CN202103033U - Passive accurate aligning cap sealing system - Google Patents
Passive accurate aligning cap sealing system Download PDFInfo
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- CN202103033U CN202103033U CN2011201092888U CN201120109288U CN202103033U CN 202103033 U CN202103033 U CN 202103033U CN 2011201092888 U CN2011201092888 U CN 2011201092888U CN 201120109288 U CN201120109288 U CN 201120109288U CN 202103033 U CN202103033 U CN 202103033U
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- mount pad
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- sealing cap
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Abstract
The utility model provides a passive accurate aligning cap sealing system which comprises a transistor type welding power source subsystem, a nitrogen drying oven subsystem and a passive accurate aligning subsystem, wherein the passive accurate aligning subsystem can realize accurate alignment of the central axis of a lens and a photoelectric chip; the transistor type welding power source subsystem comprises a welding power source part and a welding head part; the nitrogen drying oven subsystem comprises a sealed oven body; and the welding head part and the passive accurate aligning subsystem are arranged in the sealed oven body of the nitrogen drying oven subsystem. The passive accurate aligning cap sealing system is applied in alignment cap sealing of TO components, the sealing effect and the welding effect are good, the aligning accuracy is high, the cost is low, the speed is fast, and the operation method is simple.
Description
Technical field
The relevant a kind of photoelectron subassembly package system of the utility model is meant that especially a kind of TO of being used for (Transistor Outline, transistor outline) device (needing optical alignment pipe cap packaged device) aims at the passive fine registration sealing cap system of sealing cap.
Background technology
TO (Transistor Outline transistor outline) encapsulation is one of common packing forms of semiconductor photoelectronic device, and it is simple in structure, cost is lower, reliability is higher, is widely used in the optical communication network.
At present; Domestic TO device mainly contains two kinds of sealing cap modes, and the one, adopt the welding system that possesses the nitrogen drying case, utilize mechanical registeration to carry out sealing cap; This mode can satisfy the requirement of some low side TO devices; But can't guarantee the fine registration of lens centre axis and photoelectric chip,, can not satisfy higher coupling efficiency requirement for high-end TO device.The 2nd, adopt and in air ambient, carry out earlier the low-yield spot welding of optical alignment fixed position; Transfer in the soldering and sealing system that possesses the nitrogen drying case again and carry out final sealing cap, this mode can be improved the deficiency of mechanical registeration, improves the sealing cap precision; But because adopt twice welding; For high-end TO device, can not satisfy good soldering and sealing appearance requirement, and production efficiency can reduce.
Though some high-end TO sealing cap equipment are abroad arranged, can satisfy fine registration and good soldering and sealing effect simultaneously, the general employing of this kind equipment is active to be coupled and aligned or active optics aligning and soldering and sealing, and its structure is complicated, and equipment price and maintenance cost are too high.
The utility model content
In view of this, the main purpose of the utility model is to provide a kind of and can accomplish aims at and soldering and sealing in the inter-sync of nitrogen drying case, realizes the passive fine registration sealing cap system of lens centre axis and photoelectric chip fine registration.
For achieving the above object; The utility model provides a kind of passive fine registration sealing cap system; It includes transistor type source of welding current subsystem; Nitrogen drying chest system and can make the lens centre axis and photoelectric chip is realized the passive fine registration subsystem of fine registration; Said transistor type source of welding current subsystem comprises source of welding current part and welding head part, and said nitrogen drying chest system includes seal case, and wherein said welding head partly is arranged in the seal case of said nitrogen drying chest system with said passive fine registration subsystem.
Said passive fine registration subsystem comprises the optical imagery assembly; Lower chuck electrode assemblie and upper grip electrode assemblie; Said lower chuck electrode assemblie is fixed on the substrate of said welding head part through screw; Said upper grip electrode assemblie is fixed on the cylinder connecting plate of said welding head part through screw, and said upper grip electrode assemblie has into light-emitting window, the light-emitting window that advances that said optical imagery assembly one is rectified said upper grip electrode assemblie.
