CN201979616U - Silicon wafer multi-line cutting broken-line detection device - Google Patents
Silicon wafer multi-line cutting broken-line detection device Download PDFInfo
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- CN201979616U CN201979616U CN2011200420033U CN201120042003U CN201979616U CN 201979616 U CN201979616 U CN 201979616U CN 2011200420033 U CN2011200420033 U CN 2011200420033U CN 201120042003 U CN201120042003 U CN 201120042003U CN 201979616 U CN201979616 U CN 201979616U
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- rotating shaft
- brush
- thread
- broken
- detection controller
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Abstract
The utility model discloses a silicon wafer multi-line cutting broken-line detection device comprising a broken-line detection controller. The broken-line detection controller is electrically connected with the rotating shafts of a payoff roller and a take-up roller of a multi-line cutting device respectively through a pair of electric brushes, and each pair of electric brushes are staggered in arrangement in the axial direction of the rotating shafts. In the silicon wafer multi-line cutting broken-line detection device, the wear of the rotating shaft is reduced as two electric brushes outside the same rotating shaft are staggered in arrangement in the axial direction of the rotating shaft. Meanwhile, graphite carbon brushes used as the electric brushes further reduce the wear of the rotating shafts, the situation of false alarm and shutdown due to the aggregation and electric conduction of copper scale is prevented. Meanwhile, graphite has the function in lubricating the contact surface of the rotating shafts and the electric brushes.
Description
Technical field
The utility model belongs to silicon chip cutting technique field, is specifically related to be used for the broken thread detector of the multi-thread cutting of silicon chip.
Background technology
Silicon chip is the main production material in semiconductor and photovoltaic field.Multi-thread cutting equipment is the equipment that is used to cut silicon chip, and it is the high speed reciprocating motion by intensive metal wire, and the silico briquette material is once cut into hundreds of or thousands of plate sheets simultaneously.In whole cutting process, metal wire to the guiding of take-up roller by a plurality of Wire guide rollers, form a horizontal gauze on a pair of working roll that is oppositely arranged, and silico briquette to be cut is by the decline realization feeding from top to bottom of workbench from the unwrapping wire roller.
In the process of cutting, the broken string phenomenon is serious problems in the line cutting processing always.Broken string pauses processing and has to start anew, thereby wastes a large amount of man-hours, and has destroyed the integrality of machined surface.Because the gauze as cut surface is by wires ordered arrangement between two working rolls; form a cutting planes; after the cutting broken string takes place; the gauze of broken string position can't continue to travel according to the order of sequence; if can not in time shut down; working roll will still be in operating condition, like this will be owing to inertia causes also finding time backward at broken string position gauze cracking, until shutdown.Can't arrange again because of after gauze is found time in the cutting process,, cause the serious waste of silico briquette raw material so the silico briquette at the place of finding time can't continue cutting.Therefore burn out detection equipment must be set, in time shut down, avoid or reduce the generation of finding time so that the back takes place at broken string.
Fig. 1 is for being arranged on the partial structurtes schematic diagram of the broken thread detector on the multi-thread cutting equipment in the prior art.Fig. 2 is the vertical view of Fig. 1.Fig. 3 is the syndeton schematic diagram of broken thread detector of the prior art and multi-thread cutting equipment.As shown in Figure 1 to Figure 3, existing broken thread detector mainly comprises and being connected with take-up roller 2 with unwrapping wire roller 1 respectively and with two rotating shafts 3 of unwrapping wire roller 1 and take-up roller 2 rotations, the arranged outside of rotating shaft 3 contacts with rotating shaft 3 and corresponding two brushes 5 that supported by support 4, the lower end of support 4 is supported by stent support axle 6, and stent support axle 6 is provided with the insulation sleeve 7 that support 4 and stent support axle 6 are insulated.Brush 5 is connected with burn out detection controller 9 by lead 8 respectively, and burn out detection controller 9 is connected the signal that takes place in the time of detecting frame and metal wire conducting simultaneously with the frame (not shown) of multi-thread cutting equipment.
When the broken string situation appears in the metal wire 10 of multi-thread cutting equipment, the metal wire 10 that has broken can the multi-thread cutting equipment of contact, makes the burn out detection controller 9 can perception, sends signal to multi-thread cutting equipment, thus control shut down, reach the purpose that protection is produced.As multiple protective; burn out detection controller 9 is when receiving multi-thread cutting equipment metal wire ground signalling; also by the rotating shaft 3 and the brush 5 of unwrapping wire roller 1 one sides, the rotating shaft 3 of take-up roller 2 one sides and brush 5 send the signal that receives some to burn out detection controller 9 voluntarily.Under the normal condition, the signal number that burn out detection controller 9 sends and the signal number of reception are complementary.Because two brushes 5 in the prior art in rotating shaft 3 are positioned on the same cross section of rotating shaft 3; and rotating shaft 3 all adopts copper product to make with brush 5; so serious wear between brush 5 and the rotating shaft 3; the contact conditions variation; may have losing of signal number; cause signal number not match; and then false alarm is shut down; the copper scale that wears away simultaneously accumulates in the stent support axle 6 below the support 4; make support 4 and 6 conductings of stent support axle; make burn out detection controller 9 receive the information (actual metal line 10 is not disconnected) that metal wire 10 has touched frame mistakenly, burn out detection controller 9 sends signal to multi-thread cutting equipment and makes its shutdown.Therefore bring influence to ordinary production.
The utility model content
Technical problem to be solved in the utility model provides that a kind of silicon chip is multi-thread to cut off line detector; the multi-thread rotating shaft that cuts off line detector of this silicon chip is worn and torn less; the gathering that reduces copper scale makes between the equipment and can not conduct, thereby multi-thread cutting equipment can not shut down because of receiving stopping signal under situation about not breaking.
In order to solve the problems of the technologies described above, the utility model has adopted following technical scheme: a kind of silicon chip is multi-thread to cut off line detector, comprise the burn out detection controller, described burn out detection controller is electrically connected with the unwrapping wire roller of multi-thread cutting equipment and the rotating shaft of take-up roller by a pair of brush respectively, wherein, the every pair of brush described rotating shaft axially on the setting of staggering.
As preferably, the every pair of brush described rotating shaft axially on the stagger distance of thickness of a brush.
As preferably, described brush is the graphite carbon brush.
Compared with prior art, the beneficial effects of the utility model are:
1, silicon chip of the present utility model multi-thread cut off two brushes that line detector is positioned at the same rotating shaft outside rotating shaft axially on the setting of staggering, reduced the wearing and tearing of rotating shaft.
2, the multi-thread brush that cuts off in the line detector of silicon chip of the present utility model adopts the graphite carbon brush; the wearing and tearing of rotating shaft have further been reduced; prevented to assemble the situation that false alarm is shut down that takes place that conducts because of copper scale, while graphite itself has the effect of lubricated rotating shaft and brush contact susface.
Description of drawings
Fig. 1 is for being arranged on the partial structurtes schematic diagram of the burn out detection equipment on the multi-thread cutting equipment in the prior art.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is the syndeton schematic diagram of broken wire detection system of the prior art and multi-thread cutting equipment.
Fig. 4 is the multi-thread structural representation that cuts off line detector of silicon chip of embodiment of the present utility model.
Fig. 5 is the vertical view of Fig. 4.
Fig. 6 is the syndeton schematic diagram of multi-thread cutting broken string checkout equipment of the silicon chip of embodiment of the present utility model and multi-thread cutting equipment.
Description of symbols
1-unwrapping wire roller 2-take-up roller
3-rotating shaft 4-support
5-brush 6-stent support axle
7-insulation sleeve 8-lead
9-burn out detection controller 10-metal wire
11-graphite carbon brush
The specific embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail, but not as to qualification of the present utility model.
Fig. 4 is the multi-thread structural representation that cuts off line detector of silicon chip of embodiment of the present utility model.Fig. 5 is the vertical view of Fig. 4.Fig. 6 is the multi-thread syndeton schematic diagram that cuts off line detector and multi-thread cutting equipment of silicon chip of embodiment of the present utility model.Extremely shown in Figure 6 as Fig. 4, silicon chip of the present utility model is multi-thread to cut off line detector and comprises that burn out detection controller 9, burn out detection controller 9 are electrically connected with the unwrapping wire roller 1 of multi-thread cutting equipment and the rotating shaft 3 of take-up roller 2 by a pair of brush respectively, the every pair of brush rotating shaft 3 axially on the setting of staggering.Brush supports by support 4 and stent support axle 6.The every pair of brush rotating shaft 3 axially on the setting of staggering, reduced the wearing and tearing of rotating shaft 3.
As a kind of preferred version of present embodiment, not overlapping in order to ensure the frictional position of two brushes in every pair of brush and rotating shaft, the every pair of brush rotating shaft 3 axially on the stagger distance of thickness of a brush.
As another preferred version of present embodiment, described brush is a graphite carbon brush 11.Copper material is adopted in rotating shaft 3, and brush is a graphite material, because rotating shaft 3 is different materials with graphite carbon brush 11, makes copper rotating shaft 3 not easy to wear, and graphite carbon brush 11 has mild wear.And graphite itself has the effect of lubricating contact face, and the graphite that weares and teares is considered energy countershaft 3 and graphite carbon brush 11 lubricates to be worth doing, thereby helps improving the condition of work of this part.
As shown in Figure 6, burn out detection controller 9 links to each other by lead 8 with every pair of graphite carbon brush 11, and burn out detection controller 9 also is connected (not shown) with the frame of multi-thread cutting equipment simultaneously.When metal wire 10 is not disconnected; burn out detection controller 9 detects the normal signal of frame; when falling on the frame when metal wire 10 disconnections, then burn out detection controller 9 detects abnormal signal, and then burn out detection controller 9 sends the signal of reporting to the police and shutting down to multi-thread cutting equipment.But meanwhile burn out detection controller 9 is also by rotating shaft 3 and a pair of graphite carbon brush 11 on the unwrapping wire roller 1; rotating shaft 3 on the take-up roller 2 and a pair of graphite carbon brush 11 send the signal that receives some voluntarily; when the number of the signal that sends when burn out detection controller 9 and the signal of reception is complementary; burn out detection controller 9 detects to equipment state working properly, can not send the stopping alarm signal to multi-thread cutting equipment.But when rotating shaft 3 and graphite carbon brush 11 mutual friction mutually, cause the contact conditions variation, may have losing of signal number, cause signal number not match, and then false alarm is shut down; Copper scale that produces or carbon dust are assembled when making between support 4 and the stent support axle 6 conducting; then burn out detection controller 9 receives the information (metal wire 10 reality are not disconnected) that metal wire 10 has touched frame mistakenly, and burn out detection controller 9 also can send the warning stopping signal.Because wearing and tearing reduce between rotating shaft 3 of the present utility model and the graphite carbon brush 11, can not produce the gathering of abrasive dust and the phenomenon that conducts, just can not report the situation of shutdown by mistake yet.
Silicon chip of the present utility model is multi-thread to cut off the line detector practical probation 150 hours, and rotating shaft 3 does not have obviously abrasion, and graphite carbon brush 11 has slight abrasion, and the inner nothing of multi-thread cutting equipment obviously carbon, the copper scale of conduction produces.Trial employment period does not have to take place to take place because of the conduction bits situation of break alarm, has reached its intended purposes.
Above embodiment is an exemplary embodiment of the present utility model only, is not used in restriction the utility model, and protection domain of the present utility model is defined by the claims.Those skilled in the art can make various modifications or be equal to replacement the utility model in essence of the present utility model and protection domain, this modification or be equal to replacement and also should be considered as dropping in the protection domain of the present utility model.
Claims (3)
1. a silicon chip is multi-thread cuts off line detector, comprise the burn out detection controller, described burn out detection controller is electrically connected with the unwrapping wire roller of multi-thread cutting equipment and the rotating shaft of take-up roller by a pair of brush respectively, it is characterized in that, the every pair of brush described rotating shaft axially on the setting of staggering.
2. silicon chip according to claim 1 is multi-thread to cut off line detector, it is characterized in that, the every pair of brush described rotating shaft axially on the stagger distance of thickness of a brush.
3. silicon chip according to claim 1 and 2 is multi-thread to cut off line detector, it is characterized in that described brush is the graphite carbon brush.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200420033U CN201979616U (en) | 2011-02-17 | 2011-02-17 | Silicon wafer multi-line cutting broken-line detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200420033U CN201979616U (en) | 2011-02-17 | 2011-02-17 | Silicon wafer multi-line cutting broken-line detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201979616U true CN201979616U (en) | 2011-09-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200420033U Expired - Fee Related CN201979616U (en) | 2011-02-17 | 2011-02-17 | Silicon wafer multi-line cutting broken-line detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201979616U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102343632A (en) * | 2011-09-29 | 2012-02-08 | 中国电子科技集团公司第四十五研究所 | Line breakage detection method for multi-line cutting of silicon wafers |
| CN103217634A (en) * | 2013-04-03 | 2013-07-24 | 吴江市胜信光电科技有限公司 | Device for detecting and locating insulation damage of cable core wire |
| CN105788763A (en) * | 2016-04-08 | 2016-07-20 | 广东奥美格传导科技股份有限公司 | Twisted wire detection machine |
| CN108710055A (en) * | 2018-06-22 | 2018-10-26 | 沈阳长顺电缆制造有限责任公司 | A kind of online wire breakage detector of cable and method |
-
2011
- 2011-02-17 CN CN2011200420033U patent/CN201979616U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102343632A (en) * | 2011-09-29 | 2012-02-08 | 中国电子科技集团公司第四十五研究所 | Line breakage detection method for multi-line cutting of silicon wafers |
| CN102343632B (en) * | 2011-09-29 | 2015-09-16 | 中国电子科技集团公司第四十五研究所 | A kind of method of Multi-wire wafer cutting burn out detection |
| CN103217634A (en) * | 2013-04-03 | 2013-07-24 | 吴江市胜信光电科技有限公司 | Device for detecting and locating insulation damage of cable core wire |
| CN103217634B (en) * | 2013-04-03 | 2015-12-30 | 苏州胜信光电科技有限公司 | A kind of cable core damage in insulation detection and location device |
| CN105788763A (en) * | 2016-04-08 | 2016-07-20 | 广东奥美格传导科技股份有限公司 | Twisted wire detection machine |
| CN108710055A (en) * | 2018-06-22 | 2018-10-26 | 沈阳长顺电缆制造有限责任公司 | A kind of online wire breakage detector of cable and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110921 Termination date: 20150217 |
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| EXPY | Termination of patent right or utility model |