CN202020932U - Rectification device for ultra-pure nitric acid - Google Patents
Rectification device for ultra-pure nitric acid Download PDFInfo
- Publication number
- CN202020932U CN202020932U CN2011201018752U CN201120101875U CN202020932U CN 202020932 U CN202020932 U CN 202020932U CN 2011201018752 U CN2011201018752 U CN 2011201018752U CN 201120101875 U CN201120101875 U CN 201120101875U CN 202020932 U CN202020932 U CN 202020932U
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- nitric acid
- ultra
- pure nitric
- tower still
- adsorption chamber
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Abstract
The utility model discloses a rectification device for ultra-pure nitric acid, consisting of a tower kettle, an adsorption chamber and a condenser; the lower part of the tower kettle is parallel double-cylinder-shaped; spiral heating pipes are respectively arranged in the double-cylinder-shaped tower kettle; the ends of the heating pipes are arranged outside the tower kettle; an inlet for the ultra-pure nitric acid is arranged at the lower end of the double-cylinder-shaped tower kettle; the single cylinder-shaped adsorption chamber is arranged at the upper part of the tower kettle; porous clapboards are respectively arranged above and below the adsorption chamber; an absorbing material is arranged in the middle of each clapboard; the tower kettle is respectively provided with an inlet and an outlet for cleaning liquid at two ends provided with absorbing material; the upper end of the adsorption chamber is connected with the upper end of the condenser through a pipeline; a spiral pipe is arranged in the condenser, two ends of which are an inlet and an outlet of cooling water; and an output pipe for the finished ultra-pure nitric acid is arranged at the lower end of the condenser. The rectification device for the ultra-pure nitric acid has the characteristics of being simple in production process, less in invest capital, high in purity of the purified ultra-pure nitric acid, convenient for maintenance and the like.
Description
Technical field
The utility model relates to the chemical industry equipment field, the device of a kind of rectifying ultra-high pure nitric acid of more specifically saying so.
Background technology
Most of pure inorganic acids all are water white liquid.Water absorbing properties is strong, has oxidisability, can with many metals and nonmetal chemically reactive.Can also with multiple organic matter effect, reactions such as sulfonation, phosphatization, dehydration take place.Inorganic acid is in the laboratory, and industrial application is very extensive.The electronics industry of China is in develop rapidly, therefore, the chip manufacturing industry is also being advanced by leaps and bounds, and be used for the cleaning and the corrosion of chip, need ultra-pure nitric acid, concentration is greater than the source of nitric acid of 68wt%, and its purity plays critical effect to the yield rate of chip, along with science and technology constantly develops, the oxide-film of chip is more and more thinner, and is also more and more higher to the requirement of nitric acid, though the preparation technology of existing ultra-high pure nitric acid occurs at present, as sub-boiling distillation method, rectification method, but equipment investment is big, complex manufacturing, and non-vague generalization factory can accept.The equipment for purifying of relevant inorganic acid and the patent of production technology are also more, but all have unsatisfactory part, and the equipment infusion of financial resources is high, operating procedure is complicated, difficult in maintenance.
The utility model content
The purpose of this utility model is to remedy above-mentioned deficiency, and the nitric acid rectifier unit that a kind of production technology is simple, the equipment infusion of financial resources is low, easy to maintenance is provided.
For achieving the above object, the technical solution of the utility model has provided a kind of essence of ultra-high pure nitric acid and has stayed device, it is characterized in that, by the tower still, adsorption chamber, condenser is formed, described tower still bottom is bitubular shape in parallel, in described pair of tubular tower still, be respectively equipped with helical heating pipe, the end of described heating tube is arranged on tower still outside, be provided with the import of ultra-high pure nitric acid in the tower still lower end of described bitubular shape, the top of described tower still is the adsorption chamber of monotubular shape, be equipped with a dividing plate with holes up and down at described adsorption chamber, in the middle of described dividing plate, be provided with sorbing material, described tower still is respectively equipped with the inlet and the outlet of cleaning fluid at the two ends that are provided with sorbing material, upper end at described adsorption chamber is connected with the upper end of described condenser by pipeline, be provided with helix tube in described condenser, the two ends of described helix tube are the import and the outlet of cooling water, are provided with the efferent duct of finished product ultra-high pure nitric acid in the lower end of described condenser.
In order to improve the service efficiency of sorbing material, thereby improve proper purity of inorganic acid and purification efficiency, optimized technical scheme is, described filter washing water inlet by the road, valve and liquid pump be connected with the storage tank of cleaning fluid, and described rinse liquid outlet by the road, valve is connected with the recovery pond of cleaning fluid.
In order to control the flow of rectifying effectively, and for the cleaning fluid that prevents too much sorbing material flows into the tower still, optimized technical scheme is, is provided with valve between the bottom of described pair of tubular tower still and monotubular shape adsorption chamber.
In order to effectively utilize the vapours source that the enterprises line has, in order to simplify the structure of very hot device, improve the efficiency of heating surface simultaneously, optimized technical scheme is that described heating tube is connected with the vapours source.
In order to simplify the structure of heater, optimized technical scheme can also be, in described heating tube heating wire is housed, and described heating wire is connected with power supply, and described heating tube is a porcelain tube.
Advantage of the present utility model and beneficial effect are: adopt this rectifier unit purification ultra-high pure nitric acid have that production technology is simple, infusion of financial resources less, the back ultra-high pure nitric acid of purifying purity height, characteristics such as easy to maintenance.
Description of drawings
Fig. 1 is the structural representation that the essence of the utility model ultra-high pure nitric acid is stayed device.
Among the figure: 1, tower still; 2, adsorption chamber; 3, condenser; 4, helical heating pipe; 5, the end of heating tube; 6, import; 7,8, the import of dividing plate ultra-high pure nitric acid; 9, sorbing material; 10, inlet; 11, outlet; 12, pipeline; 13, helix tube; 14, inlet; 15, outlet; 16, the efferent duct of ultra-high pure nitric acid; 17, valve.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present utility model is further described.Following examples only are used for the technical solution of the utility model more clearly is described, and can not limit protection domain of the present utility model with this.
As shown in the figure 1, the utility model is that a kind of essence of ultra-high pure nitric acid is stayed device, by tower still 1, adsorption chamber 2, condenser 3 is formed, described tower still 1 bottom is bitubular shape in parallel, in described pair of tubular tower still 1, be respectively equipped with helical heating pipe 4, the end 5 of described heating tube is arranged on the outside of tower still 1, be provided with the import 6 of ultra-high pure nitric acid in tower still 1 lower end of described bitubular shape, the top of described tower still 1 is the adsorption chamber 2 of monotubular shape, be equipped with a dividing plate with holes 7 up and down at described adsorption chamber 1,8, at described dividing plate 7, be provided with sorbing material 9 in the middle of 8, described tower still 1 is respectively equipped with the inlet 10 and outlet 11 of cleaning fluid at the two ends that are provided with sorbing material 9, upper end at described adsorption chamber 2 is connected with the upper end of described condenser 3 by pipeline 12, in described condenser 3, be provided with helix tube 13, the two ends of described helix tube 13 are the import 14 and outlet 15 of cooling water, are provided with the efferent duct 16 of finished product ultra-high pure nitric acid in the lower end of described condenser 3.
On the basis of the foregoing description, in order to improve the service efficiency of sorbing material, thereby improve proper purity of inorganic acid and purification efficiency, described filter washing water inlet 10 by the road, valve and liquid pump be connected with the storage tank of cleaning fluid, and described rinse liquid outlet 11 by the road, valve is connected with the recovery pond of cleaning fluid.
On the basis of the foregoing description, in order to control the flow of rectifying effectively, and for the cleaning fluid that prevents too much sorbing material flows into the tower still, between the bottom of described pair of tubular tower still 1 and monotubular shape adsorption chamber 2, be provided with valve 17.
