CN202070281U - Tail gas recovery and purification treatment device for polycrystalline silicon production line - Google Patents
Tail gas recovery and purification treatment device for polycrystalline silicon production line Download PDFInfo
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- CN202070281U CN202070281U CN2011200718771U CN201120071877U CN202070281U CN 202070281 U CN202070281 U CN 202070281U CN 2011200718771 U CN2011200718771 U CN 2011200718771U CN 201120071877 U CN201120071877 U CN 201120071877U CN 202070281 U CN202070281 U CN 202070281U
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- hydrochloric acid
- pipeline
- tail gas
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- heat exchanger
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- 238000011084 recovery Methods 0.000 title claims abstract description 82
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 238000000746 purification Methods 0.000 title abstract description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 332
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 53
- 239000005046 Chlorosilane Substances 0.000 claims abstract description 27
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims abstract description 27
- 230000008676 import Effects 0.000 claims description 44
- 238000004140 cleaning Methods 0.000 claims description 39
- 239000000243 solution Substances 0.000 claims description 39
- 238000004064 recycling Methods 0.000 claims description 38
- 229920005591 polysilicon Polymers 0.000 claims description 26
- 239000003513 alkali Substances 0.000 claims description 19
- 238000005406 washing Methods 0.000 claims description 16
- 239000002826 coolant Substances 0.000 claims description 11
- 238000007710 freezing Methods 0.000 claims description 7
- 230000008014 freezing Effects 0.000 claims description 7
- 239000012266 salt solution Substances 0.000 claims description 4
- 239000006096 absorbing agent Substances 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 238000006386 neutralization reaction Methods 0.000 abstract description 4
- 239000006227 byproduct Substances 0.000 abstract description 2
- 239000006229 carbon black Substances 0.000 abstract 2
- 235000011167 hydrochloric acid Nutrition 0.000 description 114
- 239000007789 gas Substances 0.000 description 90
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 11
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 11
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 4
- 239000005052 trichlorosilane Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000084 colloidal system Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000004480 active ingredient Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 235000012241 calcium silicate Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
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- Treating Waste Gases (AREA)
- Silicon Compounds (AREA)
Abstract
The utility model relates to a tail gas recovery and purification treatment device for a polycrystalline silicon production line, which comprises a chlorosilane recovering device, a hydrochloric acid and white carbon black recovering device and a tail gas purification device in sequential connection. The tail gas recovery and purification treatment device also comprises an electric control unit for controlling the work of each device. The tail gas recovery and purification treatment device for the polycrystalline silicon production line has the advantages that the chlorosilane in the tail gas is recovered through condensing, recovery and neutralization, byproducts of hydrochloric acid and white carbon black are produced, and the goals of standard exhaust of the tail gas and no pollution are reached.
Description
Technical field
The utility model relates to the device for recovering tail gas technical field, and especially a kind of production of polysilicon line tail gas recycle purifying processing device is applicable to polysilicon industry and HCl tail gas recycle industry.
Background technology
Producing polysilicon is a purification process, and primary raw material is a trichlorosilane, carries out high temperature reduction one time with hydrogen again, has 25% trichlorosilane to be converted into polysilicon in this process approximately, remains a large amount of gases and enters exhaust emissions.In this process, if it is immature to reclaim technology, harmful substances such as trichlorosilane, tetrachloro hydrogen silicon, hydrogen chloride, hydrogen are very likely excessive, have great safety and pollution hidden trouble.Traditional polycrystalline silicon tail gas treatment method be water and alkali lye as absorbent, the polysilicon tail gas that contains chlorosilane is washed.Wherein the reaction of chlorosilane and water generates silica and hydrochloric acid, generates salt with alkali lye generation neutralization reaction again, and the tail gas after washing directly enters atmosphere.The major advantage of this technology is that equipment is simple, investment is little.Its shortcoming is to pollute very seriously, consumes a large amount of alkali lye, and producing a large amount of calcium silicates solid slags and high salinity waste water needs further to handle, otherwise will cause the serious environmental pollution problem.Simultaneously hydrogen easily is adsorbed on the solid phase hydration silica surface, has stoped growing up of hydrated SiO 2 nucleus, thereby forms colloid, causes the salt crust blockage problem easily after entering sewage network.Effective ingredient SiHCl in the tail gas
3, all emptyings such as HCl, a large amount of resources is by serious waste.Need a kind ofly tail gas " be turned waste into wealth " retracting device that recycles.
