CN202188722U - Silica-chip dehydrating equipment - Google Patents
Silica-chip dehydrating equipment Download PDFInfo
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- CN202188722U CN202188722U CN 201120263175 CN201120263175U CN202188722U CN 202188722 U CN202188722 U CN 202188722U CN 201120263175 CN201120263175 CN 201120263175 CN 201120263175 U CN201120263175 U CN 201120263175U CN 202188722 U CN202188722 U CN 202188722U
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- dehydration
- drive circuit
- control system
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Abstract
The utility model discloses silica-chip cleaning equipment, which aims to provide a silica-chip dehydrating machine characterized by stable and reliable operation, low maintenance demand, and low cost; the equipment disclosed by The utility model comprises a dehydrating mechanism located in a machine case, dehydrating auxiliary equipment and an electric control system; the electric control system is composed of an alternating current servo drive circuit, a single chip or a programmable controller, a touch screen and an alternating current servo motor; a data communication end of the touch screen is connected with a data communication end of the single chip or the programmable controller and a communication connecting end of the alternating current servo drive circuit respectively; and a motor connecting end and a coder connecting end of the alternating current servo drive circuit are electrically connected with a power input end and a coder output end of the alternating current servo motor respectively. An electric control system of the silica-chip dehydrating equipment can simply operation complexity and increase working reliability; in addition, the production cost of the equipment can also be reduced.
Description
Technical field
The utility model relates to a kind of centrifugal silicon chip dehydration equipment, the concrete circuit control system that relates to dehydration equipment.
Background technology
In the production of solar silicon wafers, the silicon chip after often need cleaning silicon chip needs dehydration, and the silicon chip dewaterer uses as the auxiliary equipment of cleaning after accomplishing, and the quality of its equipment performance directly has influence on cleaning efficiency.The silicon chip dewaterer has all been realized automation, intellectuality at present; Its electric-control system adopts DC servo motor, DC servo to drive and passes through relay control operation, demonstration; DC servo motor exists brush, commutator, and care and maintenance requires high, and vibrations are also bigger with noise in rotating; Owing to use relay-operated controller, the low complicated operation of its reliability is not directly perceived in addition.
The utility model content
The purpose of the utility model is to overcome the defective that exists in the prior art, provides that a kind of running is steadily reliable, the maintaining requirement is low, and lower-cost silicon chip dehydration equipment.
For realizing above-mentioned purpose; The technical scheme of the utility model has provided a kind of silicon chip dehydration equipment; Comprise the dewatering device, dehydration auxiliary equipment and the electric-control system that are arranged in the cabinet; Above-mentioned dewatering device comprise dehydration bucket with can be around the dehydration plate that is used for fixing dehydrated silicon chip of dehydration bucket central shaft rotation; The turning cylinder of dehydration plate is connected through the servomotor of transmission device and electric-control system; Above-mentioned dehydration auxiliary equipment comprises an injection apparatus and a bucket internal heater that in the dehydration bucket, sprays pure water and nitrogen; This device is characterized in that by the dehydration rotation of electric control system controls dewatering device and the running of dehydration auxiliary equipment above-mentioned electric-control system is made up of AC servo drive circuit, single-chip microcomputer or Programmable Logic Controller, touch-screen and AC servo motor; The data communication end of touch-screen is connected with the data communication end of single-chip microcomputer or Programmable Logic Controller and the communication link of AC servo drive circuit respectively, and the motor link of AC servo drive circuit and encoder link are electrically connected with the power input of AC servo motor and encoder output respectively.
As optimized technical scheme, below said dehydration bucket, be fixedly connected and support base plate, be used for fixing transmission device axle bed and servomotor mount pad.
As optimized technical scheme, the model of said AC servo drive circuit is ASD-A10421LA, and the model of Programmable Logic Controller is DVP-24ES00R2, and the model of touch-screen is DOP-A57BSTD.
The advantage and the beneficial effect of the utility model are: the automatically controlled decorum in this silicon chip dehydration equipment, and adopt AC servo drive system to make that the requirement of this device care and maintenance is low, can reduce vibrations and noise in the device busy, and operation is more reliable steadily; Control with the alternative relay of the control mode of touch-screen and single-chip microcomputer or Programmable Logic Controller in addition, both simplified the complicated operation degree, improved the reliability of work, can reduce the production cost of equipment again.
Description of drawings
Fig. 1 is the structural representation of the utility model silicon chip dehydration equipment;
Fig. 2 is the electric-control system schematic diagram of the utility model silicon chip dehydration equipment;
The specific embodiment
Below in conjunction with accompanying drawing and embodiment, the specific embodiment of the utility model is further described.Following examples only are used for more clearly explaining the technical scheme of the utility model, and can not limit the protection domain of the utility model with this.
As shown in Figure 1; Be the complete machine structure sketch map of the utility model silicon chip dehydration equipment, wherein dewatering device is positioned at the cabinet middle and upper part, below dehydration bucket 1, is provided with one and supports base plate 3; Be provided with dehydration plate 2 in the dehydration bucket; Above-mentioned dehydration plate can rotate around the central shaft of dehydration bucket, and the injection apparatus 6 of dehydration auxiliary equipment is positioned at a dehydration bucket central axis, when needs when dehydrated silicon chip adds pure water or nitrogen in bucket; Injection apparatus can eject steam and nitrogen; The turning cylinder of dehydration plate 2 is in transmission connection through transmission device 4 and servomotor 5, and the installation shaft of above-mentioned transmission device axle bed and servomotor is fixed on and supports on the base plate 3, and the heater 7 of dehydration auxiliary equipment is positioned at dewaterer cabinet bottom.
Fig. 2 is the electric-control system schematic diagram of this silicon chip dehydration equipment; Select for use the data communication end of Programmable Logic Controller and the first data communication end of touch-screen to be connected in the present embodiment; The second data communication end of touch-screen and two-way connection of communication link of AC servo drive circuit, the encoder link of above-mentioned AC servo drive circuit and motor link are connected with the encoder output and the power input of AC servo motor respectively.
The model of above-mentioned Programmable Logic Controller is DVP-24ES00R2, and its L, N end input 220V switch one, press button two and limit switch link to each other, and carry out corresponding mechanical movement through the Controlled by Programmable Controller magnetic valve.Programmable Logic Controller C input 24V working power, the YO-Y7 output links to each other with magnetic valve and other console switch respectively, realizes adding the function of pure water, heating and injection chlorine.
Above-mentioned touch-screen model is 24V for the DOP-A57BSTD operating voltage; Its first data communication end COM1 is connected with the data communication end COM1 of Programmable Logic Controller; The operator can import on touch-screen operational orders such as dehydrated workpiece heating, aeratings, goes out the processing of touch-screen process chip and sends to the Programmable Logic Controller execution; The two-way connection of communication link CN3 of its second data communication end COM2 and AC servo drive circuit, for the operational order of AC servo motor thus communication terminal send, and the operational situation of servomotor also can feed back in screen displaying.
Above-mentioned AC servo drive circuit model is that ASD-AI0421LA provides operating voltage by the 220V single phase poaer supply, and its encoder link CN2 is connected with the encoder output of AC servo motor, and the motor link is connected with the power input of servomotor; The encoder feedback motor rotation signal of above-mentioned AC servo motor is given the servo-drive circuit, and drive circuit can be adjusted the rotation of servomotor according to value of feedback.
The convenient and reliable operation of the utility model silicon chip dewaterer, human-computer dialogue is directly perceived.The power switch of opening this silicon chip dewaterer promptly shows the initial operation interface on touch-screen, said operation screen and corresponding input operation are carried out all through realizing with the supporting function software of touch panel device.The operation interface of touch-screen can be preset 3 dehydrating speeds and carry out successively by servomotor, and can set corresponding rotation time, and the relevant parameter in the servomotor rotation process also can show at display screen in real time.When the operator wants to import a certain rotating speed, only need push the initial picture medium speed and set the black region of below; Be pressed into " enter " key after the input preset data and promptly accomplish setting; Same can further specifically set other relevant operating parameters, repeats no more at this; The touch-screen of electric-control system converts identifying operation person's input parameter into relevant performance element execution that the signal of telecommunication sends to AC servo drive circuit or Programmable Logic Controller.More than the operation accomplished through touch-screen be mainly auxiliary equipment technique initialization in dehydration rotational parameters and the dehydration, other operate as power supply open and the switching of pass and dewaterer cabinet is directly accomplished by Programmable Logic Controller through push button panel.
The above only is the preferred implementation of the utility model; Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model know-why, can also make some improvement and retouching, these improvement and retouching also should be regarded as the protection domain of the utility model.
Claims (3)
1. silicon chip dehydration equipment; Comprise the dewatering device, dehydration auxiliary equipment and the electric-control system that are arranged in the cabinet; Above-mentioned dewatering device comprise dehydration bucket with can be around the dehydration plate that is used for fixing dehydrated silicon chip of dehydration bucket central shaft rotation; The turning cylinder of dehydration plate is connected through the servomotor of transmission device and electric-control system; Above-mentioned dehydration auxiliary equipment comprises an injection apparatus and a bucket internal heater that in the dehydration bucket, sprays pure water and nitrogen; This device is characterized in that by the dehydration rotation of electric control system controls dewatering device and the running of dehydration auxiliary equipment above-mentioned electric-control system is made up of AC servo drive circuit, single-chip microcomputer or Programmable Logic Controller, touch-screen and AC servo motor; The data communication end of touch-screen is connected with the data communication end of single-chip microcomputer or Programmable Logic Controller and the communication link of AC servo drive circuit respectively, and the motor link of AC servo drive circuit and encoder link are electrically connected with the power input of AC servo motor and encoder output respectively.
2. silicon chip dehydration equipment according to claim 1 is characterized in that, below said dehydration bucket, is fixedly connected and supports base plate, is used for fixing transmission device axle bed and servomotor mount pad.
3. silicon chip dehydration equipment according to claim 1 is characterized in that, the model of said AC servo drive circuit is ASD-A10421LA, and the model of Programmable Logic Controller is DVP-24ES00R2, and the model of touch-screen is DOP-A57BSTD.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120263175 CN202188722U (en) | 2011-07-22 | 2011-07-22 | Silica-chip dehydrating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120263175 CN202188722U (en) | 2011-07-22 | 2011-07-22 | Silica-chip dehydrating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202188722U true CN202188722U (en) | 2012-04-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120263175 Expired - Fee Related CN202188722U (en) | 2011-07-22 | 2011-07-22 | Silica-chip dehydrating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202188722U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102706131A (en) * | 2012-06-17 | 2012-10-03 | 无锡市优耐特石化装备有限公司 | Inner barrel assembly for centrifugal drying machine |
| CN104236258A (en) * | 2014-09-15 | 2014-12-24 | 南通皋鑫电子股份有限公司 | Variable-frequency spin dryer |
| CN105546939A (en) * | 2016-02-20 | 2016-05-04 | 苏州市吴通电子有限公司 | Centrifugal PCB plate automatic drying device |
-
2011
- 2011-07-22 CN CN 201120263175 patent/CN202188722U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102706131A (en) * | 2012-06-17 | 2012-10-03 | 无锡市优耐特石化装备有限公司 | Inner barrel assembly for centrifugal drying machine |
| CN104236258A (en) * | 2014-09-15 | 2014-12-24 | 南通皋鑫电子股份有限公司 | Variable-frequency spin dryer |
| CN105546939A (en) * | 2016-02-20 | 2016-05-04 | 苏州市吴通电子有限公司 | Centrifugal PCB plate automatic drying device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: JIANGSU AIDUO PHOTOVOLTAIC TECHNOLOGY CO., LTD. Free format text: FORMER NAME: JIANGYIN AIDUO PV TECHNOLOGY CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 214423, Jiangsu Jiangyin Town, Zhouzhuang Province Industrial Zone North Central Road Patentee after: Jiangsu Aiduo Photovoltaic Technology Co., Ltd. Address before: 214423, Jiangsu Jiangyin Town, Zhouzhuang Province Industrial Zone North Central Road Patentee before: Jiangyin Aiduo PV Technology Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120411 Termination date: 20170722 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |