CN202080899U - Silicon core holding device for polysilicon reduction furnace - Google Patents
Silicon core holding device for polysilicon reduction furnace Download PDFInfo
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- CN202080899U CN202080899U CN2011201809246U CN201120180924U CN202080899U CN 202080899 U CN202080899 U CN 202080899U CN 2011201809246 U CN2011201809246 U CN 2011201809246U CN 201120180924 U CN201120180924 U CN 201120180924U CN 202080899 U CN202080899 U CN 202080899U
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- silicon core
- clamping device
- reducing furnace
- polycrystalline silicon
- core clamping
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Abstract
The utility model relates to a holding device, in particular to a silicon core holding device for a polysilicon reduction furnace, belonging to the technical field of polysilicon production. The silicon core holding device for a polysilicon reduction furnace comprises a clamping flap, a cover and a base, wherein the clamping flap is arranged on the base by the cover; the cover is in threaded connection with the base; the clamping flap comprises an upper cone platform and a lower cylinder; the diameter of the cylinder is more than the diameter of the bottom surface of the cone platform; a vertical round hole is arranged at the center of the clamping flap; and the round hole and the cone platform have the same axes center. The silicon core holding device has a stable structure, can tightly wrap the silicon core, can prevent the root of the silicon core from being reversely corroded and inverted and effectively reduces the inversion rate of the whole reduction production.
Description
Technical field
The utility model relates to a kind of clamping device, relates in particular to polycrystalline silicon reducing furnace silicon core clamping device, belongs to technical field of polysilicon production.
Background technology
High purity polycrystalline silicon is the basic material of electronic industry and photovoltaic industry, and along with the develop rapidly of information technology and solar energy industry, the whole world is swift and violent to the demand growth of polysilicon, and supply falls short of demand in market.At present, in the world the production of polysilicon technology use more than 70% be the improvement Siemens Method.It mainly is to adopt high-purity trichlorosilane and High Purity Hydrogen to mix the formation mixed raw material gas according to certain proportioning that the improvement Siemens Method is produced polysilicon, feed in the reduction furnace reactor, be heated to about 1100 ℃ at the silicon wicking surface on the heating electrode, trichlorosilane and hydrogen generation reduction reaction, generate polysilicon and constantly be deposited on the silicon core, the diameter that makes this silicon core chap and form polycrystalline silicon rod gradually.
In the polycrystalline silicon growth process, need the silicon core is fixing well, finish smoothly to guarantee the polycrystalline silicon growth process, generally all the silicon core is fixed with clamping device.Silicon core clamping device is very big to the influence of whole polysilicon reduction production run, if the clamping device structure is provided with unreasonable, in polysilicon reduction production process, along with the growth of the polysilicon that reacts generation at the silicon wicking surface, the weight of polycrystalline silicon rod increases gradually, in reduction furnace under the acting in conjunction of gas flowfield and polycrystalline silicon rod deadweight, silicon core discontinuity very easily occurs and excellent phenomenon occurs down and take place and unexpected blowing out, influenced the output, quality product of reduction reaction etc. to a great extent.Thus, adopt novel silicon core clamping device to become the present stage research emphasis.
Chinese patent 200920229097 discloses a kind of clamping device, comprises graphite card lobe, graphite cap and graphite seat, and graphite card lobe is installed on the graphite seat by the graphite cap, and the graphite cap is connected with the graphite seat by screw thread.Graphite card lobe center is provided with vertical circular hole and cross recess, the axis of circular hole and cross recessed central lines in the graphite card lobe.Because the graphite card lobe of this clamping device is a circular cone shape, be provided with vertical circular hole in the graphite card lobe, though this clamping device can solve the excellent problem of falling that opens the stove and the initial stage of production, but because this device graphite card lobe is single circular cone shape, the steadiness of clamping device is limited, and circular hole connects whole graphite card lobe, has reduced the steadiness of device, along with the increase gradually of polycrystalline silicon rod weight, the risk that excellent phenomenon occurs down further strengthens.
