CN201975379U - Wafer boat - Google Patents
Wafer boat Download PDFInfo
- Publication number
- CN201975379U CN201975379U CN2011201417767U CN201120141776U CN201975379U CN 201975379 U CN201975379 U CN 201975379U CN 2011201417767 U CN2011201417767 U CN 2011201417767U CN 201120141776 U CN201120141776 U CN 201120141776U CN 201975379 U CN201975379 U CN 201975379U
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- CN
- China
- Prior art keywords
- strip
- bar
- pad bar
- brilliant boat
- wafer
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a wafer boat comprising a fixed frame, a supporting strip, a wafer clamping strip, a detachable first spacer strip and a detachable second spacer strip, wherein the supporting strip and the wafer clamping strip are arranged on the fixed frame, the first spacer strip is arranged on the surface of the supporting strip, and the second spacer strip is arranged on the wafer clamping strip; the first spacer strip and the supporting strip jointly play a role in supporting wafers; and the second spacer strip and the wafer clamping strip jointly play a role in clamping the wafers. After the wafer boat provided by the utility model is contaminated, only the first spacer strip and the second spacer strip on the wafer boat need to be replaced, therefore, more wafer boats for replacement do not need to be prepared, and scrapping of the wafer boat caused by cleaning for a plurality of times can be avoided, and further the cost is saved.
Description
Technical field
The utility model relates to the solar cell making process technical field, more particularly, relates to a kind of brilliant boat.
Background technology
Solar cell also claims photovoltaic cell, is the semiconductor device that a kind of luminous energy with the sun is converted into electric energy.Because it is a Green Product, can cause environmental pollution, and be renewable resource, so under current energy starved situation, solar cell is a kind of novel energy with wide development prospect.
At present, the standardization of the manufacturing process of solar cell, it mainly comprises: making herbs into wool, diffusion system knot, peripheral etching, deposit antireflective coating, print electrode and processing step such as sintering.After process for etching finishes, wafer need be placed on the brilliant boat (carrier of carrying silicon chip), the brilliant boat that will carry wafer then places and spreads the system knot in the diffusion furnace.After process for etching finishes, materials such as wafer surface regular meeting residual chemicals (acid solution or alkali lye etc.), deionized water, and then these materials cause the pollution of brilliant boat easily when wafer being placed on the brilliant boat; In addition, in diffusion system knot technology, brilliant boat also can residual thereon phosphorus because of long-time use or material such as boron, and this is another reason that causes brilliant boat pollution.To directly influence the diffusion system knot effect of wafer on it after brilliant boat is contaminated.
Tie effect in order to make wafer obtain diffusion system preferably in the existing technology, need to change polluted brilliant boat, and the brilliant boat that changes is cleaned, this need prepare more brilliant boat on the one hand in case change, on the other hand, after repeatedly being cleaned, brilliant boat causes scrapping of brilliant boat easily.
The utility model content
In view of this, the utility model provides a kind of brilliant boat, utilizes this crystalline substance boat bearing wafer to spread the system knot, can reduce that brilliant boat is polluted, thereby need not prepare more brilliant boat in case change, and also can not cause scrapping because of brilliant boat is repeatedly cleaned.
For achieving the above object, the utility model provides following technical scheme:
A kind of brilliant boat, this crystalline substance boat comprises:
Fixed mount;
Be arranged on support bar and card strip on the described fixed mount;
Be arranged on support bar surface, dismountable first pad bar, described first pad bar and support bar acting in conjunction play a supportive role to wafer;
Be arranged on card strip surface, dismountable second pad bar, described second pad bar and card strip acting in conjunction work the effect of holding to wafer.
Preferably, in the above-mentioned brilliant boat, the described second pad bar is fixedlyed connected with described card strip by bolt.
Preferably, in the above-mentioned brilliant boat, the described first pad bar is fixedlyed connected with described support bar by bolt.
Preferably, in the above-mentioned brilliant boat, described fixed mount comprises:
At least two end fixed strips that are parallel to each other;
Vertical with fixed strip of the described end and fixedly connected side fixed strip;
Wherein, described support bar is arranged on the fixed strip of the described end, and described support bar is all vertical with the side fixed strip with end fixed strip; Described card strip is arranged on the described side fixed strip, and described card strip and described support bar are parallel to each other.
Preferably, in the above-mentioned brilliant boat, the described first pad bar is provided with first groove that is complementary with wafer.
Preferably, in the above-mentioned brilliant boat, the described second pad bar is provided with second groove that is complementary with wafer.
Preferably, in the above-mentioned brilliant boat, the described first pad bar and the second pad bar are the pad bar of quartzy material.
Preferably, in the above-mentioned brilliant boat, the number of the described first pad bar is 1.
Preferably, in the above-mentioned brilliant boat, the number of the described second pad bar is 2.
From technique scheme as can be seen, brilliant boat provided by the utility model comprises: fixed mount; Be arranged on support bar and card strip on the described fixed mount; Be arranged on support bar surface, dismountable first pad bar, described first pad bar and support bar acting in conjunction play a supportive role to wafer; Be arranged on card strip surface, dismountable second pad bar, described second pad bar and card strip acting in conjunction work the effect of holding to wafer.Brilliant boat provided by the utility model, owing to be respectively arranged with the dismountable first pad bar and the second pad bar at support bar and card strip surface, and the first pad bar and support bar acting in conjunction play a supportive role to wafer, the second pad bar and card strip acting in conjunction work the effect of holding to wafer, therefore, be the first pad bar and the second pad bar with wafer directly contacts, so the first pad bar and the second pad bar in the process of using this crystalline substance boat on the brilliant boat easily pollute, other structures on the brilliant boat except that the first pad bar and the second pad bar are difficult for polluting, therefore, after brilliant boat is used multiple times, only need in time to change, the first pad bar and the second pad bar that clean on it get final product, and need not prepare more brilliant boat, do not worry that brilliant boat is repeatedly cleaned and causes scrapping yet.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The perspective view of a kind of brilliant boat that Fig. 1 is provided for the utility model embodiment;
Fig. 2 is the side structure schematic diagram of brilliant boat shown in Fig. 1;
The vertical view of the first pad bar that Fig. 3 is provided for the utility model embodiment and the structural representation of bolt.
Embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
With reference to figure 1 and Fig. 2, the perspective view of a kind of brilliant boat that Fig. 1 is provided for the utility model embodiment, Fig. 2 is the side structure schematic diagram of brilliant boat shown in Fig. 1, this crystalline substance boat specifically comprises: fixed mount; Be arranged on support bar 1 and card strip 2 on the described fixed mount; Be arranged on support bar 1 surface, dismountable first pad bar 3, described first pad bar 3 and support bar 1 acting in conjunction play a supportive role to the wafer (not shown); Be arranged on card strip 2 surfaces, dismountable second pad bar 4, described second pad bar 4 and card strip 2 actings in conjunction work the effect of holding to wafer.
Described fixed mount specifically can comprise: at least two end fixed strips 11 that are parallel to each other (fixed strip 11 at the bottom of having illustrated two among Fig. 1); Vertical with fixed strip of the described end 11 and fixedly connected side fixed strip 12, side fixed strip 12 is configured to the state of vertically " standing ", and is positioned at the upper surface of end fixed strip 11, and the two ends of each end fixed strip 11 are respectively arranged with a side fixed strip 12; Be arranged on the feet 13 of end fixed strip 11 lower surfaces.
Described support bar 1 also is positioned at the upper surface of end fixed strip 11 and fixedlys connected with fixed strip of the described end 11, different is with side fixed strip 12, described support bar 1 level that the is configured to state that " couches ", and described support bar 1 is all vertical with side fixed strip 12 with end fixed strip 11.The number of support bar 1 is 1 in the present embodiment, and this support bar 1 is positioned at the upper surface of end fixed strip 11 middle-ends, and across all end fixed strips 11.
Described card strip 2 is arranged on the described side fixed strip 12, and described card strip 2 is parallel to each other with described support bar 1.The number of card strip 2 is 2 in the present embodiment, and each card strip 2 is respectively across the side fixed strip 12 on the identical end of all end fixed strip 11 directions.And two card strip 2 opposing end faces are all stretched out the side fixed strip 12 corresponding with it.
The first pad bar 3 is set in the present embodiment fixedlys connected with support bar 1 end face up by bolt 16, the described first pad bar 3 covers support bar 1 end face up; The second pad bar 4 also is set in the present embodiment fixedlys connected with the end face of card strip 2 by respective bolt, the described second pad bar 4 covers the end face of card strip 2.By the dismounting corresponding bolts, the described first pad bar 3 and the second pad bar 4 can be disassembled from support bar 1 and card strip 2 respectively.
On the first pad bar 3 and the second pad bar 4, be respectively arranged with a plurality of first groove and second grooves that are complementary with wafer in the present embodiment, and first groove is corresponding one by one with the position of second groove.A plurality of first grooves 14 that are parallel to each other on the first pad bar 3 have been shown among Fig. 1.
