CN202119587U - Hydraulic pressure alarm device and water-cooled silicon chip slicer comprising same - Google Patents
Hydraulic pressure alarm device and water-cooled silicon chip slicer comprising same Download PDFInfo
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- CN202119587U CN202119587U CN2011201023248U CN201120102324U CN202119587U CN 202119587 U CN202119587 U CN 202119587U CN 2011201023248 U CN2011201023248 U CN 2011201023248U CN 201120102324 U CN201120102324 U CN 201120102324U CN 202119587 U CN202119587 U CN 202119587U
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Abstract
The utility model discloses a hydraulic pressure alarm device of a silicon chip slicer and a water-cooled silicon chip slicer comprising the same. The hydraulic pressure alarm device of a silicon chip slicer comprises a hydraulic pressure detection unit, used for testing hydraulic pressure and generating corresponding hydraulic pressure detection signal; and a comparison unit, used for comparing the hydraulic pressure detection unit with a first threshold and a second threshold, generating and outputting a control signal. Besides, the first threshold and the second threshold are respectively a largest water inlet hydraulic pressure and a smallest water inlet hydraulic pressure of the slicer.
Description
Technical field
The utility model relates to the hydraulic pressure warning device that is used for water-cooled silicon chip microtome, relates more specifically to the warning device that segmentation shows water-cooled silicon chip microtome water feeding pressure.The utility model also relates to the water-cooled silicon chip microtome that comprises said hydraulic pressure warning device.
Background technology
Along with the popularization of global various countries green energy resource and the extra normal development of semiconductor industry in recent years, the supply in silicon chip market degree to the utmost is uneven, the development that has seriously restricted industry of the backwardness of cutting processing ability and production capacity.The novel silicon chip multifibres cutting technique that occurs in recent years has been the gordian technique of silicon chip (wafer) production upstream at present, but has that the cutting surface quality is high, cutting efficiency is high and the cutting large size material, make things convenient for characteristics such as following process.
At present; The mechanical type tensimeter is only installed in the design of the apparatus control system of common water-cooled silicon chip microtome additional on the market on inlet pipeline; Intake pressure does not obtain effective alarm monitoring, and filtrator does not have and can in time clean, and causes equipment usually to cut midway and shuts down because screen pack stops up.
The utility model content
Therefore in actual production, need a kind of hydraulic pressure warning device that is used for to monitor the microtome water feeding pressure, prevent to hinder ordinary production because of not timely cleaning and filtering net causes equipment downtime.
The hydraulic pressure warning device that the utility model provides comprises hydraulic pressure detecting unit, comparing unit and alarm unit, belongs to hardware controls, just the microtome water feeding pressure is detected, and does not change the software control system of original equipment.
The hydraulic pressure detecting unit of the hydraulic pressure warning device that the utility model provides is installed on the inlet pipeline, is used to detect hydraulic pressure and exports the hydraulic pressure detection signal; Comparing unit preestablishes the first threshold and second threshold value; First threshold and second threshold value compare therewith with the hydraulic pressure detection signal for they; Generate corresponding control signal and output, the said first threshold and second threshold value correspond respectively to the maximum water feeding pressure and the minimum water feeding pressure of microtome; Control signal is exported and is sent to alarm unit and shows water pressure conditions.
In embodiment of the utility model, alarm unit can be any alarm unit commonly used in this area, and for example it can comprise three look alarm lamp and hummers, shows the intake pressure situation through various colors, and for example, green: hydraulic pressure is normal; Yellow: hydraulic pressure descends, and the prompting cutting is accomplished needs the cleaning and filtering net; Redness+buzzing: hydraulic pressure is low, and screen pack stops up, and needs to clean.
In embodiment of the utility model; Said hydraulic pressure detecting unit and comparing unit are included in the electro connecting pressure gauge; The signal upper limit output terminal of electro connecting pressure gauge links to each other with the first auxiliary reclay coil; The signal lower limit output terminal of said electro connecting pressure gauge links to each other with the second auxiliary reclay coil, and the output terminal of first and second auxiliary reclays links to each other with the input end of three look alarm lamps.
Improvement as the utility model; Can between the signal upper limit output terminal of electro connecting pressure gauge and the first auxiliary reclay coil, be connected very first time relay; Between the signal lower limit output terminal of electro connecting pressure gauge and the second auxiliary reclay coil, be connected with second time relay; In the time of so can preventing water feeding pressure near maximum or minimum hydraulic pressure, owing to water pressure fluctuations causes the alarm lamp flicker.This time relay can be set a delay time, for example 1～60 second, 1～40 second, 1～20 second, 1～10 second, 1～5 second, 1～4 second, 1～3 second and 1～2 second according to the fluctuation situation of on-the-spot hydraulic pressure usually.When hydraulic pressure near maximum or minimum hydraulic pressure the time, if hydraulic pressure continues to depart from maximum or minimum predefined time of hydraulic pressure overtime relay, then can export this hydraulic pressure detection signal, otherwise can not export, thereby eliminate the problem of alarm lamp flicker.
Because water pressure fluctuations is generally the short time fluctuation, generally between the several seconds to tens of seconds, therefore as the another improvement of the utility model, it is second time relay of level that the utility model preferably adopts precision.
As another improvement of the utility model, the maximum range of the electro connecting pressure gauge that the utility model adopted is 1.1～1.8 times of chilled water top pressure, is preferably 1.2～1.5 times.The too small meeting of electro connecting pressure gauge range causes and exceeds measurement range, damages electro connecting pressure gauge; The excessive water-pressure survey out of true that causes, the warning device reaction is insensitive.
In another embodiment of the utility model; The hydraulic pressure detecting unit is a pressure transducer; Comparing unit is an analog module; The input end of analog module links to each other with the pressure transducer output terminal, and analog module links to each other with Programmable Logic Controller (PLC), and the output point of Programmable Logic Controller (PLC) links to each other with the input end of said three look alarm lamps.
Water-cooled silicon chip microtome described in the utility model is meant the silicon chip microtome that any use recirculated water cools off, and this type microtome all can use the described circuit of the utility model to prevent that screen pack from time not cleaning and cause the low excessively shutdown that causes of hydraulic pressure.This type water-cooled silicon chip microtome includes, but are not limited to: the DS264 of Mei Yeboge company type microtome, the DS271 of Mei Yeboge company type microtome and the HCT-B5 of Applied Materials type microtome.
Description of drawings
Through reading the detailed description of doing with reference to following accompanying drawing that non-limiting example is done, other features, objects and advantages of the present invention will become more apparent:
Fig. 1 is the process flow diagram of the utility model warning device;
Fig. 2 is the circuit diagram that the utility model utilizes the warning device of electro connecting pressure gauge;
Fig. 3 is the circuit diagram that the utility model utilizes the warning device of electro connecting pressure gauge, has wherein also used the time relay;
Fig. 4 is the circuit diagram that the utility model utilizes the warning device of Programmable Logic Controller (PLC).
Embodiment
Accompanying drawing 1 has been explained the process flow diagram of the utility model warning device; Wherein the hydraulic pressure detecting unit is after detecting hydraulic pressure; Output hydraulic pressure detection signal is to comparing unit; Comparing unit with the hydraulic pressure detection signal with preestablish first threshold and second threshold value compares, generate the also corresponding control signal of output, the said first threshold and second threshold value correspond respectively to the maximum water feeding pressure and the minimum water feeding pressure of microtome; Control signal is exported and is sent to alarm unit and shows water pressure conditions.
Accompanying drawing 2 has been to use the warning device of electro connecting pressure gauge, and wherein alarm unit is made up of green, Huang and red trichromatism alarm lamp and hummer, and wherein green alarm lamp indication hydraulic pressure is normal; Yellow alarm lamp indication hydraulic pressure descends; Need cleaning and filtering net after cutting is accomplished, the red alarm lamp links to each other with hummer, and indication hydraulic pressure is low; Screen pack stops up, and needs to clean microtome.Each loop connects according to following mode:
Loop 1: electro connecting pressure gauge upper limit end 101 links to each other with power supply 100, and the other end links to each other with the first auxiliary reclay coil, 102 1 ends, and first auxiliary reclay, the 102 coil other ends link to each other with power supply 100, forms the closed-loop path.