The utility model content
It is not good enough that the purpose of this utility model is to overcome existing clamping device steadiness, occurs falling the deficiency of rod easily, and a kind of improved polycrystalline silicon reducing furnace silicon core clamping device is provided.Polycrystalline silicon reducing furnace silicon core clamping device steadiness of the present utility model is good, is not easy to occur down excellent phenomenon.
To achieve these goals, the utility model provides following technical scheme:
A kind of polycrystalline silicon reducing furnace silicon core clamping device, comprise card lobe, lid and base, the center of card lobe is provided with vertical circular hole, the diameter of the diameter of described circular hole and silicon core is suitable, the card lobe is installed on the base by lid, lid is connected with base by screw thread, and described card lobe comprises the frustum of a cone on top and the right cylinder of bottom, and described cylindrical diameter is greater than the diameter of frustum of a cone bottom surface.In this polycrystalline silicon reducing furnace silicon core clamping device, the card lobe is made up of the frustum of a cone and right cylinder, and cylindrical diameter is greater than the diameter of frustum of a cone bottom surface, and this structure makes the steadiness of clamping device improve greatly, generation that can effectively pre-anti-down excellent phenomenon.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, the diameter of described circular hole is preferably 7-11mm.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, circular hole and the frustum of a cone and right cylinder concentric that described card lobe center is provided with can further increase the stability of clamping device.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, the frustum of a cone of described card lobe partly is provided with vertical cruciform otch, the medullary ray of cruciform otch and the axis coinciding of circular hole.The criss-cross otch that is provided with in the clamping device helps eliminating the external stress when the silicon core is installed, and the stability when the silicon core is installed increases.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, the width of described cruciform otch is preferably 1.5-3mm, is beneficial to eliminate external stress and is beneficial to the corrosion that reduces as far as possible the silicon core again.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, described lid is the graphite lid.Preferably adopt the high purity graphite isostatic pressing to make.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, the diameter of described graphite lid is 110-130mm.In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, the height of described graphite lid is 60-80mm.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, described base is the graphite stand.Preferably adopt the high purity graphite isostatic pressing to make.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, the diameter of described graphite stand is 75-85mm.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, the height of described graphite stand is 60-80mm.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, described card lobe is a graphite card lobe.Preferably adopt the high purity graphite isostatic pressing to make.
In the above-mentioned polycrystalline silicon reducing furnace silicon core clamping device, the frustum of a cone of described graphite card lobe part and barrel portion are an integral body, i.e. global formation.
Polycrystalline silicon reducing furnace silicon core clamping device of the present utility model, comprise card lobe, lid and base, the card lobe is installed on the base by lid, lid is connected with base by screw thread, described card lobe comprises the frustum of a cone on top and the right cylinder of bottom, the center of described card lobe is provided with vertical circular hole, described circular hole and frustum of a cone concentric.Card lobe of the present utility model comprises the frustum of a cone on top and the right cylinder of bottom, and cylindrical diameter owing to adopted said structure, makes the steadiness of silicon core clamping device improve greatly greater than the diameter of frustum of a cone bottom surface.Further, partly be provided with vertical cruciform otch at the frustum of a cone that blocks lobe, and right cylinder department is not provided with otch, such structure both can effectively have been eliminated the external stress that had been produced when the silicon core is installed, and can guarantee the steadiness of device again.The diameter of vertical circular hole of the present utility model and silicon core diameter size are suitable, and card lobe frustum of a cone cruciform otch is less, and the corrosion of outer bound pair silicon core is very little.The frustum of a cone part and the barrel portion of the utility model card lobe can be made by the graphite global formation, and whole card valve structure more helps increasing the steadiness of device.Prove through production test, in polysilicon production process, keep under the nominal situation running condition, this structure can be good at bearing the stress of silicon rod all directions in process of production, and Stability Analysis of Structures, closely wrap up the silicon core, prevent that silicon core root from contrary corrosion taking place and the rod that falls, it is very effective that the minimizing of excellent rate is fallen in whole also original production.
Compared with prior art, the beneficial effects of the utility model:The utility model Stability Analysis of Structures, can closely wrap up the silicon core, prevent that silicon core root from contrary corrosion taking place and the rod that falls, it is very effective that the minimizing of excellent rate is fallen in whole also original production.