Said optical imagery assembly comprises lighting source, microscope, imaging sensor, three-dimensional adjustable shelf and LCD; Said three-dimensional adjustable shelf is installed on the combiner of being made up of in regular turn said lighting source, microscope and imaging sensor and regulates the illumination of this combiner and take direction; Said LCD connects said imaging sensor, and said lighting source is over against the light-emitting window that advances of said upper grip electrode assemblie.
Said lower chuck electrode assemblie comprises pedestal displacement platform, bottom electrode mount pad, bottom electrode, bottom electrode locking circle and workpiece location lasso; Said bottom electrode mount pad is arranged on the said pedestal displacement platform; Said bottom electrode mount pad has the electrode mounting groove, and the bottom of said bottom electrode is installed in the said electrode mounting groove, and said electrode mounting groove outer peripheral edges are processed with screw thread; Said bottom electrode locking circle inside is provided with the fillet of screw; Said bottom electrode locking circle is installed on the outer peripheral edges of said electrode mounting groove, and lasso inside, said workpiece location is provided with the space, location, the top of this ccontaining said bottom electrode in space, location; Said bottom electrode inside is provided with perforation; Perforation place of the corresponding said bottom electrode in top of said workpiece location lasso is provided with through hole, is equipped with the encapsulation base in the through hole of said workpiece location lasso and the perforation of said bottom electrode, and this encapsulation base top is provided with photoelectric chip.
Said upper grip electrode assemblie comprises prism assemblies, top electrode mount pad, top electrode and top electrode locking circle; Said top electrode mount pad medial side mask has cubic groove, and said prism assemblies is installed in this four directions groove, and the front end of said top electrode mount pad is provided with the electrode mounting groove; The rear end of said top electrode is installed in the electrode mounting groove of said top electrode mount pad; Said top electrode locking circle is installed on the outer peripheral edges of the electrode mounting groove of said top electrode mount pad, is provided with inner chamber in the said top electrode mount pad, and said top electrode is interior to being provided with endoporus in the inner chamber place; This endoporus top is equipped with pipe cap, and this pipe cap top is provided with lens.
Said bottom electrode mount pad is to regulate the central axis of said lens and the X of said photoelectric chip fine registration, Y diaxon translation slide unit.
Said prism assemblies comprises that total reflection prism reaches in order to load the prism carrier of this total reflection prism; This prism carrier one end is provided with light hole; This light hole is the light-emitting window that advances of said upper grip electrode assemblie, and said light hole is communicated with the inner chamber of said top electrode mount pad.
Said total reflection prism is the isosceles right triangle prism.
Charge flow rate control device, exhaust control device and dew point monitoring appearance are installed on the said seal case, and said seal case front is provided with gloves interface and gas dam.
Said passive fine registration sealing cap system also includes respectively installs the vacuum bakeout case and isolation transferring cabin that is connected with said seal case.
The passive fine registration sealing cap system applies that the utility model provides is aimed at sealing cap in the TO device, and its soldering and sealing is effective, alignment precision is high, cost is low, speed is fast, method of operation is simple.
Description of drawings
Fig. 1 is the structural principle block diagram of the passive fine registration sealing cap of the utility model system;
Fig. 2 is the structural representation of the passive fine registration subsystem in the utility model;
Fig. 3 A is the three-dimensional decomposition texture sketch map of the lower chuck electrode assemblie in the utility model;
Fig. 3 B is the plane decomposition texture sketch map of the lower chuck electrode assemblie in the utility model;
Fig. 4 A is the three-dimensional decomposition texture sketch map of the upper grip electrode assemblie in the utility model;
Fig. 4 B is the plane decomposition texture sketch map of the upper grip electrode assemblie in the utility model;
Fig. 5 is the structure enlarged diagram of A among Fig. 2, B part;
Fig. 6 is the structural representation of the nitrogen drying chest system in the utility model;
Fig. 7 is the principle schematic that the pipe cap lens central axis in the utility model is aimed at photoelectric chip;
Fig. 8 is the three-dimensional decomposition texture sketch map of the exhaust control device in the utility model;
Fig. 9 is the plane decomposition texture sketch map of the exhaust control device in the utility model.