Loop 2: electro connecting pressure gauge lower limit end 103 links to each other with power supply 100, and the other end links to each other with the second auxiliary reclay coil, 104 1 ends, and the second auxiliary reclay coil, 104 other ends link to each other with power supply 100, forms the closed-loop path.
3: the first auxiliary reclay normally opened contact 105 1 ends in loop link to each other with power supply 100, and the other end links to each other with green alarm lamp 106 1 ends, and green alarm lamp 106 other ends link to each other with power supply 100, form the closed-loop path.
4: the second auxiliary reclay normally opened contact 107 1 ends in loop link to each other with power supply 100, and the other end links to each other with hummer 108 1 ends with the red alarm lamp, and the red alarm lamp links to each other with power supply 100 with hummer 108 other ends, form the closed-loop path.
5: the first auxiliary reclay normally closed contact 109 1 ends in loop link to each other with power supply 100; The other end links to each other with the second auxiliary reclay normally closed contact 110; The second auxiliary reclay normally closed contact, 110 other ends link to each other with yellow alarm lamp 111 1 ends; Yellow alarm lamp 111 other ends link to each other with power supply 100, form the closed-loop path.
In when work, when the chilled water actual pressure surpasses the predefined first threshold of electro connecting pressure gauge, loop 1, loop 3 equal conductings, in running order, loop 2, loop 4, loop 5 all can conductings, and green alarm lamp power supply is switched on and lights at this moment; When the chilled water actual pressure is lower than predefined second threshold value of electro connecting pressure gauge, loop 2, loop 4 equal conductings, in running order, loop 1, loop 3, loop 5 all not conductings, red alarm lamp and hummer power supply were switched on and lighted this moment; When the chilled water actual pressure is between the electro connecting pressure gauge first threshold and second threshold value, loop 1, loop 2, loop 3, loop 4 all not conductings, loop 5 conductings, yellow alarm lamp power supply was switched on and lighted this moment.
Accompanying drawing 3 has been to use the warning device of the electro connecting pressure gauge and the time relay, and wherein alarm unit is made up of green, Huang and red trichromatism alarm lamp and hummer, and wherein green alarm lamp indication hydraulic pressure is normal; Yellow alarm lamp indication hydraulic pressure descends; Need cleaning and filtering net after cutting is accomplished, the red alarm lamp links to each other with hummer, and indication hydraulic pressure is low; Screen pack stops up, and needs to clean microtome.Each loop connects according to following mode:
Loop 1: the electro connecting pressure gauge upper limit 201 1 ends link to each other with power supply, and the other end links to each other with very first time relay coil 202 1 ends, and very first time relay coil 202 other ends link to each other with power supply 200, form the closed-loop path.
Loop 2: electro connecting pressure gauge lower limit 203 1 ends link to each other with power supply 200, and the other end links to each other with second time relay coil, 204 1 ends, and second time relay coil, 204 other ends link to each other with power supply 200, form the closed-loop path.
Loop 3: very first time relay normally open contact 205 1 ends link to each other with power supply, and the other end links to each other with the first auxiliary reclay coil, 206 1 ends, and the first auxiliary reclay coil, 206 other ends link to each other with power supply 200, form the closed-loop path.
4: the second time relay normally opened contact 207 1 ends in loop link to each other with power supply 200, and the other end links to each other with the second auxiliary reclay coil, 208 1 ends, and the second auxiliary reclay coil, 208 other ends link to each other with power supply 200, form the closed-loop path.
5: the first auxiliary reclay normally opened contact 209 1 ends in loop link to each other with power supply 200, and the other end links to each other with green alarm lamp 210 1 ends, and green alarm lamp 210 other ends link to each other with power supply 200, form the closed-loop path.
6: the second auxiliary reclay normally opened contact 211 1 ends in loop link to each other with power supply, and the other end links to each other with hummer 212 1 ends with the red alarm lamp, and the red alarm lamp links to each other with power supply 200 with hummer 212 other ends, form the closed-loop path.
7: the first auxiliary reclay normally closed contact 213 1 ends in loop link to each other with power supply 200; The other end links to each other with the second auxiliary reclay normally closed contact 214; The second auxiliary reclay normally closed contact, 214 other ends link to each other with yellow alarm lamp 215 1 ends; Yellow alarm lamp 215 other ends link to each other with power supply 200, form the closed-loop path.
In the work: when the chilled water actual pressure surpasses the first threshold of electro connecting pressure gauge setting, start working in loop 1, and very first time relay picks up counting; Reach setting-up time pressure like timing and still surpass first threshold; Then loop 3, loop 5 conductings are started working, and green alarm lamp 210 power supplys are switched on and light, if timing midway hydraulic pressure be lower than first threshold again; Then stop timing and reset, loop 3, loop 5 can conductings.In these cases, loop 2, loop 4, loop 6, loop 7 all can conductings; When the chilled water actual pressure is lower than second threshold value of electro connecting pressure gauge setting, start working in loop 2, and second time relay picks up counting; If timing reach setting-up time pressure still low second threshold value; Then loop 4, loop 6 conductings are started working, and red alarm lamp and hummer 212 power supplys are switched on and light, if timing midway hydraulic pressure be higher than second threshold value again; Then stop timing and reset; Loop 4, loop 6 can conductings, and in these cases, loop 1, loop 3, loop 5, loop 7 all can not be switched on; When the chilled water actual pressure was between first and second threshold values that electro connecting pressure gauge sets, loop 1, loop 2, loop 3, loop 4, loop 5, loop 6 all can conductings, loop 7 conductings, and yellow alarm lamp 215 power supplys were switched on and lighted this moment.
Accompanying drawing 4 is to use the warning device of Programmable Logic Controller (PLC), wherein:
Loop 1: pressure transducer 301 1 ends link to each other with power supply 300, and the other end links to each other with analog module 302 1 ends, and analog module 302 other ends link to each other with power supply 300, form the closed-loop path.
Loop 2: Programmable Logic Controller first output point 303 1 ends link to each other with power supply 300, and the other end links to each other with green alarm lamp 304 1 ends, and green alarm lamp 304 other ends link to each other with power supply 300, form the closed-loop path.
Loop 3: Programmable Logic Controller second output point 305 1 ends link to each other with power supply 300, and the other end links to each other with yellow alarm lamp 306 1 ends, and yellow alarm lamp 306 other ends link to each other with power supply 300, form the closed-loop path.
Loop 4: Programmable Logic Controller the 3rd output point 307 1 ends link to each other with power supply 300, and the other end links to each other with hummer 308 1 ends with red look alarm lamp, and red alarm lamp and hummer 308 other ends and power supply 300 connect mutually, form the closed-loop path.
During work; Analog quantity will be gathered the signal of coming from pressure transducer 301 and will be sent to the Programmable Logic Controller (PLC); Programmable Logic Controller (PLC) is exported signal through sorting of operation, compare with the first threshold and second threshold value and judge the hydraulic pressure size, is higher than first threshold like hydraulic pressure; Loop 2 conductings, green alarm lamp is bright; Be lower than second threshold value like hydraulic pressure, loop 4 conductings, bright and hummer 308 sound of red alarm lamp; Like hydraulic pressure between the first threshold and second threshold value, then loop 3 conductings, yellow alarm lamp 306 is bright.
Those skilled in the art will be understood that the foregoing description all is exemplary and nonrestrictive.The different technologies characteristic that in different embodiment, occurs can make up, to obtain beneficial effect.Those skilled in the art will be understood that and realize the embodiment of other variations of the embodiment that disclosed on the basis of research accompanying drawing, instructions and claims.In claims, term " comprises " does not get rid of other devices or step; Indefinite article " one " is not got rid of a plurality of; Term " first ", " second " are used to indicate title but not are used to represent any specific order.Any Reference numeral in the claim all should not be understood that the restriction to protection domain.The function of a plurality of parts that occur in the claim can be realized that certain a part of function also can be realized by a plurality of different hardware or software module by independent hardware or software module.Some technical characterictic appears in the different dependent claims and does not mean that and can not these technical characterictics be made up to obtain beneficial effect.
Claims (9)
1. silicon chip microtome hydraulic pressure warning device is characterized in that comprising:
The hydraulic pressure detecting unit is used to detect hydraulic pressure and generates corresponding hydraulic pressure detection signal;
Comparing unit is used for said hydraulic pressure detection signal and first threshold and second threshold value compared and generates and the output control signal, and the said first threshold and second threshold value are respectively the maximum water feeding pressure and the minimum water feeding pressure of microtome;
Alarm unit is used for based on the corresponding indication of said control signal output.
