CN202159653U - Supersonic wave suction component for taking and putting tiny and light objects - Google Patents
Supersonic wave suction component for taking and putting tiny and light objects Download PDFInfo
- Publication number
- CN202159653U CN202159653U CN2011202569678U CN201120256967U CN202159653U CN 202159653 U CN202159653 U CN 202159653U CN 2011202569678 U CN2011202569678 U CN 2011202569678U CN 201120256967 U CN201120256967 U CN 201120256967U CN 202159653 U CN202159653 U CN 202159653U
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- China
- Prior art keywords
- taking
- putting
- wafer
- tiny
- vacuum
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a supersonic wave suction component for taking and putting tiny and light objects, comprising a fixed plate, a supersonic generator fixedly connected with the fixed plate through a clamping plate, wherein a suction nozzle mounted on the supersonic generator is communicated with a vacuum generator via a vacuum air passage joint. The component may be used in a crystal device for taking and putting wafers, realizing good positioning of small wafers.
Description
Technical field
The utility model relates to getter assembly, particularly a kind of ultrasonic wave getter assembly that picks and places small slight small item body.
Background technology
When wafer is detected, normally wafer is utilized the mode of vacuum suction, wafer is drawn from feeding machanism, utilize barotropic gas to blow then and be placed on the detection station on the detection platform, carry out a series of wafer inspection project.
Along with crystal develops to miniaturization, intracrystalline wafer is more and more littler, because the too small weight of wafer is very light; Very easy blow wafer of positive pressure air flies when placing wafer, the substantial deviation detection position, and air-blowing quantity is difficult to adjustment and control; When turning air-blowing quantity down; Because factors such as chip static electricity and wafer surface pollution are very easy to attached on the suction nozzle with the little wafer of traditional mode, make the blowing failure.
Summary of the invention
The purpose of the utility model is to overcome the deficiency of prior art, and a kind of ultrasonic wave getter assembly that picks and places small slight small item body that can realize the good location of little wafer is provided.
In order to achieve the above object, the technical scheme of the utility model employing is:
The ultrasonic wave getter assembly that picks and places small slight small item body of the utility model; It comprises fixed head; It also comprises the supersonic generator that is fixedly linked through clamping plate and described fixed head, and the suction nozzle that is installed on the described supersonic generator is connected through the vacuum air-channel joint with vacuum generator.
The advantage of the utility model is: this assembly can be applied to and be used for picking and placeing of wafer in the crystal equipment, has realized the good location of little wafer.
Description of drawings
Fig. 1 is the perspective view of the ultrasonic wave getter assembly of the small slight small item body of picking and placeing of the utility model;
Fig. 2 is the vertical view of assembly shown in Figure 1.
Embodiment
Below in conjunction with specific embodiment the utility model is described in detail.
Ultrasonic wave getter assembly like the small slight small item body of picking and placeing of the utility model shown in the drawings; It comprises fixed head 2; It also comprises the supersonic generator 1 that is fixedly linked through clamping plate 3 and described fixed head 2, and the suction nozzle 4 that is installed on the described supersonic generator 1 is connected through vacuum air-channel joint 6 with vacuum generator.
This assembly is the part of quartz crystal checkout equipment, is used in particular for picking and placeing very light little quartz wafer.
Adopt the course of work of this assembly following:
Claims (1)
1. pick and place the ultrasonic wave getter assembly of small slight small item body; It comprises fixed head; It is characterized in that: it also comprises the supersonic generator that is fixedly linked through clamping plate and described fixed head, and the suction nozzle that is installed on the described supersonic generator is connected through the vacuum air-channel joint with vacuum generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202569678U CN202159653U (en) | 2011-07-20 | 2011-07-20 | Supersonic wave suction component for taking and putting tiny and light objects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202569678U CN202159653U (en) | 2011-07-20 | 2011-07-20 | Supersonic wave suction component for taking and putting tiny and light objects |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202159653U true CN202159653U (en) | 2012-03-07 |
Family
ID=45767279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202569678U Expired - Lifetime CN202159653U (en) | 2011-07-20 | 2011-07-20 | Supersonic wave suction component for taking and putting tiny and light objects |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202159653U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102361017A (en) * | 2011-07-20 | 2012-02-22 | 天津必利优科技发展有限公司 | Ultrasonic air suction component |
-
2011
- 2011-07-20 CN CN2011202569678U patent/CN202159653U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102361017A (en) * | 2011-07-20 | 2012-02-22 | 天津必利优科技发展有限公司 | Ultrasonic air suction component |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120307 |
|
| CX01 | Expiry of patent term |