Embodiment
For ease of structure of the utility model and the effect that reaches are had further understanding, existing conjunction with figs. develops simultaneously the preferred embodiment detailed description as follows.
As shown in Figure 1; The passive fine registration sealing cap of the utility model system includes transistor type source of welding current subsystem 1; Nitrogen drying chest system 3 and can make the lens centre axis and photoelectric chip is realized the passive fine registration subsystem 2 of fine registration; This transistor type source of welding current subsystem 1 comprises source of welding current part 10 and welding head part 11, and wherein welding head part 11 is arranged in the seal case 30 of nitrogen drying chest system 3 with passive fine registration subsystem 2.The lead that is connected between source of welding current part 10 and the welding head part 11 passes the wire guide of reserving on the seal case 30.Nitrogen drying chest system 3 uses foot support to carry, and foot support possesses the height regulatory function.Wherein welding head part 11 apolegamy cylinder pressures can reach 10-120kgf (kilogram); The source of welding current part 10 apolegamy transistor type sources of welding current; It comprises controller and two parts of transformer (not shown); All place seal case 30 outsides, can be fixed on the article carrying platform below the foot support or separately and place.The welding trigger switch is double control switch (presses simultaneously for two and could start), is installed in the seal case 30, is positioned at the both sides of welding head part 11, and spacing distance is 40-50cm, meets the operation of human body both arms.
As shown in Figure 2, the passive fine registration subsystem 2 in the utility model comprises optical imagery assembly 20, lower chuck electrode assemblie 21 and upper grip electrode assemblie 22.Said optical imagery assembly 20 comprises lighting source 201, microscope 202, imaging sensor 203, three-dimensional adjustable shelf 204 and LCD 205.Lighting source 201 is selected high shiny red of annular LED or white light source for use, size and the microscope of selecting for use 202 couplings.The highest enlargement ratio of microscope camera lens is 5-8 times, possesses multiplying power and adjustable focal length function, and dimensions needs and imaging sensor 203 couplings.Imaging sensor 203 is selected CCD (Charge Coupled Device for use; Charge coupled device) or CMOS (Complementary Metal-Oxide-Semiconductor Transistor; Complementary metal oxide semiconductors (CMOS)) formation such as, pixel reaches 480 * 480, interface and microscope coupling.Three-dimensional adjustable shelf 204 is selected X for use, Y, and three adjustable type micropositioning stages of Z, matching and fixing substrate are with lighting source 201, and the combiner that microscope 202, imaging sensor 203 are formed in regular turn installs, and three-dimensional adjustable shelf also can be regulated the illumination of combiner and take direction.LCD 205 connects into image-position sensor 203, can be shown as the captured image of image-position sensor 203.
Shown in Fig. 3 A and Fig. 3 B, the lower chuck electrode assemblie 22 of the utility model comprises pedestal displacement platform 220, bottom electrode mount pad 221, bottom electrode 222, bottom electrode locking circle 223, workpiece location lasso 224.Pedestal displacement platform 220 is selected X for use, and Y diaxon translation slide unit can make the tote on the pedestal displacement platform move along two vertical direction of XY, and load can reach 100Kg.Bottom electrode mount pad 221 adopts alloyed copper materials processing, and material requirements hardness (HV) is 245-270kgf/mm
2, conductance (e) is 30-34ms/m, softening temperature (S.T) is 500-600 ℃.Bottom electrode mount pad 221 inside are provided with electrode mounting groove 2210; These electrode mounting groove 2210 degree of depth can not surpass bottom electrode 222 bottom clamping bench height; And more than the 1mm less than normal; Electrode mounting groove 2210 outer peripheral edges processing criterion screw threads, pedestal displacement platform 220 rear portions also need possess the lead copper sheet mounting interface.Bottom electrode 222 adopts alloyed copper materials processing, and the center is provided with perforation, and the race diameter of bottom electrode 222 bottom clamping benches is less than in the electrode mounting groove 2210 internal diameter 0.05mm, so that bottom electrode 222 can be locked in electrode mounting groove 2210.Bottom electrode locking circle 223 adopts alloyed copper materials processing, and bottom electrode locks circle 223 outer rings and is processed into anti-skidding striped, and these bottom electrode locking circle 223 inside are provided with the fillet of screw, and this fillet of screw and bottom electrode mount pad 221 outside screw threads mate.Workpiece location lasso 224 adopts Antistatic Nylon (Polyamide; Polyamide) or anti-static PVC (polyvinyl chloride) materials processing; Lasso 224 inside, workpiece location are provided with space 2240, location; The top of these space, location 2240 ccontaining bottom electrodes 222, perforation place of the corresponding bottom electrode 222 in top of workpiece location lasso 224 is provided with through hole, is equipped with encapsulation base 60 in the through hole of workpiece location lasso 224 and the perforation of bottom electrode; These encapsulation base 60 tops are provided with photoelectric chip, and encapsulation base 60 is TO encapsulation base in the utility model.
Shown in Fig. 4 A and Fig. 4 B, the upper grip electrode assemblie 21 in the utility model comprises prism assemblies 210, top electrode mount pad 211, top electrode 212 and top electrode locking circle 213.Prism assemblies 210 comprises prism carrier 2100 and total reflection prism 2101.Prism carrier 2,100 one ends are provided with light hole 2102; Prism carrier 2100 adopts Antistatic Nylon (Polyamide; Polyamide) or anti-static PVC (polyvinyl chloride) materials processing, design size and total reflection prism 2101 size match, total reflection prism 2101 is selected the isosceles right triangle prism that is applied in the periscope for use; Total reflection prism 2101 is packed in the prism carrier 2100, and the place of packing into is designed with trip size and prism carrier 2100 precision-fit.Top electrode mount pad 211 adopts alloyed copper materials processing; Its intracavity diameter and total reflection prism 2101 couplings; The side, middle part has cubic groove 2110; This prism assemblies 210 is installed in the cubic groove 2110 of top electrode mount pad 211, and fastening with screw, and lighting device 201 is provided with over against the light hole 2102 (being the light-emitting window that advances of upper grip electrode assemblie) of prism assemblies 210.Top electrode mount pad 211 rear portions possess the lead copper sheet mounting interface; The front end of top electrode mount pad 211 is provided with electrode mounting groove 2111; These electrode mounting groove 2111 degree of depth are less than the clamping bench height of top electrode 212 rear ends, and more than the 1mm less than normal, so that the clamping bench of top electrode 212 can lock onto this electrode mounting groove 2111; Electrode mounting groove 2111 machining accuracies are controlled in the 0.05mm, electrode mounting groove 2111 outer peripheral edges processing criterion screw threads.Top electrode 212 adopts alloyed copper materials processing; The top is formed with endoporus, is provided with pipe cap 61 in this endoporus, and diameter of bore is greater than in the pipe cap 61 race diameter 0.05mm; The bottom bore design diameter of top electrode 212 and top electrode mount pad 211 inner chambers coupling; The circular cone chamfering is done in the junction, and outer ring, top electrode 212 bottom intended diameter is less than in the electrode mounting groove internal diameter 0.05mm, and machining accuracy is controlled in the 0.05mm.Top electrode locking circle 213 adopts alloyed copper materials processing, and its inside is provided with the fillet of screw, the screw thread coupling of electrode mounting groove 2111 outer peripheral edges of this fillet of screw and top electrode mount pad 211, and anti-skidding striped is processed in top electrode locking circle 213 outer rings.
As shown in Figure 1, lower chuck electrode assemblie 22 is fixed on through screw on the substrate of welding head part 11, and upper grip electrode assemblie 21 is fixed on the cylinder connecting plate of welding head part 11 through screw.
In conjunction with Fig. 2, Fig. 5 and shown in Figure 7, Fig. 7 is the principle schematic that the pipe cap lens central axis is aimed at photoelectric chip.Be provided with a photoelectric chip on encapsulation base 60 tops, the utility model is an example with semiconductor laser chip (Laser Diode, laser diode), and other photoelectric chip execution mode is similar, and pipe cap 61 tops are provided with lens.Can observe the imaging 601 that is mounted on the photoelectric chip on the encapsulation base 60 through the LCD 205 of passive fine registration subsystem 2, wherein indentation, there is a chip light emitting point 602; Imaging 2010 figures of annular LED after the lens on the pipe cap 61 are reflective comprise lens centre feature structure 611 in the lighting source 201.At first regulate the combiner of forming by lighting source 201, microscope 202 and imaging sensor 203 through three-dimensional adjustable shelf 204; Make assembly illumination consistent with prism assemblies 210 light holes 2102 with the shooting direction; Can carry out Precision trimming through three-dimensional adjustable shelf 204, reach the optical axis unanimity.Regulate pipe cap lens centre axis and photoelectric chip on time; Alignment so is that pipe cap 61 is fixed; Encapsulate the position of bases 60 through pedestal displacement platform 220 adjustment of lower chuck electrode assemblie 22; Just adjusted the position of photoelectric chip on the encapsulation base 60, when chip light emitting point 602 overlaps with lens centre feature structure 611, explained that the pipe cap lens central axis aims at photoelectric chip.
Like Fig. 1 and shown in Figure 6, the assembling sketch map of nitrogen drying chest system 3, it comprises seal case 30.Seal case 30 is to be welded with stainless steel materials is seamless, and box sizes is according to the design of interior arrangement requisite space, and seal case 30 back side preformed holes are installed into throughput control device 31, exhaust control device 32 and dew point monitoring appearance 33; The wire guide that seal case 30 bottoms are reserved is used for lead and passes, and the front is provided with two gloves interfaces 34, and gloves interface 34 is provided with the operation gloves; These operation gloves adopt the long-armed gloves of conductivity material, and wall thickness is no more than 0.5mm, and the installation site conforms to double control switch; Spacing distance is 40-50cm; Meet the operation of human body both arms, seal case 30 fronts also are provided with gas dam 35, and this gas dam 35 adopts antistatic PC (Polycarbonate; Merlon) plate; Window size guarantees that according to the casing size design field range is enough to observe interior arrangement, and it can observe the image on the LCD 205 through gas dam 35.Charge flow rate control device 31 is selected spinner flowmeter for use, and range ability is 5-50L/min, and the installation site is seal case 30 upper right sides.Exhaust control device 32 installation sites are seal case upper left sides, and embodiment is as shown in Figure 8.The dew point monitoring appearance of dew point monitoring appearance 33 apolegamy film oxidation aluminium sensor probes, the installation site is the casing upper left side, this dew point monitoring appearance 33 is used to monitor dew point in the seal case 30.
Fig. 8 and Fig. 9 are the solid and the plane decomposition texture sketch map of the exhaust control device 32 in the utility model.This exhaust control device comprises transitional cavity 320, sealing catch 322, guide rail pole 323, spiral compression spring 324, cavity cover plate 325 and blast pipe 326.Transitional cavity 320 adopts aluminium alloy or stainless steel material processing; Transitional cavity 320 bottoms are provided with steam vent 3200, and these steam vent 3200 intended diameter are greater than 1/2 cavity race diameter, and steam vent is distributed with a plurality of counterbores 3201 around 3200 inboards; In the utility model four counterbores; The design attitude of 323, four counterbores 3201 of mounting guide rail bar needs and seals catch 322 race diameters coupling in the counterbore 3201, and assurance sealing catch 322 can cooperate slip along guide rail pole 323.The other end of the transitional cavity 320 relative with steam vent 3200 is provided with opening, and this opening diameter should be greater than the transitional cavity inside diameter, and around openings is distributed with a plurality of holding screws, is used for fixing cavity cover plate 325.Sealing catch 322 adopts Antistatic Nylon (Polyamide, polyamide) or anti-static PVC (polyvinyl chloride) materials processing, and the race diameter of sealing catch 322 and guide rail pole 323 are formed the circle coupling, and the central area of sealing catch 322 is convexes.Be resisted against cavity cover plate 325 at the bottom of the awl of spiral compression spring 324, the vertex of a cone is resisted against the convex of sealing catch 322, and assurance sealing catch 322 can be stuck on the spiral compression spring 324 and not come off.Guide rail pole 323 adopts aluminium alloy or stainless steel material processing, in the intended diameter 1.5mm, and length and transitional cavity 320 couplings.Spiral compression spring 324 adopts carbon steel or steel alloy; Spring vertex of a cone intended diameter and the convex diameter coupling that seals catch 322 centers; Awl end intended diameter is greater than blast pipe 326 diameters but be no more than guide rail pole 323 and form diameter of a circles; Main design parameters is P1=0.04-0.05N (5mm), P2=0.07-0.08N (8mm), P3=0.12-0.13N (12mm).Cavity cover plate 325 adopts aluminium alloy or stainless steel material processing; Interstitial hole intended diameter and blast pipe 326 couplings; And be processed with screw thread around cavity cover plate 325 centre bores, outer ring a plurality of screw fixing holes that distribute, a plurality of holding screws that distribute with transitional cavity 320 around openings cooperate.In the opening diameter 0.05mm of cavity cover plate 325 outer ring intended diameter less than transitional cavity 320, cavity cover plate 325 is embedded in the opening of transitional cavity 320, needs to use position, the bonding slit of fluid sealant after installation cooperates, and machining accuracy is controlled in the 0.05mm.Blast pipe 326 connects cavity cover plate 325; And blast pipe 326 hickey intended diameter and cavity cover plate 325 and seal case 30 couplings; Need add sealing ring during installation; The parts of wherein being made up of transitional cavity 320, sealing catch 322, guide rail pole 323, spiral compression spring 324 and cavity cover plate 325 are installed in the seal case 30, and blast pipe 326 stretches out outside the seal case 30 after being installed on cavity cover plate 325.
Make the sealing cap environment that forms nitrogen in the seal case 30 through the charge flow rate control device 31 in the utility model, exhaust control device 32; And can form-40 ℃ dew point in the seal case 30; Can realize that through passive fine registration subsystem 2 the pipe cap lens central axis aims at photoelectric chip, and after through transistor type source of welding current subsystem 1 the lens fine registration that the required energy of sealing cap melting welding makes pipe cap being provided soldering and sealing on encapsulation base 60.
The passive fine registration sealing cap of the utility model system also is provided with the vacuum bakeout case and isolates two auxiliary systems of transferring cabin; Soldering and sealing parts and soldering and sealing parts are treated in oven dry and the storage of treating the soldering and sealing parts respectively, and these two servicing units are respectively two individual components, and cooperate installation with seal case 30 reserved windows respectively; Fastening with screw; The middle adding sealing ring that needs, assembled is used position, the bonding slit of fluid sealant.
The passive fine registration sealing cap system applies that the utility model provides is aimed at sealing cap in TO device (packaging that needs the optical alignment pipe cap), and its soldering and sealing is effective, alignment precision is high, cost is low, speed is fast, method of operation is simple.
The above is merely the preferred embodiment of the utility model, is not the protection range that is used to limit the utility model.
Claims (10)
1. passive fine registration sealing cap system; It is characterized in that; It includes transistor type source of welding current subsystem; Nitrogen drying chest system and can make the lens centre axis and photoelectric chip is realized the passive fine registration subsystem of fine registration; Said transistor type source of welding current subsystem comprises source of welding current part and welding head part, and said nitrogen drying chest system includes seal case, and wherein said welding head partly is arranged in the seal case of said nitrogen drying chest system with said passive fine registration subsystem.
2. passive fine registration sealing cap as claimed in claim 1 system; It is characterized in that; Said passive fine registration subsystem comprises the optical imagery assembly; Lower chuck electrode assemblie and upper grip electrode assemblie, said lower chuck electrode assemblie are fixed on through screw on the substrate of said welding head part, and said upper grip electrode assemblie is fixed on the cylinder connecting plate of said welding head part through screw; Said upper grip electrode assemblie has into light-emitting window, the light-emitting window that advances that said optical imagery assembly one is rectified said upper grip electrode assemblie.
3. passive fine registration sealing cap as claimed in claim 2 system; It is characterized in that; Said optical imagery assembly comprises lighting source, microscope, imaging sensor, three-dimensional adjustable shelf and LCD; Said three-dimensional adjustable shelf is installed on the combiner of being made up of in regular turn said lighting source, microscope and imaging sensor and regulates the illumination of this combiner and take direction; Said LCD connects said imaging sensor, and said lighting source is over against the light-emitting window that advances of said upper grip electrode assemblie.
4. passive fine registration sealing cap as claimed in claim 3 system is characterized in that said lower chuck electrode assemblie comprises pedestal displacement platform, bottom electrode mount pad, bottom electrode, bottom electrode locking circle and workpiece location lasso; Said bottom electrode mount pad is arranged on the said pedestal displacement platform; Said bottom electrode mount pad has the electrode mounting groove, and the bottom of said bottom electrode is installed in the said electrode mounting groove, and said electrode mounting groove outer peripheral edges are processed with screw thread; Said bottom electrode locking circle inside is provided with the fillet of screw; Said bottom electrode locking circle is installed on the outer peripheral edges of said electrode mounting groove, and lasso inside, said workpiece location is provided with the space, location, the top of this ccontaining said bottom electrode in space, location; Said bottom electrode inside is provided with perforation; Perforation place of the corresponding said bottom electrode in top of said workpiece location lasso is provided with through hole, is equipped with the encapsulation base in the through hole of said workpiece location lasso and the perforation of said bottom electrode, and this encapsulation base top is provided with said photoelectric chip.
5. passive fine registration sealing cap as claimed in claim 4 system; It is characterized in that said upper grip electrode assemblie comprises prism assemblies, top electrode mount pad, top electrode and top electrode locking circle, said top electrode mount pad medial side mask has cubic groove; Said prism assemblies is installed in this four directions groove; The front end of said top electrode mount pad is provided with the electrode mounting groove, and the rear end of said top electrode is installed in the electrode mounting groove of said top electrode mount pad, and said top electrode locking circle is installed on the outer peripheral edges of the electrode mounting groove of said top electrode mount pad; Be provided with inner chamber in the said top electrode mount pad; To being provided with endoporus in the inner chamber place, this endoporus top is equipped with pipe cap in the said top electrode, and this pipe cap top is provided with said lens.
6. passive fine registration sealing cap as claimed in claim 5 system is characterized in that said bottom electrode mount pad is to regulate the central axis of said lens and the X of said photoelectric chip fine registration, Y diaxon translation slide unit.
7. passive fine registration sealing cap as claimed in claim 5 system; It is characterized in that; Said prism assemblies comprises that total reflection prism reaches in order to load the prism carrier of this total reflection prism; This prism carrier one end is provided with light hole, and this light hole is the light-emitting window that advances of said upper grip electrode assemblie, and said light hole is communicated with the inner chamber of said top electrode mount pad.
8. passive fine registration sealing cap as claimed in claim 7 system is characterized in that said total reflection prism is the isosceles right triangle prism.
9. passive fine registration sealing cap as claimed in claim 1 system is characterized in that charge flow rate control device, exhaust control device and dew point monitoring appearance are installed on the said seal case, and said seal case front is provided with gloves interface and gas dam.
10. passive fine registration sealing cap as claimed in claim 1 system is characterized in that, said passive fine registration sealing cap system also includes respectively installs the vacuum bakeout case and isolation transferring cabin that is connected with said seal case.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201092888U CN202103033U (en) | 2011-04-14 | 2011-04-14 | Passive accurate aligning cap sealing system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201092888U CN202103033U (en) | 2011-04-14 | 2011-04-14 | Passive accurate aligning cap sealing system |
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| CN202103033U true CN202103033U (en) | 2012-01-04 |
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| CN2011201092888U Expired - Lifetime CN202103033U (en) | 2011-04-14 | 2011-04-14 | Passive accurate aligning cap sealing system |
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| CN103567954A (en) * | 2012-08-10 | 2014-02-12 | 上海微电子装备有限公司 | Two-dimensional regulating mechanism and two-dimensional regulating method |
| CN106392268A (en) * | 2016-09-08 | 2017-02-15 | 广东瑞谷光网通信股份有限公司 | Optical fiber transmit-receive module cap sealing method and cap sealing equipment |
| CN107999942A (en) * | 2016-11-01 | 2018-05-08 | 深圳市三联光智能设备股份有限公司 | Sealing cap welding equipment |
| CN110657759A (en) * | 2019-09-30 | 2020-01-07 | 武汉东飞凌科技有限公司 | Sealing cap concentricity measuring method suitable for TO46 photoelectronic component |
| CN111694113A (en) * | 2019-03-15 | 2020-09-22 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN112025127A (en) * | 2020-09-23 | 2020-12-04 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Integrated full-automatic optical device tube seat and tube cap packaging equipment |
| CN112025028A (en) * | 2020-09-25 | 2020-12-04 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Tool and method for correcting parallelism and coaxiality of upper and lower working tables of cap sealing machine |
| WO2022213403A1 (en) * | 2021-04-06 | 2022-10-13 | 桂林芯飞光电子科技有限公司 | Visual cap-sealing system and cap-sealing method |
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| CN103567954A (en) * | 2012-08-10 | 2014-02-12 | 上海微电子装备有限公司 | Two-dimensional regulating mechanism and two-dimensional regulating method |
| CN103567954B (en) * | 2012-08-10 | 2016-09-28 | 上海微电子装备有限公司 | Two-dimensional adjusting mechanism and two-dimension adjustment method |
| CN106392268A (en) * | 2016-09-08 | 2017-02-15 | 广东瑞谷光网通信股份有限公司 | Optical fiber transmit-receive module cap sealing method and cap sealing equipment |
| CN106392268B (en) * | 2016-09-08 | 2019-04-05 | 广东瑞谷光网通信股份有限公司 | A kind of optical fiber receiver-transmitter module sealing cap method and sealing cap equipment |
| CN107999942A (en) * | 2016-11-01 | 2018-05-08 | 深圳市三联光智能设备股份有限公司 | Sealing cap welding equipment |
| CN107999942B (en) * | 2016-11-01 | 2023-09-22 | 深圳市三一联光智能设备股份有限公司 | Sealing cap welding equipment |
| CN111694113A (en) * | 2019-03-15 | 2020-09-22 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| US11828991B2 (en) | 2019-03-15 | 2023-11-28 | Hisense Broadband Multimedia Technologies Co., Ltd. | Optical module |
| CN110657759B (en) * | 2019-09-30 | 2021-09-21 | 武汉东飞凌科技有限公司 | Sealing cap concentricity measuring method suitable for TO46 photoelectronic component |
| CN110657759A (en) * | 2019-09-30 | 2020-01-07 | 武汉东飞凌科技有限公司 | Sealing cap concentricity measuring method suitable for TO46 photoelectronic component |
| CN112025127A (en) * | 2020-09-23 | 2020-12-04 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Integrated full-automatic optical device tube seat and tube cap packaging equipment |
| CN112025127B (en) * | 2020-09-23 | 2023-12-01 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Integrated full-automatic optical device tube seat and tube cap packaging equipment |
| CN112025028A (en) * | 2020-09-25 | 2020-12-04 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Tool and method for correcting parallelism and coaxiality of upper and lower working tables of cap sealing machine |
| WO2022213403A1 (en) * | 2021-04-06 | 2022-10-13 | 桂林芯飞光电子科技有限公司 | Visual cap-sealing system and cap-sealing method |
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