CN202246859U - 薄膜太阳能电池沉积生产设备 - Google Patents
薄膜太阳能电池沉积生产设备 Download PDFInfo
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- CN202246859U CN202246859U CN2011203466965U CN201120346696U CN202246859U CN 202246859 U CN202246859 U CN 202246859U CN 2011203466965 U CN2011203466965 U CN 2011203466965U CN 201120346696 U CN201120346696 U CN 201120346696U CN 202246859 U CN202246859 U CN 202246859U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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CN2011203466965U CN202246859U (zh) | 2011-09-16 | 2011-09-16 | 薄膜太阳能电池沉积生产设备 |
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CN2011203466965U CN202246859U (zh) | 2011-09-16 | 2011-09-16 | 薄膜太阳能电池沉积生产设备 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103074616A (zh) * | 2012-12-26 | 2013-05-01 | 光达光电设备科技(嘉兴)有限公司 | 在衬底上沉积多层材料层的方法及化学气相沉积设备 |
CN104164661A (zh) * | 2013-05-16 | 2014-11-26 | 理想能源设备(上海)有限公司 | 直列式多腔叠层并行处理真空设备及其使用方法 |
CN107871682A (zh) * | 2016-09-27 | 2018-04-03 | 北京北方华创微电子装备有限公司 | 传输腔室及半导体加工设备 |
CN111910167A (zh) * | 2020-07-03 | 2020-11-10 | 上海理想万里晖薄膜设备有限公司 | 用于制造异质结太阳能电池的cvd设备及其镀膜方法 |
CN114645264A (zh) * | 2022-03-14 | 2022-06-21 | 上海德瀛睿创半导体科技有限公司 | 镀膜系统 |
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2011
- 2011-09-16 CN CN2011203466965U patent/CN202246859U/zh not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103074616A (zh) * | 2012-12-26 | 2013-05-01 | 光达光电设备科技(嘉兴)有限公司 | 在衬底上沉积多层材料层的方法及化学气相沉积设备 |
CN104164661A (zh) * | 2013-05-16 | 2014-11-26 | 理想能源设备(上海)有限公司 | 直列式多腔叠层并行处理真空设备及其使用方法 |
CN107871682A (zh) * | 2016-09-27 | 2018-04-03 | 北京北方华创微电子装备有限公司 | 传输腔室及半导体加工设备 |
CN111910167A (zh) * | 2020-07-03 | 2020-11-10 | 上海理想万里晖薄膜设备有限公司 | 用于制造异质结太阳能电池的cvd设备及其镀膜方法 |
CN111910167B (zh) * | 2020-07-03 | 2022-10-04 | 上海理想万里晖薄膜设备有限公司 | 用于制造异质结太阳能电池的cvd设备及其镀膜方法 |
CN114645264A (zh) * | 2022-03-14 | 2022-06-21 | 上海德瀛睿创半导体科技有限公司 | 镀膜系统 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170605 Address after: 201620 Shanghai city Songjiang District Sixian Road No. 3255, building 3, Room 403 Patentee after: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT CO., LTD. Address before: 201203 Curie Road, Zhangjiang hi tech park, Shanghai, Pudong New Area, No. 1 Patentee before: Ideal Energy Equipment (Shanghai) Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170608 Address after: 201620 Shanghai city Songjiang District Sixian Road No. 3255, building 3, Room 403 Patentee after: SHANGHAI LIXIANG WANLIHUI FILM EQUIPMENT CO., LTD. Address before: 201203 Curie Road, Zhangjiang hi tech park, Shanghai, Pudong New Area, No. 1 Patentee before: Ideal Energy Equipment (Shanghai) Ltd. |
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TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20120530 |
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