The utility model content
The technical problems to be solved in the utility model is: overcome the deficiency in the prior art, a kind of production of polysilicon line tail gas recycle purifying processing device be provided, can reclaim active ingredient in the tail gas, realize pollution-free, zero-emission.
The technical scheme that its technical problem that solves the utility model adopts is: a kind of production of polysilicon line tail gas recycle purifying processing device, comprise the chlorosilane retracting device, hydrochloric acid and white carbon retracting device and the exhaust gas cleaner that connect successively, comprise that also control respectively installs the electric control unit of work
Described chlorosilane retracting device comprises condensing unit and chlorosilane recycling can, the gas feed pipeline of condensing unit connects the outlet of production line tail gas, the condensed fluid export pipeline of condensing unit connects the chlorosilane recycling can, makes trichlorosilane and dichloro-dihydro silicon in the tail gas be transformed into liquid back inflow chlorosilane recycling can by condensation;
Described hydrochloric acid and white carbon retracting device comprise the hydrochloric acid recovery tower, the hydrochloric acid circulatory pool, the hydrochloric acid recycling can, the ultrasonic wave circulating slot, white carbon lautertuns and white carbon recycling can, the gas feed pipeline of hydrochloric acid recovery tower connects the gas vent of described condensing unit, the washing liquor exhaust pipe road of hydrochloric acid recovery tower connects the import of ultrasonic wave circulating slot, the export pipeline of ultrasonic wave circulating slot connects the import of white carbon lautertuns, the white carbon export pipeline of white carbon lautertuns connects the white carbon recycling can, the hydrochloric acid outlet pipeline of white carbon lautertuns connects the import of hydrochloric acid circulatory pool, the hydrochloric acid outlet pipeline of hydrochloric acid circulatory pool connects the cleaning solution import of hydrochloric acid recycling can and hydrochloric acid recovery tower respectively, the cleaning solution that sprays out in the hydrochloric acid recovery tower fully contacts with tail gas, hydrogen chloride and silica enter the ultrasonic wave circulating slot after dissolving in cleaning solution, the ultrasonic wave circulating slot can destroy colloid, and hydrated SiO 2 is fully precipitated;
Described exhaust gas cleaner comprises tail gas clean-up tower and alkali lye circulatory pool, the gas feed pipeline of tail gas clean-up tower connects the gas vent of described hydrochloric acid recovery tower, the cleaning solution inlet ductwork of tail gas clean-up tower connects the cleaning solution outlet of alkali lye circulatory pool, the washing liquor exhaust pipe road of tail gas clean-up tower connects the cleaning solution import of alkali lye circulatory pool, remaining hydrogen chloride enters the tail gas clean-up tower, go down except that hydrogen chloride in the washing of alkali lye, make tail gas reach discharge standard.
For fully removing the chlorosilane in the tail gas, described condensing unit comprises the first-class heat exchanger and the secondary heat exchanger of series connection successively, also be provided with freezing unit and compressor that cooling medium is provided for first-class heat exchanger and secondary heat exchanger, the gas feed pipeline of first-class heat exchanger connects the outlet of production line tail gas, the gas vent pipeline of first-class heat exchanger connects the gas feed of secondary heat exchanger, the gas vent pipeline of secondary heat exchanger connects the hydrochloric acid recovery tower, and the condensate outlet pipeline of first-class heat exchanger and secondary heat exchanger is connected the chlorosilane recycling can.
Preferred heat transmission equipment and cooling medium, described first-class heat exchanger and secondary heat exchanger are tubular heat exchanger, and the cooling medium of described first-class heat exchanger is a cryogenic freezing salt solution, and the cooling medium of described secondary heat exchanger is R404 or R507 cold-producing medium.
For fully reclaiming the hydrogen chloride in the tail gas, described hydrochloric acid recovery tower comprises a grade hydrochloric acid recovery tower and the two grade hydrochloric acid recovery towers of series connection successively, the gas vent pipeline of one grade hydrochloric acid recovery tower connects the gas feed of two grade hydrochloric acid recovery towers, the gas vent pipeline of two grade hydrochloric acid recovery towers connects the gas feed of tail gas clean-up tower, and the washing liquor exhaust pipe road of a grade hydrochloric acid recovery tower connects the import of ultrasonic wave circulating slot.
Described hydrochloric acid circulatory pool quantity is two, be respectively a grade hydrochloric acid circulatory pool corresponding with a grade hydrochloric acid recovery tower, the two grade hydrochloric acid circulatory pools corresponding with two grade hydrochloric acid recovery towers, connect the import of a grade hydrochloric acid circulatory pool behind the export pipeline process white carbon lautertuns of ultrasonic wave circulating slot, the export pipeline of one grade hydrochloric acid circulatory pool connects the cleaning solution import of a hydrochloric acid recycling can and a grade hydrochloric acid recovery tower, the washing liquor exhaust pipe road of two grade hydrochloric acid recovery towers connects the import of two grade hydrochloric acid circulatory pools, and the export pipeline of two grade hydrochloric acid circulatory pools connects the cleaning solution import of a grade hydrochloric acid circulatory pool and two grade hydrochloric acid recovery towers respectively.
Work for convenient each device of control, have first delivery pump and first electromagnetic switch valve on the pipeline between described white carbon lautertuns and the white carbon recycling can, have second delivery pump and second electromagnetic switch valve on the pipeline between described hydrochloric acid circulatory pool and the hydrochloric acid recycling can.
Interrupt for preventing that the circulating pump fault from causing producing, the first group of standby each other circulating pump that has two parallel connections on the cleaning solution import of described hydrochloric acid recovery tower and the pipeline between the hydrochloric acid circulatory pool has second group of standby each other circulating pump of two parallel connections on the cleaning solution import of described tail gas clean-up tower and the pipeline between the alkali lye circulatory pool.
Interrupt for preventing that the circulating pump fault from causing producing, the 3rd group of standby each other circulating pump that has two parallel connections on the pipeline between the cleaning solution import of a described grade hydrochloric acid recovery tower and the grade hydrochloric acid circulatory pool, the 4th group of standby each other circulating pump that has two parallel connections on the pipeline between the cleaning solution import of two grade hydrochloric acid recovery towers and the two grade hydrochloric acid circulatory pools has the standby each other negative-pressure air fan of two parallel connections on the pipeline between the gas vent of described two grade hydrochloric acid recovery towers and the gas feed of tail gas clean-up tower.
For ease of the management of each group circulating pump, prevent that cleaning solution from refluxing, the described circulating pump rear and front end of respectively organizing in the circulating pump is respectively equipped with electromagnetic switch valve, has check valve near on the pipeline of each device end.
The beneficial effects of the utility model are, production of polysilicon line tail gas recycle purifying processing device of the present utility model reclaims the chlorosilane that has higher economic worth in the tail gas by condensation, recovery and neutralization, produces by-product hydrochloric acid and white carbon, make exhaust emissions up to standard, pollution-free.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is the process chart of production of polysilicon line tail gas recycle purifying processing device of the present utility model;
Fig. 2 is the process flow diagram of first embodiment of production of polysilicon line tail gas recycle purifying processing device of the present utility model;
Fig. 3 is the process flow diagram of second embodiment of production of polysilicon line tail gas recycle purifying processing device of the present utility model;
Fig. 4 is the process flow diagram of second embodiment of production of polysilicon line tail gas recycle purifying processing device of the present utility model.
Among the figure: 1. chlorosilane retracting device, 1-1. condensing unit, 1-2. the chlorosilane recycling can, 1-11. first-class heat exchanger, 1-12. secondary heat exchanger, 2. hydrochloric acid and white carbon retracting device, 2-1. the hydrochloric acid recovery tower, 2-2. hydrochloric acid circulatory pool, 2-3. hydrochloric acid recycling can, 2-4. ultrasonic wave circulating slot, 2-5. the white carbon lautertuns, 2-6. white carbon recycling can, 2-11. one grade hydrochloric acid recovery tower, 2-12. two grade hydrochloric acid recovery towers, 2-21. a grade hydrochloric acid circulatory pool, 2-22. two grade hydrochloric acid circulatory pool, 3. exhaust gas cleaners, 3-1. tail gas absorber, 3-2. alkali lye circulatory pool.
The specific embodiment
In conjunction with the accompanying drawings the utility model is described in further detail now.These accompanying drawings are the schematic diagram of simplification, basic structure of the present utility model only is described in a schematic way, so it only show the formation relevant with the utility model.
Shown in Figure 2 as Fig. 1, first embodiment of production of polysilicon line tail gas recycle purifying processing device of the present utility model, comprise successively chlorosilane retracting device 1, hydrochloric acid and the white carbon retracting device 2 and the exhaust gas cleaner 3 that connect, comprise that also control respectively installs the electric control unit of work
Hydrochloric acid and white carbon retracting device 2 comprise hydrochloric acid recovery tower 2-1, hydrochloric acid circulatory pool 2-2, hydrochloric acid recycling can 2-3, ultrasonic wave circulating slot 2-4, white carbon lautertuns 2-5 and white carbon recycling can 2-6, the gas feed pipeline of hydrochloric acid recovery tower 2-1 connects the gas vent of condensing unit 1-1, the washing liquor exhaust pipe road of hydrochloric acid recovery tower 2-1 connects the import of ultrasonic wave circulating slot 2-4, the outlet of ultrasonic wave circulating slot 2-4 connects the import of white carbon lautertuns 2-5, the white carbon export pipeline of white carbon lautertuns 2-5 connects white carbon recycling can 2-6, the hydrochloric acid outlet pipeline of white carbon lautertuns 2-5 connects the import of hydrochloric acid circulatory pool 2-2, and the hydrochloric acid outlet difference pipeline of hydrochloric acid circulatory pool 2-2 connects the cleaning solution import of hydrochloric acid recycling can 2-3 and hydrochloric acid recovery tower 2-1;
Have first delivery pump and first electromagnetic switch valve on the pipeline between white carbon lautertuns 2-5 and the white carbon recycling can 2-6, have second delivery pump and second electromagnetic switch valve on the pipeline between hydrochloric acid circulatory pool 2-2 and the hydrochloric acid recycling can 2-3, the first group of standby each other circulating pump that has two parallel connections on the pipeline between the cleaning solution import of hydrochloric acid recovery tower 2-1 and the hydrochloric acid circulatory pool 2-2 has second group of standby each other circulating pump of two parallel connections on the pipeline between the cleaning solution import of tail gas clean-up tower 3-1 and the alkali lye circulatory pool 3-2.
Each circulating pump rear and front end of organizing in the circulating pump is respectively equipped with electromagnetic switch valve, has check valve near on the pipeline of each device end.
Shown in Figure 4 as Fig. 3, second embodiment of production of polysilicon line tail gas recycle purifying processing device of the present utility model, the distinguishing characteristics of second embodiment and first embodiment is:
Condensing unit 1-1 comprises the first-class heat exchanger 1-11 and the secondary heat exchanger 1-12 of series connection successively, also be provided with freezing unit and compressor that cooling medium is provided for first-class heat exchanger 1-11 and secondary heat exchanger 1-12, the gas feed pipeline of first-class heat exchanger 1-11 connects the outlet of production line tail gas, the gas vent pipeline of first-class heat exchanger 1-11 connects the gas feed of secondary heat exchanger 1-12, the gas vent pipeline of secondary heat exchanger 1-12 connects hydrochloric acid recovery tower 2-1, and the condensate outlet pipeline of first-class heat exchanger 1-11 and secondary heat exchanger 1-12 is connected chlorosilane recycling can 1-2.
