CN202033004U - Laser beam focusing focal spot detecting device - Google Patents
Laser beam focusing focal spot detecting device Download PDFInfo
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- CN202033004U CN202033004U CN2011200581923U CN201120058192U CN202033004U CN 202033004 U CN202033004 U CN 202033004U CN 2011200581923 U CN2011200581923 U CN 2011200581923U CN 201120058192 U CN201120058192 U CN 201120058192U CN 202033004 U CN202033004 U CN 202033004U
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- laser beam
- splitting prism
- lens
- camera
- polarization splitting
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Abstract
The present utility model discloses a laser beam focusing focal spot detecting device which is used for detecting the focusing change of a laser beam on a workpiece after passing through an optical mechanism. Besides a baffle plate, a plano-convex cylindrical lens, a camera and a monitor, the device also comprises a laser, a polarization splitting prism, a quarter wave plate and an objective lens which are successively arranged and have centers on a first optical axis. The baffle plate is arranged between the polarization splitting prism and the laser, and a circular linear polarization laser beam is blocked to form a semicircular linear polarization laser beam by the baffle plate, the objective lens is in opposite with the workpiece, the centers of the polarization splitting prism, the plano-convex cylindrical lens and the lens surface of the camera are all arranged on a second optical axis which is orthogonal with the first optical axis, the convex surface of the plano-convex cylindrical lens is in opposite with the lens surface of the camera, and the monitor is connected with the camera and images are displayed by the monitor. The laser beam focusing focal spot detecting device is reasonable in structure, easy and simple to operate, high in precision and clear in imaging, and can intuitively display the position change of laser focal spots.
Description
Technical field
The utility model relates to a kind of light beam detection system, relates in particular to a kind of laser beam and focuses on the position of focal spot and the detection system of variation.
Background technology
Laser (Light Amplification by Stimulated Emission of Radiation, LASER) be modern new light sources, spread angle is little, brightness is high because of having, monochromaticity is good, can grow characteristics such as propagation is widely used, as laser ranging, laser drill and cutting, seismic monitoring, laser surgey, laser pickup etc.Simultaneously, the spatial control of laser and time are controlled fine, degree of freedom to material, shape, size and the processing environment of processing object is all very big, be applicable to robotization processing, laser-processing system combines with computer numerical control technology can constitute the high-efficient automatic process equipment, become enterprise and carried out the gordian technique of in good time producing, for high-quality, efficiently and processing cheaply opened up wide prospect.
In laser is used, particularly in the Laser Processing, need focus the laser beam to the desired position of technology usually.The variation of focal position surpasses the deviation that allows, and will influence crudy.Therefore, be detection laser light beam focus variations situation, multiple detection system and device are applied to monitoring beam focusing position to be changed, wherein a kind of scheme is by charge coupled cell (Charge-coupled Device, CCD) camera, by illuminator irradiating laser working position, and then the processing situation of laser beam at this position be imaged on the monitor, realize that laser beam focuses on the real-time monitoring of processing, another kind of scheme is by four-quadrant photo detector or photodiode, by detecting irradiation light signal thereon, utilize signal processing module, realize the quantitative measurment of focal length, some system is furnished with servo-actuating device, can realize automatic focusing.
Yet, though above-mentioned first kind of scheme system can be intuitively monitoring laser process in real time, but can't demonstrate the change in location that light beam focuses on focal spot, though the scheme system can be beneficial to signal processing module and arithmetical unit able to programme in second, detection by quantitative goes out to focus on the location variation of focal spot, carry out automatic focusing thereby drive servo control mechanism, but the change in location that focuses on focal spot can not be presented on the monitor intuitively.Therefore, be badly in need of a kind of easy and simple to handle, to adjust precision high and laser beam can be focused on laser beam that the change in location of focal spot shows intuitively and focus on the focal spot pick-up unit and satisfy the demands.
The utility model content
The purpose of this utility model be to provide a kind of rational in infrastructure, easy and simple to handle, to adjust precision high and laser beam can be focused on the laser beam that the change in location of focal spot shows intuitively and focus on the focal spot pick-up unit.
For achieving the above object, the technical solution of the utility model is: provide a kind of laser beam to focus on the focal spot pick-up unit, be used for the detection laser light beam by optical facilities after focus variations on workpiece, it comprises baffle plate, the plano-convex cylindrical lens, camera, monitor and the linear polarization laser instrument that is arranged in order and is arranged in parallel, polarization splitting prism, quarter-wave plate, to the thing lens, described linear polarization laser instrument, polarization splitting prism, quarter-wave plate reaches forming primary optic axis on the same straight line of being centered close to of thing lens, described linear polarization laser instrument produces parallel linear polarization laser beam, described linear polarization laser beam is rounded, described baffle plate is located between described polarization splitting prism and the described laser instrument and the linear polarization laser beam of described circle stopped becomes semicircular linear polarization laser beam, described to the thing lens over against described workpiece, described camera has minute surface, described polarization splitting prism, the minute surface of plano-convex cylindrical lens and camera is arranged in order and is arranged in parallel, described polarization splitting prism, being centered close to of the minute surface of plano-convex cylindrical lens and camera forms second optical axis on the same straight line, the described primary optic axis and second light shaft positive cross, the convex surface of described plano-convex cylindrical lens is over against the minute surface of described camera, and described monitor is connected with described camera and display image.
Preferably, also be provided with the beam expander that is used for the linear polarization laser beam is expanded bundle between described linear polarization laser instrument and the described polarization splitting prism, described baffle plate between described beam expander and described polarization splitting prism, being centered close on the described primary optic axis of described beam expander.Linear polarization laser from the linear polarization laser instrument sends by becoming the directional light that expands bundle behind the beam expander, has enlarged the cross-sectional area of laser beam.
Preferably, be provided with convex lens between described polarization splitting prism and the described plano-convex cylindrical lens, being centered close on second optical axis of described convex lens.By the setting of described convex lens, the laser beam that will reflect from workpiece is assembled, and improves laser beam by the plano-convex cylindrical lens brightness of image during imaging on camera, further improves image resolution ability and accuracy of detection.
Preferably, described polarization splitting prism synthesizes and is the square bodily form by two equilateral right angle prisms, the diagonal plane of described polarization splitting prism is provided with the polarization spectro diaphragm, described quarter-wave plate, thing lens, workpiece, plano-convex cylindrical lens, camera and monitor all is positioned at the same side of the diagonal plane of described polarization splitting prism.Described polarization splitting prism can make P linear polarization luminous energy pass through fully, and the S linearly polarized photon can not pass through, and can only be reflected on the diagonal plane of polarization splitting prism, shines the another kind of medium from a side of prism.
Compared with prior art, laser beam of the present utility model focuses on the focal spot pick-up unit and sends linear polarization laser by the linear polarization laser instrument, circular linear polarization laser beam is by behind the baffle plate, become semicircular linear polarization laser beam, pass through polarization splitting prism then, quarter-wave plate, the polarization direction of linear polarization laser will rotate 45 degree, become rotatory polarization, described parallel circularly polarized light passes through the thing lens focus to the surface of workpiece, reflect again, during by quarter-wave plate, the polarization direction is rotated 45 degree once more, after the polarization splitting prism place is reflected, incides on the plano-convex cylindrical lens, be imaged at last on the camera, can intuitively observe out laser beam focusing focal spot by the monitor that links to each other with camera and whether be positioned on the surface of workpiece.The utility model utilizes linear polarization laser to pass through quarter-wave plate rear polarizer direction generation 90 degree rotation change polarization directions for twice, again after polarization splitting prism reflection, plano-convex cylindrical lens focus, image in the mode on the camera, realized on monitor, intuitively demonstrating the change in location that laser beam focuses on focal spot, and change according to it and to adjust accordingly focusing on focal spot position, thereby make the focusing focal spot be positioned at the desired position of technology, adjust the precision height, easy and simple to handle.
Description of drawings
Fig. 1-the 3rd, the laser beam of the utility model embodiment focuses on the principle schematic of focal spot pick-up unit.
Fig. 4 a-4c is that the laser beam of the utility model embodiment focuses on the imaging synoptic diagram on the monitor of focal spot pick-up unit.
Embodiment
With reference now to accompanying drawing, describe embodiment of the present utility model, the similar elements label is represented similar elements in the accompanying drawing.As mentioned above, for the detection laser light beam by optical facilities after focus variations on workpiece, laser beam of the present utility model focuses on the focal spot pick-up unit and has adopted the CCD camera, and in light path, introduce a baffle plate, circular light spot is become semicircle hot spot, after optical facilities, the change in location that laser beam is focused on focal spot is presented on the monitor intuitively, by adjusting the thing lens are adjusted to desired position with focal spot position, adjust the precision height, easy and simple to handle.
