CN202083516U - 基于微熔技术压力传感器 - Google Patents
基于微熔技术压力传感器 Download PDFInfo
- Publication number
- CN202083516U CN202083516U CN2011201988265U CN201120198826U CN202083516U CN 202083516 U CN202083516 U CN 202083516U CN 2011201988265 U CN2011201988265 U CN 2011201988265U CN 201120198826 U CN201120198826 U CN 201120198826U CN 202083516 U CN202083516 U CN 202083516U
- Authority
- CN
- China
- Prior art keywords
- pressure
- sensor
- cavity body
- pressure sensor
- rear end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005516 engineering process Methods 0.000 title abstract description 16
- 238000002844 melting Methods 0.000 title abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 18
- 239000010703 silicon Substances 0.000 claims abstract description 18
- 239000011888 foil Substances 0.000 claims description 11
- 239000006060 molten glass Substances 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 4
- 230000008447 perception Effects 0.000 claims description 4
- 229910000679 solder Inorganic materials 0.000 claims description 4
- 230000008676 import Effects 0.000 claims description 3
- 239000012530 fluid Substances 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 238000012360 testing method Methods 0.000 abstract description 6
- 238000007789 sealing Methods 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 2
- 230000007547 defect Effects 0.000 abstract 1
- 230000007613 environmental effect Effects 0.000 abstract 1
- 238000004880 explosion Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 239000012943 hotmelt Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- UCHOFYCGAZVYGZ-UHFFFAOYSA-N gold lead Chemical compound [Au].[Pb] UCHOFYCGAZVYGZ-UHFFFAOYSA-N 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000009628 steelmaking Methods 0.000 description 1
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201988265U CN202083516U (zh) | 2011-06-14 | 2011-06-14 | 基于微熔技术压力传感器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201988265U CN202083516U (zh) | 2011-06-14 | 2011-06-14 | 基于微熔技术压力传感器 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202083516U true CN202083516U (zh) | 2011-12-21 |
Family
ID=45344142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201988265U Expired - Fee Related CN202083516U (zh) | 2011-06-14 | 2011-06-14 | 基于微熔技术压力传感器 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202083516U (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102661822A (zh) * | 2012-04-28 | 2012-09-12 | 无锡永阳电子科技有限公司 | 硅应变片金属封装传感器 |
| CN104390739A (zh) * | 2014-11-26 | 2015-03-04 | 西安微纳传感器研究所有限公司 | 压阻式微熔高温压力传感器及其制造方法 |
| CN106908193A (zh) * | 2017-02-24 | 2017-06-30 | 中国电子科技集团公司第三十八研究所 | 一种耐腐蚀玻璃微熔压力变送器感压芯体及其制作方法 |
-
2011
- 2011-06-14 CN CN2011201988265U patent/CN202083516U/zh not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102661822A (zh) * | 2012-04-28 | 2012-09-12 | 无锡永阳电子科技有限公司 | 硅应变片金属封装传感器 |
| CN104390739A (zh) * | 2014-11-26 | 2015-03-04 | 西安微纳传感器研究所有限公司 | 压阻式微熔高温压力传感器及其制造方法 |
| CN106908193A (zh) * | 2017-02-24 | 2017-06-30 | 中国电子科技集团公司第三十八研究所 | 一种耐腐蚀玻璃微熔压力变送器感压芯体及其制作方法 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103105248B (zh) | 一种硅基双岛结构石英梁谐振式微压力传感器 | |
| CN101718605B (zh) | 测量大坝、河流湖泊底部土壤中水压力传感器及测量方法 | |
| CN104132767A (zh) | 一种基于mems的压力传感器 | |
| CN101710007B (zh) | 混凝土墙体膨胀内应力测量传感器及测量方法 | |
| CN202083516U (zh) | 基于微熔技术压力传感器 | |
| CN201754114U (zh) | 一种低频宽电压输出范围的绝压传感器 | |
| CN207636232U (zh) | 一种应变式压差传感器 | |
| CN1336538A (zh) | 耐高温压力传感器 | |
| CN201535706U (zh) | 渗透膜土壤水压力传感器 | |
| CN109855789B (zh) | 一种用于监测水下小型航行器表面压力的传感器 | |
| CN105973525A (zh) | 一种高可靠性压阻式压力传感器 | |
| CN105136377A (zh) | 溅射薄膜锤击由壬压力传感器 | |
| CN2898795Y (zh) | 高温蓝宝石压力变送器 | |
| CN207675354U (zh) | 一种用于负压测量的mems充油压力传感器 | |
| CN104931176A (zh) | 一种压电式三爪卡盘夹紧力测量装置 | |
| CN2802486Y (zh) | 高温防腐蚀平模型微压变送器 | |
| CN204679198U (zh) | 便装式溅射薄膜压力传感器 | |
| CN104316252A (zh) | 分体式锤击由壬压裂泥浆压力变送器 | |
| CN204679199U (zh) | 分体式溅射薄膜压力传感器 | |
| CN201488851U (zh) | 高准确度振弦式压力传感器 | |
| CN201141790Y (zh) | 高温高频响双膜充油压力传感器 | |
| CN208383370U (zh) | 一种用于特种爆破压力测量的爆破压力传感器 | |
| CN203241188U (zh) | 一种电感式差压传感器 | |
| CN103196617B (zh) | 一种侧腔充油结构的圆筒式超高压力传感器 | |
| CN201811817U (zh) | 一种压力表 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Pressure sensor based on micro-melting technology Effective date of registration: 20140625 Granted publication date: 20111221 Pledgee: Bank of Changan, Limited by Share Ltd, Baoji Jinling subbranch Pledgor: Baoji Huamin Measurement Control Instrument Co., Ltd. Registration number: 2014990000507 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20150728 Granted publication date: 20111221 Pledgee: Bank of Changan, Limited by Share Ltd, Baoji Jinling subbranch Pledgor: Baoji Huamin Measurement Control Instrument Co., Ltd. Registration number: 2014990000507 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Pressure sensor based on micro-melting technology Effective date of registration: 20150731 Granted publication date: 20111221 Pledgee: Bank of Changan, Limited by Share Ltd, Baoji Jinling subbranch Pledgor: Baoji Huamin Measurement Control Instrument Co., Ltd. Registration number: 2015990000629 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20160809 Granted publication date: 20111221 Pledgee: Bank of Changan, Limited by Share Ltd, Baoji Jinling subbranch Pledgor: Baoji Huamin Measurement Control Instrument Co., Ltd. Registration number: 2015990000629 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Pressure sensor based on micro-melting technology Effective date of registration: 20160809 Granted publication date: 20111221 Pledgee: Bank of Changan, Limited by Share Ltd, Baoji Jinling subbranch Pledgor: Baoji Huamin Measurement Control Instrument Co., Ltd. Registration number: 2016990000692 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20170809 Granted publication date: 20111221 Pledgee: Bank of Changan, Limited by Share Ltd, Baoji Jinling subbranch Pledgor: Baoji Huamin Measurement Control Instrument Co., Ltd. Registration number: 2016990000692 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Pressure sensor based on micro-melting technology Effective date of registration: 20170810 Granted publication date: 20111221 Pledgee: Bank of Changan, Limited by Share Ltd, Baoji Jinling subbranch Pledgor: Baoji Huamin Measurement Control Instrument Co., Ltd. Registration number: 2017610000088 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20180817 Granted publication date: 20111221 Pledgee: Bank of Changan, Limited by Share Ltd, Baoji Jinling subbranch Pledgor: Baoji Huamin Measurement Control Instrument Co., Ltd. Registration number: 2017610000088 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111221 Termination date: 20190614 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |