene film, and the number of plies of described graphene film is the 1-100 layer, and more excellent is 1～30 nm, and optimum is 1～3 layer.
The nanoporous of described sensitive function layer is circular hole, ellipse or Polygons, and the aperture of nanoporous is 1～100 nm, and optimum is 1～20 nm.
The shape of cross section of described the first insulating layer perforating, the second insulating layer perforating and the first micro-nano split tunnel and the second micro-nano split tunnel is circle, ellipse or Polygons, the aperture is 1～30 mm, more excellent is 1～10 mm, and optimum is 1～20 nm.
Sensitive function layer of the present invention can reach the resolution requirement that detects the single base among single stranded DNA or the RNA; Micro-nano fluid device of the present invention, the speed in the time of can controlling DNA or RNA and pass through nanoporous, control base and sensitive function layer interact, and can reach the electric property of accurate detection base like this, thereby reach the purpose of gene sequencing.Electric sensitive function collection of units is formed in the sensitivity that micro-nano fluid device will have nanoporous, and its preparation method is simple, thereby is suitable for low cost, the order-checking of rapid gene electronics.The sensitive function layer clamps between two insulation layers, can avoid polluting and unnecessary environmental influence, such sensitive function layer sound construction, thus obtain stable signal detection, reach the resolving power of single base.The different orientation that may exist owing to base when the nanoporous periphery passes through nanoporous for the shape of the sensitive function layer of full wafer has solved DNA or RNA base causes the interactional impact on base and sensitive function layer.
Description of drawings
Fig. 1 is the structural representation of high resolving power biosensor of the present invention;
Fig. 2 is high resolving power biosensor preparation flow synoptic diagram of the present invention; Employing by the synthetic graphene film of chemical Vapor deposition process as the sensitive function layer;
Fig. 3 is the transmission electron microscope shape figure of grapheme nano-pore of the present invention;
Fig. 4 is high resolving power biosensor preparation flow synoptic diagram of the present invention; The MoS that employing is obtained by mechanically peel
2Film is as the sensitive function layer;
Fig. 5 is high resolving power biosensor preparation flow synoptic diagram of the present invention; The graphene film that employing is obtained by the SiC thermolysis is as the sensitive function layer.
Embodiment
As shown in Figure 1, the present invention includes the electric sensitive function unit that detects analyzed molecule and the micro-nano fluid device of controlling analyzed molecular motion.
Described electric sensitive function unit comprises the first insulation layer 2, sensitive function layer 3, the second insulation layer 4.Sensitive function layer 3 is located between the first insulation layer 2 and the second insulation layer 4.
Described micro-nano fluid device comprises the first micro-nano split tunnel 7, the second micro-nano split tunnel 8, the first storage room 10, the second storage room 11, the first iontophoretic electrode or Micropump 12, the second iontophoretic electrode or Micropump 13.
Described biosensor comprises substrate 1, and the center of substrate 1 is provided with base openings 15;
The second iontophoretic electrode or Micropump 13, the second storage room 11, the second micro-nano split tunnel 8, substrate 1, the first insulation layer 2, sensitive function layer 3, the second insulation layer 4, the first micro-nano split tunnel 7, the first storage room 10, the first iontophoretic electrode or Micropump 12 are placed in turn;
The center of the second insulation layer 4 is provided with the second insulating layer perforating 17, and the center that the center of sensitive function layer 3 is provided with nanoporous 5, the first insulation layers 2 is provided with the first insulating layer perforating 16.
The electric contacting layer 9 that is attached thereto on the described sensitive function layer 3.
The center of the nanoporous 5 of the described second micro-nano split tunnel 8, base openings 15, sensitive function layer, the first insulating layer perforating 16, the second insulating layer perforating 17 and the first micro-nano split tunnel 7 is on the same central axis, and the shape of the first micro-nano split tunnel 7, the second micro-nano split tunnel 8, nanoporous 5, base openings 15, the first insulating layer perforating 16, the second insulating layer perforating 17 is circle, Polygons, ellipse or square.
As preferably, the nanoporous of described sensitive function layer is circular hole, and the aperture of the nanoporous of sensitive function layer is 1～100 nm, and the aperture of optimum nanoporous is 1～20 nm.Nanoporous is that circular hole can better guarantee the sensor isotropy.As other scheme, the nanoporous of sensitive function layer also can be shape changeable hole or elliptical aperture, and the ultimate range around the nanoporous between upper 2 is 1～100 nm.
Basic functional principle of the present invention is as follows:
Electrolytic solution is put in described sensor, the electrolytic solution that will contain the samples 14 such as the DNA that wants measured analysis or RNA is positioned over the first storage room 10, DNA or RNA molecule are straightened under by iontophoretic electrode or Micropump 12 and the 13 gradient fields effects that produce, and arrive the second storage room 11 through the perforate 16 of the nanoporous 5 of the perforate 17 of the first micro-nano split tunnel 7, the second insulation layer 4, sensitive function layer 3, the first insulation layer 2, substrate 1, the second micro-nano split tunnel 8 successively.Electric property when passing through nanoporous 5 with sensitive function layer 3 measurement base 6, electrical signal passes to data-analyzing machine by electric contacting layer 9, obtains base putting in order in DNA or RNA molecule by analysis.
Laminar with nanoporous centered by the described sensitive function layer, the different orientation problem that may exist when having solved base by nanoporous.
Nanopore sensor of the present invention also can be measured and analyze other macromole such as protein etc. except being applied to DNA or RNA Measurement and analysis.Synoptic diagram 1 only is explanation ultimate principle of the present invention and basic structure thereof, and biosensor of the present invention can be revised on this basis to some extent.
Also the present invention is further described by reference to the accompanying drawings below by specific embodiment.
Embodiment 1: synthetic and transfer graphene film
Adopt chemical gaseous phase depositing process synthesizing graphite alkene film on Cu: will have thickness is that 25 μ m Cu sheets carry out the surface finish clean, is placed in the ultrahigh vacuum(HHV) (1 * 10
-8Torr), then at Ar/H
2(~ 20 vol% H in the atmosphere
2) carried out 750 oC thermal treatments about 110 minutes, then temperature is elevated to ~ 950 oC processed 30 minutes; Turn off Ar/H
2, and change logical CH
4Come the synthesizing graphite alkene film, growth time is 5 minutes, has so just synthesized graphene film.
After graphene film is synthetic, spin coating 500 nm Polymethylmethacrylate (PMMA) layer on the graphene film that is synthesized, graphene film/the Cu that scribbles PMMA is positioned in the iron nitrate solution Cu is eroded, the PMMA/ graphene film separates with the Cu substrate like this, thereby obtains the PMMA/ graphene film.Then, the PMMA/ graphene film is transferred to Al for the preparation of sensor
2O
3The Al of (100 nm)/Si (550 μ m)
2O
3On the hole; At last, with acetone PMMA is dissolved, the graphene film layer has just been transferred to Al like this
2O
3The Al of (100 nm)/Si (550 μ m)
2O
3On the hole and as sensitive function layer 3.
Embodiment 2: Graphene is as the biosensor of sensitive function layer
As shown in Figure 2: at the thick Si substrate 1 preparation 100 nm Al of 550 μ m
2O
3(Fig. 2 a) for the first insulation layer 2.
Adopt photoetching and mask technique, thereby and prepare square openings 15(Fig. 2 b that is approximately 30 mm * 30 mm with KOH solution corrosion silicon substrate).
Adopt photoetching and mask technique technology, and with the Al of HF solution corrosion on the square openings of silicon substrate that cushions
2O
3Thereby hole 16(Fig. 2 c that to prepare a diameter be 10 mm).
The graphene film for preparing is transferred to Al
2O
3The Al of (100 nm)/Si (550 μ m)
2O
3As sensitive function layer 3, graphene film covers Al on the first insulation layer
2O
3Hole 16(Fig. 3 d).
Be used to prepare grapheme nano-pore 5 from the electron beam of transmission electron microscope (JEOL 2010F): the magnification of transmission electron microscope is transferred to about 800,000 zoom and focus on Graphene, was approximately for 6 seconds, thereby prepare the grapheme nano-pore (Fig. 2 e and Fig. 3) of 2.5 nm.
In argon atmospher, heat-treat in 300 oC and remove pollutent (Fig. 2 f).
Adopt photoetching technique, mask technique and low-pressure chemical vapor deposition method prepare 20 nm Si on the surface of sensitive function layer graphene 3
3N
4Insulation layer is as second insulation layer 4(Fig. 2 g).
Adopt photoetching technique, the mask technique Ti (2 nm) that preparation is connected with sensitive function layer graphene 3 with the vacuum thermal evaporation method/Au (15 nm) layer is as electric contacting layer 9(Fig. 2 h).