2. microtome hydraulic pressure warning device according to claim 1, said alarm unit comprises three look alarm lamp and hummers.
3. microtome hydraulic pressure warning device according to claim 2; It is characterized in that said hydraulic pressure detecting unit and comparing unit are included in the electro connecting pressure gauge; The signal upper limit output terminal of said electro connecting pressure gauge links to each other with the first auxiliary reclay coil; The signal lower limit output terminal of said electro connecting pressure gauge links to each other with the second auxiliary reclay coil, and the output terminal of said first and second auxiliary reclays links to each other with the input end of said three look alarm lamps.
4. microtome hydraulic pressure warning device according to claim 3; It is characterized in that being connected with very first time relay between signal upper limit output terminal and the said first auxiliary reclay coil of said electro connecting pressure gauge, between the signal lower limit output terminal of said electro connecting pressure gauge and the said second auxiliary reclay coil, be connected with second time relay.
5. microtome hydraulic pressure warning device according to claim 4 is characterized in that the precision of said first and second time relays is a second level.
6. according to claim 3 or 4 described microtome hydraulic pressure warning devices, the maximum range that it is characterized in that said electro connecting pressure gauge is 1.1～1.8 times of chilled water top pressure.
7. according to claim 3 or 4 described microtome hydraulic pressure warning devices, the maximum range that it is characterized in that said electro connecting pressure gauge is 1.2～1.5 times of chilled water top pressure.
8. microtome hydraulic pressure warning device according to claim 2; It is characterized in that said hydraulic pressure detecting unit is a pressure transducer; Said comparing unit is an analog module; The input end of said analog module links to each other with said pressure transducer output terminal, and said analog module links to each other with Programmable Logic Controller, and the output point of said Programmable Logic Controller links to each other with the input end of said three look alarm lamps.
9. a water-cooled silicon chip microtome is characterized in that comprising according to each described silicon chip microtome hydraulic pressure warning device in the claim 1～8.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201023248U CN202119587U (en) | 2011-04-08 | 2011-04-08 | Hydraulic pressure alarm device and water-cooled silicon chip slicer comprising same |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011201023248U CN202119587U (en) | 2011-04-08 | 2011-04-08 | Hydraulic pressure alarm device and water-cooled silicon chip slicer comprising same |
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| CN202119587U true CN202119587U (en) | 2012-01-18 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106299900A (en) * | 2015-06-24 | 2017-01-04 | 福特全球技术公司 | For non-locking adapter from warning system |
| CN107968382A (en) * | 2017-12-26 | 2018-04-27 | 贵州钢绳股份有限公司 | A kind of water pressure fluctuations delay protection method and its device |
| CN111413022A (en) * | 2020-05-20 | 2020-07-14 | 中车青岛四方机车车辆股份有限公司 | Wind pressure fault judgment system and method and train |
| CN111650877A (en) * | 2020-06-04 | 2020-09-11 | 华天科技（西安）有限公司 | System for systematically and automatically preventing product from being stained and working method |
-
2011
- 2011-04-08 CN CN2011201023248U patent/CN202119587U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106299900A (en) * | 2015-06-24 | 2017-01-04 | 福特全球技术公司 | For non-locking adapter from warning system |
| CN107968382A (en) * | 2017-12-26 | 2018-04-27 | 贵州钢绳股份有限公司 | A kind of water pressure fluctuations delay protection method and its device |
| CN111413022A (en) * | 2020-05-20 | 2020-07-14 | 中车青岛四方机车车辆股份有限公司 | Wind pressure fault judgment system and method and train |
| CN111413022B (en) * | 2020-05-20 | 2021-09-14 | 中车青岛四方机车车辆股份有限公司 | Wind pressure fault judgment system and method and train |
| CN111650877A (en) * | 2020-06-04 | 2020-09-11 | 华天科技（西安）有限公司 | System for systematically and automatically preventing product from being stained and working method |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120118 Termination date: 20200408 |
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| CF01 | Termination of patent right due to non-payment of annual fee |