CN202196033U - MEMS heat-conducted low-concentration methane gas sensor - Google Patents
MEMS heat-conducted low-concentration methane gas sensor Download PDFInfo
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- CN202196033U CN202196033U CN2011202447702U CN201120244770U CN202196033U CN 202196033 U CN202196033 U CN 202196033U CN 2011202447702 U CN2011202447702 U CN 2011202447702U CN 201120244770 U CN201120244770 U CN 201120244770U CN 202196033 U CN202196033 U CN 202196033U
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Abstract
The utility model belongs to the technical field of mining inflammable and explosive gas safety monitoring, and relates to an MEMS (Electronic Mechanical System) heat-conducted low-concentration methane gas sensor. The sensor comprises an MEMS heat-conducted sensitive element, a humiture compensation element, a signal conditioner and a control panel, wherein the MEMS heat-conducted sensitive element is connected with the signal conditioner through a data cable; the humiture compensation element is connected with the control panel through a data cable; and the signal conditioner is connected with the control panel through a pin header. In the methane gas sensor provided by the utility model, the MEMS heat-conducted sensitive element is adopted to detect the concentration of methane gas, and temperature and humidity compensation is realized through the humiture compensation element. The sensor based on the MEMS technology has very small volume and low power consumption but greatly improved sensitivity, has the power consumption of about 800mW in the whole in comparison with a catalytic combustion type methane gas sensor of which the power consumption is about 1.5W in the whole, and enables each channel in a substation to drive three sensors.
Description
Technical field
The utility model belongs to mining flammable explosive gas safety monitoring technology field, relates to a kind of micro electronmechanical heat-conducted low dense methane gas sensor.
Background technology
At present, detecting the most extensive, the prevailing method of low-concentration methane gas use is to adopt the methane gas sensor of catalytic combustion type to detect.
There is following weak point in the catalytic combustion type methane gas sensor:
1. the overall power of catalytic combustion type methane gas sensor is bigger, has limited the distributed quantity of its sensor of methane in the mine like this.A passage of present mining substation can drive 1-2 methane gas sensor.
2. oxidation reaction takes place in when work in the catalytic combustion type methane gas sensor under the effect of catalyzer, in oxidation reaction process, needs spent catalyst, when catalyst consumption totally, catalytic combustion type sensor can not continue use.At present, the serviceable life of catalytic combustion type sensor is not generally about half a year.In addition, catalyzer is consumables, and along with the increase of service time, catalyzer can reduce gradually, so the numerical value of measurement point also can produce drift, for guaranteeing its measurement point numerical value precision, need demarcate methane gas sensor again, and the cycle of demarcation at present was 2 weeks.
In sum; At present to hanging down the detection of dense methane gas; Problems such as the methane gas sensor of catalytic combustion type exists that power consumption is big, the life-span is short, the demarcation cycle is short, these issues limit the distributed quantity of methane gas sensor, increased the use cost of safeguarding of sensor.
Summary of the invention
The purpose of the utility model provides the micro electronmechanical heat-conducted low dense methane gas sensor that a kind of low in energy consumption, life-span is long and the demarcation cycle is long.
The technical solution of the utility model is; Sensor comprises micro electronmechanical heat-conducted sensitive element, temperature and humidity compensation element, signal condition and control panel; Micro electronmechanical heat-conducted sensitive element joins through data line and signal condition; The temperature and humidity compensation element joins through data line and control panel, and signal condition joins through row's pin and control panel.
Described temperature and humidity compensation element and micro electronmechanical heat-conducted sensitive element and control panel place two environment respectively.
Described temperature and humidity compensation element compensates the methane concentration signal that micro electronmechanical heat-conducted sensitive element obtains through the CPU on the control panel.
Described control panel comprises CPU, infrared reception, LED demonstration, frequency output, sound and light alarm and power supply.
Described temperature and humidity compensation element and micro electronmechanical heat-conducted sensitive element place same air chamber jointly.
The advantageous effect that the utlity model has; The utility model adopts the concentration of micro electronmechanical (MEMS:Micro-electromechanical Systems) heat-conducted sensitive element detection methane gas, and carries out the temperature and humidity compensation through the temperature and humidity compensation element.Micro electronmechanical (MEMS) heat-conducted sensitive element of the utility model is based on micro-electromechanical technology, and its volume and power consumption are very little, but sensitivity improves greatly; The overall power of catalytic combustion type methane gas sensor is about 1.5W, and the overall power of the utility model is about 800mW, makes each passage of substation can drive 3 sensors.
Because micro electronmechanical heat-conducted methane gas sensor is to carry out detected gas concentration through thermal conduction principle; There is not the physics loss; Need spent catalyst unlike catalytic combustion type methane gas sensor that kind, therefore, the serviceable life of micro electronmechanical heat-conducted methane transducer and demarcation cycle are all very long; Reach serviceable life more than 2 years, the demarcation cycle is more than 3 months.
The utility model adopts micro electronmechanical heat-conducted methane transducer that low-concentration methane gas is detected; Has advantage low in energy consumption, that the life-span long and the demarcation cycle is long; Can practice thrift a large amount of man power and materials thus, have marketing prospect preferably and considerable economic.
Description of drawings
Fig. 1 is the system principle diagram of the utility model;
Fig. 2 is the structural representation of the utility model.
Embodiment
Sensor is made up of micro electronmechanical heat-conducted sensitive element 9, temperature and humidity compensation element 10, signal condition 7, control panel 12, air chamber 8 and shell 11, and control panel 12 comprises: CPU 2, infrared reception 1, LED show 3, frequency output 4, sound and light alarm 5 and power supply 6.
Micro electronmechanical heat-conducted sensitive element 9 and temperature and humidity compensation element 10 are installed in the same air chamber 8 jointly, and temperature and humidity compensation element 10 and micro electronmechanical heat-conducted sensitive element 9 are under the same environment, and the temperature and humidity compensation is more accurate like this.Micro electronmechanical heat-conducted sensitive element 9 is connected to signal condition 7 through lead-in wire, and temperature and humidity compensation element 10 is connected to control panel 12 through lead-in wire.
The principle of work of sensor: detect methane gas through micro electronmechanical heat-conducted sensitive element 9, the variation of concentration of methane gas can cause the variation of micro electronmechanical heat-conducted sensitive element 9 resistances; Signal condition 7 circuit convert the variation of micro electronmechanical heat-conducted sensitive element 9 resistances to the methane concentration corresponding voltage value; CPU 2 inside carry 12 A/D converters, convert the methane concentration corresponding voltage value of signal condition 7 circuit output to methane concentration corresponding digital signal; Temperature and humidity compensation element 10 testing environment temperature and humidities, and pass to CPU 2 through the I2C bus; CPU 2 compensates and revises the corresponding digital signal of methane concentration according to temperature and humidity; LED shows that 3 modules show the methane concentration value, and exports 4 modules output methane concentration value frequency value corresponding through frequency, when concentration value surpasses alarm limit, carries out sound and light alarm through sound and light alarm 5 modules; Infrared reception 1 module receives the order of IR remote controller, and CPU 2 demarcates and stores calibration point according to order.
Claims (5)
1. micro electronmechanical heat-conducted low dense methane gas sensor; It is characterized in that; Comprise micro electronmechanical heat-conducted sensitive element (9), temperature and humidity compensation element (10), signal condition (7), control panel (12), air chamber (8) and shell (11); Micro electronmechanical heat-conducted sensitive element (9) joins through data line and signal condition (7), and temperature and humidity compensation element (10) joins through data line and control panel (12), and signal condition (7) joins through row's pin and control panel (12).
2. a kind of micro electronmechanical heat-conducted low dense methane gas sensor as claimed in claim 1 is characterized in that described temperature and humidity compensation element (10) and micro electronmechanical heat-conducted sensitive element (9) place two environment respectively with control panel (12).
3. a kind of micro electronmechanical heat-conducted low dense methane gas sensor as claimed in claim 1; It is characterized in that described temperature and humidity compensation element (10) compensates the methane concentration signal that micro electronmechanical heat-conducted sensitive element (9) obtains through the CPU (2) on the control panel (12).
4. a kind of micro electronmechanical heat-conducted low dense methane gas sensor as claimed in claim 1 is characterized in that described control panel (12) comprises that CPU (2), infrared reception (1), LED show (3), frequency output (4), sound and light alarm (5) and power supply (6).
5. a kind of micro electronmechanical heat-conducted low dense methane gas sensor as claimed in claim 1 is characterized in that described temperature and humidity compensation element (10) and micro electronmechanical heat-conducted sensitive element (9) place same air chamber (8) jointly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202447702U CN202196033U (en) | 2011-07-13 | 2011-07-13 | MEMS heat-conducted low-concentration methane gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202447702U CN202196033U (en) | 2011-07-13 | 2011-07-13 | MEMS heat-conducted low-concentration methane gas sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202196033U true CN202196033U (en) | 2012-04-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN2011202447702U Expired - Lifetime CN202196033U (en) | 2011-07-13 | 2011-07-13 | MEMS heat-conducted low-concentration methane gas sensor |
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| CN (1) | CN202196033U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105464A (en) * | 2012-12-20 | 2013-05-15 | 江苏三恒科技股份有限公司 | Infrared methane sensor and water vapor resisting method |
| US20140223995A1 (en) * | 2013-01-31 | 2014-08-14 | Sensirion Ag | Portable sensor device with a gas sensor and method for operating the same |
| CN110462377A (en) * | 2016-12-09 | 2019-11-15 | 新加坡国立大学 | Gas sensor MEMS structure and its manufacturing method |
| CN110988049A (en) * | 2019-12-10 | 2020-04-10 | 武汉微纳传感技术有限公司 | Catalytic combustion type MEMS gas sensor and working method thereof |
-
2011
- 2011-07-13 CN CN2011202447702U patent/CN202196033U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105464A (en) * | 2012-12-20 | 2013-05-15 | 江苏三恒科技股份有限公司 | Infrared methane sensor and water vapor resisting method |
| US20140223995A1 (en) * | 2013-01-31 | 2014-08-14 | Sensirion Ag | Portable sensor device with a gas sensor and method for operating the same |
| CN110462377A (en) * | 2016-12-09 | 2019-11-15 | 新加坡国立大学 | Gas sensor MEMS structure and its manufacturing method |
| CN110988049A (en) * | 2019-12-10 | 2020-04-10 | 武汉微纳传感技术有限公司 | Catalytic combustion type MEMS gas sensor and working method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120418 |