CN201967236U - Fixer for ion source main magnet - Google Patents
Fixer for ion source main magnet Download PDFInfo
- Publication number
- CN201967236U CN201967236U CN2010207001500U CN201020700150U CN201967236U CN 201967236 U CN201967236 U CN 201967236U CN 2010207001500 U CN2010207001500 U CN 2010207001500U CN 201020700150 U CN201020700150 U CN 201020700150U CN 201967236 U CN201967236 U CN 201967236U
- Authority
- CN
- China
- Prior art keywords
- permanent magnet
- magnet
- ion source
- magnet array
- source main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000498 cooling water Substances 0.000 claims abstract description 6
- 230000005347 demagnetization Effects 0.000 abstract description 3
- 238000001816 cooling Methods 0.000 abstract description 2
- 238000013021 overheating Methods 0.000 abstract 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
Images
Abstract
The utility model belongs to the technical field of accelerators and relates to a fixer for an ion source main magnet in particular, which comprises a cylindrical inner cavity and an outer cavity; and a permanent magnet array is fixed between the inner cavity and the outer cavity. The fixer for the ion source main magnet is mainly characterized in that: a cooling water channel is also arranged between the inner cavity and the permanent magnet array; and each row of the permanent magnet array consists of six same permanent magnets. The permanent magnet array comprises a radical magnet array and a tangential magnet array arranged at intervals; the permanent magnet array is arranged in a clip-shaped permanent magnet fixing clip, wherein each permanent magnet is fixed by an independent permanent magnet fixing screw. The technical scheme provided by the utility model can effectively solve the problem of demagnetization of an ion source main magnet in the prior art due to overheating, improves the cooling efficiency of the magnet, prolongs the service life of the magnet, maintains the constance of magnetic fields, and keeps a plasma state. Moreover, a clip-shaped magnet fixer employed is convenient to mount and dismount.
Description
Technical field
The utility model belongs to the accelerator art field, is specifically related to a kind of ion source main body magnet fixing device.
Background technology
Ion source is the important building block of accelerator, is used to provide charged ion, for example H
-Ion.H
-Ion is mutually to collide generation with hydrogen molecule or hydrogen atom by the high energy electron that hot filament is launched under arc voltage quickens.Increasing electronics and hydrogen molecule or hydrogen atom, to collide effective method repeatedly be with magnetic field electronics to be retrained, and the be excited plasma of back formation of gas also will be used magnetically confined usually.Shown in Figure 1 is a kind ofly can provide H
-The ion source of ion, its main body is made up of exocoel cylindraceous and inner chamber, is fixed with permanent magnet between inner chamber and exocoel, above inner chamber and exocoel loam cake is set, on cover and be fixed with lamp stand and filament, the high energy electron that filament sends is exported downwards.For the plasma in the operative constraint cavity, improve near the plasma density the central shaft, we adopt the multimodal magnetic field structure, and the shown magnet layout of the sectional view of ion source main body is as shown in Figure 2.
Permanent magnet is arranged between inner chamber and the exocoel, because the plasma temperature in the inner chamber is very high, can reach several Baidu even thousands of degree, because permanent magnet and inner chamber stick together, as shown in Figure 3, this causes the permanent magnet temperature too high and demagnetize.Therefore, there is defective in prior art, needs to improve.
The utility model content
(1) utility model purpose
For solving above-mentioned problems of the prior art, the purpose of this utility model provides and a kind ofly can prevent the too high and ion source main body magnet fixing device of demagnetization of permanent magnet Yin Wendu.
(2) technical scheme
For achieving the above object, the technical solution of the utility model realizes as follows:
A kind of ion source main body magnet fixing device comprises cylindric inner chamber and exocoel, is fixed with the permanent magnet array between described inner chamber and exocoel, and its key is: also be provided with cooling-water duct between described inner chamber and permanent magnet array.
Each row of described permanent magnet array are made up of the identical permanent magnet of piece.
Described permanent magnet array comprises radial magnet array and the tangential magnet array that is provided with at interval.
Described permanent magnet array places in the permanent magnet R-clip of cartridge clip shape, and wherein every block permanent magnet is fixed by permanent magnet fixed screw independently.
(3) beneficial effect
The technical scheme that the utility model provides can solve prior art intermediate ion source main body magnet effectively because of overheated problem of demagnetizing, and has improved the magnet cooling effectiveness, has prolonged the magnet life-span, keeps the magnetic field constancy, keeps plasmoid.And, the magnet fixing device of employing cartridge-type, easy installation and removal.
