CN201994077U - Rotational DOF precise regulating and positioning mechanism - Google Patents

Rotational DOF precise regulating and positioning mechanism Download PDF

Info

Publication number
CN201994077U
CN201994077U CN2010206943622U CN201020694362U CN201994077U CN 201994077 U CN201994077 U CN 201994077U CN 2010206943622 U CN2010206943622 U CN 2010206943622U CN 201020694362 U CN201020694362 U CN 201020694362U CN 201994077 U CN201994077 U CN 201994077U
Authority
CN
China
Prior art keywords
leg
base
screw
eccentric pin
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2010206943622U
Other languages
Chinese (zh)
Inventor
王凯
段振飞
Original Assignee
Shanghai Micro Electronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to CN2010206943622U priority Critical patent/CN201994077U/en
Application granted granted Critical
Publication of CN201994077U publication Critical patent/CN201994077U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Abstract

The utility model relates to a rotational DOF (degree of freedom) precise positioning and regulating mechanism, which comprises a base and support legs, wherein, three support legs are provided and respectively connected with the lower part of the base; an adjusting screw with a spherical bottom surface is arranged between a first support leg and the base; a gasket positioning groove corresponding to the adjusting screw is formed on the first support leg, and a conical gasket is arranged in the gasket positioning groove; a positioning pin with the spherical bottom surface is arranged between a second support leg and the base; a spherical groove corresponding to the positioning pin is formed on the second support leg, and the positioning pin props against the inner part of the spherical groove; the connection relation between a third support leg and the base is identical to that between the second support leg and the base; an eccentric pin is also assembled on the third support leg; the direction of the axle center of the eccentric pin is perpendicular to the base; a gap is formed on the base in a position corresponding to the cylindrical surface of a large end of the eccentric pin; the cylindrical surface of the large end of the eccentric pin tightly leans against the inner wall of the gap; the eccentric pin is also connected with a set screw; and the included angles formed between the adjusting screw positioned on the first support leg and the center line of the positioning pin, as well as between the adjusting screw positioned on the third support leg and the center line of the positioning pin is right angles. The technical scheme is suitable for various occasions, is convenient to adjust, is easy to accomplish, and can achieve higher rigidity and modality.

Description

A kind of rotary freedom minute adjustment detent mechanism
Technical field
The utility model belongs to the technology of instrument and meter field, specifically is a kind of rotary freedom minute adjustment detent mechanism
Background technology
Tradition rotary freedom minute adjustment detent mechanism generally needs three-decker to realize, whole governor motion upwards need take than large space at Z, and when installing space was narrow and small, use was restricted.And rotary freedom minute adjustment detent mechanism generally all is that forward is installed, when Rx and the adjusting of Ry rotary freedom, can utilize set screw institute gravity supported to compress the stability that set screw realizes adjusting, but when oppositely hanging installation, gravity has just become influence to regulate the negative factor of stability.Three-dimensional perspective shown in Figure 1A~1C is regulated platform, and 100 is differential heads, the 200th among the figure, set screw, the 300th, support steel ball, A can rotate mutually between the B.Though be double-layer structure, actual conditions are that set screw and holddown spring are fitted together, and cause the rigidity of total and mode on the low side, only be applicable to the product weight of installing little, mode is required low occasion.
Summary of the invention
In order to solve the above-mentioned problems in the prior art, the utility model proposes a kind of rotary freedom minute adjustment detent mechanism, concrete technical scheme is as follows:
A kind of rotary freedom minute adjustment detent mechanism comprises base and three legs, is respectively first leg, second leg and the 3rd leg, and described three legs are triangularly arranged below base;
Be equipped with set screw between described first leg and the 3rd leg and the described base, described set screw lower surface is a sphere; Be equipped with the packing ring locating slot on described first leg and the 3rd leg, be provided with taper faced washer in this locating slot, described taper faced washer and described set screw are complementary;
Be provided with register pin between second leg and the base, the bottom surface of register pin is a sphere, and the second leg upper surface is provided with rounded channels, and register pin withstands in the rounded channels;
Also be equipped with eccentric pin on the 3rd leg, eccentric pin be axially perpendicular to base; Base is having breach with the big newel post corresponding position of face of eccentric pin, and the big newel post face of eccentric pin abuts against on the breach inwall.
The line at the center of the packing ring locating slot on described first leg and the center of described rounded channels is perpendicular to the line at the center of the center of the packing ring locating slot on described the 3rd leg and described rounded channels.
Be connected by screw between described base and three legs; Described screw is successively by plain washer and elastic body, passes that corresponding screw is connected on the leg on the base.
Leave the gap between the corresponding screw on described screw and the base.
Described elastic body is dish spring group or volute spring.
Described eccentric pin also is connected with holding screw.
Compared with prior art, the beneficial effects of the utility model are as follows:
1. the utility model only uses double-layer structure to realize the adjusting of three rotary freedoms, is highly suitable for Z to the compact occasion of space requirement;
2. used elastic pressuring clamping device in the utility model structure, entire mechanism has oppositely been hung upside down when installing still can carry out online adjusting, adjusting has dirigibility, has guaranteed the positional precision of the product of adorning.
3. when having saved the space, the reasonable Arrangement in each regulating device space makes between each degree of freedom adjusting and do not have coupling, and is easy to adjust, realizes easily.
4. regulating device and locking mechanism thereof and elastic pressuring clamping device are arranged apart, have guaranteed that entire mechanism has higher rigidity and mode.
5. be applicable to multiple occasion, easy to adjust, realize having higher rigidity and mode easily.
Description of drawings
Figure 1A is that three-dimensional perspective is regulated the platform front view in the prior art;
Figure 1B is the left view of Figure 1A;
Fig. 1 C is the rear view of Figure 1A;
Fig. 2 is that synoptic diagram is looked in the blast of the utility model embodiment;
Fig. 3 is the schematic top plan view of the utility model embodiment.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing and embodiment:
The general structure explanation
As shown in Figure 2, rotary freedom minute adjustment detent mechanism of the present utility model comprises base 2 and three legs that are triangularly arranged under base 2: first leg 1, second leg 4 and the 3rd leg 5.Be equipped with set screw 15 between first leg 1 and the 3rd leg 5 and the base 2, set screw 15 lower ends are spheres; Be equipped with the packing ring locating slot on first leg 1 and the 3rd leg 5, be provided with taper faced washer 16 in this locating slot, taper faced washer 16 and set screw 15 are complementary; Be provided with register pin 3 between second leg 4 and the base 2, the bottom surface of register pin 3 is spheres, and second leg, 4 upper surfaces and corresponding position, register pin 3 position are provided with rounded channels, and register pin 3 withstands in the rounded channels; Also be equipped with eccentric pin 7 on the 3rd leg 5, eccentric pin 7 be axially perpendicular to base 2, base 2 is having breach with the big newel post corresponding position of face of eccentric pin 7, the big newel post face of eccentric pin 7 abuts against on the breach inwall.As shown in Figure 3, the line of centres of the center of the packing ring locating slot on first leg 1 and described rounded channels is perpendicular to the center of the packing ring locating slot on described the 3rd leg 5 and the line of centres of described rounded channels.
Please continue to consult Fig. 2, be connected by screw 8 between base 2 and three legs, described screw 8 is successively by plain washer 10 and elastic body, passes that corresponding screw is connected on the corresponding leg on the base 2, leaves the gap between the screw accordingly on described screw 8 and the base 2.Described elastic body is dish spring group 9 or volute spring.In addition, described eccentric pin 7 also is connected with holding screw 6.
In practical application, base 2 can be installed Related product, and first leg 1, second leg 4, the 3rd leg 5 are connected on the fitting surface of other associated supports.This utility model can realize Rx, the Ry of the product of installing, the adjusting of three rotary freedoms of Rz.Total can forward placement installation also can oppositely be hung installation.When oppositely installing, need on platform, carry out preliminary forward pre-assembled earlier, Rx, Ry, three rotary freedoms of Rz are adjusted in certain fine adjustment range, and then are reversely connected on the fitting surface by the screw hole integral body of first leg 1, second leg 4, the 3rd leg 5.
The preassembled step of forward is that register pin 3, two set screw 15 are assembled on the base 2, the sphere end of register pin 3 withstands in the rounded channels of second leg 4 then, and two set screw 15 are assembled to respectively on first leg 1, the 3rd leg 5 by taper faced washer 16; Eccentric pin 7 is assembled on the 3rd leg 5, as shown in Figure 3, the big newel post face of eccentric pin 7 is abutted on the face A of base 2.Regulate Rx, Ry rotary freedom, make base 2 be tending towards level.Screw 8 by plain washer 10, dish spring group 9, is passed base 2, be connected on first leg 1 (second leg, 4, the three legs 5), make the gross weight of the general pressure of three dish spring groups 9 greater than base and product.Use screw 11, spring washer 12, spheric washer 13, taper faced washer 14 that set screw 15 and taper faced washer 16 are locked between first leg 1 (the 3rd leg 5) and the base 2, finish pre-assembled.
The entire mechanism that prepackage is prepared is oppositely hung and is connected on the fitting surface.Earlier screw 11 is loosened, regulate the Rz rotary freedom by eccentric pin 7 then, regulating finishes uses holding screw 6 locking eccentric pins 7.By set screw 15 accurate adjustment Rx, Ry rotary freedom, tighten screw 11 at last again, finish adjusting.
The set screw 15 of Rx and Ry and lock-screw 11 thereof are all arranged apart with the dish spring group 9 of elastic compression mechanism, have guaranteed that so whole governor motion has higher rigidity and mode.
Principle of the present utility model and operation instruction:
1, the location explanation of three one-movement-freedom-degrees
As shown in Figure 2, the location of one-movement-freedom-degree is determined by the position relation of the plane of the pin-and-hole of installing and locating pin 3 on the position of the right alignment of two cylinders of the position of rounded channels on second leg 4 and the degree of depth, register pin 3 and step surface, the base 2 and position that product is installed and installing and locating pin 3 step surfaces and product installed surface.The key element of these decision one-movement-freedom-degree location is mainly guaranteed by the processing and manufacturing tolerance of each part.
2, adjusting oppositely is installed and realizes explanation
As shown in Figures 2 and 3, regulatory function oppositely is installed is by screw 8, pass base 2, be connected to first leg 1 (second leg, 4, the three legs 5) and go up and guarantee by plain washer 10, dish spring group 9.Screw 8 and dish spring group 9 overcome the gravity of the product of installing and base 2, make between base 2, set screw 15 and first leg 1 (second leg 4, the 3rd leg 5) snap-in force is arranged, guarantee when using set screw 15 to regulate, the spherical end surface of set screw 15 abuts against on the taper faced washer 16 all the time, and taper faced washer 16 abuts against on first leg 1 (second leg 4, the 3rd leg 5).
The decrement of dish spring group 9 changes, and this carries out Z for set screw 15 provides condition to adjusting, and the size of range of adjustment can realize by calculating the quantity that changes the dish spring.Dish spring group 9 also can change the suitable volute spring of elasticity coefficient into.
Gapped amount between the screw unthreaded hole of screw 8 and base 2 can guarantee that base 2 is rotating shaft with register pin 3 and with respect to each leg among a small circle Rz amount of spin is arranged.
3, Rx and the explanation of Ry control method
It mainly is to be realized by register pin 3 and set screw 15 that Rx and Ry regulate.As shown in Figure 3, when regulating Rx, rotate upper right corner set screw 15, the Z that changes base 2 left sides is to height, and then to be equivalent to the line of centres with register pin 3 and lower right corner set screw 15 be that axis carries out Rx to rotation (actual is that line with the contact point of register pin 3 and second leg 4 and lower right corner set screw 15 and the contact point of taper faced washer 16 is that axis carries out Rx to rotating) to base 2; When regulating Ry, rotate lower right corner set screw 15, the Z that changes base 2 bottoms is to height, and then to be equivalent to the line of centres with register pin 3 and upper left corner set screw 15 be that axis carries out Rx to rotation (actual is that line with the contact point of register pin 3 and second leg 4 and upper left corner set screw 15 and the contact point of taper faced washer 16 is that axis carries out Rx to rotating) to base 2;
As shown in Figure 3, because two set screw 15 become 90 ° with the line of centres of register pin 3, thus when carrying out Rx and Ry adjusting, there is not the coupled problem of two degree of freedom, easy to adjust.
Taper faced washer 16 can move on leg, has guaranteed that base 2 is rotating shaft with register pin 3 and with respect to each leg among a small circle Rz amount of spin is arranged.
After adjusting finishes, use screw 11, spring washer 12, spheric washer 13, taper faced washer 14 that set screw 15 and taper faced washer 16 are locked between first leg 1 (the 3rd leg 5) and the base 2.
4, Rz control method explanation
Rz regulates by eccentric pin 7 and realizes.As shown in Figure 2, there is certain offset on two faces of cylinder of eccentric pin 7, and the small end cylinder is contained in the 3rd leg 5, adopt little clearance fit, big newel post face abuts against on the face A of base 2, as shown in Figure 3, and guarantees that eccentric pin 7 and base 2 contact points can not be in eccentric maximum position.Have adjustment hole on the big newel post face, use adjustment means to penetrate adjustment hole, rotate eccentric pin 7, because eccentric existence, big newel post face can promote base 2 by face A, realizes the adjusting of Rz.
In adjustment process,, can increase elastic pulling force mechanism at the directions X between the 3rd leg 5 and the base 2 for the big newel post face of eccentric pin 7 is abutted against on the face A of base 2 all the time.
After finishing, adjusting eccentric pin 7 is locked with holding screw 6.
The screw thread rotation that this eccentric adjusting mechanism also can change tight function with lock into promotes regulating device.

Claims (6)

1. a rotary freedom minute adjustment detent mechanism comprises base (2) and leg, it is characterized in that leg has three, is respectively first leg (1), second leg (4) and the 3rd leg (5), and above-mentioned three legs are triangularly arranged in base (2) below;
Be equipped with set screw between described first leg (1) and the 3rd leg (5) and the described base (2), described set screw lower surface is a sphere; Be equipped with the packing ring locating slot on described first leg (1) and the 3rd leg (5), be provided with taper faced washer in this locating slot, described taper faced washer and described set screw are complementary;
Be provided with register pin (3) between described second leg (4) and the described base (2), the bottom surface of described register pin (3) is a sphere, and the upper surface of described second leg (4) is provided with rounded channels, and described register pin (3) withstands in the described rounded channels;
Also be equipped with eccentric pin (7) on described the 3rd leg (5), described eccentric pin (7) be axially perpendicular to described base (2); Described base (2) is having breach with the big newel post corresponding position of face of described eccentric pin (7), and the big newel post face of described eccentric pin (7) abuts against on the breach inwall.
2. a kind of rotary freedom minute adjustment detent mechanism according to claim 1, the line at center that it is characterized in that the center of the packing ring locating slot on described first leg (1) and described rounded channels is perpendicular to the line at the center of the center of the packing ring locating slot on described the 3rd leg (5) and described rounded channels.
3. a kind of rotary freedom minute adjustment detent mechanism according to claim 1 is characterized in that being connected by screw between described base (2) and above-mentioned three legs; Described screw passes the last corresponding screw of base (2) and is connected on the leg successively by plain washer (10) and elastic body.
4. a kind of rotary freedom minute adjustment detent mechanism according to claim 3 is characterized in that described screw and base (2) upward leave the gap between the corresponding screw.
5. a kind of rotary freedom minute adjustment detent mechanism according to claim 3 is characterized in that described elastic body is dish spring group (9) or volute spring.
6. a kind of rotary freedom minute adjustment detent mechanism according to claim 1 is characterized in that described eccentric pin (7) also is connected with holding screw (6).
CN2010206943622U 2010-12-30 2010-12-30 Rotational DOF precise regulating and positioning mechanism Expired - Lifetime CN201994077U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010206943622U CN201994077U (en) 2010-12-30 2010-12-30 Rotational DOF precise regulating and positioning mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010206943622U CN201994077U (en) 2010-12-30 2010-12-30 Rotational DOF precise regulating and positioning mechanism