At last, will be assembled between the first micro-nano split tunnel of micro-nano fluid device and the second micro-nano split tunnel (Fig. 2 i) by the prepared electric sensitive function unit of above step, thereby obtain biosensor.
Embodiment 3:MoS
2Biosensor as the sensitive function layer
As shown in Figure 4: on the thick silicon single crystal of 600 μ m＜100〉substrate 1, prepare successively 50 nm SiO
2With 30 nm Si
3N
4Composite insulation layer 2(Fig. 4 a).
Adopt photoetching technique, and corrode respectively silicon substrate and SiO with the HF solution of KOH solution and buffering
2And prepare square openings 15(Fig. 4 b that is approximately 10 mm * 10 mm).
Adopt electron beam lithography and SF
6The plasma reaction lithographic technique is at Si
3N
4Diameter of preparation is approximately hole 16(Fig. 4 c of 2 mm on the film).
The double-deck MoS that will be produced by mechanically peel
2Film transfer is to Si
3N
4(30 nm)/SiO
2The Si of (50 nm)/Si
3N
4On the hole and as inferior nano functional layer 3, MoS
2Film covers silicon nitride fenestra 16(Fig. 4 d).
Be used to prepare MoS from the electron beam of transmission electron microscope (JEOL 2010F)
2Nanoporous 5: the magnification of transmission electron microscope is transferred to about 800,000 zoom and focus on boron nitride, was approximately for 10 seconds, thereby prepare the large MoS of 20 nm
2Nanoporous 5(Fig. 4 e).
Adopt electron beam lithography, mask technique and plasma reinforced chemical vapour deposition method are at inferior nano functional layer MoS
2The surface on the preparation 5 nm SiN
xAs second insulation layer 4(Fig. 4 f).
Adopt photoetching technique, the mask technique Pt layer (15nm) that preparation is connected with sensitive function layer graphene 3 with the electron beam deposition method is as electric contacting layer 9(Fig. 4 g).
At last, will be assembled between the first micro-nano split tunnel of micro-nano fluid device and the second micro-nano split tunnel (Fig. 4 h) by the prepared electric sensitive function unit of above step, thereby obtain biosensor.
Embodiment 4: the graphene film on synthetic by SiC is as the biosensor of sensitive function layer
{ 0001} substrate 1 is in ultrahigh vacuum(HHV) (1.0 * 10 at the thick monocrystal SiC of 500 μ m
-10Torr) (surface treatment of 950oC-1400oC) becomes Silicon-rich face (Si-terminated surface), and (Fig. 5 a), then epitaxy obtains the graphene film layer (Fig. 5 b) as sensitive function layer 3 to carry out heat.
Adopt photoetching technique and corrosion technology at square openings 15(Fig. 5 c that is approximately 20 nm * 20 nm of SiC preparation)
Be used to prepare grapheme nano-pore 5 from the electron beam of transmission electron microscope (JEOL 2010F): the magnification of transmission electron microscope is transferred to about 800,000 zoom and focus on Graphene, was approximately for 6 seconds, thereby prepare the grapheme nano-pore (Fig. 5 d) of 5 nm.
Adopt electron beam lithography, the method for mask technique and ald is at the surface of inferior nano functional layer graphene preparation 10 nm HfO
2As second insulation layer 4(Fig. 5 e).
Adopt photoetching technique, mask technique PSS:PDOT (35 nm) layer that preparation is connected with sensitive function layer graphene 3 with the solution spin coating method is as electric contacting layer 9(Fig. 5 f).
At last, will be assembled between the first micro-nano split tunnel of micro-nano fluid device and the second micro-nano split tunnel (Fig. 5 g) by the prepared electric sensitive function unit of above step, thereby obtain biosensor.
The synthesizing graphite alkene film is as sensitive function layer 3 on the SiC of insulation for the employing of this example, and SiC both had been the solid carbon source material of synthesizing graphite alkene thin film layer, also for preparing substrate 1 and the first insulation layer 2 materials of sensor.
Above embodiment has carried out certain explanation to basic structural feature and the preparation of nanopore sensor of the present invention, but the constitutional features of nanopore sensor of the present invention and preparation are not limited to above embodiment.
Claims (10)
1. a high-resolution biosensor is characterized in that comprising the electric sensitive function unit that detects analyzed molecule and the micro-nano fluid device of controlling analyzed molecular motion.
