CN202101556U - Pad for minimizing sintering deformation of rotary ceramic target - Google Patents
Pad for minimizing sintering deformation of rotary ceramic target Download PDFInfo
- Publication number
- CN202101556U CN202101556U CN2011201160052U CN201120116005U CN202101556U CN 202101556 U CN202101556 U CN 202101556U CN 2011201160052 U CN2011201160052 U CN 2011201160052U CN 201120116005 U CN201120116005 U CN 201120116005U CN 202101556 U CN202101556 U CN 202101556U
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- pad
- green compact
- ceramic target
- sintering
- backing plate
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Abstract
The utility model relates to a pad for minimizing sintering deformation of a rotary ceramic target. A pad is placed on a setter plate on a sintering furnace, and a rotary ceramic target green compact is arranged on the pad. An auxiliary contraction pad is placed under the rotary ceramic target green compact. The pad, the setter plate and the ceramic green compact are separated from one another by high temperature sands. During sintering, the pad and the ceramic green compact are contracted simultaneously towards a same direction. In this way, the position of the ceramic green compact is stationary relative to the pad, thereby maximally reducing friction and improving qualified rate of sintered products of ceramic targets.
Description
Technical field
The utility model belongs to sputter and uses the rotary ceramic target production technical field, relates to a kind ofly in sintering process, can effectively reducing sintering warpage and cracking, improves the backing plate of the raising rotary ceramic target sintering warpage of sintered article qualification rate.
Background technology
Rotary target material has the high characteristics of utilization rate, makes it on market, to obtain day by day to pay attention to.The rotary ceramic target generally is to obtain green compact by powder through compacting, and green compact obtain through oversintering and post-production.Sintering processing generally is directly ceramic green to be sintered directly to be positioned on the load bearing board of sintering kiln; Because ceramic green is in the sintering contraction process; Exist friction to hinder with the sintering furnace load bearing board; Can cause and shrink asynchronously up and down, cause the rotary ceramic target to be horn-like (above little below big), can cause the product cracking when serious.Can reduce friction though between green compact and load bearing board, evenly spill high temperature resistant sand, when the sintering large-size target, the inconsistent cracking phenomena that causes of contraction that friction causes still exists.
The utility model content
In order to overcome the above-mentioned shortcoming of prior art
,The utility model provides a kind of sintering cracking that in sintering process, can effectively reduce; Improve the backing plate of sintered article qualification rate; Reduce friction to greatest extent, guaranteed degree of shrinkage up and down, improved the backing plate of the raising rotary ceramic target sintering warpage of sintered products yields.
The utility model solves the technical scheme that its technical problem adopted: a kind of backing plate that improves the sintering warpage of rotary ceramic target, on the load bearing board of sintering furnace, be provided with backing plate, and on backing plate, be equipped with the rotary ceramic target green compact.
Between load bearing board and the backing plate and between backing plate and the target green compact high temperature sand is being housed.
The beneficial effect of the utility model is: below the rotary ceramic target green compact, place an auxiliary backing plate that shrinks; All separate between this backing plate and load bearing board and the ceramic green with high temperature sand; Backing plate and ceramic target green compact shrink simultaneously in the same way in company with sintering the time; Guarantee that target and pad burn plate and be in static relatively position all the time, thereby eliminated friction to greatest extent, improved ceramic target sintered products qualification rate.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Among the figure: the ceramic target green compact that 1-is to be burnt, 2-backing plate, 3-high temperature sand, 4-load bearing board.
The specific embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is further specified.
Referring to Fig. 1, a kind of backing plate that improves the sintering warpage of rotary ceramic target is put backing plate 2 on the load bearing board 4 of sintering furnace; On backing plate 2, put rotary ceramic target green compact 1 again; Between load bearing board 4, backing plate 2, target green compact 1, will spill high temperature sand 3, the sintering that heats up subsequently is after sintering is accomplished; Sintered article shrinks unanimity up and down, and loudspeaker form phenomenon is effectively avoided.
Adopt the utility model, in sintering process, can eliminate the target green compact to greatest extent in contraction process and support the friction between the backing plate, improved ceramic target sintered products qualification rate; Sintered products shrinks unanimity up and down after guaranteeing the rotary ceramic green sintering, and product quality effectively improves.
Claims (2)
1. a backing plate that improves the sintering warpage of rotary ceramic target is characterized in that: on the load bearing board of sintering furnace, be provided with backing plate, on backing plate, be equipped with the rotary ceramic target green compact.