Publications (1)

Publication Number Publication Date
CN201994077U true CN201994077U (en) 2011-09-28

Family

ID=44670558

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010206943622U Expired - Lifetime CN201994077U (en) 2010-12-30 2010-12-30 Rotational DOF precise regulating and positioning mechanism

Country Status (1)

Country Link
CN (1) CN201994077U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103063140A (en) * 2011-10-20 2013-04-24 上海微电子装备有限公司 High precision adjustment device and high precision adjustment method
CN104070518A (en) * 2014-06-20 2014-10-01 浙江大学 Three freedom precision control apparatus based on eccentric structure
CN104332183A (en) * 2014-10-31 2015-02-04 华南理工大学 Large-stroke high-accuracy positioning platform with three sections of wavelike thin sheets in regular triangular distribution
CN106932878A (en) * 2015-12-31 2017-07-07 上海微电子装备有限公司 A kind of six-degree-of-freedom adjusting

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103063140A (en) * 2011-10-20 2013-04-24 上海微电子装备有限公司 High precision adjustment device and high precision adjustment method
CN103063140B (en) * 2011-10-20 2015-07-22 上海微电子装备有限公司 High precision adjustment device and high precision adjustment method
CN104070518A (en) * 2014-06-20 2014-10-01 浙江大学 Three freedom precision control apparatus based on eccentric structure
CN104070518B (en) * 2014-06-20 2015-09-02 浙江大学 A kind of Three-degree-of-freeprecision precision adjustment device based on eccentric structure
CN104332183A (en) * 2014-10-31 2015-02-04 华南理工大学 Large-stroke high-accuracy positioning platform with three sections of wavelike thin sheets in regular triangular distribution
CN106932878A (en) * 2015-12-31 2017-07-07 上海微电子装备有限公司 A kind of six-degree-of-freedom adjusting

Similar Documents

Publication Publication Date Title
CN201994077U (en) Rotational DOF precise regulating and positioning mechanism
CN201744716U (en) Clamp dedicated for fine milling of radial inclined planes of blade basin
CN104035183B (en) A kind of large-scale catoptron pitching adjusting device
CN102689217B (en) Device for correcting double-shaft micro-deformation blade reference
CN205276480U (en) Adjustable high formula support
CN201637915U (en) Optical adjusting device
CN104316396A (en) XYZ triaxial centering regulating device for mechanical testing machine
CN104772772A (en) Fast connecting mechanism for joints
CN103522102A (en) Leveling tool
CN208091331U (en) A kind of cubing of thrust ball bearing steel ball axial movement value
CN205333944U (en) Sphere formula optical lens piece angle demodulator
CN205254458U (en) Strutting arrangement highly finely tunes
CN209288743U (en) A kind of machine tool chief axis pose adjustment standard apparatus
CN208012600U (en) A kind of high-precision convenient for adjusting leans on face datum tool device
CN205937523U (en) Wide bearing frame of application range
CN202093304U (en) Portable shooting stabilizer
CN202825455U (en) elbow-neck phase angle adjustment device used for grinding crankshaft elbow
CN204935761U (en) The Intelligent clothes cabinet plate body locating and machining part of intelligent domestic system
CN102874027B (en) Large-width laser internal carving machine
CN202433027U (en) Electric objective table
CN202572352U (en) Objective table accurately controlling positions
CN204177668U (en) A kind of XYZ tri-shaft assignment regulating device of mechanics machine
CN209633021U (en) A kind of crankshaft gear ring installation graduating device
CN202763279U (en) Large-size inner carven processing device
CN207272890U (en) A kind of bistrique angle adjusting mechanism for being used for accurate double-ended grinding machine

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai

Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd

Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai

Patentee before: Shanghai Micro Electronics Equipment Co., Ltd.

CP01 Change in the name or title of a patent holder
CX01 Expiry of patent term

Granted publication date: 20110928

CX01 Expiry of patent term