2. a kind of high-resolution biosensor according to claim 1 is characterized in that described micro-nano fluid device comprises the first micro-nano split tunnel (7), the second micro-nano split tunnel (8), the first storage room (10), the second storage room (11), the first iontophoretic electrode or Micropump (12), the second iontophoretic electrode or Micropump (13); Described the second iontophoretic electrode or Micropump (13), the second storage room (11), the second micro-nano split tunnel (8), the first insulation layer (2), sensitive function layer (3), the second insulation layer (4), the first micro-nano split tunnel (7), the first storage room (10), the first iontophoretic electrode or Micropump (12) are placed in turn;
The sensitive function collection of units is formed between the first micro-nano split tunnel and the second micro-nano split tunnel of micro-nano fluid device.
3. a kind of high-resolution biosensor according to claim 1 is characterized in that:
Described electric sensitive function unit comprises the first insulation layer (2), sensitive function layer (3), the second insulation layer (4), sensitive function layer (3) is located between the first insulation layer (2) and the second insulation layer (4), the sensitive function layer is provided with nanoporous (5), the first insulation layer is provided with the first insulating layer perforating (16), and the second insulation layer is provided with the second insulating layer perforating (17);
Described micro-nano fluid device comprises the first micro-nano split tunnel (7), the second micro-nano split tunnel (8), the first storage room (10), the second storage room (11), the first iontophoretic electrode or Micropump (12), the second iontophoretic electrode or Micropump (13).
4. a kind of high-resolution biosensor according to claim 3 is characterized in that:
Described the second iontophoretic electrode or Micropump (13), the second storage room (11), the second micro-nano split tunnel (8), the first insulation layer (2), sensitive function layer (3), the second insulation layer (4), the first micro-nano split tunnel (7), the first storage room (10), the first iontophoretic electrode or Micropump (12) are placed in turn;
The center of the nanoporous (5) of the described second micro-nano split tunnel (8), the first insulating layer perforating (16), sensitive function layer, the first micro-nano split tunnel (7) and the second insulating layer perforating (17) is on the same central axis.
5. a kind of high-resolution biosensor according to claim 1 is characterized in that:
Described electric sensitive function unit comprises the first insulation layer (2), sensitive function layer (3), the second insulation layer (4), and sensitive function layer (3) is located between the first insulation layer (2) and the second insulation layer (4);
Described micro-nano fluid device comprises the first micro-nano split tunnel (7), the second micro-nano split tunnel (8), the first storage room (10), the second storage room (11), the first iontophoretic electrode (12) and the second iontophoretic electrode (13);
Described biosensor comprises substrate (1), and the center of substrate (1) is provided with base openings (15);
The second iontophoretic electrode or Micropump (13), the second storage room (11), the second micro-nano split tunnel (8), substrate (1), the first insulation layer (2), sensitive function layer (3), the second insulation layer (4), the first micro-nano split tunnel (7), the first storage room (10), the first iontophoretic electrode or Micropump (12) are placed in turn;
The center of the second insulation layer (4) is provided with the second insulating layer perforating (17), and the center of sensitive function layer (3) is provided with nanoporous (5), and the center of the first insulation layer (2) is provided with the first insulating layer perforating (16);
The center of the nanoporous (5) of the second micro-nano split tunnel (8), base openings (15), the first insulating layer perforating (16), sensitive function layer, the first micro-nano split tunnel (7) and the second insulating layer perforating (17) is on the same central axis.
6. according to claim 2,3,4 or 5 described a kind of high-resolution biosensors, it is characterized in that described sensitive function layer (3) is provided with coupled electric contacting layer (9).
7. according to claim 2,3,4 or 5 described a kind of high-resolution biosensors, the material that it is characterized in that described sensitive function layer (3) is layered conductive material, the thickness of described sensitive function layer is 0.2～30 nm, and more excellent is 0.2～10 nm, and optimum is 0.2～1 nm.
8. according to claim 2,3,4 or 5 described a kind of high-resolution biosensors, the material that it is characterized in that described sensitive function layer (3) is graphene film, the number of plies of described graphene film is the 1-100 layer, and more excellent is 1～30 nm, and optimum is 1～3 layer.
9. according to claim 2,3,4 or 5 described a kind of high-resolution biosensors, the nanoporous (5) that it is characterized in that described sensitive function layer is circular hole, ellipse or Polygons, the aperture of nanoporous (5) is 1～100 nm, and optimum is 1～20 nm.
10. according to claim 2,3,4 or 5 described a kind of high-resolution biosensors, the shape of cross section that it is characterized in that described the first insulating layer perforating (16), the second insulating layer perforating (17) and the first micro-nano split tunnel (7) and the second micro-nano split tunnel (8) is circle, ellipse or Polygons, the aperture is 1～30 mm, more excellent is 1～10 mm, and optimum is 1～20 nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110219584.8A CN102911859B (en) | 2011-08-02 | A kind of high-resolution biosensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110219584.8A CN102911859B (en) | 2011-08-02 | A kind of high-resolution biosensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102911859A true CN102911859A (en) | 2013-02-06 |
| CN102911859B CN102911859B (en) | 2016-12-14 |
Family
ID=
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103585004A (en) * | 2013-11-19 | 2014-02-19 | 湖北中医药大学 | Nanometer sensing needle and manufacturing method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1034432A (en) * | 1988-01-08 | 1989-08-02 | 大洋渔业株式会社 | Biology sensor |
| CN2177946Y (en) * | 1993-12-14 | 1994-09-21 | 南京理工大学 | Biological sensor |
| CN101694474A (en) * | 2009-10-22 | 2010-04-14 | 浙江大学 | Nano-pore electric sensor |
| CN102095768A (en) * | 2010-11-16 | 2011-06-15 | 浙江大学 | Subnano-thickness nano hole sensor |
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1034432A (en) * | 1988-01-08 | 1989-08-02 | 大洋渔业株式会社 | Biology sensor |
| CN2177946Y (en) * | 1993-12-14 | 1994-09-21 | 南京理工大学 | Biological sensor |
| CN101694474A (en) * | 2009-10-22 | 2010-04-14 | 浙江大学 | Nano-pore electric sensor |
| CN102095768A (en) * | 2010-11-16 | 2011-06-15 | 浙江大学 | Subnano-thickness nano hole sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103585004A (en) * | 2013-11-19 | 2014-02-19 | 湖北中医药大学 | Nanometer sensing needle and manufacturing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102242062B (en) | High-resolution biosensor | |
| US9133023B2 (en) | Nanopore sensor comprising a sub-nanometer-thick layer | |
| Liu et al. | Atomically thin molybdenum disulfide nanopores with high sensitivity for DNA translocation | |
| US20190376925A1 (en) | Nucleic acid sequencing device containing graphene | |
| Chen et al. | Fabrication and applications of solid-state nanopores | |
| US11442026B2 (en) | Crack structure and tunneling device with a layer exhibiting a crack-defined gap between two cantilevering parts | |
| Waduge et al. | Direct and scalable deposition of atomically thin low-noise MoS2 membranes on apertures | |
| CN103224232B (en) | Preparation method of graphite nanometer hole | |
| Phan et al. | Single-crystalline 3C-SiC anodically bonded onto glass: an excellent platform for high-temperature electronics and bioapplications | |
| Chen et al. | Probing single DNA molecule transport using fabricated nanopores | |
| CN202284206U (en) | High-resolution biosensor | |
| US8470408B2 (en) | Carbon nanotube synthesis for nanopore devices | |
| Soikkeli et al. | Graphene biosensor programming with genetically engineered fusion protein monolayers | |
| Liu et al. | Solid-state nanopore-based DNA sequencing technology | |
| KR101798295B1 (en) | Manufacturing method of biosensor platform using graphene and protein, biosensor platform made by the same, and field effect transistor type biosensor comprising the same | |
| Yang et al. | Construction of MoS 2 field effect transistor sensor array for the detection of bladder cancer biomarkers | |
| EP1433744A1 (en) | System with nano-scale conductor and nano-opening | |
| CN103193189A (en) | Multielectrode nanopore device for DNA detection and production method thereof | |
| CN102590309A (en) | Manufacture and application method for graphene transistor and biosensor of graphene transistor | |
| WO2020024856A1 (en) | Thin film transistor, preparation method therefor and sensor | |
| TW201100796A (en) | Sensing element integrating silicon nanowire gated-diodes, manufacturing method and detecting system thereof | |
| CN101126735A (en) | Biosensor and its preparation method and detection method using said biosensor | |
| Leyden et al. | Fabrication and characterization of carbon nanotube field-effect transistor biosensors | |
| Lin et al. | Fabrication of solid-state nanopores | |
| CA2944889A1 (en) | Biosensors comprising a gate-keeper membrane |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |