CN201967234U

CN201967234U - Ion source arc power supply digging system

Info

Publication number: CN201967234U
Application number: CN201020691889XU
Authority: CN
Inventors: 胡纯栋; 蒋才超; 刘胜; 刘智民
Original assignee: Institute of Plasma Physics of CAS
Current assignee: Institute of Plasma Physics of CAS
Priority date: 2010-12-30
Filing date: 2010-12-30
Publication date: 2011-09-07
Anticipated expiration: 2020-12-30

Abstract

The utility model discloses an ion source arc power supply digging system. The system mainly comprises a branch circuit which is formed by combining a plurality of insulated gate bipolar transistors and resistors, wherein the insulated gate bipolar transistors are connected in parallel at the output end of an arc power supply; a trigger system consists of a step pulse encoder and an insulated gate bipolar transistor triggering plate; the step pulse encoder is provided with an external interface which controls the pulse output of the step pulse encoder; and the step pulse encoder is used for receiving signals when an ion source leads a high voltage and a light is struck. The design of a control trigger pulse is greatly simplified through the system; different digging times are set through software, so the whole system is more simply operated; the requirement on the quickness of the digging times is met; the output current of the arc power supply can be controlled to be bypassed by 20 to 30 percent in a time range of microsecond to millisecond; and the requirement that the ion source is matched with an arc current when the high voltage is led or the light is struck is met.

Description

The ion source arc power system of digging a pit, hole, etc.

Technical field

The utility model is in order to satisfy the ion source physical field its arc power to be drawn the high voltage power supply input or a kind of device of the specific (special) requirements constantly of striking sparks, and is specifically related to control ion source arc power output current and is drawing the quick back electric current separate system of recovery rapidly of shunting of the high pressure input or the sparking moment.

Background technology

When ion source is drawn ion beam, according to plasma discharge with draw substantial connection between the high pressure, when line is drawn in order to obtain more suitably perveance, must make arc stream and draw the high pressure phase coupling, particularly the initial time of drawing at line is drawn most importantly in order to obtain stable bundle, therefore need carry out arc in the moment that high pressure is set up and dig a pit, hole, etc.Its basic principle is that the arc power output current is basicly stable and flow under the situation of load, open constantly at the plasma electrode power supply, make about 20%～30% current bypass of arc power output current, the arc power output current forms a pit, (width of pit is by the decision of the plasma electrode power supply rate of climb) then, cooperates the sequential of other power supplys of neutral beam to stop to dig a pit, hole, etc., make electric current transfer to load circuit fast, finish the process of once digging a pit, hole, etc.

The utility model content

In order to satisfy of the requirement of above-mentioned ion source to arc power, the utility model provides a kind of ion source arc power system of digging a pit, hole, etc., it is (ion source is drawn the high pressure input or the sparking moment) when the external control signal input is arranged, by designed step pulse encoder sequential is set, send the encode insulated gate bipolar transistor of conducting arc power output parallel connection of control impuls, realize the shunting of arc power electric current fast and recover the function of its output rapidly, reach ion source is drawn the coupling between high pressure and the arc stream when drawing ion beam purpose.

The technical solution of the utility model is as follows:

A kind of ion source arc power system of digging a pit, hole, etc., it mainly comprises: many insulated gate bipolar transistors of arc power output parallel connection and the branch road of resistance combination; The triggering system that constitutes by step pulse encoder and insulated gate bipolar transistor trigger board; The step pulse encoder is provided with the interface of its pulse of external control output, is used to receive ion source and draws the high pressure signal constantly of opening and strike sparks.

Native system serves as the control core with the step pulse encoder, after the control signal (the high pressure input drawn by ion source or sparking is sent out constantly) that receives from the outside, send notch cuttype decline that sets and the trigger impulse sequence that rises, the process of digging a pit, hole, etc. that realizes that turns on and off by the control insulated gate bipolar transistor, the sequential of the pulse train that its step pulse encoder sends can be passed through software adjustment, to satisfy the demand of the different time of digging a pit, hole, etc.

The beneficial effects of the utility model:

(1), the utility model adopts with the digital control chip is that core designs complicated step pulse encoder, simplifies the design of control trigger impulse greatly, difference is dug a pit, hole, etc. the time by software setting, makes that the operation of whole system is more simple;

(2), the utility model adopts insulated gate bipolar transistor and resistance to form whole diverter branch, utilizes the high-speed switch of insulated gate bipolar transistor to guarantee requirement to the rapidity of the time of digging a pit, hole, etc.;

(3), the utility model can be applied to other needs fast with electric power outputting current shunting and the rapid related occasion of recovering.

Description of drawings

Fig. 1 is the utility model electrical block diagram.

Embodiment

Referring to Fig. 1, the ion source arc power dig a pit, hole, etc. system its mainly comprise: the branch road of many insulated gate bipolar transistors of arc power output parallel connection and resistance combination; The triggering system that constitutes by step pulse encoder and insulated gate bipolar transistor trigger board; The step pulse encoder is provided with the interface of its pulse of external control output, is used to receive ion source and draws the high pressure signal constantly of opening and strike sparks.Its key technology is insulated gate bipolar transistor multitube connection in series-parallel technology and coding triggering technique.

The course of work of the present utility model is: after the reception of step pulse encoder is come when ion source is drawn the high pressure input moment or struck sparks the control signal of constantly sending, send the pulse train that sets drive plate to insulated gate bipolar transistor, by turning on and off of the insulated gate bipolar transistor of the drive plate of insulated gate bipolar transistor control arc power output parallel connection, realize once shunting and recovering (promptly digging a pit, hole, etc.) process, after finishing the process of once digging a pit, hole, etc., the arrival of control signal is next time waited in system reset.

In actual the use, native system can control the arc power output current delicate to the time range of millisecond by bypass 20%～30%, satisfied at ion source and drawn the requirement that high pressure input or sparking are complementary with arc current constantly.

Claims

1. ion source arc power system of digging a pit, hole, etc., it mainly comprises: many insulated gate bipolar transistors of arc power output parallel connection and the branch road of resistance combination; The triggering system that constitutes by step pulse encoder and insulated gate bipolar transistor trigger board; The step pulse encoder is provided with the interface of its pulse of external control output, is used to receive ion source and draws the high pressure signal constantly of opening and strike sparks.