CN202182855U - Shearing force test device - Google Patents
Shearing force test device Download PDFInfo
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- CN202182855U CN202182855U CN2011201977330U CN201120197733U CN202182855U CN 202182855 U CN202182855 U CN 202182855U CN 2011201977330 U CN2011201977330 U CN 2011201977330U CN 201120197733 U CN201120197733 U CN 201120197733U CN 202182855 U CN202182855 U CN 202182855U
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- free end
- substrate
- shearing force
- elastic body
- measuring head
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Abstract
The utility model discloses a shearing force test device. The test device comprises a base plate, an elastic body is arranged on the base plate and provided with a free end capable of moving towards or away from the base plate; a test head is connected at the free end; the elastic body is further provided with two U-shaped elastic arms which are arranged in a spaced manner and can mutually counteract horizontal deviation; the free ends of the two U-shaped elastic arms are connected together; and the test head is fixedly mounted at the free end. The fixed ends of the elastic body are arranged between the two U-shaped elastic arms, connected to a whole, and fixedly connected with the base plate; and the ends away from the free ends of the two U-shaped arms are fixedly connected via a connecting plate. The utility model has the advantages that in the shearing force test process, a contact positioning position can not deviate in the horizontal direction, so as to meet the requirement of extremely precise positioning in a filament distance or extreme filament distance semiconductor shearing force test, and the shearing force test device has high test reliability and precision.
Description
Technical field
The utility model relates to a kind of fine rule spacing and superfine wire spacing semiconductor devices and lead or conductor welding fastness shearing force testing device of being used for.
Background technology
Along with the continuous development of semiconductor science and technology, increasing function is integrated on small-sized brilliant first substrate, and the wiring on brilliant first substrate is more and more intensive.At present, 65nm live width device is succeeded in developing, and 45nm live width technology realizes volume production at last.Fine rule spacing (Fine Pitch) or superfine wire spacing (Ultra Fine Pitch) Wire Bonding Technology is progressively applied, and makes that the lead or the spacing between conductor that are welded in the brilliant unit are more and more littler, has reached 60-40um.Following several years even possibly reach the superfine wire spacing of 35-30um.Onesize chip has had more strong functions.
Being welded on diameter of wire in the brilliant unit is generally 25.4um/20um or thinner diameter such as the diameter of 18um. welding gold ball and then should be 32um-50um mutually.These connect lead and gold goal must be welded on the pad on brilliant first substrate solid and reliablely.Because welding object to be tested is very little, proving installation must be aimed at the welding gold ball that will test accurately, and behind aligning, does not produce the contraposition skew before the EOT, to guarantee precision of test result.
Known proving installation all is to have that level is put or the force cell of vertical display adheres to the basic structure that the plane contacts the location and carries out the instrument push broach of shearing force testing with being used for welding object to be tested.Adhering to the plane through the instrument push broach with welding object to be tested contacts; Thereby perception welding object to be tested adheres to the plane in the axial position of Z; With this position is benchmark, confirms the bottom of welding object to be tested, and the bottom position of this welding object to be tested predetermined height h that rises relatively; Like 3um, carry out the shearing force testing relative motion again.Thereby obtain having repeatable weld strength test value.
According to disclosed patent US6078387; Disclosed a kind of mechanism that realizes the perception contact: the main body of this mechanism is by having horizontal both arms cantilever beam structure; One end of this both arms semi-girder is fixed on the fixed block, and the other end (free end) is connecting movable block and probe (being the said instrument push broach of this paper).Under the effect of air bearing, the free end of this both arms semi-girder can move by easy on and off.The probe that utilizes the photoelectric sensor perception to be fixed on the free-ended movable block of this both arms semi-girder is again touching that welding object to be tested adheres to the plane and the displacement that produces.Then, the supply of closes compression air stops the effect of air bearing, utilizes the elasticity of this both arms semi-girder to be fixed on movable block on the fixed block, realizes the purpose of location.
According to physics general knowledge and geometry knowledge, during semi-girder free end relative fixed end generation upper and lower displacement deformation, free end is the displacement on the occurred level direction simultaneously inevitably.That is to say, adopt cantilever beam structure realize the method for contact perception in fact exist before the contact with contact after the problem of position location horizontal-shift.Side-play amount P1 as shown in Figure 4.
The length of supposing semi-girder is L; In order to contact, free end rotates an angle a1 behind the contact target plane; Semi-girder free end end points moves to D2 from D1.An offset P1 has taken place in semi-girder free end inevitably.By triangle relation, the corresponding relation of angle a2 and semi-girder length L that is easy to draw offset P1 and anglec of rotation a1 and twice displacement line and perpendicular line is following:
B＝2×L×Sin(a1/2)
P1＝B×Sina2＝2×L×Sin(a1/2)×Sin(a2)
At this; We do not discuss the problem of the concrete side-play amount that concrete cantilever beam structure brings; But the judgement that can affirm: the contact locator meams that is made up of cantilever beam structure can cause contacting the position location skew; And this contact position location horizontal-shift P1 (Fig. 4) might cause instrument push broach and welding object to be tested to misplace.And different big or small contact dynamics can cause the nonlinearities change of contact position location horizontal offset P1, are unfavorable for controlling different big or small contact dynamics.
Fig. 5 has showed fine rule spacing or the superfine wire spacing semiconductor product gold goal welding shearing force testing from the shearing force testing direction of relative movement visually, relative position relation when the corresponding size relationship of instrument push broach and welding gold ball and test.Like Fig. 5; In the welding gold ball array of dense arrangement; Because the welding gold ball of arranging is very intensive, the spacing between the welding gold ball is very little, and the offset on position location horizontal-shift P1 (Fig. 5) direction can not take place in the position that the instrument push broach is aimed at before carrying out shearing force testing.The skew of this position location might cause instrument push broach and welding gold ball to be tested that the shearing of dislocation takes place, and promptly welding gold ball possibly intactly not sheared and partly clipped to two welding gold balls, thus the test result that rides for a fall.The problem of this position location horizontal-shift should be avoided when fine rule spacing or superfine wire spacing semiconductor shearing force testing as far as possible.
Certainly, under the situation of using cantilever beam structure, can try every possible means to be controlled at very little scope to the anglec of rotation, to reduce position location horizontal offset P1.But the generation of position location skew in the time of can not avoiding carrying out the perception contact in this way.And when needing bigger contact force to confirm to contact, certainly will need bigger anglec of rotation a1, and so, skew P1 in position location will correspondingly strengthen significantly.
In order to address the above problem; Chinese patent document CN201382828 discloses a kind of shearing force testing device; Comprise a substrate moving up and down, on said substrate, be provided with elastic body, said elastic body have one can towards or the free end that moves away from said substrate; Measuring head is connected on the said free end; Said elastic body is a horizontal symmetrical structural elasticity body, and said free end is positioned on the line of symmetry of said horizontal symmetrical structural elasticity body, above said measuring head, is provided with a hold-down mechanism that is used for fixing said measuring head; Be provided with between said free end and the substrate and be convenient to the gap that free end and the measuring head that is connected on it move up and down together; After said measuring head accurate positioning; Under the effect of said hold-down mechanism, said free end abuts against on the said substrate, fixing said measuring head.This shearing force testing device has solved preferably in the shearing force testing process, the problem of the skew of meeting occurred level direction during the contact position location, still, the moving problem of small heavy curtain before and after this device also exists.
The utility model content
The purpose of the utility model is to overcome above-mentioned defective, to society a kind of problem that not only can eliminate the position location horizontal-shift fully is provided, but also can guarantee to test the shearing force testing device with higher reliability and accuracy.
The basic idea of the utility model is that the sensor construction that the utility model adopted has imported a kind of offset compensation of reverse horizontal shift of active nature, on principle, reduces the generation of squinting this test process to greatest extent.
The technical scheme of the utility model is: design a kind of shearing force testing device; Comprise a substrate, on said substrate, be provided with elastic body, said elastic body have can towards or the free end that moves away from said substrate; Measuring head is connected on the said free end; Said elastic body has the U-shaped elastic arm of the cancelled out each other horizontal level skew of two settings that keep at a certain distance away, and the free end of said two U-shaped elastic arms links together, and measuring head is fixedly mounted on the said free end; Between two U-shaped elastic arms, be provided with elastomeric stiff end, the stiff end of two U-shaped elastic arms is connected as a single entity, and is fixedly connected with said substrate; Being fixedly connected through tie-beam of two U-shaped elastic arms away from a free-ended end.
The first U-shaped elastic arm that said elastomeric elastic arm constitutes, and the second U-shaped elastic arm that elastic arm constitutes is put separated by a distance up and down.The stiff end of the said first U-shaped elastic arm and the second U-shaped elastic arm is connected with the fixed block that is arranged between the first U-shaped elastic arm and the second U-shaped elastic arm respectively, and fixed block is fixedly mounted on the substrate.The free end of the said first U-shaped elastic arm and the second U-shaped elastic arm couples together, and measuring head is fixed on the said free end.
As improvement to the utility model, between said free end and substrate, be provided with the process that is used in the small contact force of said measuring head perception, make free end and be connected the micromotion mechanism that on it measuring head is kept away from the substrate certain interval.
As further improvement to the utility model; Said micromotion mechanism comprises slide block and air bearing, and said slide block and said free end flexibly connect, and entirely are pressed on the said substrate; Be provided with air bearing at said slide block rear side, the gas outlet of air bearing is facing to the trailing flank of said slide block.When pressurized air imported, air bearing startup effect was pushed said slide block and maintenance and said substrate certain interval open with the said measuring head that is connected on it with said free end.After the contact position location is found exactly, remove pressurized air, air bearing fails, and said slide block is pushed back on the substrate by said elastic body with the said measuring head that is connected on it with said free end, and is fixed on the substrate through contact friction force.
As the further improvement to the utility model, said micromotion mechanism is plane rolling bearing or linear bearing.
As further improvement to the utility model; Said micromotion mechanism is to be provided with magnetic at said free end; On substrate, be provided with coil with respect to free-ended position; Behind the coil electricity, the magnetic that said coil produces is identical with the magnetic on the said free end, and said free end is produced repulsive interaction.Said free end is pushed open and maintenance and said substrate certain interval with the said measuring head that is connected on it.After the contact position location is found exactly; Said coil feeds inverse current; Said coil produce with said free end on the magnet magnetic magnetic of inhaling mutually; Said slide block is pushed back on the substrate by said elastic body and magnetive attraction acting in conjunction with the said measuring head that is connected on it with said free end, to be fixed on the substrate through bigger contact friction force.
As the further improvement to the utility model, the place of elastic body strain concentrating is posted and is used to respond to elastomeric deformation, and control contact force size is to adapt to the sensitive element of different soft and hard surface contact.
As the further improvement to the utility model, said sensitive element is strainometer or photoelectric sensor.
As the further improvement to the utility model, said elastomeric elastic arm can level be put.
The utility model is in the shearing force testing process; Owing to adopted elastic body with horizontal level migration, during the contact location, the offset of contact point on can the occurred level direction; In addition; Under the effect of said micromotion mechanism, said free end and be connected the said measuring head on the free end is in the process of the small contact force of perception; Basically be in do not have friction up and down, sagging naturally state under gravity and said elastic arm effect; And in the process of perception contact force, remain on the same vertical line, guaranteed the requirements at the higher level of extreme precision positioning in fine rule spacing or superfine wire spacing semiconductor shearing force testing, improved the reliability and the accuracy of test more.
Description of drawings
Fig. 1 is the perspective view of a kind of embodiment of the utility model.
Fig. 2 is the main view plane structural representation of Fig. 1.
Fig. 3 is the side-looking planar structure synoptic diagram of Fig. 1.
