CN202054891U - Transmission device for vacuum sputtering - Google Patents
Transmission device for vacuum sputtering Download PDFInfo
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- CN202054891U CN202054891U CN2011200920320U CN201120092032U CN202054891U CN 202054891 U CN202054891 U CN 202054891U CN 2011200920320 U CN2011200920320 U CN 2011200920320U CN 201120092032 U CN201120092032 U CN 201120092032U CN 202054891 U CN202054891 U CN 202054891U
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- transmission
- spiral wheel
- spiral
- transmission device
- thrust
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Abstract
The utility model relates to a transmission device, in particular to a transmission device for vacuum sputtering. The transmission device comprises a main body, a plurality of shaft holes, a plurality of guide wheels, shaft levers, first spiral gears, thrust fixed seats, transmission mandrels and second spiral gears, wherein the shaft holes are formed on the main body; the shaft levers penetrating the main body are arranged in the shaft holes; the guide wheels are respectively sleeved at one end of each shaft lever; the first spiral gears are sleeved at the other ends of the shaft levers; the thrust fixed seats are arranged among the first spiral gear through thrust shafts and rolling bearings, and are positioned on the same plane with the first spiral gears; the transmission mandrels are arranged among the thrust fixed seats; and the second spiral gears are arranged on the transmission mandrels and meshed with the first spiral gears. In the transmission device, the spiral gears replace a belt, so that the transmission device has long service life, the sputtering quality is improved, and the production efficiency is also improved.
Description
Technical field:
The utility model relates to a kind of transmission mechanism, relates in particular to a kind of transmission mechanism that is used for vacuum splashing and plating.
Background technology:
The vacuum splashing and plating technology is application important technology quite widely in the vacuum thin film manufacture process, has replaced the mode that lacquer and metallide are led in spray in recent years gradually, widely applies at photoelectricity, communicates by letter, and industries such as semi-conductor become important process for treating surface.
Generally at the vacuum sputtering apparatus that uses the continous way transmission, be with the neat fixed discharge of base material on standardized carrier, drive by transmission rig, each chamber that is transported to that carrier is smooth-going carries out sputter.Transmission rig in vacuum sputtering apparatus is to use the belt transmission at present, still, in the partial hot environment of vacuum sputtering apparatus cavity, when temperature is spent the left and right sides up to 200, causes the loss of belt easily.In addition, the length of belt has the restriction of specification, and therefore the position of associated mechanisms must just be limited by the strap length specification in design according to the length specification design of belt, causes the inconvenience on the mechanism design.
The utility model content:
The purpose of this utility model provides a kind of transmission mechanism that is used for vacuum splashing and plating, and it replaces belt by spiral wheel is set, thereby makes the selection of mechanism design more free, and the work-ing life of having improved machine.
In order to solve the existing problem of background technology, the utility model is by the following technical solutions: it comprises main body, axis hole, guide wheel, axostylus axostyle, first spiral wheel, the thrust permanent seat, the transmission spindle and second spiral wheel, main body is provided with a plurality of axis holes, be provided with the axostylus axostyle that runs through main body in the axis hole, a plurality of guide wheels are socketed in an end of each axostylus axostyle respectively, first spiral wheel is socketed in the other end of axostylus axostyle, the thrust permanent seat is arranged between first spiral wheel by thrust shaft and rolling bearing, and with first spiral wheel in same plane, transmission spindle is located between the thrust permanent seat, second spiral wheel is arranged on the transmission spindle, and is meshed with first spiral wheel.
Described transmission spindle is provided with a plurality of pieces of tightening, and tightens piece and keeps thrust bearing, rolling bearing and second spiral wheel not influenced by side force.
Thrust permanent seat in the utility model is passed strength in order to bear the side direction that produces when this transmission spindle is rotated, and makes this thrust permanent seat this transmission spindle can be defined in the original position rotation.The propulsion source of this transmission mechanism is a motor, and is connected in this transmission spindle or first spiral wheel with a shaft joint, to provide power wheel drive this transmission mechanism; First spiral wheel is to adopt to have high temperature resistantly, and the high molecular polymer of abrasion resistant qualities is as its material; The material of second spiral wheel is the synthetic metal with heat-resisting and high-strength characteristic, so they are suitable in the hot environment of vacuum splashing and plating and the transmission process continuous operation of number when high.
The utility model is to have replaced belt and improve with belt as the shortcoming that transmission rig was caused with spiral wheel, and therefore, prolong the work-ing life of vacuum splashing and plating processing procedure transmission mechanism, and the sputter quality improves, and production efficiency also promotes thereupon.
Description of drawings:
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the structural representation of embodiment one;
Fig. 3 is the structural representation of embodiment two.
Embodiment:
With reference to Fig. 1, this embodiment is by the following technical solutions: it comprises main body 11, axis hole 111, guide wheel 12, axostylus axostyle 13, first spiral wheel 14, thrust permanent seat 15, the transmission spindle 16 and second spiral wheel 17, main body 11 is provided with a plurality of axis holes 111, be provided with the axostylus axostyle 13 that runs through main body 11 in the axis hole 111, a plurality of guide wheels 12 are socketed in an end of each axostylus axostyle 13 respectively, first spiral wheel 14 is socketed in the other end of axostylus axostyle 13, thrust permanent seat 15 is arranged between first spiral wheel 14 by thrust shaft and rolling bearing, and with first spiral wheel 14 in same plane, transmission spindle 16 is located between the thrust permanent seat 15, second spiral wheel 17 is arranged on the transmission spindle 16, and is meshed with first spiral wheel 14.
