CN202254809U - Tubular furnace pipe device for fluoride heat treatment - Google Patents
Tubular furnace pipe device for fluoride heat treatment Download PDFInfo
- Publication number
- CN202254809U CN202254809U CN2011204038635U CN201120403863U CN202254809U CN 202254809 U CN202254809 U CN 202254809U CN 2011204038635 U CN2011204038635 U CN 2011204038635U CN 201120403863 U CN201120403863 U CN 201120403863U CN 202254809 U CN202254809 U CN 202254809U
- Authority
- CN
- China
- Prior art keywords
- furnace pipe
- seal cover
- gas
- heat treatment
- boiler tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a tubular furnace pipe device for fluoride heat treatment. The tubular furnace pipe device comprises two parts, namely a furnace pipe and a seal cover, wherein one end of the furnace pipe is an opened end, the other end of the furnace pipe is a closed end; the bottom of the closed end is provided with a gas outlet end for discharging gas and condensed fluid conveniently, a flange plate is welded at the edge of the opened end, the furnace pipe and the seal cover are in close fit by virtue of a seal washer; and a gas inlet end is welded at the center of one side of the seal cover. A protective gas enters from the gas inlet end, passes through the sealed furnace pipe part and is discharged from the sealed end, thus the constant inner atmosphere of the furnace can be maintained. Different from the prior art in material, the tubular furnace pipe device has the following technical characteristic: the furnace pipe and the seal cover are both made of Monel400 alloy and can effectively resist the corrosion of HF (Hydrogen Fluoride) gas at room temperature or a high temperature.
Description
Technical field
The utility model relates to a kind of tube furnace boiler tube equipment, and strictness is that a kind of fluoride heat treatment is with tube furnace boiler tube equipment in fact.
Background technology
Present existing tube furnace boiler tube mainly adopts quartz ampoule, can under high temperature and protective atmosphere, realize many material hot treatment.But because this kind furnace tube material is quartzy (SiO
2Crystal), HF gas is not possessed corrosion resistance, so this kind boiler tube and be not suitable for the material of easy generation such as heat treatment fluoride HF gas.
Summary of the invention
The purpose of the utility model is to provide a kind of fluoride heat treatment with tube furnace boiler tube equipment, the technical problem of the HF gas attack boiler tube that produces during with solution heat treatment fluoride.
The purpose of the utility model can realize through following technical scheme: a kind of fluoride heat treatment comprises boiler tube and seal cover two large divisions with tube furnace boiler tube equipment; Boiler tube one end is an opening end, and the other end is a blind end, and the blind end bottom is welded with gas outlet end, is convenient to gas and condensed fluid and discharges; The opening end edge is welded with ring flange, realizes closely cooperating through seal washer and seal cover; Seal cover one side center is welded with gas inlet end; A kind of fluoride heat treatment is all adopted the Monel400 alloy with tube furnace boiler tube equipment boiler tube and seal cover.
The utility model compared with prior art has following advantage: the corrosion of HF gas can effectively be resisted because boiler tube and seal cover all adopt the Monel400 alloy in (1) under normal temperature and high temperature, has solved the shortcoming that the conventional quartz tube furnace can not the heat treatment fluoride; (2) owing to offer gas outlet end, can waste gas and condensation waste liquid be derived boiler tube, be beneficial to the atmosphere that keeps in the boiler tube in the blind end bottom of boiler tube.
Description of drawings
Fig. 1 is the main TV structure sketch map of the utility model.
Fig. 2 is the A-A profile of Fig. 1.
Among the figure: boiler tube (1), seal cover (2), opening end (3), blind end (4), ring flange (5), gas outlet end (6), gas inlet end (7), bolt hole (8), seal washer (9).
The specific embodiment
In conjunction with accompanying drawing, the specific embodiment of the utility model is described.
Shown in accompanying drawing 1: a kind of fluoride heat treatment mainly is made up of boiler tube (1) and seal cover (2) with tube furnace boiler tube equipment; Boiler tube (1) can or be welded by steel plate is seamless through casting; Its diameter confirms that according to market seal cover (2) forms through casting and cut.Boiler tube (1) one end is opening end (3), and the other end is blind end (4); Blind end (4) bottom is welded with gas outlet end (6), is convenient to gas and condensation waste liquid and discharges; Opening end (3) edge is welded with ring flange (5), realizes closely cooperating through seal washer (9) and seal cover (2); Seal cover one side center is welded with gas inlet end (7), and opposite side can be as required, and cut becomes discoid projection, and diameter should be consistent with the internal diameter of boiler tube, and adopts matched in clearance, during use projection is stuck in the boiler tube, to play the positioning action to seal cover.On material, be characterized as with the prior art different techniques: said boiler tube and seal cover all adopt the Monel400 alloy.According to above-mentioned parameter, the technical problem of furnace tube corrosion when just having realized solving the heat treatment fluoride.
Claims (2)
1. a fluoride heat treatment includes boiler tube (1) and seal cover (2) with tube furnace boiler tube equipment; It is characterized in that: boiler tube (1) one end is opening end (3), and the other end is blind end (4); Blind end (4) bottom has gas outlet end (6); Opening end (3) utilizes ring flange (5) that seal cover (2) is installed; Seal cover (2) middle part is installed and is had gas inlet end (7).
2. a kind of fluoride heat treatment according to claim 1 is characterized in that with tube furnace boiler tube equipment: boiler tube (1) and seal cover (2) all material are all selected the Monel400 alloy for use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204038635U CN202254809U (en) | 2011-10-14 | 2011-10-14 | Tubular furnace pipe device for fluoride heat treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204038635U CN202254809U (en) | 2011-10-14 | 2011-10-14 | Tubular furnace pipe device for fluoride heat treatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202254809U true CN202254809U (en) | 2012-05-30 |
Family
ID=46116039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204038635U Expired - Fee Related CN202254809U (en) | 2011-10-14 | 2011-10-14 | Tubular furnace pipe device for fluoride heat treatment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202254809U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107701833A (en) * | 2017-11-14 | 2018-02-16 | 西安工程大学 | A kind of Mobile flange for tube furnace |
| CN108240767A (en) * | 2016-12-26 | 2018-07-03 | 北京北方华创微电子装备有限公司 | A kind of diffusion furnace oven door sealing structure |
| CN110836604A (en) * | 2018-08-17 | 2020-02-25 | 湖南红太阳光电科技有限公司 | Tubular vacuum reaction furnace |
-
2011
- 2011-10-14 CN CN2011204038635U patent/CN202254809U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108240767A (en) * | 2016-12-26 | 2018-07-03 | 北京北方华创微电子装备有限公司 | A kind of diffusion furnace oven door sealing structure |
| CN107701833A (en) * | 2017-11-14 | 2018-02-16 | 西安工程大学 | A kind of Mobile flange for tube furnace |
| CN107701833B (en) * | 2017-11-14 | 2019-08-20 | 西安工程大学 | A kind of Mobile flange for tube furnace |
| CN110836604A (en) * | 2018-08-17 | 2020-02-25 | 湖南红太阳光电科技有限公司 | Tubular vacuum reaction furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120530 Termination date: 20121014 |