Fig. 4 is the planar structure synoptic diagram of existing proving installation existing problems theory structure.
Fig. 5 is the planar structure synoptic diagram of existing proving installation existing problems theory structure.
Embodiment
See also Fig. 1, Fig. 2 and Fig. 3; What Fig. 1, Fig. 2 and Fig. 3 disclosed is a kind of shearing force testing device; Comprise a substrate 4 moving up and down; On said substrate 4, be provided with elastic body 1 with horizontal level migration; Said elastic body 1 with horizontal level migration have can towards or the free end 5 that moves away from said substrate 4, measuring head 12 is connected on the said free end 5, above said measuring head 12, is provided with a hold-down mechanism (not shown) that is used for fixing said measuring head 12; After said measuring head 12 accurate positionings, under the effect of said hold-down mechanism, said free end 5 abuts against on the said substrate 4, fixing said measuring head 12; Between said free end 5 and substrate 4, be provided with the process that is used in the small contact force of said measuring head 12 perception, make free end 5 and be connected the micromotion mechanism 16 that on it measuring head 12 is kept away from substrate 4 certain intervals.In this instance, said measuring head 12 comprises force cell 6 and instrument push broach 7.Micromotion mechanism 16 in this instance comprises slide block 13 and air bearing 14 (see figure 3)s; Said slide block 13 flexibly connects (more specifically saying, is that slide block 13 is suspended on the substrate 4) with said substrate 4, and the gas outlet of said air bearing 14 is facing to the trailing flank of said slide block 13; When not using; Stop compressed-air actuated supply, under the effect of hold-down mechanism, the gas outlet of said air bearing 14 is fully by said slide block 13 sealings.During use; Unclamp hold-down mechanism, after air bearing 14 fed pressurized air, the free end 5 of slide block 13 and the elastic body with horizontal level migration 1 and the measuring head 12 that is connected with free end 5 were by jack-up; Form and 4 very little gaps of substrate; Continue under the supply at pressurized air, this gap continues to keep, and slide block 13 has got into frictionless motion state up and down with measuring head 12.Through photoelectric sensor 15 or strainometer 11, just can the small contact force of perception.In case detect contact, the closes compression air, hold-down mechanism pushes back measuring head 12 and slide block 13 on the substrate 4, through substrate 4 and 13 bigger friction force of slide block measuring head 12 and slide block 13 is fixed on the substrate 4.Thereby realized the action of contact location.
In the utility model, said micromotion mechanism 16 also can be plane rolling bearing or linear bearing.Utilize plane rolling bearing or linear bearing to replace slide block and air bearing structure, also be fine.
In the utility model; Said micromotion mechanism 16 can also be to be provided with magnetic at said free end 5; On the substrate 4 with respect to the position of free end 5, be provided with coil, behind the coil electricity, the magnetic that said coil produces is identical with the magnetic on the said free end 5; Said free end 5 is produced repulsive interactions, reach and let free end 5 and connect above that measuring head 12 away from the purpose of substrate 4.After the contact position location is found; Said coil feeds inverse current; The magnetic field of said coil changes direction; Said free end 5 and the measuring head 12 that connects are above that pushed back on the substrate by said elastic body 1 with horizontal level migration, and put on free end 5 and free end 5 and connection measuring head 12 above that are fixed on the pressure on the substrate through further enhancing of magnetic attracting force, thereby increase contact friction force.
Referring to Fig. 2; In the utility model illustrated embodiment; Said elastic body 1 with horizontal level migration comprises elastic arm 100, elastic arm 100 ' and elastic arm 200, the elastic arm 200 ' of the horizontal level skew of can cancelling out each other, wherein, and said elastic arm 100 and elastic arm 100 ' the end to end formation first U-shaped elastic arm; Said elastic arm 200 and elastic arm 200 ' end to end formation be the second U-shaped elastic arm in addition, and two U-shaped elastic arms are put separated by a distance up and down.The free end 5 of the said first U-shaped elastic arm and the second U-shaped elastic arm couples together and is connected with measuring head 12; The stiff end 500 of the said first U-shaped elastic arm and the second U-shaped elastic arm interconnects with fixed block 400 respectively, and fixed block 400 is fixedly mounted on the substrate 4.The outer end of the said first U-shaped elastic arm and the second U-shaped elastic arm is fixedly connected through vertical tie-beam 300.Said testing sensor 15 and testing tool 12 are installed on the free end 5 of said elastic body 1 with horizontal level migration.