First-class heat exchanger 1-11 and secondary heat exchanger 1-12 are tubular heat exchanger, and the cooling medium of first-class heat exchanger 1-11 is a cryogenic freezing salt solution, and the cooling medium of secondary heat exchanger 1-12 is R404 or R507 cold-producing medium.
Hydrochloric acid recovery tower 2-1 comprises a grade hydrochloric acid recovery tower 2-11 and the two grade hydrochloric acid recovery tower 2-12 of series connection successively, the gas vent pipeline of one grade hydrochloric acid recovery tower 2-11 connects the gas feed of two grade hydrochloric acid recovery tower 2-12, the gas vent pipeline of two grade hydrochloric acid recovery tower 2-12 connects the gas feed of tail gas clean-up tower 3-1, and the washing liquor exhaust pipe road of a grade hydrochloric acid recovery tower 2-11 connects the import of ultrasonic wave circulating slot 2-4.
Hydrochloric acid circulatory pool 2-2 quantity is two, be respectively a grade hydrochloric acid circulatory pool 2-21 corresponding with a grade hydrochloric acid recovery tower 2-11, the two grade hydrochloric acid circulatory pool 2-22s corresponding with two grade hydrochloric acid recovery tower 2-12, the hydrochloric acid outlet pipeline of ultrasonic wave circulating slot 2-4 connects the import of a grade hydrochloric acid circulatory pool 2-21 behind white carbon lautertuns 2-5, the export pipeline of one grade hydrochloric acid circulatory pool 2-21 connects the cleaning solution import of a hydrochloric acid recycling can 2-3 and a grade hydrochloric acid recovery tower 2-11, the washing liquor exhaust pipe road of two grade hydrochloric acid recovery tower 2-12 connects the import of two grade hydrochloric acid circulatory pool 2-22, and the outlet of two grade hydrochloric acid circulatory pool 2-22 pipeline respectively connects the cleaning solution import of a grade hydrochloric acid circulatory pool 2-21 and two grade hydrochloric acid recovery tower 2-12.
Have first delivery pump and first electromagnetic switch valve on the pipeline between white carbon lautertuns 2-5 and the white carbon recycling can 2-6, have second delivery pump and second electromagnetic switch valve on the pipeline between hydrochloric acid circulatory pool 2-2 and the hydrochloric acid recycling can 2-3, the first group of standby each other circulating pump that has two parallel connections on the pipeline between the cleaning solution import of hydrochloric acid recovery tower 2-1 and the hydrochloric acid circulatory pool 2-2 has second group of standby each other circulating pump of two parallel connections on the pipeline between the cleaning solution import of tail gas clean-up tower 3-1 and the alkali lye circulatory pool 3-2.
The 3rd group of standby each other circulating pump that has two parallel connections on the pipeline between the cleaning solution import of one grade hydrochloric acid recovery tower 2-11 and the grade hydrochloric acid circulatory pool 2-21, the 4th group of standby each other circulating pump that has two parallel connections on the pipeline between the cleaning solution import of two grade hydrochloric acid recovery tower 2-12 and the two grade hydrochloric acid circulatory pool 2-22 has the standby each other negative-pressure air fan of two parallel connections on the pipeline between the gas vent of two grade hydrochloric acid recovery tower 2-12 and the tail gas absorber 3-1 gas feed.
Each circulating pump rear and front end of organizing in the circulating pump is respectively equipped with electromagnetic switch valve, has check valve near on the pipeline of each device end.
The utility model is applicable to the vent gas treatment of industries such as polysilicon industry, HCl tail gas recycle, reclaims after going out chlorosilane by condensing unit 1-1 condensation separation; Tail gas when the hydrochloric acid recovery tower 2-1 with cleaning solution generation hydrolysis generation hydrochloric acid, enter ultrasonic wave circulating slot 2-4 with cleaning solution, by first delivery pump pressurization input white carbon recycling can, hydrochloric acid recycling can 2-3 was imported in the pressurization of second delivery pump to a small amount of silica in the cleaning solution after the hydrochloric acid among the hydrochloric acid circulatory pool 2-2 reached finite concentration through the filtration back; The a small amount of hydrogen chloride gas that does not the react completely tail gas clean-up tower of entering, all dissolving residues hydrogen chloride and neutralization under the washing of alkali lye, thus reach exhaust emission standard.
Adopt condensed in two stages among second embodiment, the chlorosilane in the abundant cooled exhaust gas, the rate of recovery of chlorosilane reaches 90%; Adopt two grade hydrochloric acids to reclaim, the cleaning solution shunting part of two grade hydrochloric acid recovery tower 2-12 participates in the washing process of a grade hydrochloric acid recovery tower 2-11, can significantly increase recovery of hydrogen chloride efficient, and the salt acid recovering rate reaches 95%, by behind the exhaust gas cleaner 3, the tail gas absorptivity is greater than 98% at last.
Claims (9)
1. production of polysilicon line tail gas recycle purifying processing device, it is characterized in that: comprise chlorosilane retracting device (1), hydrochloric acid and the white carbon retracting device (2) and the exhaust gas cleaner (3) that connect successively, comprise that also control respectively installs the electric control unit of work
Described chlorosilane retracting device (1) comprises condensing unit (1-1) and chlorosilane recycling can (1-2), the gas feed pipeline of condensing unit (1-1) connects the outlet of production line tail gas, and the condensed fluid export pipeline of condensing unit (1-1) connects chlorosilane recycling can (1-2);
Described hydrochloric acid and white carbon retracting device (2) comprise hydrochloric acid recovery tower (2-1), hydrochloric acid circulatory pool (2-2), hydrochloric acid recycling can (2-3), ultrasonic wave circulating slot (2-4), white carbon lautertuns (2-5) and white carbon recycling can (2-6), the gas feed pipeline of hydrochloric acid recovery tower (2-1) connects the gas vent of described condensing unit (1-1), the washing liquor exhaust pipe road of hydrochloric acid recovery tower (2-1) connects the import of ultrasonic wave circulating slot (2-4), the outlet of ultrasonic wave circulating slot (2-4) is connected to the import of white carbon lautertuns (2-5), the white carbon export pipeline of white carbon lautertuns (2-5) connects white carbon recycling can (2-6), the hydrochloric acid outlet of white carbon lautertuns (2-5) is connected to the import of hydrochloric acid circulatory pool (2-2), and the hydrochloric acid outlet pipeline of hydrochloric acid circulatory pool (2-2) connects the cleaning solution import of hydrochloric acid recycling can (2-3) and hydrochloric acid recovery tower (2-1) respectively;
Described exhaust gas cleaner (3) comprises tail gas clean-up tower (3-1) and alkali lye circulatory pool (3-2), the gas feed pipeline of tail gas clean-up tower (3-1) connects the gas vent of described hydrochloric acid recovery tower (2-1), the cleaning solution inlet ductwork of tail gas clean-up tower (3-1) connects the cleaning solution outlet of alkali lye circulatory pool (3-2), and the washing liquor exhaust pipe road of tail gas clean-up tower (3-1) connects the cleaning solution import of alkali lye circulatory pool (3-2).
2. production of polysilicon line tail gas recycle purifying processing device as claimed in claim 1, it is characterized in that: described condensing unit (1-1) comprises the first-class heat exchanger (1-11) and the secondary heat exchanger (1-12) of series connection successively, also be provided with freezing unit and compressor that cooling medium is provided for first-class heat exchanger (1-11) and secondary heat exchanger (1-12), the gas feed pipeline of first-class heat exchanger (1-11) connects the outlet of production of polysilicon line tail gas, the gas vent pipeline of first-class heat exchanger (1-11) connects the gas feed of secondary heat exchanger (1-12), the gas vent pipeline of secondary heat exchanger (1-12) connects hydrochloric acid recovery tower (2-1), and the condensate outlet pipeline of first-class heat exchanger (1-11) and secondary heat exchanger (1-12) is connected chlorosilane recycling can (1-2).