Particularly, referring to figs. 1 to Fig. 3, the laser beam of the utility model embodiment focuses on the focal spot pick-up unit and comprises: baffle plate 3, plano-convex cylindrical lens 9, camera 10, monitor 11 and the linear polarization laser instrument 1 that is arranged in order and is arranged in parallel, polarization splitting prism 4, quarter-wave plate 5, to thing lens 6, described linear polarization laser instrument 1, polarization splitting prism 4, the quarter-wave plate 5 and center of thing lens 6 all is located along the same line forms primary optic axis C1, described linear polarization laser instrument 1 produces P linear polarization laser beam, described P linear polarization laser beam is rounded, described baffle plate 3 is located between described polarization splitting prism 4 and the described linear polarization laser instrument 1 and the P linear polarization laser beam of circle stopped becomes semicircular P linear polarization laser beam, described to thing lens 6 over against workpiece 7, described is convex lens to thing lens 6, have focussing force, laser beam is focused on the surface of workpiece 7.The effect of described polarization splitting prism 4 is that P linear polarization luminous energy is passed through fully, and the S linearly polarized photon can not pass through, can only on the diagonal plane of polarization splitting prism 4, be reflected, shine the another kind of medium from a side of prism, in the utility model is implemented, described polarization splitting prism 4 is the square bodily form and synthetic by two equilateral right angle prisms, its synthetic position forms the diagonal plane 41 of polarization splitting prism 4, these diagonal plane 41 places are provided with polarization beam splitter, described quarter-wave plate 5, to thing lens 6, workpiece 7, plano-convex cylindrical lens 9 and camera 10 all are positioned at the same side of the diagonal plane 41 of described polarization splitting prism 4.The polarization spectro principle of described polarization splitting prism 4 is known to those skilled in the art, so few detailed description the in detail.Described camera 10 has minute surface, the minute surface of described polarization splitting prism 4, plano-convex cylindrical lens 9 and described camera 10 is arranged in order and is arranged in parallel, being centered close to of the minute surface of described polarization splitting prism 4, plano-convex cylindrical lens 9 and camera 10 forms the second optical axis C2 on the same straight line, the described primary optic axis C1 and the second optical axis C2 quadrature, the convex surface 91 of described plano-convex cylindrical lens 9 is over against the minute surface of described camera 10, and described monitor 11 is connected with described camera 10 and display image.The effect of described plano-convex cylindrical lens 9 is to make semicircular light beam become the strip picture, thereby can more clearly observe the situation of change of focal spot position on monitor 11, improves image resolution ability and focal spot position accuracy of detection.
Preferably, also be provided with the beam expander 2 that is used for the linear polarization laser beam is expanded bundle between described linear polarization laser instrument 1 and the described polarization splitting prism 4, described baffle plate 3 between described beam expander 2 and described polarization splitting prism 4, being centered close on the described primary optic axis C1 of described beam expander 2.Linear polarization laser from linear polarization laser instrument 1 sends by becoming the directional light that expands bundle behind the beam expander 2, has enlarged the cross-sectional area of linear polarization laser beam.
Preferably, be provided with convex lens 8 between described polarization splitting prism 4 and the described plano-convex cylindrical lens 9, being centered close on the second optical axis C2 of described convex lens 8.By the setting of described convex lens 8, the laser beam that will reflect from workpiece 7 is assembled, and improves laser beam by plano-convex cylindrical lens 9 brightness of image during imaging on camera 10, further improves image resolution ability and accuracy of detection.
In conjunction with Fig. 4 a-4c, the principle of work of the laser beam focusing focal spot pick-up unit of the utility model embodiment is as described below: shown in the arrow among Fig. 1, the P linear polarization laser beam of the rounded shape that sends from linear polarization laser instrument 1, by beam expander 2, become the directional light that expands bundle, circular P linear polarization laser beam is by behind the baffle plate 3, become semicircular P linear polarization laser beam, pass through polarization splitting prism 4 then, quarter-wave plate 5, P linear polarization laser beam total transmissivity is crossed polarization splitting prism 4, during by quarter-wave plate 5, the polarization direction of P linear polarization laser will rotate 45 degree, become rotatory polarization, the circularly polarized light of this Shu Pinghang is through focusing on the surface of workpiece 7 thing lens 6, reflect again, by to thing lens 6 and quarter-wave plate 5, during by quarter-wave plate 5, the polarization direction is rotated 45 degree once more, become the S linearly polarized photon, because the S linearly polarized photon can't pass through in polarization splitting prism 4, can only reenter and be mapped to convex lens 8 at diagonal plane 41 places by total reflection, on the plano-convex cylindrical lens 9, be imaged at last on the CCD camera 10.As shown in fig. 1, if focusing on focal spot, laser beam is positioned on the surface of workpiece 7, promptly the distance between the surface of thing lens 6 and workpiece 7 is equaled focal length to thing lens 6, described workpiece 7 is positioned on focal plane, the picture side L to thing lens 6, the laser beam that the surface reflection of thing lens 6 and quarter-wave plate 5 is returned overlaps with laser beam imaging P on CCD camera 106 that the surface reflection of workpiece 7 is returned at imaging O on the CCD camera 10, can intuitively observe the image of shape shown in Fig. 4 a on monitor 7.
Particularly, when to the distance between thing lens 6 and the surface of the work less than to the focal length of thing lens 6 time, as shown in Figure 2, near among the figure workpiece 7 dotted line is represented focal plane, the picture side L to thing lens 6, the laser beam that the surface reflection of workpiece 7 is returned passes through thing lens 6, quarter-wave plate 5, behind polarization splitting prism 4 and the convex lens 8 peaceful projection face lens 9, imaging P will no longer overlap with the laser beam that the surface reflection of thing lens 6 and quarter-wave plate 5 is returned imaging O on CCD camera 10 on CCD camera 10, but be positioned at the left side (direction of going into to inject CCD camera 10 from laser beam is observed) that looks like O, thereby on monitor 11, can intuitively observe the image of shape shown in Fig. 4 b.
Particularly, as shown in Figure 3, if to the distance between the surface of thing lens 6 and workpiece 7 greater than focal length to thing lens 6, the laser beam that the surface reflection of workpiece 7 is returned passes through thing lens 6, quarter-wave plate 5, behind polarization splitting prism 4 and the convex lens 8 peaceful projection face lens 9, imaging P will no longer overlap with the laser beam that the surface reflection of thing lens 6 and quarter-wave plate 5 is returned imaging O on CCD camera 10 on CCD camera 10, but be positioned at the right side (direction of going into to inject CCD camera 10 from laser beam is observed) that looks like O, thereby on monitor 11, can intuitively observe the image of shape shown in Fig. 4 c.
By observing on the monitor 11 as the relative position of O with picture P, whether can judge laser beam focuses on workpiece 7 surfaces and focuses on the change in location of focal spot with respect to workpiece 7 surfaces after to thing lens 6, and can laser beam be focused on workpiece 7 surfaces by regulating position to thing lens 6.Owing to introduced baffle plate 3 and convex lens 8, brightness of image is greatly improved, even workpiece 7 is rough or workpiece 7 presents evident difference at bright place and dark place, the laser light reflected light beam also can obtain the imaging of enough brightness on CCD camera 10.The utility model can detect laser beam intuitively and focus on the focal spot position variation, and is easy to operate, focal spot position calibration accuracy advantages of higher.As if CCD camera 10 being changed into photodetector and reload signal processing module and, can realizing the automatic focusing of laser processing procedure, laser beam can be focused on workpiece 7 surfaces all the time after to thing lens 6 to thing lens 6 driving mechanisms.
Be appreciated that ground, laser beam of the present utility model focuses on the focal spot pick-up unit also can produce S linear polarization laser beam with linear polarization laser instrument 1, and with linear ahrens prism 4 be designed to allow S linear polarization laser by and P linear polarization laser can not pass through, its principle is similar to the above embodiments, can reach equally intuitively to demonstrate the purpose that laser beam focuses on the change in location of focal spot on monitor 11.
Compared with prior art, laser beam of the present utility model focuses on the focal spot pick-up unit and sends parallel linear polarization laser by linear polarization laser instrument 1, circular linear laser light beam is by behind the baffle plate 3, become semicircular linear polarization laser beam, pass through polarization splitting prism 4 then, quarter-wave plate 5, the polarization direction of P linear polarization laser will rotate 45 degree, become rotatory polarization, described parallel circularly polarized light is through focusing on the surface of workpiece 7 thing lens 6, reflect again, during by quarter-wave plate 5, the polarization direction is rotated 45 degree once more, after polarization splitting prism 4 places are reflected, incides on the plano-convex cylindrical lens 9, be imaged at last on the camera 10, can intuitively observe out laser beam focusing focal spot by the monitor 11 that links to each other with camera 10 and whether be positioned on the surface of workpiece 7.The utility model has utilized linear polarization laser to pass through quarter-wave plate 5 rear polarizer directions generation 90 degree rotation change polarization directions for twice, again after polarization splitting prism 4 reflections, plano-convex cylindrical lens 9 focus on, image in the mode on the camera 10, realized on monitor 11, intuitively demonstrating the change in location that laser beam focuses on focal spot, and change according to it and to adjust accordingly focusing on focal spot position, thereby make the focusing focal spot be positioned at the desired position of technology, imaging is clear, adjustment precision height, easy and simple to handle.
Above disclosed only is preferred embodiment of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (4)
1. a laser beam focuses on the focal spot pick-up unit, be used for the detection laser light beam by optical facilities after focus variations on workpiece, it is characterized in that, comprise baffle plate, the plano-convex cylindrical lens, camera, monitor and the linear polarization laser instrument that is arranged in order and is arranged in parallel, polarization splitting prism, quarter-wave plate, to the thing lens, described linear polarization laser instrument, polarization splitting prism, quarter-wave plate reaches forming primary optic axis on the same straight line of being centered close to of thing lens, described linear polarization laser instrument produces parallel linear polarization laser beam, described linear polarization laser beam is rounded, described baffle plate is located between described polarization splitting prism and the described laser instrument and the linear polarization laser beam of described circle stopped becomes semicircular linear polarization laser beam, described to the thing lens over against described workpiece, described camera has minute surface, described polarization splitting prism, the minute surface of plano-convex cylindrical lens and camera is arranged in order and is arranged in parallel, described polarization splitting prism, being centered close to of the minute surface of plano-convex cylindrical lens and camera forms second optical axis on the same straight line, the described primary optic axis and second light shaft positive cross, the convex surface of described plano-convex cylindrical lens is over against the minute surface of described camera, and described monitor is connected with described camera and display image.
2. laser beam as claimed in claim 1 focuses on the focal spot pick-up unit, it is characterized in that: also be provided with the beam expander that is used for the linear polarization laser beam is expanded bundle between described linear polarization laser instrument and the described polarization splitting prism, described baffle plate between described beam expander and described polarization splitting prism, being centered close on the described primary optic axis of described beam expander.
3. laser beam as claimed in claim 1 focuses on the focal spot pick-up unit, it is characterized in that: be provided with convex lens between described polarization splitting prism and the described plano-convex cylindrical lens, being centered close on second optical axis of described convex lens.
4. laser beam as claimed in claim 1 focuses on the focal spot pick-up unit, it is characterized in that: described polarization splitting prism synthesizes and is the square bodily form by two equilateral right angle prisms, the diagonal plane of described polarization splitting prism is provided with the polarization spectro diaphragm, described quarter-wave plate, thing lens, workpiece, plano-convex cylindrical lens, camera and monitor all is positioned at the same side of the diagonal plane of described polarization splitting prism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200581923U CN202033004U (en) | 2011-03-08 | 2011-03-08 | Laser beam focusing focal spot detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200581923U CN202033004U (en) | 2011-03-08 | 2011-03-08 | Laser beam focusing focal spot detecting device |
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| Publication Number | Publication Date |
|---|---|
| CN202033004U true CN202033004U (en) | 2011-11-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011200581923U Expired - Lifetime CN202033004U (en) | 2011-03-08 | 2011-03-08 | Laser beam focusing focal spot detecting device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175153A (en) * | 2011-03-08 | 2011-09-07 | 东莞宏威数码机械有限公司 | Laser beam focusing spot detection system |
| CN104155639A (en) * | 2014-08-20 | 2014-11-19 | 中国海洋大学 | Transmitting and receiving integrated laser radar device |
-
2011
- 2011-03-08 CN CN2011200581923U patent/CN202033004U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175153A (en) * | 2011-03-08 | 2011-09-07 | 东莞宏威数码机械有限公司 | Laser beam focusing spot detection system |
| CN102175153B (en) * | 2011-03-08 | 2013-09-11 | 东莞宏威数码机械有限公司 | Laser beam focusing spot detection system |
| CN104155639A (en) * | 2014-08-20 | 2014-11-19 | 中国海洋大学 | Transmitting and receiving integrated laser radar device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20111109 Effective date of abandoning: 20130911 |
|
| RGAV | Abandon patent right to avoid regrant |