CN202246838U - Vacuum coating machine - Google Patents
Vacuum coating machine Download PDFInfo
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- CN202246838U CN202246838U CN2011203234188U CN201120323418U CN202246838U CN 202246838 U CN202246838 U CN 202246838U CN 2011203234188 U CN2011203234188 U CN 2011203234188U CN 201120323418 U CN201120323418 U CN 201120323418U CN 202246838 U CN202246838 U CN 202246838U
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Abstract
The utility model belongs to the technical field of vacuum coating and particularly relates to a vacuum coating machine, which comprises a cathode device, wherein the cathode device comprises a plurality of target materials, and each target material can be singly connected with an electric arc generator. The vacuum coating machine has the advantages that the target material size is smaller, a plurality of electric arc generators are adopted, because the size of the adopted target materials is smaller than that of square targets, and in addition, the electric arc generators singly control each round target so that the uniform volatilization is realized, produced coating metal particles are smaller than the square targets, the coating structure is more compact, and the bonding force between coatings and coated workpieces is good. The size of the round targets is small, the use quantity of the target materials is great, and the target materials made of different materials can be used for producing and developing composite coatings and diversified coatings, so the process variability and the flexibility are high.
Description
Technical field
The utility model belongs to the vacuum coat technical field, particularly relates to a kind of vacuum-coating machine.
Background technology
The side's of being target cathode apparatus system of vacuum-coating machine employing at present; Square target 1 volume in side's target cathode apparatus system is all bigger; The standard that could effectively use based on target is to be as the criterion according to the partial-depth that has evaporated on the target, when certain local evaporation of target that uses during to certain bounding depth target will scrap and can't continue use.Because the target that square target 1 volume ratio is scrapped more greatly also can't carry out reusing so caused great raw-material waste after the reconditioning.Can't place a plurality of targets owing to square target 1 volume ratio than the limitation of large equipment cavity space in addition, so the system of the bigger user's target cathode of the more single limitation of target kind device can't carry out the production technique of compound coating, diversification coating.Once more, user's target system is because the target volume ratio is bigger, and relative vaporator rate is slow during arc generator 2 evaporation targets, and therefore the metallics that is evaporated is relatively thicker can't obtain the very high coating of compactness.
The utility model content
The technical problem that (one) will solve
The technical problem that the utility model will solve is: a kind of target utilization rate of raw materials and coating quality of improving is provided, and can carries out the vacuum-coating machine of compound coating and diversification coating.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of vacuum-coating machine, comprises casing, cathode assembly and arc initiation device, and said cathode assembly connects arc generator, and said cathode assembly comprises a plurality of targets.
Wherein, each target all connects an arc generator separately.
Wherein, target is circular target.
Wherein, the diameter of target is 55mm～70mm.
(3) beneficial effect
Technique scheme has following advantage: the utility model target volume ratio is less has used a plurality of arc generators; Because the target volume counterparty target that adopts is little and so coating metal particle side target that have each circle target of a plurality of arc generator independent control to produce by its even volatilization is littler; So this is that coating metal particle side target little owing to square target in the target volume ratio prior art that adopts and that have the virtual voltage current control of each circle target of a plurality of arc generator independent control on unit surface that its even volatilization is produced is littler; Thereby make coating structure finer and close, coating and coated workpiece bonding force are good.Because the quantity that the little target of circle target volume uses often can use the target of unlike material to carry out the production and the exploitation of compound coating and diversification coating in explained hereafter, the process variability handiness is big.
Description of drawings
Fig. 1 is the square target cathode device synoptic diagram that prior art vacuum-coating machine structure is used;
Fig. 2 is a square target cathode device synoptic diagram among the utility model embodiment.
Wherein, 1: square target; 2: arc generator; 3: circular target.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the embodiment of the utility model is described in further detail.Following examples are used to explain the utility model, but are not used for limiting the scope of the utility model.
As shown in Figure 1, the cavity both sides of present embodiment vacuum-coating machine respectively are equipped with 4 miniature circular targets 3, and the diameter of circular target 3 is 63mm, and each circular target 3 connects an independently arc generator.Arc generator 2 anodal linking device cavitys, negative pole connects circular target 3.Adopt the steady-state evaporation of the mode may command target metals ion of an arc generator 2 corresponding circular targets 3.
Under high vacuum state, pass through heater heats cavity to certain temperature; The circular target 3 of arc initiation device action contact makes arc generator 1 instantaneous short circuit that connects circular target 3 positive and negative electrode produce electric arc to bombard circular target 3 surfaces, is evaporated out because electric arc has the target metals ion that very high energy bombarded.
An instance that uses the vacuum-coating machine in the foregoing description to carry out the coating operation: employed circular target 3 is the titanium target.In vacuum tightness is 5E-5mbar workpiece Heating temperature to 480 degree centigrade, gets into the coating step.Follow procedure is set and to be required titanium target on load voltage to-60V, electric current to rise to 18A, and the workpiece loading voltage of coating to+40V, electric current risen to 18A, and feed the 3 hours nitrogen coating time of 1000sccm.The actual coat-thickness that records is 2.3u after cooling and the release vacuum.
Because square target volume is little in the miniature circular target 3 volume ratio prior aries that adopt; And there is each circular target 3 of a plurality of arc generator 1 independent control let its even volatilization; So thereby the littler coating structure that makes of the coating metal particle of producing is finer and close, coating and coated workpiece bonding force are good.
Than the vacuum-coating machine of prior art user target cathode equipment, use the present embodiment vacuum-coating machine after, to the coating bonding force, surface hardness is tested and is drawn bonding force and brought up to HF2 by original HF3.Surface hardness has been brought up to HV2000-2300 by HV1800-2000.
Drawing maximum ga(u)ge and minimum thickness through the detection to test sample different sites coat-thickness differs and is no more than 0.4u to draw after using round target cathode device the coat-thickness homogeneity thus relatively good.
According to process requirements, to the shape of target, the adjustment that quantity all can be done adaptation, for example the diameter of circular target can be 55mm～70mm.
Because circular target 3 volumes of the utility model are little, the quantity that target uses is many, in explained hereafter, can use the target of unlike material to carry out the production and the exploitation of compound coating and diversification coating, and the process variability handiness is big.Because circular target 3 thickness are thicker; When the new target that uses the circle target system arrives the use volatilization limit for the first time; Can its top be done and repair a die; Processing treatment is fallen the target top and is erose part because of target consumption, adds the utilization ratio that has effectively improved target corresponding to the copper billet of the condition of equivalent thickness that repairs a die thereby contrast new target thickness then in the bottom of the back target that repairs a die.
The above only is the preferred implementation of the utility model; Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model know-why, can also make some improvement and replacement, these improvement and replacement also should be regarded as the protection domain of the utility model.
Claims (5)
1. a vacuum-coating machine comprises casing, cathode assembly and arc initiation device, and said cathode assembly connects arc generator, it is characterized in that said cathode assembly comprises a plurality of targets.
2. vacuum-coating machine as claimed in claim 1 is characterized in that, each target all connects an arc generator (2) separately.
3. vacuum-coating machine as claimed in claim 1 is characterized in that, said target is circular target.
4. vacuum-coating machine as claimed in claim 3 is characterized in that, the diameter of said circular target is 55mm～70mm.
5. vacuum-coating machine as claimed in claim 4 is characterized in that, the diameter of said circular target is 63mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203234188U CN202246838U (en) | 2011-08-31 | 2011-08-31 | Vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203234188U CN202246838U (en) | 2011-08-31 | 2011-08-31 | Vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202246838U true CN202246838U (en) | 2012-05-30 |
Family
ID=46108109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203234188U Expired - Fee Related CN202246838U (en) | 2011-08-31 | 2011-08-31 | Vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202246838U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102345098A (en) * | 2011-08-31 | 2012-02-08 | 苏州鼎利涂层有限公司 | Vacuum coating machine |
-
2011
- 2011-08-31 CN CN2011203234188U patent/CN202246838U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102345098A (en) * | 2011-08-31 | 2012-02-08 | 苏州鼎利涂层有限公司 | Vacuum coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120530 Termination date: 20170831 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |