CN202189021U - Illumination system of full-automatic tertiary photodetector - Google Patents

Illumination system of full-automatic tertiary photodetector Download PDF

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Publication number
CN202189021U
CN202189021U CN2011202623278U CN201120262327U CN202189021U CN 202189021 U CN202189021 U CN 202189021U CN 2011202623278 U CN2011202623278 U CN 2011202623278U CN 201120262327 U CN201120262327 U CN 201120262327U CN 202189021 U CN202189021 U CN 202189021U
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China
Prior art keywords
illumination system
generator
automatic
backlight
full
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Expired - Lifetime
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CN2011202623278U
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Chinese (zh)
Inventor
林宜龙
刘宝龙
戚长政
唐召来
黄水清
林清岚
王能翔
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Shenzhen Geland Intelligent Equipment Ltd By Share Ltd
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Grand Technology Shenzhen Co Ltd
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Priority to CN2011202623278U priority Critical patent/CN202189021U/en
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Abstract

The utility model discloses an illumination system of a full-automatic tertiary photodetector. The illumination system is characterized by comprising a camera and lens A, a coaxial optical generator B, a backlight generator D and a vertical mounting plate E, wherein both the camera and lens A and the coaxial optical generator are mounted on the vertical mounting plate E; and the backlight generator D and the coaxial optical generator B are arranged below the coaxial optical generator at an interval. The utility model has the benefits that the illumination system can irradiate gold threads uniformly, has the grey value deviation smaller than 30, and achieves good irradiation contrast ratio of a gold thread patch region and a gold thread endpoint region, as well as favorable silver glue separation, gold thread endpoint region separation, gold thread and impurity separation and other effects.

Description

A kind of illumination system of full-automatic three Optical Inspection Machines
Technical field
The utility model relates to the illumination system of full-automatic three Optical Inspection Machines; More precisely; Relate to the vision system camera when material bar chip gold thread is captured detection; The axis light that is produced by led light source and catoptron is radiated at material bar top, is radiated at the below of material bar by backlight, makes the illumination system of a kind of full-automatic three Optical Inspection Machines of clear, the accurate various defectives of capturing the chip gold thread of phase function.
Background technology
Detection to gold thread on the chip is the detection for the third time in the chip production process, and detects relevant machinery and equipment for the third time and is called Optical Inspection Machine three times.Gold thread to chip on the material bar detects to the effect that: the gold thread curved detection; The gold thread thread cast-off detects; Impurity detects; Unnecessary gold thread detects; Short-circuit detecting; The six kinds of contents such as detection that open circuit at present, are accomplished the detection of these contents of gold thread, mainly lean on eye-observation to detect and the artificial detection that combines with microscope.This detection method, not only labour intensity is big, inefficiency, the quality of detection also varies with each individual, and is difficult to guarantee the detection quality of product.
Also there is the people once to attempt to obtain the automatic detection of the method realization gold thread that the live information of chip gold thread and computer-controlled standard gold line template compare with camera; But suffer from do not find a kind of can let camera clear, accurately obtain the illumination system of the various defectives of gold thread, the efficient of detection and quality and manual detection do not have remarkable advantages.
The utility model content
The purpose of the utility model is to solve the difficult problem that above-mentioned gold thread detects, provide a kind of can make camera clear, accurately obtain the illumination system of the various defect information of gold thread.
For realizing above-mentioned purpose; The utility model provides a kind of illumination system of full-automatic three Optical Inspection Machines, and this system comprises camera and camera lens A, axis light generator B; Generator D backlight and vertical installing plate E; Wherein, camera and camera lens A and axis light generator are installed on the vertical installing plate E, and generator D backlight and axis light generator B are spaced a distance and are arranged in axis light generator below.
Preferably, the illumination system light source expects that relatively the bar operating distance is adjustable: coaxial light source is 25~50mm apart from the operating distance of material bar; Backlight is-50~0mm apart from the operating distance of material bar, and wherein 0mm refers to expect the bar bottom surface.
Preferably, the area backlight of illumination system can the mulch bar on all chips.
Preferably, the light source of illumination system uses normal bright state, closed condition and triggering state alternately.
Preferably, axis light generator B looks axis light and the needs of expecting stripe pitch, can vertically do adjustment up and down on the installing plate E.
Preferably, the coaxial light source operating distance can be 25~50mm; The structure of axis light generator B comprises a shell 704; Shell 704 middle parts are provided with diffuse reflector 702; The shell of one side of diffuse reflector is provided with LED particle board 701; Opposite side is obliquely installed half-reflecting half mirror 703, and LED particle board 701 links to each other with external power source through power lead, and the part of the corresponding half-reflecting half mirror of outer casing bottom is provided with light-emitting window.
Preferably, generator D backlight comprises emitting led particle board 711 and light source diffusion sheet 712 on it is set.
There is following beneficial effect in this system:
1. the illumination system light source is made up of axis light and backlight, and the material bar is positioned between two light sources, and camera is captured chip information downwards above illumination system.
2. the illumination system light source expects that relatively the bar operating distance is adjustable: coaxial light source is 25~50mm apart from the operating distance of material bar; Backlight is-50~0mm apart from the operating distance of material bar
3. the backlight bottom and the sky are relatively more spacious, and thermal diffusivity is good, has prolonged the serviceable life of backlight.
4. the light source of illumination system uses normal bright state, closed condition and triggering state alternately, has prolonged the serviceable life of light source.
5. this illumination system is even to the gold thread irradiation, and the gray-scale value deviation is less than 30.Contrast to gold thread paster zone and gold thread end points area illumination is fine, and what elargol separated, the regional separation of gold thread end points, gold thread separate with impurity etc. is respond well.
Description of drawings
Fig. 1 a is that illumination system is formed schematic side view
Fig. 1 b is that illumination system is formed schematic perspective view
The structural representation of Fig. 2 axis light generator
Fig. 3 generator architecture synoptic diagram backlight
The workflow diagram of Fig. 4 illumination system
Wherein
A-camera and the emitting led particle board 712-of the emitting led particle board 702-of the vertical installing plate 701-of camera lens B-axis light generator C-measured object (material bar) D-generator E-backlight diffuse reflector 703-half-reflecting half mirror 704-install bin 711-light source diffusion sheet
Embodiment
The structure of the illumination system in the utility model is formed shown in Fig. 1 a, 1b mainly by camera and camera lens A; Axis light generator B; Measured object (chip on the material bar) C, generator D backlight and vertical installing plate E, wherein; Camera and camera lens A and axis light generator are installed on the vertical installing plate E, and generator D backlight and axis light generator B are spaced a distance and are arranged in axis light generator below.During use, measured object expects that promptly bar (chip) C places between axis light generator B and the generator D backlight.。
The coaxial light source operating distance can be 25~50mm, and wherein 0mm refers to expect the bar bottom surface; Show a kind of enforcement structure of axis light generator 601 with reference to Fig. 2, it comprises a shell 704, and shell 704 middle parts are provided with diffuse reflector 702; The shell of one side of diffuse reflector 702 is provided with and its opposing L ED particle board 701; Opposite side is obliquely installed half the anti-semi-permeable mirror 703 from top margin to the shell of diffuse reflector 702 with diffuse reflector 702 relative bases, and at this, those skilled in the art all should be clear that; The periphery of diffuse reflector 702; And the periphery of half-reflecting half mirror 703 all should with the inwall close contact of shell, in the inwall that embeds shell, to guarantee the consistance of light path.Shell 704 the above and below of half-reflecting half mirror 703 be provided with respectively all with the camera lens of camera coaxial on light hole and following light hole.LED particle board 701 links to each other with external power source through power lead; The light that LED on the LED particle board sends is reflected by half-reflecting half mirror 703 after diffuse reflection takes place diffuse reflector 702; The light that the reflection back forms passes through down, and light hole penetrates; And then be radiated on the material bar, and the light of material bar emission incides in the camera lens of camera through light hole, half-reflecting half mirror (playing the transmission effect at this moment) and last light hole down, and then make camera can clearly capture the gold thread of chip.
The backlight operating distance can be-50~0mm, and wherein 0mm refers to expect the bar bottom surface.With reference to Fig. 3, generator D backlight comprises emitting led particle board 711 and light source diffusion sheet 712 on it is set.
As shown in Figure 1, the area backlight of illumination system is bigger, can the mulch bar on all chips, generator D backlight looks the lighting effect of this batch of material bar with the spacing of material bar C and decide, after the spacing setting, generator D backlight will be locked.Axis light generator B places the top of material bar, and the axis light area that it produces is less, when axis light and entering backlight trigger state, for camera is captured the lighting effect that chip gold thread information provides reliable high-quality.Axis light generator B and camera A are installed on the vertical installing plate E that can move along x and y direction with follower (among the figure draw), and axis light generator B looks the needs of axis light and material stripe pitch, can on vertical installing plate E, do up and down and adjust.The course of work of illumination system is as shown in Figure 4.
With reference to Fig. 4, the course of work of the illumination system of the utility model is: after the system start-up, the material bar is transferred device in the course of conveying of the detection position of illumination system, and illumination system is in closed condition; When the material bar reached the sensor response position, illumination system was opened normal bright state; Follow the tracks of travel mechanism this moment and seek the first core assembly sheet on the material bar according to the software location, if seek fall short, then illumination system is closed; If search out target, illumination system is then opened the triggering state, and keeps synchronous coordination to trigger state with camera candid photograph detection system and tracking travel mechanism, remains to one always and expects that the whole chips candid photograph detections on the bar finish; The whole chips of a material on the bar capture detect finish after, illumination system is closed, the material bar that detected is exported detecting position, the original position is got back to by tracking travel mechanism, wait is to the detection of next piece material bar.
The characteristics of the illumination system of the utility model are:
1. the illumination system light source is made up of axis light and backlight, and the material bar is positioned between two light sources, and camera is captured chip information downwards above illumination system.
2. the illumination system light source expects that relatively the bar operating distance is adjustable: coaxial light source is 25~50mm apart from the operating distance of material bar; Backlight is-50~0mm apart from the operating distance of material bar
3. the backlight bottom and the sky are relatively more spacious, and thermal diffusivity is good, has prolonged the serviceable life of backlight.
4. the light source of illumination system uses normal bright state, closed condition and triggering state alternately, has prolonged the serviceable life of light source.
5. this illumination system is even to the gold thread irradiation, and the gray-scale value deviation is less than 30.Contrast to gold thread paster zone and gold thread end points area illumination is fine, and what elargol separated, the regional separation of gold thread end points, gold thread separate with impurity etc. is respond well.