Description of drawings
Fig. 1 is the structural representation of the utility model silicon core clamping device card lobe.
Fig. 2 is the vertical view of the utility model silicon core clamping device card lobe.
Fig. 3 is the synoptic diagram that the utility model silicon core clamping device is installed the silicon core.
Mark among the figure: 1-card lobe, the 2-frustum of a cone, 3-right cylinder, 4-circular hole, 5-cruciform otch, 6-lid, 7-base, 8-silicon core.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is further described.
Embodiment of the present utility model is not limited to following examples, all belongs within the protection domain of the present utility model in the various variations of making under the prerequisite that does not break away from the utility model aim.
The polycrystalline silicon reducing furnace silicon core clamping device that present embodiment is enumerated comprises card lobe 1, lid 6 and base 7, and card lobe 1, lid 6 and base 7 all are graphite material, are made the about 130mm of the diameter of graphite lid, highly about 80mm by the high purity graphite isostatic pressing; Card lobe 1 is installed on the base 7 by lid 6, lid 6 is connected with base 7 by screw thread, card lobe 1 comprises the frustum of a cone 2 on top and the right cylinder 3 of bottom, the frustum of a cone part and the barrel portion of graphite card lobe 1 are an integral body, the diameter of right cylinder 3 is greater than the diameter of the frustum of a cone 2 bottom surfaces, and the center of described card lobe 1 is provided with vertical circular hole 4 and cruciform otch 5, circular hole 4 and the frustum of a cone 2 and right cylinder 3 concentrics, the medullary ray of cruciform otch and the axis coinciding of circular hole, Circularhole diameter are 11mm; The width of cruciform otch is 3mm.
In polysilicon production process, the silicon core is installed in the circular hole that the card lobe center of present embodiment clamping device is provided with, will will block lobe by lid and be mounted on the base.Because the constructional feature of present embodiment device, the steadiness of clamping device is good, and in polysilicon production process, clamping device can bear the stress of silicon rod all directions in process of production well, can closely wrap up the silicon core.Prove that through production test this polycrystalline silicon core clamping device can guarantee that operating mode normally moves, can prevent effectively that silicon core root from contrary corrosion taking place.
The polycrystalline silicon reducing furnace silicon core clamping device that present embodiment is enumerated comprises card lobe 1, lid 6 and base 7, and card lobe 1, lid 6 and base 7 all are graphite material, are made the about 110mm of the diameter of graphite lid, highly about 60mm by the high purity graphite isostatic pressing; Card lobe 1 is installed on the base 7 by lid 6, lid 6 is connected with base 7 by screw thread, card lobe 1 comprises the frustum of a cone 2 on top and the right cylinder 3 of bottom, the frustum of a cone part and the barrel portion of graphite card lobe 1 are an integral body, the diameter of right cylinder 3 is greater than the diameter of the frustum of a cone 2 bottom surfaces, and the center of described card lobe 1 is provided with vertical circular hole 4 and cruciform otch 5, circular hole 4 and the frustum of a cone 2 and right cylinder 3 concentrics, the medullary ray of cruciform otch and the axis coinciding of circular hole, its diameter of circular hole is 7mm; The width of cruciform otch is 1.5mm.
Prove that through production test this polycrystalline silicon core clamping device can guarantee that operating mode normally moves, can prevent effectively that silicon core root from contrary corrosion taking place, reduce reduction furnace simultaneously greatly and fall excellent probability.
Claims (15)
1. polycrystalline silicon reducing furnace silicon core clamping device, comprise card lobe, lid and base, the center of card lobe is provided with vertical circular hole, the diameter of the diameter of described circular hole and silicon core is suitable, the card lobe is installed on the base by lid, lid is connected with base by screw thread, it is characterized in that: described card lobe comprises the frustum of a cone on top and the right cylinder of bottom, and described cylindrical diameter is greater than the diameter of frustum of a cone bottom surface.
2. polycrystalline silicon reducing furnace silicon core clamping device according to claim 1, it is characterized in that: the diameter of described circular hole is 7-11mm.