3. production of polysilicon line tail gas recycle purifying processing device as claimed in claim 2, it is characterized in that: described first-class heat exchanger (1-11) and secondary heat exchanger (1-12) are tubular heat exchanger, the cooling medium of described first-class heat exchanger (1-11) is a cryogenic freezing salt solution, and the cooling medium of described secondary heat exchanger (1-12) is R404 or R507 cold-producing medium.
4. production of polysilicon line tail gas recycle purifying processing device as claimed in claim 1, it is characterized in that: described hydrochloric acid recovery tower (2-1) comprises a grade hydrochloric acid recovery tower (2-11) and the two grade hydrochloric acid recovery towers (2-12) of series connection successively, the gas vent pipeline of one grade hydrochloric acid recovery tower (2-11) connects the gas feed of two grade hydrochloric acid recovery towers (2-12), the gas vent pipeline of two grade hydrochloric acid recovery towers (2-12) connects the gas feed of tail gas clean-up tower (3-1), and the washing liquor exhaust pipe road of a grade hydrochloric acid recovery tower (2-11) connects the import of ultrasonic wave circulating slot (2-4).
5. production of polysilicon line tail gas recycle purifying processing device as claimed in claim 4, it is characterized in that: described hydrochloric acid circulatory pool (2-2) quantity is two, be respectively a grade hydrochloric acid circulatory pool (2-21) corresponding with a grade hydrochloric acid recovery tower (2-11), the two grade hydrochloric acid circulatory pools (2-22) corresponding with two grade hydrochloric acid recovery towers (2-12), the export pipeline of ultrasonic wave circulating slot (2-4) connects the import of a grade hydrochloric acid circulatory pool (2-21) by white carbon lautertuns (2-5) back, the export pipeline of one grade hydrochloric acid circulatory pool (2-21) connects the cleaning solution import of a hydrochloric acid recycling can (2-3) and a grade hydrochloric acid recovery tower (2-11), the washing liquor exhaust pipe road of two grade hydrochloric acid recovery towers (2-12) connects the import of two grade hydrochloric acid circulatory pools (2-22), and the export pipeline of two grade hydrochloric acid circulatory pools (2-22) connects the cleaning solution import of a grade hydrochloric acid circulatory pool (2-21) and two grade hydrochloric acid recovery towers (2-12) respectively.
6. production of polysilicon line tail gas recycle purifying processing device as claimed in claim 1, it is characterized in that: have first delivery pump and first electromagnetic switch valve on the pipeline between described white carbon lautertuns (2-5) and the white carbon recycling can (2-6), have second delivery pump and second electromagnetic switch valve on the pipeline between described hydrochloric acid circulatory pool (2-2) and the hydrochloric acid recycling can (2-3).
7. production of polysilicon line tail gas recycle purifying processing device as claimed in claim 1, it is characterized in that: have first group of standby each other circulating pump of two parallel connections on the pipeline between the cleaning solution import of described hydrochloric acid recovery tower (2-1) and the hydrochloric acid circulatory pool (2-2), have second group of standby each other circulating pump of two parallel connections on the pipeline between the cleaning solution import of described tail gas clean-up tower (3-1) and the alkali lye circulatory pool (3-2).
8. production of polysilicon line tail gas recycle purifying processing device as claimed in claim 5, it is characterized in that: the 3rd group of standby each other circulating pump that has two parallel connections on the pipeline between the cleaning solution import of a described grade hydrochloric acid recovery tower (2-11) and the grade hydrochloric acid circulatory pool (2-21), the 4th group of standby each other circulating pump that has two parallel connections on the pipeline between the cleaning solution import of two grade hydrochloric acid recovery towers (2-12) and the two grade hydrochloric acid circulatory pools (2-22) has the standby each other negative-pressure air fan of two parallel connections on the pipeline between the gas vent of described two grade hydrochloric acid recovery towers (2-12) and tail gas absorber (3-1) gas feed.