Claims (7)

1. the illumination system of full-automatic three Optical Inspection Machines; It is characterized in that, comprise camera and camera lens (A), axis light generator (B); Generator backlight (D) and vertical installing plate (E); Wherein, camera and camera lens (A) are installed on the vertical installing plate (E) with the axis light generator, and generator backlight (D) is spaced a distance with axis light generator (B) and is arranged in axis light generator below.
2. according to the illumination system of full-automatic three Optical Inspection Machines of claim 1, it is characterized in that: the illumination system light source expects that relatively the bar operating distance is adjustable: coaxial light source is 25~50mm apart from the operating distance of material bar; Backlight is-50~0mm apart from the operating distance of material bar, and wherein 0mm refers to expect the bar bottom surface.
3. according to the illumination system of full-automatic three Optical Inspection Machines of claim 1, it is characterized in that: the area backlight of illumination system can the mulch bar on all chips.
4. according to the illumination system of full-automatic three Optical Inspection Machines of claim 1, it is characterized in that: the light source of illumination system uses normal bright state, closed condition and triggering state alternately.
5. according to the illumination system of full-automatic three Optical Inspection Machines of claim 1, it is characterized in that: axis light generator (B) is looked the needs of axis light and material stripe pitch, can vertically do adjustment up and down on the installing plate (E).
6. according to the illumination system of full-automatic three Optical Inspection Machines of claim 1, it is characterized in that: the coaxial light source operating distance is 25~50mm, and wherein 0mm refers to expect the bar bottom surface; The structure of axis light generator (B) comprises a shell (704); Shell (704) middle part is provided with diffuse reflector (702); The shell of one side of diffuse reflector is provided with LED particle board (701); Opposite side is obliquely installed half-reflecting half mirror (703) LED particle board (701) and links to each other with external power source through power lead, and the part of the corresponding half-reflecting half mirror of outer casing bottom is provided with light-emitting window.
7. according to the illumination system of full-automatic three Optical Inspection Machines of claim 1, it is characterized in that: generator backlight (D) comprises emitting led particle board (711) and light source diffusion sheet (712) on it is set.
CN2011202623278U 2011-07-22 2011-07-22 Illumination system of full-automatic tertiary photodetector Expired - Lifetime CN202189021U (en)

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Application Number Priority Date Filing Date Title
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104165653A (en) * 2014-08-27 2014-11-26 洛阳久德轴承模具技术有限公司 Device for collecting end face image and chamfer image of bearing roller and collecting method thereof
CN104535579A (en) * 2014-12-22 2015-04-22 中国科学院长春光学精密机械与物理研究所 Etch defect detection device for steel belt grating
CN105548210A (en) * 2015-12-31 2016-05-04 广东工业大学 Detection method for American-standard power source extension wire based on machine vision
CN106153630A (en) * 2015-04-27 2016-11-23 昆山市和博电子科技有限公司 Chip-R detection device
CN108267448A (en) * 2018-01-23 2018-07-10 上海读家电子科技有限公司 A kind of backlight operating mechanism for ceramic substrate detection
CN110501341A (en) * 2019-08-19 2019-11-26 无锡先导智能装备股份有限公司 Battery testing system and battery detection method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104165653A (en) * 2014-08-27 2014-11-26 洛阳久德轴承模具技术有限公司 Device for collecting end face image and chamfer image of bearing roller and collecting method thereof
CN104165653B (en) * 2014-08-27 2016-06-08 洛阳久德轴承模具技术有限公司 For gathering device and the acquisition method thereof of bearing roller end face and chamfering image
CN104535579A (en) * 2014-12-22 2015-04-22 中国科学院长春光学精密机械与物理研究所 Etch defect detection device for steel belt grating
CN106153630A (en) * 2015-04-27 2016-11-23 昆山市和博电子科技有限公司 Chip-R detection device
CN105548210A (en) * 2015-12-31 2016-05-04 广东工业大学 Detection method for American-standard power source extension wire based on machine vision
CN105548210B (en) * 2015-12-31 2018-05-08 广东工业大学 The detection method of American Standard power extending line based on machine vision
CN108267448A (en) * 2018-01-23 2018-07-10 上海读家电子科技有限公司 A kind of backlight operating mechanism for ceramic substrate detection
CN110501341A (en) * 2019-08-19 2019-11-26 无锡先导智能装备股份有限公司 Battery testing system and battery detection method

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C56 Change in the name or address of the patentee
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Address after: 518000 Guangdong city of Shenzhen province Baoan District Longhua sea with rich industrial park third area Huarong Road Long Fu Industrial Zone 3 and 4, 7, 8, 1-4

Patentee after: Shenzhen geland intelligent equipment Limited by Share Ltd

Address before: 518000 Guangdong city of Shenzhen province Baoan District Longhua sea with rich industrial park third area Huarong Road Long Fu Industrial Zone 3 and 4, 7, 8, 1-4

Patentee before: Grand Technology (Shenzhen) Co.,Ltd.

CX01 Expiry of patent term

Granted publication date: 20120411

CX01 Expiry of patent term