With reference to figure 3, the vertical view of the first pad bar that Fig. 3 is provided for the utility model embodiment and the structural representation of bolt.There is shown and be arranged on a plurality of first grooves 14 that are parallel to each other that are complementary with wafer on the first pad bar 3, and four drift angle places of the first pad bar 3 are provided with a through hole 15 respectively.Also be provided with four through holes on the described support bar end face up, when placing the first pad bar 3 on the described support bar, four through holes on the described support bar are just in time corresponding one by one with four through holes 15 on the first pad bar 3, at this moment, adopt the bolt 16 that is complementary with through hole 15 the first pad bar 3 can be coupled together with support bar.
The second pad bar 4 in the present embodiment is identical with the structure of the first pad bar 3, and different is that both are arranged on the position difference on the fixed mount.
The described first pad bar 3 and the second pad bar 4 are the pad bar of quartzy material.
The number of the first pad bar 3 is that the number of 1, the second pad bar 4 is 2 in the present embodiment.
When using this crystalline substance boat, only wafer need be put between the first pad bar and the second pad bar on the brilliant boat, and make wafer be positioned at corresponding first groove and second groove, therefore, brilliant boat provided by the utility model in use, what directly contact with wafer is the first pad bar and the second pad bar, does not all contact with wafer with other structures the second pad bar except that the first pad bar on the brilliant boat, thereby has in use avoided on the brilliant boat other structures contaminated.After the first pad bar that directly contacts with wafer or the second pad bar are contaminated, only need the corresponding pad bar of dismounting and clean to get final product, therefore, brilliant boat provided by the utility model in use, only need to prepare the first more pad bar and the second pad bar in order to changing, and need not to prepare the structure except that the first pad bar and the second pad bar on a plurality of brilliant boats, also avoided simultaneously on the brilliant boat structure except that the first pad bar and the second pad bar repeatedly to be cleaned and cause scrapping, and then escapable cost.
Need to prove, in this article, relational terms such as first and second grades only is used for an entity or operation are made a distinction with another entity or operation, and not necessarily requires or hint and have the relation of any this reality or in proper order between these entities or the operation.And, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thereby make and comprise that process, method, article or the equipment of a series of key elements not only comprise those key elements, but also comprise other key elements of clearly not listing, or also be included as this process, method, article or equipment intrinsic key element.Do not having under the situation of more restrictions, the key element that limits by statement " comprising ... ", and be not precluded within process, method, article or the equipment that comprises described key element and also have other identical element.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined herein General Principle can realize under the situation that does not break away from spirit or scope of the present utility model in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (9)
1. a brilliant boat is characterized in that, comprising:
Fixed mount;
Be arranged on support bar and card strip on the described fixed mount;
Be arranged on support bar surface, dismountable first pad bar, described first pad bar and support bar acting in conjunction play a supportive role to wafer;
Be arranged on card strip surface, dismountable second pad bar, described second pad bar and card strip acting in conjunction work the effect of holding to wafer.
2. brilliant boat according to claim 1 is characterized in that, the described second pad bar is fixedlyed connected with described card strip by bolt.
3. brilliant boat according to claim 1 is characterized in that, the described first pad bar is fixedlyed connected with described support bar by bolt.
4. brilliant boat according to claim 1 is characterized in that, described fixed mount comprises:
At least two end fixed strips that are parallel to each other;
Vertical with fixed strip of the described end and fixedly connected side fixed strip;
Wherein, described support bar is arranged on the fixed strip of the described end, and described support bar is all vertical with the side fixed strip with end fixed strip; Described card strip is arranged on the described side fixed strip, and described card strip and described support bar are parallel to each other.
5. brilliant boat according to claim 1 is characterized in that, the described first pad bar is provided with first groove that is complementary with wafer.
6. brilliant boat according to claim 1 is characterized in that, the described second pad bar is provided with second groove that is complementary with wafer.
7. brilliant boat according to claim 1 is characterized in that, the described first pad bar and the second pad bar are the pad bar of quartzy material.
8. according to each described brilliant boat of claim 1～7, it is characterized in that the number of the described first pad bar is 1.
9. according to each described brilliant boat of claim 1～7, it is characterized in that the number of the described second pad bar is 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201417767U CN201975379U (en) | 2011-05-06 | 2011-05-06 | Wafer boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201417767U CN201975379U (en) | 2011-05-06 | 2011-05-06 | Wafer boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201975379U true CN201975379U (en) | 2011-09-14 |
Family
ID=44580477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201417767U Expired - Fee Related CN201975379U (en) | 2011-05-06 | 2011-05-06 | Wafer boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201975379U (en) |
-
2011
- 2011-05-06 CN CN2011201417767U patent/CN201975379U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110914 Termination date: 20190506 |