Described transmission spindle 16 is provided with a plurality of pieces 18 of tightening, and tightens piece 18 and keeps thrust bearing, rolling bearing and second spiral wheel 17 not influenced by side force.
Thrust permanent seat 15 in this embodiment is passed strength in order to bear the side direction that produces when this transmission spindle 16 is rotated, and makes thrust permanent seat 15 this transmission spindle 16 can be defined in the original position rotation.The propulsion source of this transmission mechanism is a motor, and is connected in this transmission spindle 16 or first spiral wheel 14 with a shaft joint 3, to provide power wheel drive this transmission mechanism 1; First spiral wheel 14 is to adopt to have high temperature resistantly, and the high molecular polymer of abrasion resistant qualities is as its material; The material of second spiral wheel 17 is the synthetic metals with heat-resisting and high-strength characteristic, so they are suitable in the hot environment of vacuum splashing and plating and the transmission process continuous operation of number when high.
This embodiment is to have replaced belt and improve with belt as the shortcoming that transmission rig was caused with spiral wheel, and therefore, prolong the work-ing life of vacuum splashing and plating processing procedure transmission mechanism, and the sputter quality improves, and production efficiency also promotes thereupon.
Embodiment one: with reference to Fig. 2, present embodiment is to adopt the collocation of two groups of transmission mechanisms to carry out the transmission of workpiece load plate in the vacuum splashing and plating processing procedure, motor 2 makes this transmission mechanism 1 running as propulsion source, motor 2 is to be connected in arbitrary first spiral wheel 14 with a shaft joint 3 in this example, after starting this motor 2 this first spiral wheel 14 of power wheel drive being provided, second spiral wheel 17 with these first spiral wheel, 14 engagements on this transmission spindle 16 also is driven, this transmission spindle 16 is rotation thereupon also, simultaneously, also be driven with first spiral wheel 14 of other second spiral wheel, 17 engagements, and then drive each guide wheel 12 and rotate, but so also the conveying workpieces load plate to carry out sputter.The design of this example is not only applicable to single board, is applicable to continuous board yet, and when two above boards connected, the installing of propulsion source can not be subject to the space; And as transmission rig, can increase and decrease the spiral wheel number with spiral wheel on demand, not have the restriction of strap length specification at the board design aspect.
Embodiment two: with reference to Fig. 3, present embodiment is connected in this motor 2 with a shaft joint 3 end of this transmission spindle 16, after starting this motor 2, this transmission spindle 16 promptly is activated and rotates, be arranged at the also rotation thereupon of a plurality of second spiral wheels 17 on this transmission spindle 16, simultaneously, also rotation thereupon of a plurality of second spiral wheels 17 with these second spiral wheel, 17 engagements, simultaneously, with a plurality of first spiral wheels 14 of this second spiral wheel 17 engagements thereby be driven, and then drive each guide wheel 12 and rotate and carry out sputter with the conveying work pieces load plate.
Claims (4)
1. the transmission mechanism that is used for vacuum splashing and plating, it is characterized in that it comprises main body (11), axis hole (111), guide wheel (12), axostylus axostyle (13), first spiral wheel (14), thrust permanent seat (15), transmission spindle (16) and second spiral wheel (17), main body (11) is provided with a plurality of axis holes (111), be provided with the axostylus axostyle (13) that runs through main body (11) in the axis hole (111), a plurality of guide wheels (12) are socketed in an end of each axostylus axostyle (13) respectively, first spiral wheel (14) is socketed in the other end of axostylus axostyle (13), thrust permanent seat (15) is arranged between first spiral wheel (14) by thrust shaft and rolling bearing, and with first spiral wheel (14) in same plane, transmission spindle (16) is located between the thrust permanent seat (15), second spiral wheel (17) is arranged on the transmission spindle (16), and is meshed with first spiral wheel (14).
2. the transmission mechanism that is used for vacuum splashing and plating according to claim 1 is characterized in that described transmission spindle (16) is provided with a plurality of pieces (18) of tightening.
3. the transmission mechanism that is used for vacuum splashing and plating according to claim 1 is characterized in that described first spiral wheel (14) links to each other with motor (2) by shaft coupling (3).
4. the transmission mechanism that is used for vacuum splashing and plating according to claim 1 is characterized in that described transmission spindle (16) links to each other with motor (2) by shaft coupling (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200920320U CN202054891U (en) | 2011-03-31 | 2011-03-31 | Transmission device for vacuum sputtering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200920320U CN202054891U (en) | 2011-03-31 | 2011-03-31 | Transmission device for vacuum sputtering |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202054891U true CN202054891U (en) | 2011-11-30 |
Family
ID=45014872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200920320U Expired - Fee Related CN202054891U (en) | 2011-03-31 | 2011-03-31 | Transmission device for vacuum sputtering |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202054891U (en) |
-
2011
- 2011-03-31 CN CN2011200920320U patent/CN202054891U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111130 Termination date: 20130331 |