CN202120861U - 一种用于防止等离子体辐射的盖子 - Google Patents

一种用于防止等离子体辐射的盖子 Download PDF

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Publication number
CN202120861U
CN202120861U CN2010206950537U CN201020695053U CN202120861U CN 202120861 U CN202120861 U CN 202120861U CN 2010206950537 U CN2010206950537 U CN 2010206950537U CN 201020695053 U CN201020695053 U CN 201020695053U CN 202120861 U CN202120861 U CN 202120861U
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孙波远
石劲超
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BRIGHT SOLAR ENERGY Co Ltd
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BRIGHT SOLAR ENERGY Co Ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract

本实用新型提供了一种用于防止等离子体辐射的盖子，其特征在于：包括可360度旋转的合页，合页的一端固定在机体观察窗的上方，由铅制得的盖板与在合页的另一端相连，盖板将观察窗完全遮盖住，在盖板的表面覆盖有一层铝薄板。本实用新型能有效得防止等离子体刻蚀机观察窗处的等离子体辐射泄露，盖板采用可活动的形式，不影响技术员观察等离子体形态，在防辐射材料铅外包裹一层铝，防止员工直接与铅接触。

Description

一种用于防止等离子体辐射的盖子
技术领域
本实用新型涉及一种太阳能电池干法刻蚀和PECVD工序中用于防止等离子辐射的盖子。
背景技术
等离子体刻蚀机和PECVD是太阳能电池片生产过程中较常用的设备。由于太阳能硅片在扩散过程中，即使采用背靠背扩散，硅片的所有表面（包括边缘）都将不可避免地扩散上磷。PN结的正面所收集到的光生电子会沿着边缘扩散有磷的区域，流到PN结的背面，而造成短路，此短路通道等效于降低并联电阻，所以需要使用刻蚀工序将太阳能硅片边缘的PN结去掉。PECVD技术原理是利用低温等离子体作能量源，样品置于低气压下辉光放电的阴极上，利用辉光放电（或另加发热体）使样品升温到预定的温度，然后通入适量的反应气体，气体经一系列化学反应和等离子体反应，在样品表面形成固态薄膜，起到减反射和钝化的作用。等离子体刻蚀机和PECVD一般都设有透明材料的观察窗，这种材料不能有效的防止等离子体辐射，刻蚀工序员工易受到等离子体辐射的污染。
发明内容
本实用新型的目的是提供一种能有效防止等离子体辐射的盖子。
为了达到上述目的，本实用新型的技术方案是提供了一种用于防止等离子体辐射的盖子，其特征在于：包括可360度旋转的合页，合页的一端固定在机体观察窗的上方，由铅制得的盖板与在合页的另一端相连，盖板将观察窗完全遮盖住，在盖板的表面覆盖有一层铝薄板。
本实用新型能有效得防止等离子体刻蚀机观察窗处的等离子体辐射泄露，盖板采用可活动的形式，不影响技术员观察等离子体形态，在防辐射材料铅外包裹一层铝，防止员工直接与铅接触。
附图说明
图1为本实用新型提供的一种用于防止等离子体辐射的盖子示意图。
具体实施方式
以下结合实施例来具体说明本实用新型。
实施例
如图1所示，为本实用新型提供的一种用于防止等离子体辐射的盖子，包括可360度旋转的合页1，合页1的一端固定在机体观察窗3的上方，由铅制得的盖板2与在合页1的另一端相连，盖板2将观察窗完全遮盖住，在盖板2的表面覆盖有一层铝薄板。
本实用新型提供的防止等离子体辐射的盖子工作过程如下：当观察窗不使用时，盖板2在重力的作用下自然将观察窗3盖住；当需要使用观察窗3时将盖板2向上翻即可。为了防止员工直接接触到铅，在铅制得的盖板2外面用铝薄板进行包裹起来。

Claims (1)

1.一种用于防止等离子体辐射的盖子，其特征在于：包括可360度旋转的合页（1），合页（1）的一端固定在机体观察窗（3）的上方，由铅制得的盖板（2）与在合页（1）的另一端相连，盖板（2）将观察窗完全遮盖住，在盖板（2）的表面覆盖有一层铝薄板。
CN2010206950537U 2010-12-31 2010-12-31 一种用于防止等离子体辐射的盖子 Expired - Fee Related CN202120861U (zh)

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CN2010206950537U CN202120861U (zh) 2010-12-31 2010-12-31 一种用于防止等离子体辐射的盖子

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CN202120861U true CN202120861U (zh) 2012-01-18

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104887434A (zh) * 2015-05-03 2015-09-09 江村 一种医用高压氧舱观察窗盲板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104887434A (zh) * 2015-05-03 2015-09-09 江村 一种医用高压氧舱观察窗盲板

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