Post the deformation that is used to respond to the elastic body 1 with horizontal level migration in the place of 1 strain concentrating of the elastic body with horizontal level migration, control contact force size is to adapt to the sensitive element of different soft and hard surface contact.Sensitive element in the present embodiment is strainometer 11 or photoelectric sensor 15, also can use simultaneously to reach better effect.
During use, this device has XY axle and Z axle mobile platform.Elastic body 1 with horizontal level migration is fixed on through fixed block 400 usefulness Luo bolts and is installed on the substrate 4, and said substrate 4 is installed on the Z axle, and can move up and down with the Z axle.Free end 5 is connecting measuring head 12 securely.Make a very little gap of maintenance between free end 5 and the substrate 4 through micromotion mechanism 16; Make free end 5 can freely move up and down together with instrument push broach 7 with the force cell 6 that is connected on it; And sagging naturally under the weight of the elastic force of the elastic body with horizontal level migration 1 and force cell 6 and instrument push broach 7, reach balance.The sensitive element of perception elastic deformation is posted in the position of strain concentrating with elastic body 1 of horizontal level migration, like strainometer 11.Substrate 4 is under the drive of Z axle; Adhere to plane motion towards welding object to be tested, when instrument push broach 7 touches welding object to be tested and adheres to the plane, have the elastic body 1 of horizontal level migration; Owing to be the U-shaped elastic arm that two elastic arms that are arranged in parallel join end to end and constitute; Therefore, produce symmetric deformation between two arms, deformation quantity varies in size with the contact dynamics and different.Because when having the free end generation upper and lower displacement of elastic body 1 of horizontal level migration; The horizontal level of cancelling out each other when deformation takes place said elastic arm 100,100 ' squints; The horizontal level of also cancelling out each other when deformation takes place said elastic arm 200,200 ' squints; So can not squint in the position of contact point, in the elastic deformation scope of the elastic body with horizontal level migration 1, can not produce position location horizontal offset P1.The strainometer 11 that is attached to the elastic body 1 strain concentrating position with horizontal level migration sends the electric signal of different sizes and gives signal acquiring system under the different big or small deformation effect of the elastic body with horizontal level migration 1.System is according to the software set parameter; Under the big or small electric signal indicative function of difference; Stop the motion of Z axle, eliminate the thrust of 16 pairs of free ends 5 of micromotion mechanism, and drive the mode of free end 5 usefulness mechanical forces that hold-down mechanism will have the elastic body 1 of horizontal level migration simultaneously and compress; Completion perception contact, and realize the location.That is to say, thoroughly eliminated the problem of contact position location horizontal-shift, thereby strictly guaranteed the needs of precision positioning.And, the electric signal that strainometer 11 sends is handled the contact dynamics that can realize the different sizes of software adjustment easily, and the adjustment of contact dynamics size does not cause the position location skew.Behind completion contact location, behind system control substrate 4 predetermined height of rising such as the several um, the XY axle drives welding object 10 to be tested and adheres to the motion of plane generation towards instrument push broach 7 with welding object to be tested, carries out shearing force testing.Signal acquiring system begins to gather force cell 6 and changes at the signal of whole test process.After accomplishing the shearing test motion, substrate 4 under the drive of Z axle, the height of the safety that rises.
Said elastic body 1 with horizontal level migration can be designed to multiple shape.To obtain the elastic body with horizontal level migration of different elasticity coefficient.As the elastic arm of the horizontal level skew of cancelling out each other can put up and down also can before and after level put, must be designed to quite contact perception and during deformation, the horizontal level skew is opposite direction, thereby cancels out each other the horizontal level skew but key is it.To guarantee not occurred level skew of contacting points position.
