CN202084522U - Wafer cleaning clamp - Google Patents
Wafer cleaning clamp Download PDFInfo
- Publication number
- CN202084522U CN202084522U CN201120168708XU CN201120168708U CN202084522U CN 202084522 U CN202084522 U CN 202084522U CN 201120168708X U CN201120168708X U CN 201120168708XU CN 201120168708 U CN201120168708 U CN 201120168708U CN 202084522 U CN202084522 U CN 202084522U
- Authority
- CN
- China
- Prior art keywords
- wafer
- chuck
- anchor clamps
- handle
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a wafer cleaning clamp comprising a collet for supporting a wafer; a handle connected with the chuck; a movable chuck being sleeved onto the handle and moving along the length direction of the handle, and fixing the wafer in cooperation with the collet; and a fastening hook arranged on the collet and the movable chuck and contacted with the wafer to clamp the wafer. The wafer cleaning clamp has the characteristic of small clamping contact area with the wafer, and in the cleaning process, the area obstructed by the clamp, on the wafer is small thereby being in favor of outflow of soup, such that the wafer can be flushed to be clean. Additionally, the handle of the wafer cleaning clamp is more suitable for holding and convenient for flushing operation.
Description
Technical field
The utility model relates to the Wafer Machining field, relates in particular to a kind of anchor clamps that are used for clean wafers.
Background technology
As everyone knows, in the course of processing of wafer, need it is cleaned,, and when cleaning, need usually to use corresponding anchor clamps that wafer is carried out clamping so that rinse out soup residual on the wafer.As shown in Figure 1, the contact area of employed in the prior art anchor clamps and wafer is bigger, therefore, when having bath anchor clamps to wafer stop that area is big, be unfavorable for the shortcoming that cleans up.In addition, the handle of employed anchor clamps is longer in the prior art, therefore, exists handle to be not suitable for controlling, not being suitable for the shortcoming of cleaning.
The utility model content
(1) technical problem that will solve
The purpose of this utility model is to provide a kind of novel wafer to clean anchor clamps, so that can effectively wafer be cleaned up in the cleaning process of wafer.Another purpose of the present utility model is, provides a kind of novel wafer to clean anchor clamps, makes its handle be suitable for controlling, making things convenient for cleaning operation.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of wafer to clean anchor clamps, and comprising: chuck is used to support described wafer; Hold handle, be connected with described chuck; Movable chuck is socketed on described holding on the handle, can move on the described length direction of holding handle, fixes described wafer to cooperate described chuck; Described anchor clamps also comprise grab, are arranged on described chuck and the described movable chuck, contact with described wafer, with the described wafer of clamping.
Preferably, described grab has the tip, with the described wafer of mode clamping of a contact.
Preferably, described grab longitudinal cross-section is a triangle.
Preferably, described chuck is a rhombus, and its first jiao is connected with the described handle of holding.
Preferably, described grab is four, and wherein two grabs are arranged on two limits of second jiao of described chuck, and described second jiao and described first jiao is oppositely arranged, and two other grab is arranged on the described movable chuck.
Preferably, the thickness as outside on two limits of second jiao of described chuck is greater than its inboard thickness.
Preferably, the described handle of holding is provided with perforate near on the end of described chuck.
Preferably, the described perforate length of holding on the handle accounts for the described 1/3-1/4 that holds the length of handle.
Preferably, the described length of holding handle accounts for 2/3 of described anchor clamps total length.
Preferably, on the described chuck perforate is set.
(3) beneficial effect
The wafer that the utility model proposes cleans anchor clamps, have the characteristics little with the clamping contact area of wafer, make in cleaning process anchor clamps stop that to wafer area is little, helping soup flows out, thereby wafer can be rinsed well, and the handle of holding that the wafer that the utility model proposes cleans anchor clamps is more suitable for controlling, and makes things convenient for flushing operation.
Description of drawings
Further describe the utility model with reference to the accompanying drawings and in conjunction with example.Wherein:
Fig. 1 show prior art wafer clean the vertical view of anchor clamps;
Fig. 2 shows the vertical view that wafer of the present utility model cleans anchor clamps;
Fig. 3 shows the stereogram that wafer of the present utility model cleans anchor clamps.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used to illustrate the utility model, but are not used for limiting scope of the present utility model.
Fig. 2 and Fig. 3 show the exemplary configurations that wafer of the present utility model cleans anchor clamps.As shown in Figures 2 and 3, according to this embodiment, wafer of the present utility model cleans anchor clamps mouldedly is divided into chuck 1, hold handle 2 and movable chuck 3 three parts.
Wherein, 1 pair of wafer of chuck rises and supports and clamping action.Chuck 1 assumes diamond in shape, an one angle with hold handle 2 and be connected, on second jiao two limits relative, be respectively arranged with a grab 11 with this angle, the thickness as outside on two limits that 1 second jiao of this chuck is set is greater than its inboard thickness, can at utmost reduce the contact area of wafer and chuck, wherein, the inboard on this limit refers to this interior angular direction of second jiao.This grab 11 fixedlys connected with chuck 1, one-body molded.Grab 11 has towards the tip of wafer, and this tip connects in a mode that contacts with wafer, so that holding chip.The longitudinal cross-section of grab 11 is a triangle, and the shape of these two grabs 11 can be identical, also can be different.In addition, on the chuck 1 perforate can be set, thereby further reduce the stop area of anchor clamps, help soup and flow out, thereby wafer can be rinsed well wafer.The shape of perforate can be of all kinds, but for the ease of processing and use, considering that simultaneously 1 pair of wafer of chuck plays a supportive role, is that the diagonal holding on the handle extended line with rhombus chuck 1 is a center line in the present embodiment, form in its both sides two symmetrical tri-angle-holed.