Description of drawings
Fig. 1 is the structure chart of ion source device, wherein 1 plasma chamber, 2 inner chambers, 3 permanent magnet arrays, 4 exocoels, 6 loam cakes, 7 lamp stands, 8 filaments, 9 extraction electrodes;
Fig. 2 is the schematic cross-section that permanent magnet is arranged in the ion source device, wherein 3a radial magnet array, the tangential magnet array of 3b;
Fig. 3 be among Fig. 1 magnet fixation structure partly cut open enlarged drawing;
Fig. 4 be the ion source main body magnet fixing device that provides of the utility model partly cut open schematic diagram;
Fig. 5 is the schematic diagram of the R-clip of permanent magnet described in the embodiment, wherein 11 permanent magnet R-clips, 14 permanent magnet fixed screws.
Embodiment
Below in conjunction with accompanying drawing preferred embodiment of the present utility model is described further.
A kind of ion source main body magnet fixing device, comprise cylindric inner chamber 2 and exocoel 4, between described inner chamber 2 and exocoel 4, be fixed with permanent magnet array 3, its key is: also be provided with cooling-water duct 5 between described inner chamber 2 and permanent magnet array 3, can make between permanent magnet and the inner chamber 2 and separate, cool off by cooling water, avoid the overheated and demagnetization that causes of permanent magnet.
Each row of described permanent magnet array 3 are made up of 6 blocks of identical permanent magnets.
Described permanent magnet array 3 comprises radial magnet array 3a and the tangential magnet array 3b that is provided with at interval, forms Distribution of Magnetic Field shown in Figure 2 generally.
Described permanent magnet array 3 places in the permanent magnet R-clip 11 of cartridge clip shape, and wherein every block permanent magnet is fixed by the independently permanent magnet fixed screw 14 on the cartridge clip outer wall, and such design makes the installation and removal of permanent magnet very convenient.Whole permanent magnet R-clip 11 is fixed on the outer chamber, and makes between permanent magnet array and the inner chamber certain clearance is arranged, and this gap ensures that mainly cooling water is unobstructed, has avoided permanent magnet to contact with the direct of high temperature inner chamber.
Above content be in conjunction with preferred embodiment to specifying that the utility model is done, can not assert that embodiment of the present utility model only limits to these explanations.Concerning the utility model person of an ordinary skill in the technical field, under the prerequisite that does not break away from the utility model design, can also make some simple deductions and conversion, all should be considered as belonging to protection range of the present utility model.
Claims (4)
1. ion source main body magnet fixing device, comprise cylindric inner chamber (2) and exocoel (4), between described inner chamber (2) and exocoel (4), be fixed with permanent magnet array (3), it is characterized in that: between described inner chamber (2) and permanent magnet array (3), also be provided with cooling-water duct (5).
2. ion source main body magnet fixing device according to claim 1 is characterized in that, each row of described permanent magnet array (3) are made up of 6 blocks of identical permanent magnets.
3. ion source main body magnet fixing device according to claim 2 is characterized in that, described permanent magnet array (3) comprises radial magnet array (3a) and the tangential magnet array (3b) that is provided with at interval.
4. according to each described ion source main body magnet fixing device of claim 1-3, it is characterized in that, described permanent magnet array (3) places in the permanent magnet R-clip (11) of cartridge clip shape, and wherein every block permanent magnet is fixed by permanent magnet fixed screw (14) independently.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010207001500U CN201967236U (en) | 2010-12-30 | 2010-12-30 | Fixer for ion source main magnet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010207001500U CN201967236U (en) | 2010-12-30 | 2010-12-30 | Fixer for ion source main magnet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201967236U true CN201967236U (en) | 2011-09-07 |
Family
ID=44529788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010207001500U Expired - Lifetime CN201967236U (en) | 2010-12-30 | 2010-12-30 | Fixer for ion source main magnet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201967236U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111681936A (en) * | 2020-06-09 | 2020-09-18 | 中国科学院合肥物质科学研究院 | Tip field negative hydrogen ion source device for high-energy ion implanter |
-
2010
- 2010-12-30 CN CN2010207001500U patent/CN201967236U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111681936A (en) * | 2020-06-09 | 2020-09-18 | 中国科学院合肥物质科学研究院 | Tip field negative hydrogen ion source device for high-energy ion implanter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110907 |