9. as claim 7 or 8 described production of polysilicon line tail gas recycle purifying processing devices, it is characterized in that: the described circulating pump rear and front end of respectively organizing in the circulating pump is respectively equipped with electromagnetic switch valve, has check valve near on the pipeline of each device end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200718771U CN202070281U (en) | 2011-03-14 | 2011-03-14 | Tail gas recovery and purification treatment device for polycrystalline silicon production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200718771U CN202070281U (en) | 2011-03-14 | 2011-03-14 | Tail gas recovery and purification treatment device for polycrystalline silicon production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202070281U true CN202070281U (en) | 2011-12-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200718771U Expired - Lifetime CN202070281U (en) | 2011-03-14 | 2011-03-14 | Tail gas recovery and purification treatment device for polycrystalline silicon production line |
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| CN (1) | CN202070281U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102160962A (en) * | 2011-03-14 | 2011-08-24 | 蒋超 | Tail gas recovering and purifying treatment device for polycrystalline production line |
| CN105036141A (en) * | 2015-08-03 | 2015-11-11 | 昆明理工大学 | Method for producing nanosilicon dioxide and by-product hydrochloric acid through chlorosilane waste gas |
| CN108837662A (en) * | 2018-08-13 | 2018-11-20 | 金能科技股份有限公司 | A kind of dry kiln gas of carbon black takes off white device and technique |
| CN109569262A (en) * | 2018-12-25 | 2019-04-05 | 亚洲硅业（青海）有限公司 | The method, apparatus and application of chlorosilane in a kind of removal polysilicon tail gas |
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2011
- 2011-03-14 CN CN2011200718771U patent/CN202070281U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102160962A (en) * | 2011-03-14 | 2011-08-24 | 蒋超 | Tail gas recovering and purifying treatment device for polycrystalline production line |
| CN102160962B (en) * | 2011-03-14 | 2013-03-20 | 蒋超 | Tail gas recovering and purifying treatment device for polycrystalline production line |
| CN105036141A (en) * | 2015-08-03 | 2015-11-11 | 昆明理工大学 | Method for producing nanosilicon dioxide and by-product hydrochloric acid through chlorosilane waste gas |
| CN108837662A (en) * | 2018-08-13 | 2018-11-20 | 金能科技股份有限公司 | A kind of dry kiln gas of carbon black takes off white device and technique |
| CN108837662B (en) * | 2018-08-13 | 2024-05-28 | 金能化学(青岛)有限公司 | Carbon black drying furnace flue gas whitening device and process |
| CN109569262A (en) * | 2018-12-25 | 2019-04-05 | 亚洲硅业（青海）有限公司 | The method, apparatus and application of chlorosilane in a kind of removal polysilicon tail gas |
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| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: JIANGSU HONGYUAN FRP EQUIPMENT CO., LTD. Assignor: Jiang Chao Contract record no.: 2012320000058 Denomination of utility model: Tail gas recovering and purifying treatment device for polycrystalline production line Granted publication date: 20111214 License type: Exclusive License Record date: 20120209 |
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Owner name: JIANGSU HONGYUAN FRP EQUIPMENT CO., LTD. Free format text: FORMER OWNER: JIANG CHAO Effective date: 20120308 |
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Effective date of registration: 20120308 Address after: 213175 Changzhou District, Jiangsu City, Wujin Province town of Cao Yun Village Post Office Xijiang Su Hongyuan glass fiber reinforced plastic Co., Ltd. Patentee after: JIANGSU HONGYUAN FRP EQUIPMENT CO., LTD. Address before: 213175, No. 1, Dahe head, Tan Town, Wujin District, Jiangsu, Changzhou Patentee before: Jiang Chao |
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