Holding handle 2 and link into an integrated entity with chuck 1, is convenient the manufacturing, add hold handle man-hour can be one-body molded with chuck 1.The length of holding handle 2 can design as required, finds that after deliberation reasonable value is that the length of holding handle 2 accounts for 2/3 of anchor clamps total length, and the handle of holding with this length is suitable for controlling, and makes things convenient for cleaning operation.In addition,, be beneficial to soup and flow out, can near on the ends of chuck 1 perforate be set holding handle 2 in order further to reduce the area that stops of anchor clamps to wafer.Perforate is to be strip along the length direction of holding handle in the present embodiment, and its length can design as required, flows out for the ease of soup, and perforate length accounts for the 1/3-1/4 of the length of holding handle.
In the utility model, each part of anchor clamps can adopt identical materials to make, and it is multiple that the choosing of material can have.Because anchor clamps will contact with soup, need to consider its resistance to acids and bases, the therefore preferred stable material of chemical property.In addition,,, therefore preferably have flexible material, simultaneously,, also will consider the rigidity that it is enough in order to satisfy effective support and clamping for damage wafers not because anchor clamps, particularly grab will contact with wafer.Polytetrafluoroethylmaterial material is preferably adopted in comprehensive above consideration.
Clean anchor clamps according to wafer of the present utility model, make in cleaning process anchor clamps to wafer stop that area is little, help soup and flow out, thereby wafer can be rinsed well, and the handle of holding that wafer of the present utility model cleans anchor clamps is more suitable for controlling, and makes things convenient for flushing operation.
Description of the present utility model provides for example with for the purpose of describing, and is not exhaustively or with the utility model to be limited to disclosed form.Many modifications and variations are obvious for the ordinary skill in the art.Selecting and describing embodiment is for better explanation principle of the present utility model and practical application, thereby and makes those of ordinary skill in the art can understand the various embodiment that have various modifications that the utility model design is suitable for special-purpose.
Claims (10)
1. a wafer cleans anchor clamps, and comprising: chuck is used to support described wafer; Hold handle, be connected with described chuck; Movable chuck is socketed on described holding on the handle, can move on the described length direction of holding handle, fixes described wafer to cooperate described chuck, it is characterized in that:
Described anchor clamps also comprise grab, are arranged on described chuck and the described movable chuck, contact with described wafer, with the described wafer of clamping.
2. wafer as claimed in claim 1 cleans anchor clamps, it is characterized in that:
Described grab has the tip, with the described wafer of mode clamping of a contact.
3. wafer as claimed in claim 2 cleans anchor clamps, it is characterized in that:
Described grab longitudinal cross-section is a triangle.
4. wafer as claimed in claim 1 cleans anchor clamps, it is characterized in that:
Described chuck is a rhombus, and its first jiao is connected with the described handle of holding.
5. wafer as claimed in claim 4 cleans anchor clamps, it is characterized in that:
Described grab is four, and wherein two grabs are arranged on two limits of second jiao of described chuck, and described second jiao and described first jiao is oppositely arranged, and two other grab is arranged on the described movable chuck.
6. wafer as claimed in claim 5 cleans anchor clamps, it is characterized in that:
The thickness as outside on two limits that described chuck is second jiao is greater than its inboard thickness.
7. wafer as claimed in claim 1 cleans anchor clamps, it is characterized in that:
The described handle of holding is provided with perforate near on the end of described chuck.
8. wafer as claimed in claim 7 cleans anchor clamps, it is characterized in that:
The described perforate length of holding on the handle accounts for the described 1/3-1/4 that holds the length of handle.
9. wafer as claimed in claim 1 cleans anchor clamps, it is characterized in that:
The described length of holding handle accounts for 2/3 of described anchor clamps total length.
10. wafer as claimed in claim 4 cleans anchor clamps, it is characterized in that:
On the described chuck perforate is set.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120168708XU CN202084522U (en) | 2011-05-24 | 2011-05-24 | Wafer cleaning clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120168708XU CN202084522U (en) | 2011-05-24 | 2011-05-24 | Wafer cleaning clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202084522U true CN202084522U (en) | 2011-12-21 |
Family
ID=45345144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120168708XU Expired - Lifetime CN202084522U (en) | 2011-05-24 | 2011-05-24 | Wafer cleaning clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202084522U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109686693A (en) * | 2018-12-28 | 2019-04-26 | 西安立芯光电科技有限公司 | A kind of device and cleaning method for the fixed wafer of wet process organic washing technique |
| CN113808993A (en) * | 2021-09-23 | 2021-12-17 | 华海清科股份有限公司 | Wafer clamping mechanism and wafer post-processing equipment |
-
2011
- 2011-05-24 CN CN201120168708XU patent/CN202084522U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109686693A (en) * | 2018-12-28 | 2019-04-26 | 西安立芯光电科技有限公司 | A kind of device and cleaning method for the fixed wafer of wet process organic washing technique |
| CN113808993A (en) * | 2021-09-23 | 2021-12-17 | 华海清科股份有限公司 | Wafer clamping mechanism and wafer post-processing equipment |
| CN113808993B (en) * | 2021-09-23 | 2023-11-24 | 华海清科股份有限公司 | Wafer clamping mechanism and wafer post-processing equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20111221 |
|
| CX01 | Expiry of patent term |