On the basis of the foregoing description, in order to effectively utilize the vapours source that the enterprises line has, simultaneously in order to simplify the structure of very hot device, improve the efficiency of heating surface, described heating tube 4 is connected with the vapours source, or described heating wire is connected with power supply, and described heating tube is a porcelain tube.
The above only is a preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (5)
1. the essence of a ultra-high pure nitric acid is stayed device, it is characterized in that, by the tower still, adsorption chamber, condenser is formed, described tower still bottom is bitubular shape in parallel, in described pair of tubular tower still, be respectively equipped with helical heating pipe, the end of described heating tube is arranged on tower still outside, be provided with the import of ultra-high pure nitric acid in the tower still lower end of described bitubular shape, the top of described tower still is the adsorption chamber of monotubular shape, be equipped with a dividing plate with holes up and down at described adsorption chamber, in the middle of described dividing plate, be provided with sorbing material, described tower still is respectively equipped with the inlet and the outlet of cleaning fluid at the two ends that are provided with sorbing material, upper end at described adsorption chamber is connected with the upper end of described condenser by pipeline, in described condenser, be provided with helix tube, the two ends of described helix tube are the import and the outlet of cooling water, are provided with the efferent duct of finished product ultra-high pure nitric acid in the lower end of described condenser.
2. stay device by the essence of the described ultra-high pure nitric acid of claim 1, it is characterized in that, described filter washing water inlet by the road, valve and liquid pump be connected with the storage tank of cleaning fluid, and described rinse liquid outlet by the road, valve is connected with the recovery pond of cleaning fluid.
3. stay device by the essence of the described ultra-high pure nitric acid of claim 1, it is characterized in that, between the bottom of described pair of tubular tower still and monotubular shape adsorption chamber, be provided with valve.
4. stay device by the essence of the described ultra-high pure nitric acid of claim 1, it is characterized in that, described heating tube is connected with the vapours source.
5. stay device by the essence of the described ultra-high pure nitric acid of claim 1, it is characterized in that, in described heating tube heating wire is housed, described heating wire is connected with power supply, and described heating tube is a porcelain tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011201018752U CN202020932U (en) | 2011-04-11 | 2011-04-11 | Rectification device for ultra-pure nitric acid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011201018752U CN202020932U (en) | 2011-04-11 | 2011-04-11 | Rectification device for ultra-pure nitric acid |
Publications (1)
Publication Number | Publication Date |
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CN202020932U true CN202020932U (en) | 2011-11-02 |
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Family Applications (1)
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CN2011201018752U Expired - Lifetime CN202020932U (en) | 2011-04-11 | 2011-04-11 | Rectification device for ultra-pure nitric acid |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104108690A (en) * | 2014-06-11 | 2014-10-22 | 苏州市晶协高新电子材料有限公司 | Equipment and process for preparing electronic grade nitric acid having a concentration of 68% from industrial grade nitric acid having a concentration of 98% |
-
2011
- 2011-04-11 CN CN2011201018752U patent/CN202020932U/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104108690A (en) * | 2014-06-11 | 2014-10-22 | 苏州市晶协高新电子材料有限公司 | Equipment and process for preparing electronic grade nitric acid having a concentration of 68% from industrial grade nitric acid having a concentration of 98% |
CN104108690B (en) * | 2014-06-11 | 2016-06-15 | 苏州市晶协高新电子材料有限公司 | Equipment and the technique of electron level 68% nitric acid is prepared by 98% technical grade nitric acid |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 214423 European Industrial Zone, Zhouzhuang Town, Jiangsu, Jiangyin Patentee after: Jiangyin Runma Electronic Material Co., Ltd. Address before: 214423 European Industrial Zone, Zhouzhuang Town, Jiangsu, Jiangyin Patentee before: Jiangyin Runma Electronic Material Co., Ltd. |
|
CX01 | Expiry of patent term |
Granted publication date: 20111102 |
|
CX01 | Expiry of patent term |