Hold-down mechanism can be a multiple frame mode such as electromagnet compresses, cylinder compresses etc., does not elaborate at this.XYZ mobile platform, servo-control system, data acquisition system (DAS) and software here do not elaborate.
The instance of the above; It is the preferred embodiments of the utility model; Be not the practical range that limits the utility model,, include in the utility model claim so all equivalences of doing according to described characteristic of the utility model claim and principle change or modify.
Claims (7)
1. shearing force testing device; Comprise a substrate, on said substrate, be provided with elastic body, said elastic body have can towards or the free end that moves away from said substrate; Measuring head is connected on the said free end; It is characterized in that: said elastic body has the U-shaped elastic arm of the cancelled out each other horizontal level skew of two settings that keep at a certain distance away, and the free end of said two U-shaped elastic arms links together, and measuring head is fixedly mounted on the said free end; Between two U-shaped elastic arms, be provided with elastomeric stiff end, the stiff end of two U-shaped elastic arms is connected as a single entity, and is fixedly connected with said substrate; Being fixedly connected through tie-beam of two U-shaped elastic arms away from a free-ended end.
2. shearing force testing device as claimed in claim 1; It is characterized in that: between said free end and substrate, be provided with the process that is used in the small contact force of said measuring head perception, make free end and be connected the micromotion mechanism that on it measuring head is kept away from the substrate certain interval.
3. shearing force testing device as claimed in claim 2; It is characterized in that: said micromotion mechanism comprises slide block and air bearing; Said slide block and said free end flexibly connect; And entirely be pressed on the said substrate, being provided with air bearing at said slide block rear side, the gas outlet of air bearing is facing to the trailing flank of said slide block.
4. shearing force testing device as claimed in claim 2 is characterized in that: said micromotion mechanism is plane rolling bearing or linear bearing.
5. shearing force testing device as claimed in claim 2; It is characterized in that: said micromotion mechanism is to be provided with magnetic at said free end; On substrate, be provided with coil with respect to free-ended position; Behind the coil electricity, the magnetic that said coil produces is identical with the magnetic on the said free end, and said free end is produced repulsive interaction.
6. like the described shearing force testing device of any one claim in the claim 1 to 5; It is characterized in that: post in said place and be used to respond to elastomeric deformation, control contact force size with horizontal level migration with elastic body strain concentrating of horizontal level migration.
7. shearing force testing device as claimed in claim 6 is characterized in that: said sensitive element is strainometer or photoelectric sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201977330U CN202182855U (en) | 2011-06-13 | 2011-06-13 | Shearing force test device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201977330U CN202182855U (en) | 2011-06-13 | 2011-06-13 | Shearing force test device |
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| Publication Number | Publication Date |
|---|---|
| CN202182855U true CN202182855U (en) | 2012-04-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201977330U Expired - Lifetime CN202182855U (en) | 2011-06-13 | 2011-06-13 | Shearing force test device |
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| Country | Link |
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| CN (1) | CN202182855U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102252786A (en) * | 2011-06-13 | 2011-11-23 | 宾伟雄 | Shear force testing device |
| CN115078130A (en) * | 2022-08-23 | 2022-09-20 | 江苏华恬节能科技有限公司 | Plastic products shear strength testing arrangement |
-
2011
- 2011-06-13 CN CN2011201977330U patent/CN202182855U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102252786A (en) * | 2011-06-13 | 2011-11-23 | 宾伟雄 | Shear force testing device |
| WO2012171437A1 (en) * | 2011-06-13 | 2012-12-20 | Bin Weixiong | Shearing force test device |
| CN115078130A (en) * | 2022-08-23 | 2022-09-20 | 江苏华恬节能科技有限公司 | Plastic products shear strength testing arrangement |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120404 Effective date of abandoning: 20130403 |
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| RGAV | Abandon patent right to avoid regrant |