CN202202018U - Self-tightening seed chuck - Google Patents
Self-tightening seed chuck Download PDFInfo
- Publication number
- CN202202018U CN202202018U CN2011202337312U CN201120233731U CN202202018U CN 202202018 U CN202202018 U CN 202202018U CN 2011202337312 U CN2011202337312 U CN 2011202337312U CN 201120233731 U CN201120233731 U CN 201120233731U CN 202202018 U CN202202018 U CN 202202018U
- Authority
- CN
- China
- Prior art keywords
- self
- seed chuck
- sleeve
- tightening
- intermediate plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to auxiliary equipment of direct-pulling single crystal growth equipment, aiming at providing a self-tightening seed chuck. The self-tightening seed chuck comprises a sleeve and clamping pieces, wherein the clamping pieces are arranged on the inner wall of the sleeve in an annular way, the inner wall of the sleeve has downward taper contracting towards an axis, the clamping pieces have external shapes matched with the taper, the inner diameter of an opening at the upper end in the clamping pieces is larger than that of an opening at the lower end, and the inner walls of the clamping pieces between the opening at the upper end and the opening at the lower end are in transition by adopting a conical face. During application of the self-tightening seed chuck, all parts are automatically tightened by means of the gravity of seeds, the weight of the seeds are continuously increased during crystal pulling, the frictional force is also continuously increased, and the seeds cannot be slipped. The seed chuck has a few parts and a simplest structure, therefore, the self-tightening seed chuck is quite convenient to operate during use.
Description
Technical field
The utility model relates to the utility appliance of czochralski silicon monocrystal growth apparatus, particularly a kind of self-tightening type seed chuck.
Background technology
Straight pulling silicon single crystal furnace fixes seed crystal through seed chuck aborning.In the prior art, seed chuck has various ways, but all have complex structure, unhandy problem.
China utility model patent CN201560249U discloses a kind of seed chuck structure: in the taper permanent sleeve, be provided with the seed crystal fixed link; Be provided with taper in the outside of seed crystal fixed link and tighten pad; The water-cooled crystalline style is arranged at the top of seed crystal fixed link; Establish pad below the water-cooled crystalline style, establish gasket ring below the pad, the top that gasket ring is enclosed within the seed crystal fixed link links to each other with the upper end that pad is tightened in taper.When tightening the taper permanent sleeve, taper deflation pad compresses the seed crystal fixed link and realizes fixing.But the shortcoming that this seed chuck structure exists is: whole chuck tightens the pad completion to the fastening force of seed crystal fixed link by taper, and this just claims to the taper permanent sleeve degree of tightening, and is loosening as in the crystal pulling process, taking place, and certainly will cause serious industrial accident.In addition, it is complicated that this chuck junction structure is still disliked comparatively speaking, disassembling section inconvenience.
The utility model content
The technical problem that the utility model will solve is, overcomes deficiency of the prior art, and a kind of self-tightening type seed chuck is provided.
Be the technical solution problem, the scheme of the utility model is:
A kind of self-tightening type seed chuck is provided, comprises sleeve and the intermediate plate that is located on sleeve lining, sleeve lining has the tapering that shrinks towards the axle center downwards, and intermediate plate has the outer shape that matches with this tapering; The internal diameter of intermediate plate inner upper end opening is greater than the internal diameter of its lower ending opening, and the intermediate plate inwall between open upper end and the lower ending opening is with conical surface transition.
As a kind of improvement, said intermediate plate has two at least.
As a kind of improvement, said intermediate plate is two semicircle graphite flakes.
As a kind of improvement, said intermediate plate is the graphite intermediate plate.
As a kind of improvement, said sleeve is the Mo sleeve.
As a kind of improvement, said sleeve lining downwards and the tapering that shrinks towards the axle center be 0.5 °～2 °.
As a kind of improvement, said sleeve lining downwards and the tapering that shrinks towards the axle center be 1 °.
The beneficial effect of the utility model is:
The self-tightening type seed chuck designs through structural taper fit, and through utilizing seed crystal gravity that each parts is strained automatically, seed crystal constantly increases weight in the crystal pulling process in use, and frictional force also constantly increases, and can not occur skidding more.
What is more important, because the seed chuck parts are few, structure has accomplished to simplify most, so the utility model is in use, operation is very easy.Before use, only need seed crystal is carried out simple pre-treatment, its upper end is processed as the shape that matches with intermediate plate inwall tapering, the seed crystal upper end is omited high or can not influenced result of use a little less than intermediate plate.After crystal pulling finishes to treat the seed crystal cooling, seed crystal is upwards loose, exceed sleeve, two lobe intermediate plates unclamp automatically, take out intermediate plate then, and seed crystal can take out from the sleeve lower port, and is very convenient.
Description of drawings
Fig. 1 is the telescopic vertical view;
Fig. 2 is the shape synoptic diagram of seed crystal head;
Fig. 3 is the clamped condition synoptic diagram of self-tightening type seed chuck.
Reference numeral: 1 sleeve, 2 intermediate plates, 3 seed crystals.
Embodiment
Below in conjunction with accompanying drawing the embodiment of the utility model is carried out detailed presentations.
Self-tightening type seed chuck in the utility model; Comprise the sleeve 1 of Mo and the intermediate plate 2 of two semicircles of the high strength graphite material that is located on sleeve 1 inwall; Sleeve 1 inwall have downwards shrink towards the axle center tapering; This tapering can be set between 0.5 °～2 ° and (be preferably 1 °), and intermediate plate 2 has the outer shape that matches with this tapering; The internal diameter of intermediate plate 2 inner upper end openings is greater than the internal diameter of its lower ending opening, and the intermediate plate inwall between open upper end and the lower ending opening is then with conical surface transition.
Before the single crystal growing furnace crystal pulling, pass seed crystal 3 in the middle of the two lobe graphite intermediate plates 2 of in sleeve 1, packing into, intermediate plate 2, under seed crystal 3 self gravitations, effect is squeezed down two intermediate plates 2 at sleeve 1 inwall inclination angle, and realization adds the self-tightening of seed crystal holds.In the crystal pulling process, seed crystal 3 is more and more heavier, and sleeve 1, intermediate plate 2 and seed crystal 3 triangular frictional force also constantly increase, and self-tightening power is also big more, and seed crystal 3 is along with the synchronous rotation of weight is also just steady more.After crystal pulling finishes to treat seed crystal 3 coolings, seed crystal 3 is upwards loose, exceed sleeve 1, two lobe intermediate plate 2 and unclamp automatically.Take out intermediate plate 2 then, seed crystal 3 takes out from the lower port of sleeve 1 and gets final product.
Claims (7)
1. the self-tightening type seed chuck comprises sleeve and the intermediate plate that is located on sleeve lining, and sleeve lining has the tapering that shrinks towards the axle center downwards, and intermediate plate has the outer shape that matches with this tapering; It is characterized in that the internal diameter of intermediate plate inner upper end opening is greater than the internal diameter of its lower ending opening, the intermediate plate inwall between open upper end and the lower ending opening is with conical surface transition.
2. self-tightening type seed chuck according to claim 1 is characterized in that, said intermediate plate has two at least.
3. self-tightening type seed chuck according to claim 1 is characterized in that, said intermediate plate is two semicircle graphite flakes.
4. self-tightening type seed chuck according to claim 1 is characterized in that, said intermediate plate is the graphite intermediate plate.
5. self-tightening type seed chuck according to claim 1 is characterized in that, said sleeve is the Mo sleeve.
6. self-tightening type seed chuck according to claim 1 is characterized in that, said sleeve lining downwards and the tapering that shrinks towards the axle center be 0.5 °～2 °.
7. self-tightening type seed chuck according to claim 1 is characterized in that, said sleeve lining downwards and the tapering that shrinks towards the axle center be 1 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202337312U CN202202018U (en) | 2011-07-04 | 2011-07-04 | Self-tightening seed chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202337312U CN202202018U (en) | 2011-07-04 | 2011-07-04 | Self-tightening seed chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202202018U true CN202202018U (en) | 2012-04-25 |
Family
ID=45966150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202337312U Expired - Lifetime CN202202018U (en) | 2011-07-04 | 2011-07-04 | Self-tightening seed chuck |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202202018U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102312288A (en) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | Self-tightening type seed crystal chuck |
| CN107794565A (en) * | 2016-09-06 | 2018-03-13 | 上海新昇半导体科技有限公司 | Seedholder and czochralski crystal growing furnace |
-
2011
- 2011-07-04 CN CN2011202337312U patent/CN202202018U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102312288A (en) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | Self-tightening type seed crystal chuck |
| CN107794565A (en) * | 2016-09-06 | 2018-03-13 | 上海新昇半导体科技有限公司 | Seedholder and czochralski crystal growing furnace |
| CN107794565B (en) * | 2016-09-06 | 2020-11-13 | 上海新昇半导体科技有限公司 | Seed crystal chuck and vertical pulling single crystal furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102312288A (en) | Self-tightening type seed crystal chuck | |
| CN202202018U (en) | Self-tightening seed chuck | |
| CN106495163B (en) | A kind of device for eliminating polysilicon carbon head material | |
| CN203726115U (en) | Electrodynamic flange bolt tightener | |
| CN201762481U (en) | Single crystal furnace seed crystal chuck mechanism | |
| CN203726116U (en) | Electric flange bolt tightener | |
| CN201942789U (en) | Seed crystal holding device used for producing solar-grade silicon single crystal | |
| CN201560249U (en) | Novel seedchuck structure | |
| CN202272987U (en) | Molybdenum seed crystal gripper for single crystal furnace | |
| CN217465338U (en) | Crucible convenient to dismouting | |
| CN209519416U (en) | A kind of lautertuns of fast changeable filter cloth | |
| CN202925152U (en) | Quartz feeding device of single crystal furnace | |
| CN207665657U (en) | Afforestation trees clamping and fixing device | |
| CN202214451U (en) | Special clamping inner sleeve for conical seed crystal of silicon single crystal | |
| CN205934116U (en) | Silicon rod centre gripping fixing device of monocrystalline silicon production usefulness of draing | |
| CN205802787U (en) | A kind of special hanger of quartz crucible mold | |
| CN202705560U (en) | Seed crystal matching structure used for large-feeding czochralski silicon single crystal | |
| CN204053921U (en) | A kind of spanner support | |
| CN214572344U (en) | VGF method growth indium phosphide single crystal quartz tube and anchor clamps thereof | |
| CN202157145U (en) | Containing device for silicon core master batches | |
| CN202656143U (en) | Guiding chain type turning wheel tensioning device | |
| CN217530426U (en) | Automatic polishing device for cylindrical seed crystals | |
| CN208775844U (en) | A kind of high purity graphite block handling device | |
| CN204151464U (en) | A kind of crucible hoisting clamp | |
| CN220685320U (en) | Seed rod centering fixing device for silicon carbide crystal growth |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120425 |