3. polycrystalline silicon reducing furnace silicon core clamping device according to claim 1 is characterized in that: circular hole and the frustum of a cone and right cylinder concentric that card lobe center is provided with.
4. polycrystalline silicon reducing furnace silicon core clamping device according to claim 3, it is characterized in that: the frustum of a cone of described card lobe partly is provided with vertical cruciform otch, the medullary ray of cruciform otch and the axis coinciding of circular hole.
5. polycrystalline silicon reducing furnace silicon core clamping device according to claim 4, it is characterized in that: the width of described cruciform otch is 1.5-3mm.
6. polycrystalline silicon reducing furnace silicon core clamping device according to claim 1, it is characterized in that: described lid is the graphite lid.
7. polycrystalline silicon reducing furnace silicon core clamping device according to claim 6, it is characterized in that: described graphite lid makes for the high purity graphite isostatic pressing.
8. according to claim 6 or 7 described polycrystalline silicon reducing furnace silicon core clamping devices, it is characterized in that: the diameter of described graphite lid is 110-130mm.
9. according to claim 6 or 7 described polycrystalline silicon reducing furnace silicon core clamping devices, it is characterized in that: the height of described graphite lid is 60-80mm.
10. polycrystalline silicon reducing furnace silicon core clamping device according to claim 1, it is characterized in that: described base is the graphite stand.
11. polycrystalline silicon reducing furnace silicon core clamping device according to claim 10, it is characterized in that: described graphite stand makes for the high purity graphite isostatic pressing.
12. according to claim 10 or 11 described polycrystalline silicon reducing furnace silicon core clamping devices, it is characterized in that: the diameter of described graphite stand is 75-85mm.
13. according to claim 10 or 11 described polycrystalline silicon reducing furnace silicon core clamping devices, it is characterized in that: the height of described graphite stand is 60-80mm.
14. polycrystalline silicon reducing furnace silicon core clamping device according to claim 1 is characterized in that: described card lobe is a graphite card lobe.
15. polycrystalline silicon reducing furnace silicon core clamping device according to claim 14 is characterized in that: the frustum of a cone part and the barrel portion of described graphite card lobe are an integral body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201809246U CN202080899U (en) | 2011-05-31 | 2011-05-31 | Silicon core holding device for polysilicon reduction furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201809246U CN202080899U (en) | 2011-05-31 | 2011-05-31 | Silicon core holding device for polysilicon reduction furnace |
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| CN202080899U true CN202080899U (en) | 2011-12-21 |
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| CN2011201809246U Expired - Fee Related CN202080899U (en) | 2011-05-31 | 2011-05-31 | Silicon core holding device for polysilicon reduction furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108545747A (en) * | 2018-06-28 | 2018-09-18 | 江阴兰雷新能源科技有限公司 | A kind of plug-in silicon core assembly |
| CN110683547A (en) * | 2019-11-18 | 2020-01-14 | 新疆东方希望新能源有限公司 | Novel 72-pair rod reduction furnace high-voltage breakdown system and method thereof |
| CN111676515A (en) * | 2020-06-05 | 2020-09-18 | 邓文汉 | Silicon rod flexible clamping mechanism for vapor deposition furnace |
-
2011
- 2011-05-31 CN CN2011201809246U patent/CN202080899U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108545747A (en) * | 2018-06-28 | 2018-09-18 | 江阴兰雷新能源科技有限公司 | A kind of plug-in silicon core assembly |
| CN110683547A (en) * | 2019-11-18 | 2020-01-14 | 新疆东方希望新能源有限公司 | Novel 72-pair rod reduction furnace high-voltage breakdown system and method thereof |
| CN110683547B (en) * | 2019-11-18 | 2023-12-26 | 新疆东方希望新能源有限公司 | 72-pair rod reduction furnace high-voltage breakdown system and method thereof |
| CN111676515A (en) * | 2020-06-05 | 2020-09-18 | 邓文汉 | Silicon rod flexible clamping mechanism for vapor deposition furnace |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111221 Termination date: 20140531 |