2. the backing plate of raising rotary ceramic target as claimed in claim 1 sintering warpage is characterized in that: between load bearing board and the backing plate and between backing plate and the target green compact high temperature sand is being housed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201160052U CN202101556U (en) | 2011-04-20 | 2011-04-20 | Pad for minimizing sintering deformation of rotary ceramic target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201160052U CN202101556U (en) | 2011-04-20 | 2011-04-20 | Pad for minimizing sintering deformation of rotary ceramic target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202101556U true CN202101556U (en) | 2012-01-04 |
Family
ID=45387564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201160052U Expired - Lifetime CN202101556U (en) | 2011-04-20 | 2011-04-20 | Pad for minimizing sintering deformation of rotary ceramic target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202101556U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107599123A (en) * | 2017-09-07 | 2018-01-19 | 韶关市欧莱高新材料有限公司 | A kind of frock of tubular target injection forming mould |
| CN107614739A (en) * | 2016-05-12 | 2018-01-19 | 株式会社广筑 | The calciner and method of roasting of cylindrical sputtering target material |
| CN107687764A (en) * | 2016-08-04 | 2018-02-13 | 嘉泰屋面材料（肇庆）有限公司 | A kind of plain tile founds firing ring plate |
| CN111072379A (en) * | 2019-12-30 | 2020-04-28 | 广州市尤特新材料有限公司 | Burning bearing plate suitable for tubular rotary ceramic target material and sintering method |
| CN111072380A (en) * | 2020-01-07 | 2020-04-28 | 芜湖映日科技有限公司 | Preparation process of rotary ITO target with single length of more than one meter |
| CN111609698A (en) * | 2020-06-03 | 2020-09-01 | 福建阿石创新材料股份有限公司 | ITO target blank drying and degreasing device and method |
| CN113295002A (en) * | 2021-05-24 | 2021-08-24 | 河北恒博新材料科技股份有限公司 | Furnace charging method for sintering IGZO rotary target |
| CN113357925A (en) * | 2021-04-29 | 2021-09-07 | 芜湖映日科技股份有限公司 | Sintering preparation process of single-section-length rotary ITO target |
| CN115894009A (en) * | 2022-11-14 | 2023-04-04 | 先导薄膜材料（广东）有限公司 | Rapid sintering and degreasing method for ITO (indium tin oxide) planar target and supporting plate used by rapid sintering and degreasing method |
-
2011
- 2011-04-20 CN CN2011201160052U patent/CN202101556U/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107614739A (en) * | 2016-05-12 | 2018-01-19 | 株式会社广筑 | The calciner and method of roasting of cylindrical sputtering target material |
| CN107614739B (en) * | 2016-05-12 | 2020-08-14 | 株式会社广筑 | Cylindrical sputtering target material roasting device and roasting method |
| CN107687764A (en) * | 2016-08-04 | 2018-02-13 | 嘉泰屋面材料（肇庆）有限公司 | A kind of plain tile founds firing ring plate |
| CN107599123A (en) * | 2017-09-07 | 2018-01-19 | 韶关市欧莱高新材料有限公司 | A kind of frock of tubular target injection forming mould |
| CN107599123B (en) * | 2017-09-07 | 2023-05-05 | 广东欧莱高新材料股份有限公司 | Frock of cylindric target slip casting mould |
| CN111072379A (en) * | 2019-12-30 | 2020-04-28 | 广州市尤特新材料有限公司 | Burning bearing plate suitable for tubular rotary ceramic target material and sintering method |
| CN111072380A (en) * | 2020-01-07 | 2020-04-28 | 芜湖映日科技有限公司 | Preparation process of rotary ITO target with single length of more than one meter |
| CN111609698A (en) * | 2020-06-03 | 2020-09-01 | 福建阿石创新材料股份有限公司 | ITO target blank drying and degreasing device and method |
| CN113357925A (en) * | 2021-04-29 | 2021-09-07 | 芜湖映日科技股份有限公司 | Sintering preparation process of single-section-length rotary ITO target |
| CN113295002A (en) * | 2021-05-24 | 2021-08-24 | 河北恒博新材料科技股份有限公司 | Furnace charging method for sintering IGZO rotary target |
| CN115894009A (en) * | 2022-11-14 | 2023-04-04 | 先导薄膜材料（广东）有限公司 | Rapid sintering and degreasing method for ITO (indium tin oxide) planar target and supporting plate used by rapid sintering and degreasing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120104 |